CN212706497U

CN212706497U - Structure of joint safety torque sleeve

Info

Publication number: CN212706497U
Application number: CN202020769835.4U
Authority: CN
Inventors: 翁楠凯
Original assignee: Juxian Research And Development Co ltd
Current assignee: Juxian Research And Development Co ltd
Priority date: 2020-05-11
Filing date: 2020-05-11
Publication date: 2021-03-16
Anticipated expiration: 2030-05-11

Abstract

The utility model relates to a connect safe torsion external member structure, wherein should connect safe torsion external member and include: a sleeve body provided with a recessed inner polygonal groove; the outer multi-corner part has a specific thickness and is integrally formed at one end of the sleeve body, and the outer multi-corner part and the sleeve body form a shear fracture area; an insertion groove extending outward from a central axis formed by the sleeve body and the outer multi-corner portion; the outer polygonal part is relatively rotated to the sleeve body by specific force application, so that the shear fracture area is fractured, and a safe torsion inspection mechanism serving as a fluid pipeline joint is provided.

Description

Structure of joint safety torque sleeve

Technical Field

The utility model relates to a semiconductor equipment's technical field indicates a connect safe torsion external member structure especially.

Background

Some semiconductor equipment uses several hazardous and non-hazardous fluids together and after careful measurement, several fluids from a gas pressure source are delivered to the processing chambers of the semiconductor equipment in a synchronized manner via several fluid supply lines. Therefore, semiconductor devices such as these typically require a "fluid delivery control panel" (known in the english as GAS BOX) to control the precise flow of the fluids and when they are turned ON and OFF.

The fluid delivery control panel is provided with a plurality of fluid supply pipes 6 in a confined box space and arranged densely, and each fluid supply pipe 6 has at least one joint 7, as shown in fig. 5 and 6, composed of a male joint 71 and a female joint 72, and an airtight pad 73 is provided on the female joint 72; in other words, when the pipe joints 7 are connected and installed, there is no standard for a set of force, and sometimes the two-wrench 74 does not reliably lock the pipe joints 7 when applying force, but sometimes the force is too excessive, and the airtight pad 73(GAS KET) in the pipe joint 7 is deformed; furthermore, even if one wants to engage the fittings 7 of the fluid supply lines 6 with a torque wrench, there is not enough freedom of space to deploy the torque wrench.

Therefore, if the joints 7 in the fluid delivery control panel are not consistent in the process of connecting and installing, the joints 6 will not be connected in torsion, and the situation of fluid leakage is easily caused, which not only wastes material resources but also creates an unsafe working environment.

SUMMERY OF THE UTILITY MODEL

Accordingly, in view of the problems existing in the connection and installation process of each joint in the fluid conveying control panel, the utility model discloses a safe torque force external member structure of the joint, so the utility model mainly aims to provide a safe torque force inspection mechanism of the joint of the fluid pipeline in the fluid conveying control panel (GAS BOX) of the semiconductor equipment; it is therefore a secondary object of the present invention to provide an effective engagement of fluid line connections within a fluid transport control panel (GAS BOX) of a semiconductor device.

The utility model discloses a reach above-mentioned purpose, utilize following technical means:

about the utility model discloses connect safe torsion external member structure, wherein should connect safe torsion external member and include: a sleeve body which is a plastic part and is provided with a concave inner polygonal groove; an outer multi-corner part which is a plastic part, has a specific thickness and is integrally formed at one end of the sleeve body, and the outer multi-corner part and the sleeve body form a shear fracture area; an insertion groove extending outward from a central axis formed by the sleeve body and the outer multi-corner portion; the outer polygonal part is relatively rotated to the sleeve body by specific force application, so that a fracture torsion is generated to fracture the shear fracture area.

The joint safe torque sleeve structure is characterized in that the sleeve body and the outer multi-corner part are made of crystalline plastic materials.

The joint safety torque sleeve structure is characterized in that the outer diameter of the outer polygonal part is smaller than that of the sleeve body.

The joint safety torque force external member structure is characterized in that a concave groove is formed in the bottom of the inner multi-angle groove.

The joint safety torque sleeve structure is characterized in that the inner polygonal groove of the sleeve body is designed to be an inner quadrangle, an inner pentagon, an inner hexagon or an inner octagon.

The joint safety torque external member structure is characterized in that the appearance of the outer polygonal part is designed into an outer quadrangle, an outer pentagon, an outer hexagon or an outer octagon.

The joint safety torsion external member structure is characterized in that the numerical value of the torsion is 12.5-16 nm.

By means of the above technical means, the utility model, can reach following efficiency:

rely on the utility model discloses safe torsion external member structure lets each joint in this fluid transport control panel link up the installation in-process, and the uniformity of control panel hand application of force pound number lets this several fluid supply pipelines have the linking up of uniformity torsion.

The utility model provides a this fluid transport control panel can not be formed with the condition of leaking the fluid, so except increasing extravagant material resource on foot, still cause unsafe operational environment.

Drawings

Fig. 1 is a perspective view of the "safety torque kit" according to the present invention.

Fig. 2 is a cross-sectional view of the "safety torque kit" according to the present invention.

