CN212655627U - System for utilize BOE waste liquid preparation ammonium bifluoride - Google Patents
System for utilize BOE waste liquid preparation ammonium bifluoride Download PDFInfo
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- CN212655627U CN212655627U CN202022214176.0U CN202022214176U CN212655627U CN 212655627 U CN212655627 U CN 212655627U CN 202022214176 U CN202022214176 U CN 202022214176U CN 212655627 U CN212655627 U CN 212655627U
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- Prior art keywords
- boe
- ammonium bifluoride
- waste liquid
- reaction kettle
- effect evaporator
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- MIMUSZHMZBJBPO-UHFFFAOYSA-N 6-methoxy-8-nitroquinoline Chemical compound N1=CC=CC2=CC(OC)=CC([N+]([O-])=O)=C21 MIMUSZHMZBJBPO-UHFFFAOYSA-N 0.000 title claims abstract description 51
- 239000007788 liquid Substances 0.000 title claims abstract description 43
- 239000002699 waste material Substances 0.000 title claims abstract description 36
- 238000002360 preparation method Methods 0.000 title claims description 7
- 238000006243 chemical reaction Methods 0.000 claims abstract description 28
- 239000012528 membrane Substances 0.000 claims abstract description 27
- 238000001035 drying Methods 0.000 claims abstract description 24
- 238000001179 sorption measurement Methods 0.000 claims abstract description 17
- 238000001816 cooling Methods 0.000 claims abstract description 12
- 238000001914 filtration Methods 0.000 claims abstract description 11
- 238000003860 storage Methods 0.000 claims abstract description 9
- 239000006228 supernatant Substances 0.000 claims abstract description 7
- LYCAIKOWRPUZTN-UHFFFAOYSA-N Ethylene glycol Chemical compound OCCO LYCAIKOWRPUZTN-UHFFFAOYSA-N 0.000 claims description 9
- 239000012510 hollow fiber Substances 0.000 claims description 9
- QGZKDVFQNNGYKY-UHFFFAOYSA-N Ammonia Chemical group N QGZKDVFQNNGYKY-UHFFFAOYSA-N 0.000 claims description 5
- 239000006260 foam Substances 0.000 claims description 5
- QAOWNCQODCNURD-UHFFFAOYSA-N sulfuric acid Substances OS(O)(=O)=O QAOWNCQODCNURD-UHFFFAOYSA-N 0.000 claims description 5
- 238000010521 absorption reaction Methods 0.000 claims description 4
- 239000002101 nanobubble Substances 0.000 claims description 4
- 239000002826 coolant Substances 0.000 claims description 3
- KRHYYFGTRYWZRS-UHFFFAOYSA-N Fluorane Chemical compound F KRHYYFGTRYWZRS-UHFFFAOYSA-N 0.000 abstract description 21
- 229910000040 hydrogen fluoride Inorganic materials 0.000 abstract description 17
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 abstract description 12
- 239000007789 gas Substances 0.000 abstract description 10
- 238000004519 manufacturing process Methods 0.000 abstract description 10
- 238000003912 environmental pollution Methods 0.000 abstract description 6
- 239000000047 product Substances 0.000 abstract description 3
- 238000007599 discharging Methods 0.000 abstract description 2
- 238000000034 method Methods 0.000 description 21
- 238000001704 evaporation Methods 0.000 description 11
- 230000008020 evaporation Effects 0.000 description 11
- 230000000694 effects Effects 0.000 description 9
- 239000000243 solution Substances 0.000 description 7
- 238000009835 boiling Methods 0.000 description 6
- 238000005530 etching Methods 0.000 description 6
