CN212720437U - Supercritical fluid circulating cooling device - Google Patents

Abstract

The utility model discloses a supercritical fluid cooling back installation, include: the device comprises an annular closed cavity, a workpiece conveying device and a workpiece conveying device, wherein an annular conveying belt for conveying workpieces is arranged in the annular closed cavity; and the supercritical fluid supply system is communicated with the closed cavity to supply the supercritical fluid into the closed cavity. Further comprising: the feeding transfer chamber is connected with the head end of the closed cavity; and the discharging transfer chamber is connected with the tail end of the closed cavity. And an induced draft fan and a heat exchanger are arranged in the closed cavity. The supercritical fluid circulating cooling device provided by the invention has the advantages of novel structural design, simple and convenient operation, stable and controllable cooling process, good cooling effect, high production efficiency and low production cost, realizes a production mode of assembly line cooling, and is suitable for the cooling process of small and micro-sized precision devices.

Description

Supercritical fluid circulating cooling device

Technical Field

The utility model relates to a precision parts machining cooling technology field especially relates to a supercritical fluid cooling back installation.

Background

In the precision manufacturing, a workpiece cooling process exists, the traditional coolant uses water, oil, air, nitrogen and the like, the liquid coolant such as water and oil has relatively strong cooling capacity but low uniformity of workpiece cooling, and the uniformity of air and nitrogen cooling is high but low cooling capacity, so that the requirement of the precision workpiece cooling process cannot be met.

The supercritical fluid has the characteristics of both liquid and gas, has the density close to that of the liquid, the viscosity close to that of the gas and the high diffusion coefficient, so that the supercritical fluid has good flowing and transmission performance, has the large cooling capacity of a liquid coolant, has the same cooling uniformity as the gas, and is an ideal coolant for precision parts with high requirements on the cooling uniformity.

SUMMERY OF THE UTILITY MODEL

The utility model discloses the technical problem that will solve is: aiming at the defects in the prior art, the supercritical fluid circulating cooling device with high cooling strength, high production efficiency and low production cost is provided.

In order to achieve the above purpose, the utility model adopts the following technical scheme:

the utility model provides a supercritical fluid cooling back installation, include:

the device comprises an annular closed cavity, a workpiece conveying device and a workpiece conveying device, wherein an annular conveying belt for conveying workpieces is arranged in the annular closed cavity;

and the supercritical fluid supply system is communicated with the closed cavity so as to provide the supercritical fluid into the closed cavity.

Further, the supercritical fluid circulation cooling device further comprises:

the feeding transfer chamber is connected with the head end of the closed cavity; and

and the discharging transfer chamber is connected with the tail end of the closed cavity.

Further preferably, on the supercritical fluid circulation cooling device, the feeding transfer chamber and the discharging transfer chamber have the same structure, the front end and the rear end of the feeding transfer chamber are respectively provided with an inner side quick opening door and an outer side quick opening door, and the middle part of the feeding transfer chamber and the outer side quick opening door is provided with an air inlet and an air outlet.

Furthermore, on the supercritical fluid circulating cooling device, an induced draft fan is arranged in the closed cavity.

Furthermore, the supercritical fluid circulation cooling device is provided with a heat exchanger in the closed cavity.

Furthermore, on the supercritical fluid circulation cooling device, a fluid temperature sensor, a fluid force sensor and a fluid flow rate sensor are arranged in the closed cavity.

Further, on the supercritical fluid circulation cooling device, the supercritical fluid supply system comprises a fluid source storage tank, a booster pump, a supply heat exchanger and a supercritical fluid storage tank, wherein a storage tank temperature sensor and a storage tank pressure sensor are arranged on the supercritical fluid storage tank.

Further, the supercritical fluid circulation cooling device comprises:

and the PID control system is respectively and electrically connected with the supercritical fluid supply system, the induced draft fan, the heat exchanger, the fluid temperature sensor, the fluid pressure sensor and the fluid flow rate sensor.

Further, on the supercritical fluid circulation cooling device, the supercritical fluid is carbon dioxide, nitrogen, water or air.

