CN212659505U - Gas temperature control device of dielectric barrier discharge ion source - Google Patents
Gas temperature control device of dielectric barrier discharge ion source Download PDFInfo
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- CN212659505U CN212659505U CN202021704750.4U CN202021704750U CN212659505U CN 212659505 U CN212659505 U CN 212659505U CN 202021704750 U CN202021704750 U CN 202021704750U CN 212659505 U CN212659505 U CN 212659505U
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- ion source
- control device
- dielectric barrier
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- 230000004888 barrier function Effects 0.000 title claims abstract description 25
- 238000010438 heat treatment Methods 0.000 claims abstract description 11
- 238000007789 sealing Methods 0.000 claims description 17
- 239000000919 ceramic Substances 0.000 claims description 10
- 238000000034 method Methods 0.000 claims description 7
- 239000010453 quartz Substances 0.000 claims description 3
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 3
- 238000009529 body temperature measurement Methods 0.000 description 12
- 239000011521 glass Substances 0.000 description 3
- 238000010586 diagram Methods 0.000 description 2
- 239000007769 metal material Substances 0.000 description 2
- 229910052755 nonmetal Inorganic materials 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 239000002131 composite material Substances 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 230000007812 deficiency Effects 0.000 description 1
- 230000007613 environmental effect Effects 0.000 description 1
- 229920001973 fluoroelastomer Polymers 0.000 description 1
- 239000003292 glue Substances 0.000 description 1
- 238000010884 ion-beam technique Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 230000002265 prevention Effects 0.000 description 1
- 230000001105 regulatory effect Effects 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
- 238000009423 ventilation Methods 0.000 description 1
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Abstract
The utility model provides a gas temperature control device of a dielectric barrier discharge ion source, which comprises a first tube for forming a gas channel; the first tube is arranged inside the second tube; the first connecting piece is arranged at the end parts of the first pipe and the second pipe and is provided with a first through hole communicated with the gas channel; the temperature measuring element is arranged inside the first pipe; a heating member is disposed on the first tube; the second connecting piece is arranged at the other end parts of the first pipe and the second pipe and is connected with the second pipe; the third pipe is arranged between the first pipe and the second pipe and penetrates through the second through hole of the second connecting piece; seals are disposed between the first connector and the second tube, and between the second connector and the second tube. The utility model has the advantages of gaseous accuse temperature precision is high, simple structure, integrated level height.
Description
Technical Field
The utility model relates to an ion source, in particular to gas temperature control device of dielectric barrier discharge ion source.
Background
Under the discharge mechanism of the dielectric barrier discharge ion source, gas input with different temperatures is required for different sample ionization tests, and ion beams in corresponding states are generated. In a high-temperature working environment (especially an environment with the temperature of more than 500 ℃), an accurate gas temperature measurement method without external environment interference (in a pipeline sealing state) is required, and the accurate temperature measurement is particularly required for high-temperature sealing of different non-metal materials and prevention of electronic interference. The technical methods for solving the problems comprise the following steps:
1. the method is suitable for environments with low detachability and high requirement on air tightness, has good sealing performance, has small external interference on gas temperature measurement, has more accurate gas temperature measurement, but has high requirements on surface damage, disassembly cleaning and coating processes of a ceramic heating pipe, and particularly has serious problem on consistency of sealing at multiple positions;
2. the gas temperature measurement method under the mechanical structure sealing is fixed in a clamping mode, has good reliability, but the clamping force of a glass tube medium in the DBD cannot be accurately vacant, so that the glass tube is broken;
3. the method for measuring the temperature of the gas in threaded connection, namely cone-column and cone-cone threaded connection, is an effective mode of the existing metal sealing, but has certain difficulty in processing internal and external threads of a glass tube and a ceramic part, and is high-temperature sealing of two different materials, so that consistency is difficult to achieve;
4. the gas temperature measurement mode inside and outside the pipe is suitable for ventilation and gas storage temperature measurement in an interference-free backflow state, but the temperature measurement precision is influenced by the fact that the interference on the temperature measurement inside the pipe in an electronic backflow state is too large and the environmental interference on the temperature measurement outside the pipe cannot be eliminated.
SUMMERY OF THE UTILITY MODEL
In order to solve the deficiencies in the prior art, the utility model provides a gas temperature control device of dielectric barrier discharge ion source, which has high temperature control precision, simple structure and convenient disassembly and assembly.
The utility model aims at realizing through the following technical scheme:
a gas temperature control device of a dielectric barrier discharge ion source comprises a first tube for forming a gas channel; the gas temperature control device of the dielectric barrier discharge ion source further comprises:
a second tube, the first tube being disposed inside the second tube;
the first connecting piece is arranged at the end parts of the first pipe and the second pipe and is provided with a first through hole communicated with the gas channel;
the temperature measuring element is arranged inside the first pipe;
a heating member disposed on the first pipe;
a second connector provided at the other ends of the first and second pipes and connected to the second pipe;
a third tube between the first and second tubes and passing through the second through hole of the second connector;
a seal disposed between the first connector and the second tube, and between the second connector and the second tube.
Compared with the prior art, the utility model discloses the beneficial effect who has does:
the first connecting piece, the second pipe, the second connecting piece and the sealing piece are utilized to realize a sealed leakage-free temperature measuring environment formed by assembling different non-metal materials under a high-temperature environment, a temperature measuring element such as a thermocouple is integrated to achieve temperature control of dielectric barrier discharge input gas under accurate temperature measurement, and the temperature measuring device is small in external interference, convenient to assemble and disassemble and simple in structure.
Drawings
The disclosure of the present invention will become more readily understood with reference to the accompanying drawings. As is readily understood by those skilled in the art: these drawings are only intended to illustrate the technical solution of the present invention and are not intended to limit the scope of the present invention. In the figure:
fig. 1 is a schematic structural diagram of a gas temperature control device of a dielectric barrier discharge ion source according to an embodiment of the present invention.
Detailed Description
Fig. 1 and the following description depict alternative embodiments of the invention to teach those skilled in the art how to make and reproduce the invention. For the purpose of teaching the present invention, some conventional aspects have been simplified or omitted. Those skilled in the art will appreciate variations or substitutions from these embodiments that will be within the scope of the invention. Those skilled in the art will appreciate that the features described below can be combined in various ways to form multiple variations of the invention. Accordingly, the present invention is not limited to the following alternative embodiments, but is only limited by the claims and their equivalents.
Example 1:
fig. 1 schematically shows a schematic structural diagram of a gas temperature control device of a dielectric barrier discharge ion source according to embodiment 1 of the present invention, and as shown in fig. 1, the gas temperature control device of the dielectric barrier discharge ion source includes:
a first tube 11, the first tube 11 for forming a gas passage;
a second tube 12, such as a ceramic tube, the first tube 11 being arranged inside the second tube 12;
a first connecting member 31, such as a ceramic member, the first connecting member 31 being provided at the ends of the first and second pipes 11 and 12 and having a first through hole communicating with the gas passage;
a temperature measuring element 51, the temperature measuring element 51 being disposed inside the first pipe 11;
a heating member 61, the heating member 61 being provided on the first pipe 11;
a second connecting member 32, such as a ceramic member, the second connecting member 32 being disposed at the other ends of the first and second pipes 11 and 12 and connected to the second pipe 12;
third tubes 23-25, such as quartz tubes, said third tubes 23-25 being located between said first tube 11 and said second tube 12 and passing through said second through holes of said second connecting member 32;
seals 41-42, said seals 41-42 being arranged between said first connection 31 and said second pipe 12 and between said second connection 32 and said second pipe 12.
In order to facilitate connection and sealing, further, the third tube comprises:
a first portion 23, said first portion 23 being between said first tube 11 and second tube 12;
a connecting portion 24, said connecting portion 24 being for connecting said first portion 23 and said second portion 25;
a second portion 25, the second portion 25 passing through the second through hole; the first portion 23 and the second portion 25 have different outer diameters.
In order to facilitate the sealing, further, the sealing member is disposed between the connection portion and the second connection member.
In order to improve the stability of the connection, the first connecting element further has an annular groove, in which one end of the first tube is located.
In order to conveniently assemble and disassemble the temperature measuring element, the first connecting piece is provided with a third through hole for the temperature measuring element to pass through; the sealing element is filled between the temperature measuring element and the third through hole.
In order to facilitate assembly and disassembly, further, the end of the second tube has an annular step on which the first connector rests.
Further, the first connector 31 has a fourth through hole adapted to pass the cable 62 of the heating member 61 therethrough, and the sealing member is filled between the cable and the fourth through hole, for convenience of assembly and disassembly.
Example 2:
according to utility model embodiment 1's gaseous temperature regulating device of dielectric barrier discharge ion source in the application example of embryonated egg.
In the application example, the first pipe 11 and the second pipe 12 are respectively ceramic round pipes to form a composite pipe structure with the first pipe 11 inside and the second pipe 12 outside, and one end of the second pipe 12 is provided with an annular step; the first connecting piece 31 is made of a ceramic piece and is arranged on the annular step, and one end of the first pipe 11 is positioned in an annular groove at one side of the first connecting piece 31; the sealing member 41 between the second pipe 12 and the first connecting member 31 is made of fluororubber; the heating member 61 is a heating wire, and surrounds the first pipe 11, and the power line 62 passes through the fourth through hole of the first connecting member 31; the temperature measuring element 51 adopts a thermocouple, passes through the third through hole on the first connecting piece 31 and is inserted into the first pipe 11; the third through hole and the fourth through hole are sealed;
the second connecting piece 32 is made of ceramic and is connected and sealed with the second pipe 12 by threads; the third tube is a quartz tube and comprises a first part 23 with a larger outer diameter, a connecting part 24 and a second part 25 with a smaller outer diameter, the first part 23 is positioned between the first tube 11 and the second tube 12, the second part 25 passes through a second through hole of the second connecting piece 32, the first tube 11, the connecting part 24 and the second connecting piece 32 are sequentially arranged in a direction parallel to the axial direction of the first tube 11, and the first part 23 and the second tube 12 of the first tube 11, the third tube and the third tube are sequentially arranged in the radial direction of the first tube 11; the sealing element 42 between the connecting part 24 and the second connecting piece 32 adopts high-temperature ceramic glue; the inner diameters of the first tube 11, the connecting portion 24 and the second portion 25 are the same.
The working mode of the gas temperature control device of the dielectric barrier discharge ion source is as follows:
the discharge gas flows from left to right: the temperature measuring device sequentially passes through the first through hole, the gas channel and the third pipe, the space between the first pipe and the second pipe is filled in a short time, and the temperature of gas in the first pipe in a sealed environment is measured by using a temperature measuring element in a relatively long-distance flowing process;
and the gas heating and cooling under the accurate temperature measurement are realized according to the acquired gas temperature and the working requirement required by the analysis sample.
Claims (10)
1. A gas temperature control device of a dielectric barrier discharge ion source comprises a first tube for forming a gas channel; the method is characterized in that: the gas temperature control device of the dielectric barrier discharge ion source further comprises:
a second tube, the first tube being disposed inside the second tube;
the first connecting piece is arranged at the end parts of the first pipe and the second pipe and is provided with a first through hole communicated with the gas channel;
the temperature measuring element is arranged inside the first pipe;
a heating member disposed on the first pipe;
a second connector provided at the other ends of the first and second pipes and connected to the second pipe;
a third tube between the first and second tubes and passing through the second through hole of the second connector;
a seal disposed between the first connector and the second tube, and between the second connector and the second tube.
2. The gas temperature control device of the dielectric barrier discharge ion source according to claim 1, wherein: the third tube includes:
a first portion between the first and second tubes;
a connecting portion for connecting the first and second portions;
a second portion passing through the second through hole; the first and second portions have different outer diameters.
3. The gas temperature control device of the dielectric barrier discharge ion source according to claim 2, wherein: the seal is disposed between the connecting portion and the second connecting member.
4. The gas temperature control device of the dielectric barrier discharge ion source according to claim 2, wherein: the first tube, the connecting portion and the second portion have the same inner diameter.
5. The gas temperature control device of the dielectric barrier discharge ion source according to claim 1, wherein: the first connector has an annular groove in which one end of the first tube is located.
6. The gas temperature control device of the dielectric barrier discharge ion source according to claim 1, wherein: the first connecting piece is provided with a third through hole which is suitable for the temperature measuring element to pass through; the sealing element is filled between the temperature measuring element and the third through hole.
7. The gas temperature control device of the dielectric barrier discharge ion source according to claim 1, wherein: the end of the second tube has an annular step on which the first connector is located.
8. The gas temperature control device of the dielectric barrier discharge ion source according to claim 1, wherein: the first connecting piece is provided with a fourth through hole suitable for the cable of the heating element to pass through, and the sealing element is filled between the cable and the fourth through hole.
9. The gas temperature control device of the dielectric barrier discharge ion source according to claim 1, wherein: the second connecting piece is connected with the second pipe through threads.
10. The gas temperature control device of the dielectric barrier discharge ion source according to claim 1, wherein: the first tube, the second tube, the first connecting piece and the second connecting piece are ceramic pieces, and the third tube is a quartz tube.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202021704750.4U CN212659505U (en) | 2020-08-15 | 2020-08-15 | Gas temperature control device of dielectric barrier discharge ion source |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202021704750.4U CN212659505U (en) | 2020-08-15 | 2020-08-15 | Gas temperature control device of dielectric barrier discharge ion source |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN212659505U true CN212659505U (en) | 2021-03-05 |
Family
ID=74769482
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202021704750.4U Active CN212659505U (en) | 2020-08-15 | 2020-08-15 | Gas temperature control device of dielectric barrier discharge ion source |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN212659505U (en) |
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2020
- 2020-08-15 CN CN202021704750.4U patent/CN212659505U/en active Active
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Address after: West side of 1st floor, 1st floor, Building A, No. 288 Jingu Middle Road (East), Yinzhou District, Ningbo City, Zhejiang Province, 315000 Patentee after: CHINA INNOVATION INSTRUMENT Co.,Ltd. Country or region after: China Address before: Room 304, D Building, Kexin Building, 655 Xueshi Road, Yinzhou District, Ningbo City, Zhejiang Province, 315000 Patentee before: CHINA INNOVATION INSTRUMENT Co.,Ltd. Country or region before: China |