CN212655852U - Evaporation crucible - Google Patents
Evaporation crucible Download PDFInfo
- Publication number
- CN212655852U CN212655852U CN202021872001.2U CN202021872001U CN212655852U CN 212655852 U CN212655852 U CN 212655852U CN 202021872001 U CN202021872001 U CN 202021872001U CN 212655852 U CN212655852 U CN 212655852U
- Authority
- CN
- China
- Prior art keywords
- plate
- heating
- dispersion
- accommodating cavity
- heating plate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Images
Landscapes
- Physical Vapour Deposition (AREA)
- Electroluminescent Light Sources (AREA)
Abstract
The utility model discloses an evaporation crucible, which comprises a crucible body, a heating component, a cover plate and a dispersing component for uniformly diffusing gas; the cover plate is provided with a plurality of uniformly distributed discharge holes; the crucible body is internally provided with an accommodating cavity for accommodating organic materials, and the top of the accommodating cavity is provided with an opening matched with the size of the substrate; the heating assembly, the dispersing assembly and the cover plate are sequentially arranged in the accommodating cavity from bottom to top. The utility model discloses a mode of face source coating by vaporization utilizes the even diffusion that dispersion subassembly realized the gas molecule, reaches the purpose that improves organic material utilization ratio.
Description
Technical Field
The utility model relates to a display screen makes the field, especially indicates an evaporation crucible.
Background
Organic Light Emitting Diodes (OLEDs) have the advantages of higher contrast, wide color gamut, wide viewing angle, low power consumption, smaller volume, etc., have wider applications and more significant advantages in the fields of curved screens, wearable displays, etc., and are drawing much attention in display technology.
The main process flow of the organic light-emitting layer of the OLED display screen comprises the steps of heating and sublimating an organic material in a crucible to form gas molecules, and further attaching the gas molecules to a specified area of a TFT substrate; in the above manufacturing process, the display effect of the OLED panel is affected by the adhesion state and uniformity of the organic light emitting layer.
The existing evaporation source is divided into a point source and a line source, when point source evaporation is adopted, a TFT substrate can rotate above the evaporation source so as to achieve the effect that materials are uniformly attached as much as possible, when line source evaporation is adopted, a line source crucible can move back and forth under the TFT substrate so as to fully plate the materials on the whole TFT substrate, the two modes are evaporation through a mode that the substrate or the evaporation source moves, the atmosphere of organic materials can be influenced, and the uniformity of a coating film is poor; the utilization rate of point source materials is about 5%, the utilization rate of line source materials is about 20%, the two designs have low material utilization rate, and the materials are seriously wasted; the organic materials are expensive, and the material expenditure accounts for a high proportion of the production cost of the current OLED screen.
SUMMERY OF THE UTILITY MODEL
The utility model discloses the technical problem that will solve is: provides a vapor deposition crucible, which improves the utilization rate of organic materials.
In order to solve the technical problem, the utility model discloses a technical scheme be:
an evaporation crucible comprises a crucible body, a heating assembly, a cover plate and a dispersing assembly for uniformly diffusing gas;
the cover plate is provided with a plurality of uniformly distributed discharge holes;
the crucible body is internally provided with an accommodating cavity for accommodating organic materials, and the top of the accommodating cavity is provided with an opening matched with the size of the substrate;
the heating assembly, the dispersing assembly and the cover plate are sequentially arranged in the accommodating cavity from bottom to top.
Further, the heating assembly comprises a first heating plate and a second heating plate;
the second heating plate is connected with the first heating plate in an intersecting manner and is used for dividing the accommodating cavity into a plurality of heating spaces.
Further, the thickness of the first heating plate is less than 1 mm.
Further, the thickness of the second heating plate is less than 1 mm.
Further, the first heating plate and the second heating plate are provided in plurality;
the plurality of second heating plates are arranged in parallel with each other, and the plurality of first heating plates are arranged in parallel with each other; the second heating plate and the first heating plate are arranged perpendicular to each other.
Further, the opening is rectangular, circular or elliptical.
Furthermore, the cross section area of the accommodating cavity is gradually increased from bottom to top.
Further, the dispersion assembly includes a first dispersion plate and a second dispersion plate;
the first dispersion plate and the second dispersion plate are sequentially arranged in the accommodating cavity from top to bottom;
the first dispersion plate and the second dispersion plate are spaced, and a dispersion cavity is formed among the first dispersion plate, the second dispersion plate and the inner wall of the accommodating cavity;
the first dispersion plate is provided with a plurality of first slit openings along the X-axis direction;
the second dispersion plate is provided with a plurality of second slit openings along the Y-axis direction;
the first slit opening and the second slit opening are perpendicular to each other.