- DDFHBQSCUXNBSA-UHFFFAOYSA-N 5-(5-carboxythiophen-2-yl)thiophene-2-carboxylic acid Chemical compound S1C(C(=O)O)=CC=C1C1=CC=C(C(O)=O)S1 DDFHBQSCUXNBSA-UHFFFAOYSA-N 0.000 description 5
- 239000000706 filtrate Substances 0.000 description 5
- 239000002244 precipitate Substances 0.000 description 5
- 239000004094 surface-active agent Substances 0.000 description 5
- LDDQLRUQCUTJBB-UHFFFAOYSA-O azanium;hydrofluoride Chemical compound [NH4+].F LDDQLRUQCUTJBB-UHFFFAOYSA-O 0.000 description 4
- -1 fluorine ions Chemical class 0.000 description 4
- QAOWNCQODCNURD-UHFFFAOYSA-L Sulfate Chemical compound [O-]S([O-])(=O)=O QAOWNCQODCNURD-UHFFFAOYSA-L 0.000 description 3
- XKMRRTOUMJRJIA-UHFFFAOYSA-N ammonia nh3 Chemical compound N.N XKMRRTOUMJRJIA-UHFFFAOYSA-N 0.000 description 3
- RQPZNWPYLFFXCP-UHFFFAOYSA-L barium dihydroxide Chemical compound [OH-].[OH-].[Ba+2] RQPZNWPYLFFXCP-UHFFFAOYSA-L 0.000 description 3
- 229910001863 barium hydroxide Inorganic materials 0.000 description 3
- 229910052731 fluorine Inorganic materials 0.000 description 3
- 239000011737 fluorine Substances 0.000 description 3
- 239000007791 liquid phase Substances 0.000 description 3
- 239000012071 phase Substances 0.000 description 3
- 239000004065 semiconductor Substances 0.000 description 3
- VEXZGXHMUGYJMC-UHFFFAOYSA-M Chloride anion Chemical compound [Cl-] VEXZGXHMUGYJMC-UHFFFAOYSA-M 0.000 description 2
- TZCXTZWJZNENPQ-UHFFFAOYSA-L barium sulfate Chemical compound [Ba+2].[O-]S([O-])(=O)=O TZCXTZWJZNENPQ-UHFFFAOYSA-L 0.000 description 2
- 238000005119 centrifugation Methods 0.000 description 2
- 239000013078 crystal Substances 0.000 description 2
- 238000002425 crystallisation Methods 0.000 description 2
- 230000008025 crystallization Effects 0.000 description 2
- 239000011549 crystallization solution Substances 0.000 description 2
- 239000011521 glass Substances 0.000 description 2
- 239000012535 impurity Substances 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 238000002844 melting Methods 0.000 description 2
- 230000008018 melting Effects 0.000 description 2
- QPJSUIGXIBEQAC-UHFFFAOYSA-N n-(2,4-dichloro-5-propan-2-yloxyphenyl)acetamide Chemical compound CC(C)OC1=CC(NC(C)=O)=C(Cl)C=C1Cl QPJSUIGXIBEQAC-UHFFFAOYSA-N 0.000 description 2
- 238000000926 separation method Methods 0.000 description 2
- QGZKDVFQNNGYKY-UHFFFAOYSA-O Ammonium Chemical compound [NH4+] QGZKDVFQNNGYKY-UHFFFAOYSA-O 0.000 description 1
- IGFHQQFPSIBGKE-UHFFFAOYSA-N Nonylphenol Natural products CCCCCCCCCC1=CC=C(O)C=C1 IGFHQQFPSIBGKE-UHFFFAOYSA-N 0.000 description 1
- 239000002253 acid Substances 0.000 description 1
- LDDQLRUQCUTJBB-UHFFFAOYSA-N ammonium fluoride Chemical compound [NH4+].[F-] LDDQLRUQCUTJBB-UHFFFAOYSA-N 0.000 description 1
- BFNBIHQBYMNNAN-UHFFFAOYSA-N ammonium sulfate Chemical compound N.N.OS(O)(=O)=O BFNBIHQBYMNNAN-UHFFFAOYSA-N 0.000 description 1
- 229910052921 ammonium sulfate Inorganic materials 0.000 description 1
- 235000011130 ammonium sulphate Nutrition 0.000 description 1
- 239000007864 aqueous solution Substances 0.000 description 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- 238000005260 corrosion Methods 0.000 description 1
- 230000007797 corrosion Effects 0.000 description 1
- 230000018044 dehydration Effects 0.000 description 1
- 238000006297 dehydration reaction Methods 0.000 description 1
- 239000000645 desinfectant Substances 0.000 description 1
- YRIUSKIDOIARQF-UHFFFAOYSA-N dodecyl benzenesulfonate Chemical compound CCCCCCCCCCCCOS(=O)(=O)C1=CC=CC=C1 YRIUSKIDOIARQF-UHFFFAOYSA-N 0.000 description 1