The above technical scheme is adopted in the utility model, compared with the prior art, following technological effect has:

(1) carbon dioxide, nitrogen, water or air are used as the supercritical fluid, so that the method has no pollution to the environment, and has the characteristics of environmental protection, clean production, good economic benefit and remarkable environmental benefit;

(2) the structural design of the annular closed cavity body ensures that the supercritical fluid does not need to be discharged outside, thereby realizing the cyclic utilization of the supercritical fluid in the closed cavity body, improving the utilization rate of the supercritical fluid to the maximum extent and reducing the energy consumption;

(3) the conveying belt is arranged in the annular closed cavity, and the plurality of workpieces finish the cooling treatment of the supercritical fluid in turn in the circulation process of the conveying belt, so that the cooling treatment effect is good, and the production efficiency is greatly improved;

(4) an induced draft fan and a heat exchanger are arranged in the annular closed cavity, the supercritical fluid forms supercritical fluid circulation under the action of the induced draft fan, and the flow velocity of the supercritical fluid can be adjusted through the induced draft fan; the heat transferred from the workpiece to the supercritical fluid is transmitted out through the heat exchanger, so that the temperature stability of the supercritical fluid is maintained;

(5) corresponding temperature, pressure and flow rate sensors are arranged in the closed cavity, the temperature, pressure and flow rate parameters of the supercritical fluid are measured and controlled in real time through a PID control system, and the cooling rate is controlled according to an ideal cooling curve, so that the purpose of controllable cooling is realized;

(6) the supercritical fluid circulating cooling device is novel in structural design, simple and convenient to operate, good in workpiece cooling effect, high in production efficiency and low in production cost, realizes a production mode of assembly line cooling, and is suitable for the cooling process of small and micro-sized precision devices.

Drawings

Fig. 1 is a schematic diagram of the overall structure of a supercritical fluid circulation cooling apparatus according to the present invention;

fig. 2 is a schematic structural diagram of a charge transfer chamber and a discharge transfer chamber in a supercritical fluid circulation cooling apparatus according to the present invention;

fig. 3 is a flow chart of a process for preparing a tidal current boundary fluid by a supercritical fluid supply system in a supercritical fluid circulation cooling device according to the present invention;

FIG. 4 is a process flow diagram of a supercritical fluid cooling apparatus according to the present invention;

wherein the reference symbols are:

10-a workpiece; 20-a feeding transfer chamber, 21-an inner side quick opening door, 22-an outer side quick opening door, 23-an air inlet and 24-an air outlet; 30-a closed cavity, 31-an annular conveyer belt, 32-an induced draft fan, 33-a heat exchanger, 34-a fluid temperature sensor, 35-a fluid pressure sensor and 36-a fluid flow rate sensor; 40-a discharge transfer chamber; a 50-supercritical fluid supply system; 51-fluid source storage tank, 52-stop valve, 53-booster pump, 54-supply heat exchanger, 55-buffer tank, 56-storage tank temperature sensor, 57-storage tank pressure sensor, 58-flow regulating valve; 60-PID control system.

Detailed Description

The present invention will be described in detail and specifically with reference to specific embodiments so as to provide a better understanding of the present invention, but the following embodiments do not limit the scope of the present invention.

Example 1

Referring to fig. 1, the present embodiment provides a supercritical fluid circulation cooling apparatus, including: an annular closed cavity 30, the closed cavity 30 has certain pressure resistance and low temperature resistance, and an annular conveying belt 31 for conveying the workpieces 10 is arranged in the closed cavity; a supercritical fluid supply system 40 in communication with the enclosed cavity 30 to provide a supercritical fluid into the enclosed cavity 30. The workpiece 10 is transferred from the outside to the annular conveyer belt 31 from one end thereof, circularly moves along with the annular conveyer belt 31, and is finally transferred from the tail end of the annular conveyer belt 31 to the outside, and the workpiece 10 performs convection heat exchange with the supercritical fluid flowing in the reverse direction of the closed cavity 31 in the process of circularly flowing along with the annular conveyer belt 31, thereby completing the cooling of the workpiece 10. When the supercritical fluid circulation cooling device is used for cooling a workpiece, the supercritical fluid is used as a cooling agent to perform annular circulation flow in the annular closed cavity 30, the flow of the supercritical fluid is stable, and the parameters such as the temperature and the pressure of the supercritical fluid are stable, so that the environment of the whole cooling process of the workpiece is basically stable and controllable, and the cooling treatment effect of the workpiece is greatly improved.