Further, the discharge hole is vertically arranged upwards.
Furthermore, the discharge hole is a circular through hole.
The beneficial effects of the utility model reside in that: the heating component is arranged in the accommodating cavity and is used for uniformly heating the organic material to sublimate the organic material; the device is provided with a dispersion assembly for uniformly diffusing gas molecules after the organic material is sublimated in the dispersion assembly; the cover plate is arranged and used for enabling the gas molecules uniformly diffused by the dispersing component to pass through the discharge hole in the cover plate and be uniformly attached to one side of the substrate; and the opening of holding chamber and the size phase-match of base plate realize the face source coating by vaporization to the base plate, have reduced organic material's waste to improve the homogeneity of base plate surface organic film.
Drawings
Fig. 1 is a schematic structural view of an evaporation crucible according to an embodiment of the present invention;
FIG. 2 is an exploded view of an evaporation crucible according to an embodiment of the present invention;
FIG. 3 is a front view of FIG. 2;
fig. 4 is a sectional view of an evaporation crucible according to an embodiment of the present invention.
Description of reference numerals:
1. a crucible body;
2. a heating assembly; 21. a first heating plate; 22. a second heating plate;
3. a cover plate; 31. a discharge hole;
4. a dispersion assembly; 41. a first dispersion plate; 42. a second dispersion plate;
5. a substrate; 6. an accommodating cavity; 61. an opening; 7. a flow-through chamber; 8. heating the space; 9. a dispersion chamber.
Detailed Description
In order to explain the technical content, the objects and the effects of the present invention in detail, the following description is made with reference to the accompanying drawings in combination with the embodiments.
Referring to fig. 1 to 4, an evaporation crucible includes a crucible body, a heating assembly, a cover plate, and a dispersing assembly for uniformly dispersing gas;
the cover plate is provided with a plurality of uniformly distributed discharge holes;
the crucible body is internally provided with an accommodating cavity for accommodating organic materials, and the top of the accommodating cavity is provided with an opening matched with the size of the substrate;
the heating assembly, the dispersing assembly and the cover plate are sequentially arranged in the accommodating cavity from bottom to top.
The utility model discloses a theory of operation lies in:
set up the base plate above the crucible body, base plate and apron are parallel to each other to make the projection of base plate cover the opening in holding chamber, organic material heats the sublimation back in holding chamber bottom, diffuses to in the dispersion subassembly, and carries out even diffusion in the dispersion subassembly, and the back rises and evenly adheres to the base plate one side that is located the apron top through evenly distributed's discharge opening on the apron, has reduced organic material's waste.
From the above description, the beneficial effects of the present invention are: the heating component is arranged in the accommodating cavity and is used for uniformly heating the organic material to sublimate the organic material; the device is provided with a dispersion assembly for uniformly diffusing gas molecules after the organic material is sublimated in the dispersion assembly; the cover plate is arranged and used for enabling the gas molecules uniformly diffused by the dispersing component to pass through the discharge hole in the cover plate and be uniformly attached to one side of the substrate; and the opening of holding chamber and the size phase-match of base plate realize the face source coating by vaporization to the base plate, have reduced organic material's waste to improve the homogeneity of base plate surface organic film.
Further, the heating assembly comprises a first heating plate and a second heating plate;
the second heating plate is connected with the first heating plate in an intersecting manner and is used for dividing the accommodating cavity into a plurality of heating spaces.
As can be seen from the above description, the first heating plate and the second heating plate are connected to each other in a cross manner, and the accommodating chamber is divided into a plurality of heating spaces, so that the organic material can be uniformly heated in the plurality of heating spaces, and the evaporation rate can be kept stable.
Further, the thickness of the first heating plate is less than 1 mm.
Further, the thickness of the second heating plate is less than 1 mm.
Further, the first heating plate and the second heating plate are provided in plurality;
the plurality of second heating plates are arranged in parallel with each other, and the plurality of first heating plates are arranged in parallel with each other; the second heating plate and the first heating plate are arranged perpendicular to each other.