- GVGUFUZHNYFZLC-UHFFFAOYSA-N dodecyl benzenesulfonate;sodium Chemical compound [Na].CCCCCCCCCCCCOS(=O)(=O)C1=CC=CC=C1 GVGUFUZHNYFZLC-UHFFFAOYSA-N 0.000 description 1
- GLFVHAHBHRLYLU-UHFFFAOYSA-M dodecyl-dimethyl-phenylazanium;chloride Chemical compound [Cl-].CCCCCCCCCCCC[N+](C)(C)C1=CC=CC=C1 GLFVHAHBHRLYLU-UHFFFAOYSA-M 0.000 description 1
- 229940071161 dodecylbenzenesulfonate Drugs 0.000 description 1
- 239000003651 drinking water Substances 0.000 description 1
- 235000020188 drinking water Nutrition 0.000 description 1
- 238000000855 fermentation Methods 0.000 description 1
- 230000004151 fermentation Effects 0.000 description 1
- 239000008394 flocculating agent Substances 0.000 description 1
- 150000002221 fluorine Chemical class 0.000 description 1
- 230000008676 import Effects 0.000 description 1
- 150000002500 ions Chemical class 0.000 description 1
- 239000011259 mixed solution Substances 0.000 description 1
- 238000002156 mixing Methods 0.000 description 1
- SNQQPOLDUKLAAF-UHFFFAOYSA-N nonylphenol Chemical compound CCCCCCCCCC1=CC=CC=C1O SNQQPOLDUKLAAF-UHFFFAOYSA-N 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- 229940051841 polyoxyethylene ether Drugs 0.000 description 1
- 229920000056 polyoxyethylene ether Polymers 0.000 description 1
- 239000003755 preservative agent Substances 0.000 description 1
- 230000002335 preservative effect Effects 0.000 description 1
- 239000002994 raw material Substances 0.000 description 1
- 238000011084 recovery Methods 0.000 description 1
- 238000010992 reflux Methods 0.000 description 1
- 238000011160 research Methods 0.000 description 1
- 238000007789 sealing Methods 0.000 description 1
- 229940080264 sodium dodecylbenzenesulfonate Drugs 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 238000003756 stirring Methods 0.000 description 1
- 238000001308 synthesis method Methods 0.000 description 1
- 238000004065 wastewater treatment Methods 0.000 description 1
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- Separation Using Semi-Permeable Membranes (AREA)
Abstract
The utility model provides a system for preparing ammonium bifluoride by using BOE waste liquid, which not only can avoid directly discharging the BOE waste liquid to cause environmental pollution, but also can recover the prepared ammonium bifluoride product with high purity, low water content, low investment cost and low production cost, and can also reduce the discharge of hydrogen fluoride gas; the device comprises a BOE waste liquid storage tank, a first reaction kettle, a filtering device, a second reaction kettle, a three-effect evaporator, a cooling crystallizer, a continuous centrifuge, a drying device and an ammonium bifluoride storage tank which are connected in sequence, wherein a supernatant outlet of the continuous centrifuge is communicated with an inlet of the three-effect evaporator, the three-effect evaporator and the drying device are connected with an inlet end of a membrane adsorption system, and an outlet end of the membrane adsorption system is communicated with the second reaction kettle.
Description
Technical Field
The utility model relates to a waste water treatment technical field, in particular to BOE waste liquid treatment technical field specifically is a system for utilize BOE waste liquid preparation ammonium bifluoride.