Fig. 3 is a schematic diagram illustrating the operation of the "safety torque kit" according to the present invention.

Fig. 4 is a schematic diagram of the fracture of the "safety torque kit" according to the present invention.

FIG. 5 is a schematic view of a fluid supply line with a line connection.

Fig. 6 is a schematic diagram of the operation of a general pipeline joint.

Description of reference numerals: a-a safety torque kit; 1-a sleeve body; 2-inner polygonal groove; 21-a recessed groove; 3-outer multi-corner; 31-shear fracture zone; 4-embedding the groove; 5-central axis; 6-fluid supply line; 60-a pipe body; 7-a linker; 71-a male connector; 711-hexagonal part; 72-a female connector; 73-airtight pad; 74-wrench; t-thickness; d-outer diameter; d-outer diameter.

Detailed Description

Referring to fig. 1 to 3, the present invention relates to a joint safety torque kit structure a, which mainly provides a safety torque kit structure of a safety torque inspection mechanism for a joint 7 of a fluid pipeline 6 in a fluid delivery control panel (GAS BOX) of a semiconductor device, wherein the safety torque kit structure a comprises the following technical features: a sleeve body 1, an inner multi-angle groove 2, an outer multi-angle part 3 and an embedded groove 4.

The sleeve body 1 is a plastic part, as shown in fig. 2, wherein the sleeve body 1 is made of a crystalline plastic material, such as PP (polypropylene), so that the sleeve body 1 has a hard and brittle property, a concave inner polygonal groove 2 is formed in the sleeve body 1, and a concave groove 21 is formed at the bottom of the inner polygonal groove 2; further, the inner polygonal groove 2 is configured as an inner quadrangle, an inner pentagon, an inner hexagon or an inner octagon, and in the present embodiment, the inner polygonal groove 2 is an inner hexagon.

The outer multi-angle portion 3 is a plastic part, as shown in fig. 1, wherein the sleeve body 1 is made of a crystalline plastic material, such as PP (polypropylene), and the outer multi-angle portion 3 has a hard and brittle property, has a specific thickness t and is integrally formed at one end of the sleeve body 1, and the outer multi-angle portion 3 and the sleeve body 1 form a shear fracture area 31 and has a hard and brittle property, and the outer diameter D of the outer multi-angle portion is smaller than that of the sleeve body D; further, the outer polygonal portion 3 is formed in an outer square shape, an outer pentagon shape, an outer hexagon shape, or an outer octagon shape in appearance.

The insertion groove 4 is shown in fig. 1, wherein the insertion groove 4 extends from the central axis 5 formed by the sleeve body 1 and the outer multi-angle portion 3 to the outside to form a groove body.

Referring to fig. 3, when the safety torque kit a of the present invention is used for VCR joints and SWG joints with various specifications as shown in table 1, the insertion groove 4 of the safety torque kit a is inserted into the tube 60 of the fluid supply line 6 and then slides downward, so that the sleeve body 1 is inserted into the joint 7 which is not locked yet, but the hexagonal portion 711 below the male joint 71 is exposed, and the inner polygonal groove 2 is sealed outside the female joint 72.

Then, two wrenches 74 are used, one wrench 74 is sleeved on the outer multi-corner portion 3, the other wrench is sleeved on the hexagonal portion 711 below the male joint 71, then a specific force is applied to the outer multi-corner portion 3 in the direction that the two wrenches 74 approach each other and the two wrenches rotate relatively to the sleeve body 1, so as to form a specific torsion, wherein the value of the torsion reaches 12.5 nm to 16 nm (table 1), so that the shear fracture area 31 is fractured, as shown in fig. 4, and the joints 7 of the plurality of fluid supply pipelines 6 are connected with a consistent torsion.

TABLE 1

The foregoing description is intended to be illustrative rather than limiting, and it will be appreciated by those skilled in the art that many modifications, variations or equivalents may be made without departing from the spirit and scope of the invention as defined in the appended claims.

Claims

1. A joint safety torque sleeve structure is characterized by comprising:

a sleeve body which is a plastic part and is provided with a concave inner polygonal groove;

the outer multi-corner part is a plastic part with thickness and is integrally formed at one end of the sleeve body, and the outer multi-corner part and the sleeve body form a shear fracture area;

an embedded groove is a groove body which extends outwards from the central shaft formed by the sleeve body and the outer multi-corner part.

2. The joint safety torque kit structure of claim 1, wherein the sleeve body and the outer multi-corner portion are made of crystalline plastic.

3. The joint safety torque kit structure of claim 2, wherein the outer polygonal outer diameter is smaller than the sleeve body outer diameter.

4. The joint safety torque kit structure of claim 3, wherein the bottom of the inner polygonal groove is provided with a recessed groove.

5. The joint safety torque kit structure of claim 4, wherein the inner polygonal groove of the sleeve body is an inner quadrangle, an inner pentagon, an inner hexagon or an inner octagon.

6. The joint safety torque kit structure of claim 4, wherein the inner polygonal slot of the outer polygonal portion is an outer quadrangle, an outer pentagon, an outer hexagon or an outer octagon.

7. The joint safety torque kit structure of claim 1, wherein the shear fracture zone has a fracture torque of 12.5 nm to 16 nm.