As can be seen from the above description, the thicknesses of the first heating plate and the second heating plate are both less than 1mm, and the first heating plate and the second heating plate are both provided with a plurality of heating plates, so that the organic material is heated more uniformly, the stability of the evaporation rate is ensured, and the uniformity of the organic film on the substrate is ensured.
Further, the opening is rectangular, circular or elliptical.
As can be seen from the above description, the openings of the crucible body are set in various shapes, and can be matched with substrates in different shapes, so that gas molecules generated after the organic material is sublimated uniformly and comprehensively cover one side of the substrate, and the waste of the organic material is greatly reduced.
Furthermore, the cross section area of the accommodating cavity is gradually increased from bottom to top.
According to the description, the containing cavity is filled with the organic materials after the organic materials are heated and sublimated, the organic materials can be comprehensively covered on one side of the substrate after being uniformly diffused, the cross section area of the containing cavity is gradually increased from bottom to top, the space at the bottom of the containing cavity is smaller than the space at the top of the containing cavity, the using amount of the organic materials can be reduced, namely, the substrate is comprehensively covered by less organic materials, and the using rate of the organic materials is improved.
Further, the dispersion assembly includes a first dispersion plate and a second dispersion plate;
the first dispersion plate and the second dispersion plate are sequentially arranged in the accommodating cavity from top to bottom;
the first dispersion plate and the second dispersion plate are spaced, and a dispersion cavity is formed among the first dispersion plate, the second dispersion plate and the inner wall of the accommodating cavity;
the first dispersion plate is provided with a plurality of first slit openings along the X-axis direction;
the second dispersion plate is provided with a plurality of second slit openings along the Y-axis direction;
the first slit opening and the second slit opening are perpendicular to each other.
As can be seen from the above description, the first dispersion plate and the second dispersion plate form a dispersion cavity therebetween, and the first slit opening and the second slit opening are perpendicular to each other, so that gas molecules can enter the dispersion cavity from the second slit opening and uniformly diffuse therein, and then flow out from the first slit opening, thereby ensuring uniform diffusion of the gas molecules, and further ensuring uniformity and flatness of the organic film formed on the substrate surface.
Further, the discharge hole is vertically arranged upwards.
As can be seen from the above description, the discharge holes are vertically disposed upward, so that the gas molecules vertically rise and adhere to the substrate, thereby reducing the overlapping area of the organic films and reducing the risk of color mixing.
Furthermore, the discharge hole is a circular through hole.
From the above description, it can be seen that the circular through holes can ensure more uniform outflow of the gas molecules.
Example one
Referring to fig. 1 to 4, an evaporation crucible includes a crucible body 1, a heating assembly 2, a cover plate 3, and a dispersion assembly 4 for uniformly diffusing gas; the cover plate 3 is provided with a plurality of uniformly distributed discharging holes 31; the crucible body 1 is internally provided with an accommodating cavity 6 for accommodating organic materials, and the top of the accommodating cavity 6 is provided with an opening 61 matched with the size of the substrate 5; heating element 2, dispersion subassembly 4 and apron 3 are installed in the holding chamber 6 by supreme lower in proper order. Preferably, the discharge hole 31 is vertically arranged upwards; preferably, the discharging hole 31 is a circular through hole.
Wherein the cover plate 3 is matched with the opening 61, and a flow-through cavity 7 is arranged between the cover plate 3 and the dispersing component 4.
Referring to fig. 2, the heating module 2 includes a first heating plate 21 and a second heating plate 22; the second heating plate 22 is connected to the first heating plate 21 in a crossing manner to divide the receiving chamber 6 into a plurality of heating spaces 8. Preferably, the thickness of the first heating plate 21 is less than 1 mm; preferably, the thickness of the second heating plate 22 is less than 1 mm.
Referring to fig. 2, each of the first and second heating plates 21 and 22 has a plurality; the plurality of second heating plates 22 are disposed parallel to each other, and the plurality of first heating plates 21 are disposed parallel to each other; the second heating plate 22 is disposed perpendicular to the first heating plate 21. Preferably, the first heating plate 21 is provided with four, and the second heating plate 22 is provided with ten.
Alternatively, the opening 61 is rectangular, circular or oval. Preferably, the opening 61 is rectangular.
Referring to fig. 4, the cross-sectional area of the accommodating chamber 6 gradually increases from bottom to top. Specifically, the section of the accommodating cavity 6 is trapezoidal, and the crucible body 1 is a circular truncated cone or an inverted rectangular pyramid with the top cut off, or other regular cubes with large lower parts and small upper parts.