Background
The BOE buffer etching solution is hydrofluoric acid (HF) and ammonium fluoride (NH)4F) Mixed in different proportions, HF being the main etching liquid, NH4F is used as a buffer, and the main component of the BOE waste liquid generated after the etching process of the semiconductor element is ammonium fluoride (NH)4F) And ammonium hydrogen fluoride (NH)4HF2) Simultaneously contains a small amount of fluosilicic acid ions and sulfate ions; if the ammonia nitrogen and the fluorine ions are directly discharged, the ammonia nitrogen and the fluorine ions in the water can have serious influence on the environment, for example, when the concentration of the ammonia nitrogen in the water is too high, the water is rich in oxygen and harms aquatic ecosystems, and when the concentration of the fluorine ions is too high, the drinking water, crops and human health are greatly harmed.
The ammonium bifluoride is a white or colorless transparent crystal of an orthorhombic system, has a Melting point (Melting point) of 125.6 ℃ and a Boiling point (Boiling point) of 240 ℃, is easy to deliquesce in the air, is very easy to dissolve in cold water, has strong acidity in aqueous solution, can be sublimated at a higher temperature, can corrode glass, is mainly used as a disinfectant, a preservative and the like for glass etching and fermentation industries, and is an inorganic fluorine salt with larger yield and consumption; at present, the main domestic synthesis methods of ammonium bifluoride are a gas phase method and a liquid phase method, the water content of the ammonium bifluoride synthesized by the gas phase method is low, the purity is high, but the reaction temperature is high, the reaction temperature generally reaches the boiling point temperature of the ammonium bifluoride and is higher than the boiling point temperature of the ammonium bifluoride, the reaction is violent, the requirements on the sealing property and the corrosion resistance of equipment are higher, and the investment cost is high; although the liquid phase method has mild process conditions and low investment cost, the synthesized ammonium bifluoride has high water content, is easy to agglomerate and is difficult to store; and both the gas phase method and the liquid phase method need to adopt a large amount of raw materials such as hydrogen fluoride, liquid ammonia, ammonia gas and the like, so the production cost is higher.
Therefore, the method for preparing the ammonium bifluoride by using the BOE waste liquid is researched and developed by the applicant, and the preparation system is developed and designed according to the method.
Disclosure of Invention
Aiming at the problems of high equipment requirement, high investment cost, high water content, easy caking, difficult storage and high production cost of the existing preparation method of ammonium bifluoride, the applicant researches and develops a method for preparing ammonium bifluoride by using BOE waste liquid, and provides a system for preparing ammonium bifluoride by using BOE waste liquid, which can avoid environmental pollution caused by directly discharging BOE waste liquid, and can reduce the discharge of hydrogen fluoride gas, wherein the recovered ammonium bifluoride product has high purity, low water content, low investment cost and low production cost.
The utility model adopts the following technical scheme: the method is characterized in that: the device comprises a BOE waste liquid storage tank, a first reaction kettle, a filtering device, a second reaction kettle, a triple-effect evaporator, a cooling crystallizer, a continuous centrifuge, a drying device and an ammonium bifluoride storage tank which are connected in sequence, wherein a supernatant outlet of the continuous centrifuge is communicated with an inlet of the triple-effect evaporator, the triple-effect evaporator is connected with an inlet end of a membrane adsorption system, and an outlet end of the membrane adsorption system is communicated with the second reaction kettle.
It is further characterized in that:
the membrane adsorption system comprises a hollow fiber membrane contactor, a rectifying tower and a condenser which are sequentially connected, wherein an inlet of the hollow fiber membrane contactor is communicated with the triple-effect evaporator and the drying device, and an outlet of the condenser is connected with the second reaction kettle;
the membrane adsorption system adopts concentrated sulfuric acid with the mass fraction of 95-98% as an absorption liquid;
a defoaming device is arranged between the second reaction kettle and the triple-effect evaporator;
the defoaming device comprises a main tank, a micro-nano bubble generator and a collecting tank, wherein the main tank is provided with a foam scraper, a return pipeline is arranged between the collecting tank and the main tank, and the main tank is communicated with the triple-effect evaporator;
the cooling medium of the cooling crystallizer is liquid ammonia or ethylene glycol;
the filtering device is a plate-and-frame filter press;
the drying device is an airflow dryer.
After the structure is adopted in the utility model, BOE waste liquid generated by the semiconductor etching process reacts with barium hydroxide in the first reaction kettle to generate precipitate and impurities in the waste liquid are removed through the filtering device, then the precipitate reacts with introduced hydrogen fluoride in the second reaction kettle, ammonium fluoride in filtrate is converted into ammonium bifluoride, and the ammonium bifluoride with high purity and low water content can be obtained by adopting evaporation, cooling crystallization, centrifugal separation and drying; the whole process can be carried out below the boiling point of ammonium bifluoride, the process conditions are mild, the investment cost is low, and the BOE waste liquid is recycled, so that the environmental pollution can be avoided, and the production cost can be effectively reduced; the triple-effect evaporator and the drying device are connected with the second reaction kettle through the membrane adsorption system, and hydrogen fluoride generated in the evaporation and drying processes can be recycled, so that the production cost is further reduced, and the environmental pollution is reduced.
The defoaming device can remove the surfactant in the BOE waste liquid, avoid causing the loss of ammonium bifluoride, improve the concentrated effect of evaporation.
Drawings
Fig. 1 is a schematic structural view of the present invention;
fig. 2 is an enlarged schematic view of a point a in fig. 1.
Detailed Description
The utility model is further explained by combining the process method for preparing ammonium bifluoride by using BOE waste liquid and the attached drawings:
the method for preparing ammonium bifluoride by using BOE waste liquid comprises the following steps:
s1: adding barium hydroxide into a first reaction kettle filled with BOE waste liquid, stirring for 30-60 min, and then filtering to obtain a filtrate, wherein the BOE waste liquid contains 0.1-5% of ammonium fluosilicate, 0.1-5% of ammonium sulfate, 10-30% of ammonium fluoride and 5-20% of ammonium bifluoride by mass;
s2: putting the filtrate in a second reaction kettle, introducing anhydrous hydrogen fluoride, uniformly mixing at 30-60 ℃, and reacting until the pH of the mixed solution reaches 4-5 to obtain an ammonium bifluoride solution;
s3: carrying out reduced pressure evaporation on the ammonium bifluoride solution in a triple-effect evaporator for 30-60 min, wherein the evaporation temperature is 70-120 ℃, and the pressure is-0.03-0.06 MPa to obtain an ammonium bifluoride concentrated solution, and then cooling the ammonium bifluoride concentrated solution in a cooling crystallizer for 60-90 min at the cooling temperature of 5-20 ℃ to obtain an ammonium bifluoride crystallization solution;
s4: and (2) centrifugally separating the ammonium bifluoride crystallization solution in a continuous centrifuge, wherein the rotating speed of the continuous centrifuge is 25000 rpm-30000 rpm, refluxing the centrifuged supernatant to a triple-effect evaporator, drying the ammonium bifluoride crystal obtained by centrifugation in a drying device for 60-90 min at the drying temperature of 50-70 ℃ to obtain the ammonium bifluoride with the mass fraction of 98.5-99.5%.
As shown in fig. 1, the utility model provides a system for utilize BOE waste liquid preparation ammonium bifluoride, it includes BOE waste liquid storage tank 1, first reation kettle 2, filter equipment 3, second reation kettle 4, triple effect evaporimeter 8, cooling crystallizer 16, continuous centrifuge 9, drying device 10 and ammonium bifluoride storage tank 11 that connect in order, continuous centrifuge 9's supernatant export 901 communicates with triple effect evaporimeter 8's import 801, be unsaturated ammonium bifluoride solution in the supernatant that the centrifugation obtained, reuse in triple effect evaporimeter and carry out further evaporation, improve recycle's effect; the triple-effect evaporator 5 and the drying device 10 are connected with the inlet end of the membrane adsorption system, and the outlet end of the membrane adsorption system is communicated with the second reaction kettle 4.
The membrane adsorption system comprises a hollow fiber membrane contactor 12, a rectifying tower 13 and a condenser 14 which are connected in sequence, wherein an inlet 1201 of the hollow fiber membrane contactor 12 is communicated with a triple-effect evaporator 8 and a drying device 10, and an outlet 1401 of the condenser 14 is connected with the second reaction kettle 4; the membrane adsorption system adopts concentrated sulfuric acid with the mass fraction of 95-98% as an absorption liquid, the concentrated sulfuric acid has strong dehydration property and good absorption effect on hydrogen fluoride, steam generated by evaporation of the triple-effect evaporator mainly contains hydrogen fluoride gas, the hydrogen fluoride gas is mixed with the hydrogen fluoride gas dried and volatilized by the drying device and then enters the hollow fiber membrane contactor 12 of the membrane adsorption system, the hydrogen fluoride gas penetrates through the hollow fiber membrane in the hollow fiber membrane contactor and is contacted and absorbed by the concentrated sulfuric acid on the other side of the membrane, then the hydrogen fluoride gas enters the rectifying tower for rectification to prepare anhydrous hydrogen fluoride with the mass fraction of 99.9%, and the anhydrous hydrogen fluoride enters the second reaction kettle 4 after being cooled by the condenser 14 to react with filtrate to obtain an ammonium bifluoride solution, so that the hydrogen fluoride generated in the evaporation and drying processes can be recycled, and the production cost and the.
A defoaming device is arranged between the second reaction kettle 4 and the triple-effect evaporator 8; the defoaming device comprises a main tank 5, a micro-nano bubble generator 6 and a collecting tank 7, the main tank 5 is provided with a foam scraper 18, a return pipeline 17 is arranged between the collecting tank 7 and the main tank, and the main tank 5 is communicated with a triple-effect evaporator 8; the defoaming device can remove surfactants such as sodium Dodecyl Benzene Sulfonate (DBS), phenyl dodecyl dimethyl ammonium chloride (BD-DAC), nonylphenol polyoxyethylene ether (NPE-n) and the like contained in BOE waste liquid, avoid causing the loss of ammonium bifluoride, and improve the concentration effect of evaporation: the micro-nano bubble generator inputs bubbles to the bottom of the main tank to enable the surfactant to foam and float on the liquid level of the main tank, the foam scraper scrapes the bubbles on the liquid level into the collecting tank, a flocculating agent is added into the collecting tank to enable supernatant after the surfactant is flocculated to flow back to the main tank through a return pipeline, and liquid with the surfactant removed flows into the three-effect evaporator from the bottom of the main tank; the flocculant is polyaluminium chloride (PAC), polyaluminium sulfate (PAS), polyferric chloride (PFC), polyferric sulfate (PFS) and the like.
The cooling medium of the cooling crystallizer 16 is liquid ammonia or ethylene glycol; the filtering device is a plate-and-frame filter press 3, barium sulfate and barium hexafluorosilicate precipitates generated in the step S1 are removed by filtering through the plate-and-frame filter press, the cost is low, the filtering effect is good, the solid content of mud cakes is high, the cost performance is high, the production cost is further reduced, and the recovery effect is improved; the drying device is an airflow dryer 10 which drives wet materials by utilizing the rapid movement of heat-carrying air so that the wet materials are suspended in hot air, the whole drying process can be enhanced, the heat and mass transfer rate is improved, and the water content of the recovered and prepared ammonium bifluoride product is effectively reduced; in the figure 15 is a pump.
After the structure is adopted in the utility model, BOE waste liquid generated by the semiconductor etching process reacts with barium hydroxide in the first reaction kettle to generate precipitate and impurities in the waste liquid are removed through the filtering device, then the precipitate reacts with introduced hydrogen fluoride in the second reaction kettle, ammonium fluoride in filtrate is converted into ammonium bifluoride, and the ammonium bifluoride with high purity and low water content can be obtained by adopting evaporation, cooling crystallization, centrifugal separation and drying; the whole process is carried out below the boiling point of ammonium bifluoride, the process conditions are mild, the investment cost is low, and the BOE waste liquid is recycled, so that the environmental pollution can be avoided, and the production cost can be effectively reduced; the triple-effect evaporator and the drying device are connected with the second reaction kettle through the membrane adsorption system, and hydrogen fluoride generated in the evaporation and drying processes can be recycled, so that the production cost is further reduced, and the environmental pollution is reduced.
Claims (8)
1. The utility model provides a system for utilize BOE waste liquid preparation ammonium bifluoride which characterized in that: the device comprises a BOE waste liquid storage tank, a first reaction kettle, a filtering device, a second reaction kettle, a triple-effect evaporator, a cooling crystallizer, a continuous centrifuge, a drying device and an ammonium bifluoride storage tank which are connected in sequence, wherein a supernatant outlet of the continuous centrifuge is communicated with an inlet of the triple-effect evaporator, the triple-effect evaporator is connected with an inlet end of a membrane adsorption system, and an outlet end of the membrane adsorption system is communicated with the second reaction kettle.
2. The system for preparing ammonium bifluoride from BOE waste liquid according to claim 1, wherein: the membrane adsorption system comprises a hollow fiber membrane contactor, a rectifying tower and a condenser which are sequentially connected, the inlet of the hollow fiber membrane contactor is communicated with the triple-effect evaporator and the drying device, and the outlet of the condenser is connected with the second reaction kettle.
3. The system for preparing ammonium bifluoride from BOE waste liquid according to claim 1, wherein: the membrane adsorption system adopts concentrated sulfuric acid with the mass fraction of 95-98% as an absorption liquid.
4. The system for preparing ammonium bifluoride from BOE waste liquid according to claim 1, wherein: and a defoaming device is arranged between the second reaction kettle and the triple-effect evaporator.
5. The system for preparing ammonium bifluoride from BOE waste liquid according to claim 4, wherein: the defoaming device comprises a main tank, a micro-nano bubble generator and a collecting tank, the main tank is provided with a foam scraper, a return pipeline is arranged between the collecting tank and the main tank, and the main tank is communicated with the triple-effect evaporator.
6. The system for preparing ammonium bifluoride from BOE waste liquid according to claim 1, wherein: and the cooling medium of the cooling crystallizer is liquid ammonia or ethylene glycol.
7. The system for preparing ammonium bifluoride from BOE waste liquid according to claim 1, wherein: the filtering device is a plate-and-frame filter press.
8. The system for preparing ammonium bifluoride from BOE waste liquid according to claim 1, wherein: the drying device is an airflow dryer.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202022214176.0U CN212655627U (en) | 2020-10-08 | 2020-10-08 | System for utilize BOE waste liquid preparation ammonium bifluoride |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202022214176.0U CN212655627U (en) | 2020-10-08 | 2020-10-08 | System for utilize BOE waste liquid preparation ammonium bifluoride |
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| Publication Number | Publication Date |
|---|---|
| CN212655627U true CN212655627U (en) | 2021-03-05 |
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|---|---|---|---|
| CN202022214176.0U Withdrawn - After Issue CN212655627U (en) | 2020-10-08 | 2020-10-08 | System for utilize BOE waste liquid preparation ammonium bifluoride |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112028371A (en) * | 2020-10-08 | 2020-12-04 | 江苏电科环保有限公司 | System for utilize BOE waste liquid preparation ammonium bifluoride |
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2020
- 2020-10-08 CN CN202022214176.0U patent/CN212655627U/en not_active Withdrawn - After Issue
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112028371A (en) * | 2020-10-08 | 2020-12-04 | 江苏电科环保有限公司 | System for utilize BOE waste liquid preparation ammonium bifluoride |
| CN112028371B (en) * | 2020-10-08 | 2023-10-24 | 江苏电科环保有限公司 | System for utilize BOE waste liquid preparation ammonium bifluoride |
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