In this embodiment, please refer to fig. 2, wherein the supercritical fluid cycle cooling apparatus further includes: a feed transfer chamber 20 connected to the head end of the enclosed cavity 30; and an output transfer chamber 40 connected to the rear end of the closed chamber 30. The feeding transfer chamber 20 and the discharging transfer chamber 40 are respectively connected with the closed cavity 30 through a quick-opening door, and the pressure and the temperature of the supercritical fluid in the closed cavity 30 are always kept in a balanced state through the quick-opening door, so that the workpiece 10 is cooled by an ideal cooling curve installed in the closed cavity 30.

In this embodiment, by arranging the annular conveying belt 31 in the annular closed cavity 30, the plurality of workpieces 10 can sequentially complete the cooling treatment of the supercritical fluid in the conveying belt circulation process, the cooling treatment effect is good, and the production efficiency is greatly improved.

In this embodiment, the supercritical fluid circulation cooling apparatus further includes: and the PID control system 60 is electrically connected with the supercritical fluid supply system 40, the induced draft fan 32, the heat exchanger 33, the fluid temperature sensor 34, the fluid pressure sensor 35 and the fluid flow rate sensor 36 respectively. The temperature, pressure and flow rate parameters of the supercritical fluid are measured and controlled in real time through a PID control system, and the cooling rate is controlled according to an ideal cooling curve, so that the purpose of controllable cooling is realized.

Example 2

Referring to the process flow diagram shown in fig. 4, based on the supercritical fluid circulation cooling apparatus described in the foregoing embodiment, the present embodiment provides a supercritical fluid circulation cooling method for a small-scale precision device, which specifically includes the steps of:

s1, providing an annular closed cavity 30 as a cooling processing chamber of the workpiece, introducing supercritical fluid into the annular closed cavity through a supercritical fluid supply system 40, and enabling the supercritical fluid to circularly flow in the closed cavity under the action of an induced draft fan 32;

s2, the workpiece is conveyed to the conveying belt 31 in the closed cavity 30 through the feeding transfer chamber 20, the workpiece 10 moves along the closed cavity 40 along with the conveying belt 31 in a circulation mode, the moving direction is opposite to the flowing direction of the supercritical fluid, the workpiece and the supercritical fluid flowing in the circulation mode carry out heat convection, and the workpiece is cooled;

and S3, transferring the cooled workpiece 10 from the tail end of the conveyor belt 31 into the discharging transfer chamber 40, and discharging the workpiece out of the closed cavity 30 to finish the cooling treatment of the workpiece 10, and circulating the steps.

In the present embodiment, the supercritical fluid used has the combined advantages of liquid and gas, including density close to that of liquid, viscosity similar to that of gas, and specific heat capacity and thermal conductivity higher than those of liquid and gas, and these characteristics will solve the problem of insufficient cooling capacity of gas. The cooling rate of the workpiece can be adjusted by controlling the fluid temperature, pressure and speed by utilizing the characteristic that the heat transfer performance of the supercritical fluid, such as density, viscosity, specific heat capacity, heat conductivity and the like, is severe along with the change of temperature and pressure near a critical point, and specifically, the adopted supercritical fluid is carbon dioxide, nitrogen, water or air. The existing cooling agents are mostly water, oil, air, nitrogen and the like, and cannot meet the defect of the requirement of a workpiece cooling process, and although the cooling agents adopting the air, the nitrogen and the like have the advantages of good uniformity and small deformation, the cooling capacity of the air is smaller than that of liquid, and the requirement of the workpiece cooling rate cannot be met.

In this embodiment, in step S2, the pressure, temperature and flow rate of the supercritical fluid are adjusted during the convection heat exchange process to control the cooling rate of the workpiece. The pressure of the supercritical fluid in the closed cavity 30 can be varied according to process requirements; the temperature of the supercritical fluid within the enclosed cavity 30 can vary within a certain range; and the velocity of the supercritical fluid within the enclosed cavity 30 can also vary over a range.

The whole cooling process aims at controlling the temperature, pressure and flow rate of the superfluid with the target workpiece cooling rate, generally, in the specification of a cooling process, an ideal cooling curve of a specific position of a workpiece is formulated according to the requirements of the workpiece 10, the ideal cooling curve is a control target of the cooling process, in order to achieve the target, the real-time change of the temperature of the workpiece 10 is measured, and the process regulation and control are carried out according to the error value of the measured value to the ideal curve.