Referring to fig. 4, the dispersion member 4 includes a first dispersion plate 41 and a second dispersion plate 42; the first dispersion plate 41 and the second dispersion plate 42 are sequentially arranged in the accommodating cavity 6 from top to bottom; a space is reserved between the first dispersion plate 41 and the second dispersion plate 42, and the space is used for forming a dispersion cavity 9 among the first dispersion plate 41, the second dispersion plate 42 and the inner wall of the accommodating cavity 6; the first dispersion plate 41 is provided with a plurality of first slit openings 61 along the X-axis direction; the second dispersion plate 42 is provided with a plurality of second slit openings 61 along the Y-axis direction; the first slit opening 61 and the second slit opening 61 are perpendicular to each other.
The specific implementation process comprises the following steps: set up base plate 5 in holding chamber 6 top base plate 5 and place in the mask (the mask is the metal mask board, it has the aperture to open on the metal mask board, a position location for to Pixel, so that organic material coating by vaporization is on base plate 5), make base plate 5 be located crucible body 1 top 50 cm's position, the liquid level of the organic material of splendid attire should be less than the height of first hot plate 21 and second hot plate 22 in holding chamber 6, organic material in first hot plate 21 and the second hot plate 22 in to holding chamber 6 heats, sublimed gaseous molecule behind the organic material gets into in dispersion chamber 9 and circulation chamber 7 in proper order and simultaneously through the vertical rising of a plurality of discharge openings 31 and adheres to base plate 5 surface formation organic film.
To sum up, the utility model provides a pair of coating by vaporization crucible sets up the dispersion subassembly in the holding intracavity, a dispersion space for making the gas molecule after the organic material sublimation carry out the uniform diffusion in the dispersion subassembly, ensure the homogeneity of gas molecule and the roughness of the organic membrane that the gas molecule formed after attaching to the substrate surface, the cross section in holding chamber is by supreme crescent down, and the opening in holding chamber sets to with substrate size assorted shape, can only sublimate into the gas molecule with a small amount of organic material after the heating, and the gas molecule can be at dispersion intracavity uniform diffusion, the coverage area of gas molecule has been enlarged, and then realize the face source coating by vaporization, can cover in the substrate surface and form even, smooth organic membrane comprehensively after the discharge opening of apron is passed to the gas molecule. The utility model discloses the waste of organic material that has significantly reduced adopts and compares in traditional handicraft still less organic material can realize the comprehensive cover to the base plate, improves organic material's utilization ratio, has reduced manufacturing cost.
The above mentioned is only the embodiment of the present invention, and not the limitation of the patent scope of the present invention, all the equivalent transformations made by the contents of the specification and the drawings, or the direct or indirect application in the related technical field, are included in the patent protection scope of the present invention.
Claims (10)
1. An evaporation crucible is characterized by comprising a crucible body, a heating assembly, a cover plate and a dispersing assembly for uniformly diffusing gas;
the cover plate is provided with a plurality of uniformly distributed discharge holes;
the crucible body is internally provided with an accommodating cavity for accommodating organic materials, and the top of the accommodating cavity is provided with an opening matched with the size of the substrate;
the heating assembly, the dispersing assembly and the cover plate are sequentially arranged in the accommodating cavity from bottom to top.
2. An evaporation crucible according to claim 1, wherein the heating assembly comprises a first heating plate and a second heating plate;
the second heating plate is connected with the first heating plate in an intersecting manner and is used for dividing the accommodating cavity into a plurality of heating spaces.
3. A vaporization crucible according to claim 2, wherein the thickness of the first heating plate is less than 1 mm.
4. A vaporization crucible according to claim 2, wherein the thickness of the second heating plate is less than 1 mm.
5. An evaporation crucible according to claim 2, wherein the first heating plate and the second heating plate are provided in plurality;
the plurality of second heating plates are arranged in parallel with each other, and the plurality of first heating plates are arranged in parallel with each other; the second heating plate and the first heating plate are arranged perpendicular to each other.
6. A vaporization crucible according to claim 1, wherein the opening is rectangular, circular or oval.
7. An evaporation crucible according to claim 1, wherein the cross-sectional area of the accommodating cavity is gradually increased from bottom to top.