The processes that affect the cooling rate of the workpiece 10 during cooling are primarily the temperature, pressure and flow rate of the supercritical fluid, and therefore, these process parameters must be measured and controlled according to a predetermined desired cooling curve control model by adjusting the temperature, pressure and flow rate of the fluid to achieve a controlled cooling rate of the workpiece in accordance with the desired cooling curve.

In this embodiment, the closed cavity 30 operates in a supercritical state, and the operating temperature and pressure are relatively high. When the workpiece 10 is transferred to the feeding transfer chamber 20 or the discharging transfer chamber 40 from the outside or a previous process, the pressure and temperature of the feeding transfer chamber 20 or the discharging transfer chamber 40 should be normal temperature and normal pressure from the practical production point of view, the feeding transfer chamber 20 or the discharging transfer chamber 40 and the closed cavity 30 are two isolated sealed spaces, and the feeding transfer chamber 20 or the discharging transfer chamber 40 is much smaller than the closed cavity 30.

In order to ensure the controllability of cooling the workpiece 10 in the closed cavity 30 and improve the cooling effect of the workpiece 10 in the closed cavity 30, it is required to keep the pressure and temperature of the supercritical fluid in the closed cavity 30 in a balanced state before or after the cooling process when the workpiece 10 enters or exits the closed cavity 30, so as to prevent the deviation of the cooling process from an ideal cooling curve due to the parameter change of the cooling process caused by the entering or exiting of the workpiece 10 in the closed cavity 30.

Specifically, after the workpiece 10 enters the feeding transfer chamber 20, high-pressure gas is injected into the feeding transfer chamber 20 to stabilize the pressure therein and the pressure of the closed cavity 30. Then, the quick-opening door between the closed cavity 30 and the feeding transfer chamber 20 is opened, the workpiece 10 is transferred from the feeding transfer chamber 20 to the closed cavity 30, and after the workpiece 10 is transferred from the feeding transfer chamber 20 to the closed cavity 30, the quick-opening door is closed, so that a workpiece feeding process is completed. After the workpiece is cooled by installing a preset ideal cooling curve in the closed cavity 30, the workpiece is conveyed out through the discharging transfer chamber 40.

Example 3

Referring to fig. 2, the present embodiment provides a feeding transfer chamber 20 and a discharging transfer chamber 40, which are used for maintaining the pressure and temperature of the supercritical fluid in the closed cavity 30 in a balanced state during the feeding and discharging process of the workpiece. The feeding transfer chamber 20 and the discharging transfer chamber 40 adopt special structural designs, and when the workpiece 10 enters the closed cavity 30 through the feeding transfer chamber 20 or is transferred out of the discharging transfer chamber 40 from the closed cavity 30, the influence of the entrance and exit of the workpiece 10 on the supercritical state in the closed cavity 30 is small.

In the present embodiment, the supercritical cooling process of the workpiece is performed under high pressure, in order to achieve fast, stable and safe entrance and exit of the workpiece 10 into and out of the closed cavity 30. A specific transfer chamber structure is designed, the structures and the working principles of the feeding transfer chamber 20 and the discharging transfer chamber 40 are the same, and the feeding transfer chamber 20 and the discharging transfer chamber 40 are respectively connected with the head and tail sections connected with the closed cavity 30.

The closed cavity 30 works in a critical state, the working temperature and pressure of the supercritical fluid in the closed cavity 30 are relatively high, and when the workpiece 10 is heated from the outside or the previous process and then is conveyed to the feeding transfer chamber 20, the pressure and temperature of the feeding transfer chamber 20 should be normal temperature and normal pressure from the practical production consideration, two isolated sealed spaces are arranged between the feeding transfer chamber 20 and the closed cavity 30, and the feeding transfer chamber 20 is much smaller than the closed cavity 30.

Specifically, both ends are provided with inboard quick-opening door 21 and the outside quick-opening door 22 respectively around the feeding shifts room 20, shifts room 20 with the feeding and divide into three part on the right side in the middle of the left side, and the left side part is opened door 21 intercommunication through the inboard quick-opening door and is sealed cavity 30, and the right side part is opened door 22 and work piece entry intercommunication through the outside quick-opening door, is provided with air inlet 23 and disappointing mouth 24 on the middle part lateral wall, shifts the interior gassing of room 20 through air inlet 23 and disappointing mouth 24 to the feeding, in order to maintain the material shifts room 20 rather than the sealed cavity 30 and the work piece entry pressure balance.

In connection with the supercritical fluid circulation cooling apparatus shown in fig. 2, the working principle of the charge transfer chamber 20 and the discharge transfer chamber 40 is as follows:

opening the outer side quick opening door 22, after the workpiece 10 is sent into the right side area of the feeding transfer chamber 20, closing the outer side quick opening door 22, and injecting high-pressure gas into the middle area of the feeding transfer chamber 20 through the gas inlet 23 to balance the pressure in the discharging transfer chamber 40 with the pressure in the closed cavity 30; then, opening the inner side quick opening door 21 between the feeding transfer chamber 20 and the closed cavity 30, transferring the workpiece 10 from the feeding transfer chamber 20 to the annular conveyer belt 31 in the closed cavity 30 for cooling by heat exchange in opposite direction, after the workpiece 10 is transferred from the feeding transfer chamber 20 to the cold closed cavity 30, closing the inner side quick opening door 21, and circulating the steps, thereby completing the feeding process of transferring the workpiece 10 from the outside to the cold closed cavity 30;

when the workpiece 10 is transferred to the position of the discharge transfer chamber 40 along with the annular conveyer belt 31 after the workpiece is cooled by the opposite heat exchange between the closed cavity 30 and the supercritical fluid, high-pressure gas is injected into the middle area of the discharge transfer chamber 40 through the air inlet in the middle of the discharge transfer chamber 40, so that the pressure in the discharge transfer chamber 40 is balanced with the pressure in the closed cavity 30; opening the inner side quick-opening door of the discharging transfer chamber 40, and closing the inner side quick-opening door of the discharging transfer chamber 40 after transferring the workpiece 10 from the closed cavity 30 to the left side area of the discharging transfer chamber 40; then, the outer side quick-opening door between the discharging transfer chamber 40 and the workpiece outlet is opened, the workpiece 10 is transferred from the middle area of the discharging transfer chamber 40 to the right area and is sent out from the workpiece outlet, and finally the outer side quick-opening door is closed, and the circulation is repeated, so that the discharging process that the workpiece 10 is transferred from the closed cavity 30 to the outside is completed.

Example 4

Referring to fig. 1, the present embodiment provides a closed cavity 30 with an annular structure, where the closed cavity 30 is a closed annular space, and has certain high pressure resistance and low temperature resistance, so as to meet the cooling requirement of small and micro-sized precision devices.

In the supercritical fluid process, in order to compensate the resistance of the supercritical fluid flow process and maintain the supercritical fluid to circularly flow in the closed cavity 30, the induced draft fan 32 is arranged in the closed cavity 30, the induced draft fan 32 is electrically connected with the PID control system 60, the supercritical fluid forms circular flow in the annular closed cavity 30 under the action of the induced draft fan 32, and the flow rate regulation of the supercritical fluid can be realized by controlling the air volume of the induced draft fan 32.

In the supercritical fluid process, in order to adjust the working temperature of the supercritical fluid within a set temperature range and maintain the temperature stability of the supercritical fluid circulating in the closed cavity 30, a heat exchanger 33 is installed in the closed cavity 30, the heat exchanger 33 is electrically connected with the PID control system 60, the heat transferred to the supercritical fluid from the workpiece is transmitted through the heat exchanger 33, and the temperature rise or the temperature drop of the supercritical fluid can also be realized according to the cooling process requirement.

In addition, in the supercritical fluid process, in order to measure and control the temperature, pressure and flow rate parameters of the supercritical fluid and ensure that the cooling rate of the workpiece 10 in the circulation process in the closed cavity 30 is performed according to an ideal cooling curve, thereby achieving the purpose of controllable cooling, a fluid temperature sensor 34, a fluid pressure sensor 35 and a fluid flow rate sensor 36 are further arranged in the closed cavity 30, and the fluid temperature sensor 34, the fluid pressure sensor 35 and the fluid flow rate sensor 36 are all electrically connected with the PID control system 60. The temperature, the pressure and the flow rate in the closed cavity are monitored in real time through the fluid temperature sensor 34, the fluid pressure sensor 35 and the fluid flow rate sensor 36, monitored data are transmitted to the PID control system in real time, and the PID control system adjusts the cooling process according to the received temperature, pressure and flow rate data to realize controllable cooling.

The supercritical fluid circulates in the closed cavity 30, the workpiece 10 to be cooled moves on the endless belt 31, and performs heat convection with the flowing supercritical fluid, the supercritical fluid absorbs heat to increase the temperature, and the workpiece 10 emits heat to decrease the temperature. The workpiece 10 enters the closed cavity 30 through the feeding transfer chamber 20, and is discharged from the closed cavity 30 through the discharging transfer chamber 40 after cooling.

Example 5

Referring to fig. 3, the present embodiment provides a method and a system for preparing a supercritical fluid, which are used to provide a supercritical fluid to the closed cavity 30, and the system includes a fluid source storage tank 51, a booster pump 53, a heat exchanger 54, and a buffer tank 55, which are connected in sequence. The supercritical fluid source in the fluid source storage tank 51 can be commercially available as a liquid nitrogen tank or can be manufactured on-site, as nitrogen gas from a nitrogen generator set. The supercritical fluid in the fluid source storage tank 51 is pressurized and heat exchanged by a booster pump 53 and a heat exchanger 54 to form a supercritical fluid, and the supercritical fluid is stored in a buffer tank 55 for later use, and the buffer tank 55 is connected with the closed cavity 30 through a pipeline to provide the supercritical fluid for the closed cavity 30.

A stop valve 52 is arranged on a pipeline between the fluid source storage tank 51 and the booster pump 53; the buffer tank 55 is provided with a storage tank temperature sensor 56 and a storage tank pressure sensor 57, the storage tank temperature sensor 56 and the storage tank pressure sensor 57 are electrically connected with a PID control system 60, and the temperature and the pressure of the supercritical fluid in the buffer tank 55 are controlled by the PID control system 60.

In addition, a flow regulating valve 58 is further installed on the pipeline between the buffer tank 55 and the closed cavity 30, the flow regulating valve 58 is electrically connected with a PID control system 60, and the flow regulating valve 58 regulates the flow of the supercritical fluid input into the closed cavity 30 as required.

The above detailed description of the embodiments of the present invention is only for exemplary purposes, and the present invention is not limited to the above described embodiments. Any equivalent modifications and substitutions to those skilled in the art are also within the scope of the present invention. Accordingly, variations and modifications in equivalents may be made without departing from the spirit and scope of the invention, which is intended to be covered by the following claims.

Claims (9)

1. A supercritical fluid cycle cooling apparatus, comprising:

the device comprises an annular closed cavity, a workpiece conveying device and a workpiece conveying device, wherein an annular conveying belt for conveying workpieces is arranged in the annular closed cavity;

and the supercritical fluid supply system is communicated with the closed cavity so as to provide the supercritical fluid into the closed cavity.

2. The supercritical fluid cycle cooling apparatus according to claim 1, further comprising:

the feeding transfer chamber is connected with the head end of the closed cavity; and

and the discharging transfer chamber is connected with the tail end of the closed cavity.

3. The supercritical fluid circulating cooling apparatus according to claim 2, wherein the charging transfer chamber and the discharging transfer chamber have the same structure, and are provided with an inner side quick opening door and an outer side quick opening door at the front and rear ends, respectively, and an air inlet and an air outlet at the middle part.

4. The supercritical fluid circulation cooling apparatus according to claim 1, wherein an induced draft fan is installed in the closed cavity.

5. The supercritical fluid cycle cooling apparatus according to claim 1, wherein a heat exchanger is installed in the closed cavity.

6. The supercritical fluid cycle cooling apparatus according to claim 1, wherein the closed cavity is equipped with a fluid temperature sensor, a fluid force sensor and a fluid flow rate sensor.

7. The supercritical fluid circulation cooling apparatus according to claim 1, wherein the supercritical fluid supply system comprises a fluid source storage tank, a booster pump, a supply heat exchanger and a supercritical fluid storage tank, wherein the supercritical fluid storage tank is provided with a storage tank temperature sensor and a storage tank pressure sensor.

8. The supercritical fluid cycle cooling apparatus according to claim 1, further comprising:

and the PID control system is respectively and electrically connected with the supercritical fluid supply system, the induced draft fan, the heat exchanger, the fluid temperature sensor, the fluid pressure sensor and the fluid flow rate sensor.

9. The supercritical fluid circulation cooling apparatus according to claim 1, wherein the supercritical fluid is carbon dioxide, nitrogen, water or air.

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