8. A vaporization crucible according to claim 1, wherein the dispersion member comprises a first dispersion plate and a second dispersion plate;
the first dispersion plate and the second dispersion plate are sequentially arranged in the accommodating cavity from top to bottom;
the first dispersion plate and the second dispersion plate are spaced, and a dispersion cavity is formed among the first dispersion plate, the second dispersion plate and the inner wall of the accommodating cavity;
the first dispersion plate is provided with a plurality of first slit openings along the X-axis direction;
the second dispersion plate is provided with a plurality of second slit openings along the Y-axis direction;
the first slit opening and the second slit opening are perpendicular to each other.
9. A deposition crucible according to claim 1, wherein the discharge opening is arranged vertically upwards.
10. An evaporation crucible according to claim 1, wherein the discharge hole is a circular through hole.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202021872001.2U CN212655852U (en) | 2020-09-01 | 2020-09-01 | Evaporation crucible |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202021872001.2U CN212655852U (en) | 2020-09-01 | 2020-09-01 | Evaporation crucible |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN212655852U true CN212655852U (en) | 2021-03-05 |
Family
ID=74761582
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202021872001.2U Active CN212655852U (en) | 2020-09-01 | 2020-09-01 | Evaporation crucible |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN212655852U (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112030113A (en) * | 2020-09-01 | 2020-12-04 | 福建华佳彩有限公司 | Evaporation crucible |
| CN116121711A (en) * | 2023-03-30 | 2023-05-16 | 京东方科技集团股份有限公司 | Auxiliary evaporation device and evaporation crucible |
| CN117467947A (en) * | 2023-10-31 | 2024-01-30 | 苏州志天纳米科技有限公司 | Composite film coating device for carbon fiber built-in part and preparation method thereof |
-
2020
- 2020-09-01 CN CN202021872001.2U patent/CN212655852U/en active Active
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112030113A (en) * | 2020-09-01 | 2020-12-04 | 福建华佳彩有限公司 | Evaporation crucible |
| CN112030113B (en) * | 2020-09-01 | 2024-05-17 | 福建华佳彩有限公司 | Evaporation crucible |
| CN116121711A (en) * | 2023-03-30 | 2023-05-16 | 京东方科技集团股份有限公司 | Auxiliary evaporation device and evaporation crucible |
| CN117467947A (en) * | 2023-10-31 | 2024-01-30 | 苏州志天纳米科技有限公司 | Composite film coating device for carbon fiber built-in part and preparation method thereof |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN212655852U (en) | Evaporation crucible | |
| CN112030113B (en) | Evaporation crucible | |
| CN106597728A (en) | Color film substrate and liquid crystal display panel | |
| KR20220123336A (en) | Nozzle for a distribution assembly of a material deposition source arrangement, material deposition source arrangement, vacuum deposition system and method for depositing material | |
| CN107978676B (en) | A kind of vapor deposition uses mask assembly | |
| KR20160112293A (en) | Evaporation source and Deposition apparatus including the same | |
| TWI619823B (en) | Vacuum deposition system and method for depositing material therein | |
| CN101688648B (en) | Lighting apparatus, display unit, and television receiver | |
| CN103726030B (en) | Precipitation equipment and the manufacturing method for using its organic light-emitting display device | |
| CN107315286A (en) | The preparation method of display panel, display device and display panel | |
| CN211112187U (en) | Surface evaporation source structure and equipment | |
| CN108008578B (en) | Transfer printing plate for coating phase matching film on substrate and liquid crystal display panel | |
| CN103741097B (en) | Vacuum deposition apparatus | |
| CN108359933A (en) | At membrane module and its bearing assembly, film build method | |
| KR20080079924A (en) | Source supply device of substrate manufacturing apparatus | |
| KR20090014623A (en) | Diffusion sheet, method for manufacturing the diffusion sheet, backlight unit comprising the diffusion sheet and liquid crystal display comprising the diffusion sheet | |
| CN1299156C (en) | Supporting diffusion plate | |
| CN215757579U (en) | Crucible pot | |
| CN211546651U (en) | Back plate structure of evaporator and evaporator | |
| CN111613649A (en) | Display panel, preparation method thereof and display device | |
| US20070152554A1 (en) | Illuminating device | |
| CN103712121A (en) | Liquid crystal display device and direct-down-type backlight module thereof | |
| KR20100005514A (en) | Front lighting back light unit | |
| CN113823670B (en) | Pixel arrangement structure, mask plate assembly and display panel | |
| CN216647031U (en) | Backlight module and display device |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant |