CN212621313U

CN212621313U - Vacuum detection device for sealing vacuum equipment

Info

Publication number: CN212621313U
Application number: CN202020792506.1U
Authority: CN
Inventors: 陈国明; 陈澄; 王珍华
Original assignee: Hangzhou Dajing Vacuum Technology Co ltd
Current assignee: Hangzhou Dajing Vacuum Technology Co ltd
Priority date: 2020-05-13
Filing date: 2020-05-13
Publication date: 2021-02-26
Anticipated expiration: 2030-05-13

Abstract

The utility model relates to a simple structure not only uses the flexibility good moreover, uses the good vacuum detection device who is used for vacuum apparatus to seal of suitability simultaneously, including testing platform, helium unit, helium mass spectrometer detector and vacuum pump, the smooth finish of testing platform's up end reaches 8 grades or above, and vacuum apparatus who treats the detection places the up end at testing platform's up end down terminal surface that seals of vacuum apparatus and testing platform's up end realization face-to-face contact. The advantages are that: firstly, the vacuum detection device is simple in structure, good in detection accuracy and high in use flexibility; secondly, the vacuum detection device not only has good applicability, but also has low use cost and convenient maintenance.

Description

Vacuum detection device for sealing vacuum equipment

Technical Field

The utility model relates to a not only simple structure uses the flexibility good moreover, uses the vacuum detection device that a kind that the suitability is good for vacuum apparatus seals simultaneously, belongs to vacuum detection equipment and makes the field.

Background

CN 208795444U, entitled "a large container hydrogen helium mass spectrometer leak detection system" includes a pumping and injecting mechanism with a vacuum pump set on the ground, one side of the pumping and injecting mechanism is integrated with an electric control cabinet with an electric box and a controller, the outside of the pumping and injecting mechanism is provided with a movable water cooler with a cooling fan and a leak detection device, and the pumping and injecting mechanism is provided with a hydrogen supply unit, a helium cover gas supply unit, a vacuum pumping unit and a helium spraying gas supply unit; the leak detection device is internally provided with a hydrogen mass spectrometer leak detector and a helium mass spectrometer leak detector, wherein the leak detection end of the hydrogen mass spectrometer leak detector is connected with a suction gun through a fourth electromagnetic valve and a first check valve which are connected in series in sequence through a pipeline, and the leak detection end of the helium mass spectrometer leak detector is connected with the suction gun through a fifth electromagnetic valve and a second check valve which are connected in series in sequence through a pipeline. The pumping and injecting mechanism comprises a base with a foot cup at the bottom, a support for placing a vacuum pump set and an electric control cabinet are arranged on the base, a three-dimensional support for wrapping the vacuum pump set is fixedly arranged above the base, an opening and closing door A capable of being opened and closed is arranged on the side face of the three-dimensional support, a sealing cover plate is arranged on the upper end face of the three-dimensional support, and a cooling fan is arranged on the sealing cover plate. The hydrogen supply unit comprises a positive pressure hydrogen detection interface arranged on the base and a hydrogen cylinder fixed on the three-dimensional support, a first pipeline is arranged between the positive pressure hydrogen detection interface and the hydrogen cylinder, and a first electromagnetic valve, a first pressure regulating valve and a first pressure sensor which are connected with the controller are arranged on the first pipeline. The helium cover gas supply unit comprises a helium cover interface arranged on the base and a helium bottle fixed on the three-dimensional support, a second pipeline is arranged between the helium cover interface and the helium bottle, and a second electromagnetic valve, a second pressure regulating valve and a second pressure sensor which are connected with the controller are arranged on the second pipeline. The helium spraying and supplying unit comprises a helium spraying interface arranged on the base and a helium bottle fixed on the three-dimensional support, a third pipeline is arranged between the helium spraying interface and the helium bottle, and a third electromagnetic valve, a third pressure regulating valve and a third pressure sensor which are connected with the controller are arranged on the third pipeline. The vacuum pumping unit comprises a main container pumping port arranged on the base, the main container pumping port is connected with one end of a main vacuum pipe, a vacuum valve group is arranged on the main vacuum pipe, and an outlet of the vacuum valve group is connected with a vacuum pump group. The vacuum pump set comprises a rotary vane pump, a roots pump and an oil rotary vane pump, the support is an upper support and a lower support, the rotary vane pump and the roots pump are arranged on the upper support side by side, the oil rotary vane pump is arranged on the lower support, and an oil mist filter connected with the oil rotary vane pump is arranged on the sealing cover plate. The vacuum valve group comprises a first vacuum valve, a second vacuum valve and a third vacuum valve; the first vacuum valve is arranged at the other end of the main vacuum pipe, and the outlet of the first vacuum valve is connected with the rotary vane pump through a vacuum pipe; a first branch pipeline is arranged on the main vacuum pipe, a second vacuum valve is arranged at the other end of the first branch pipeline, an outlet of the second vacuum valve is connected with the roots pump through a vacuum pipe, and the roots pump is connected with an oil rotary vane pump below the roots pump through a vacuum pipe; and a second branch pipeline is also arranged on the main vacuum pipe, and a third vacuum valve with a silencer is arranged on the second branch pipeline. The disadvantages are that: firstly, the large container hydrogen helium mass spectrum leak detection system is not only complex in structure, but also high in production cost, and poor in use flexibility; secondly, the detection platform in the large-scale container hydrogen helium mass spectrometer leak detection system is integrated with the system, the detection platform cannot be adjusted in position (relative to other components in the system), and the use applicability is relatively poor.

SUMMERY OF THE UTILITY MODEL

The design purpose is as follows: in order to avoid the defects in the background art, the vacuum detection device for sealing the vacuum equipment is designed, which has the advantages of simple structure, good use flexibility and good use applicability.

The design scheme is as follows: the design purpose is realized.

1. The smooth finish of testing platform's up end reaches 8 grades or above, and the vacuum apparatus who treats the detection places the design that the face-to-face contact was realized to the lower terminal surface that seals of vacuum apparatus and testing platform's up end when testing platform's up end, is one of the technical characteristics of the utility model. The purpose of this design is: firstly, when the vacuum device to be detected is placed on the upper end surface of the detection platform for detecting the sealing performance, because the finish degree of the upper end surface of the detection platform reaches 8 grades or above, if the sealing performance of the seal of the vacuum device to be detected meets the design requirement, the surface-surface combination between the vacuum device to be detected and the seal meets the design requirement, helium cannot pass through the seal, and therefore the detection accuracy of the device is ensured; and the detection platform is independently arranged, and the upper end face of the detection platform is open, so that the detection platform can perform vacuum detection on the seals of vacuum equipment with different sizes, and the applicability of the detection device is improved.

2. The design that testing platform's platen was made by corrosion resistant plate is the second technical characteristics of the utility model. The purpose of this design is: the bedplate of the detection platform is made of a stainless steel plate, and the stainless steel plate is not easy to generate rusty spots, so that the service life of the detection platform is greatly prolonged.

3. The design that lower terminal surface four corners of testing platform was equipped with an universal wheel respectively is the utility model discloses a three technical characteristic. The purpose of this design is: the four corners of the lower end face of the detection platform are respectively provided with a universal wheel, and the universal wheels are arranged to facilitate the detection platform to adjust the position as required, so that the use effect of the vacuum detection device is improved.

4. The gas outlet department of the helium tank in the helium gas unit installs extension pipe and the gas outlet department of extension pipe installs the air cock, the design that the gas outlet department of helium tank was equipped with the valve is the utility model discloses a four technical characteristics. The purpose of this design is: through the combination setting of extension pipe and air cock, the user can be quick sprays helium to the junction of sealing with the platen and carries out the leakproofness and detect, not only can improve the efficiency that detects like this, can reduce the use of helium moreover.

5. The upper end of locomotive is equipped with helium tank mounting bracket, be equipped with the design of rubber pad on the internal face of helium tank mounting bracket, be the technical characteristic of the utility model fifth. The purpose of this design is: firstly, the helium tank is arranged on the trolley through the helium tank mounting frame, so that the helium unit can adjust the use position according to the use requirement, and the use effect of the vacuum detection device is greatly improved; secondly, the rubber pad can play limiting displacement to the helium tank, avoids helium tank and helium tank mounting bracket to take place to collide with.

The technical scheme is as follows: the utility model provides a vacuum detection device for vacuum apparatus seals, includes testing platform, helium unit, helium mass spectrometer and vacuum pump, the smooth finish of testing platform's up end reaches 8 grades or above, and vacuum apparatus that awaits measuring places the up end at testing platform's up end, and the lower terminal surface of vacuum apparatus's seal realizes the face-to-face contact with testing platform's up end.

Compared with the background technology, the utility model has the advantages that firstly, the vacuum detection device not only has simple structure, but also has good detection accuracy and high use flexibility; secondly, the vacuum detection device not only has good applicability, but also has low use cost and convenient maintenance.

Drawings

Fig. 1 is a schematic structural diagram of a vacuum detection device for sealing a vacuum apparatus.

FIG. 2 is a schematic diagram of the helium unit (with the addition of a dolly and extension tube).

Detailed Description

Example 1: reference is made to figures 1 and 2. The utility model provides a vacuum detection device for vacuum apparatus seals, includes testing platform 1, helium unit 2, helium mass spectrometer 3 and vacuum pump 4, the smooth finish of testing platform 1's up end reaches 8 grades or above, and the vacuum apparatus that awaits measuring places the up end at testing platform 1 the lower terminal surface of vacuum apparatus's seal and the up end realization face-to-face contact of testing platform 1. The exhaust outlet of the vacuum pump 4 is communicated with the air inlet in the helium mass spectrometer 3 through a pipeline, the exhaust inlet of the vacuum pump 4 is communicated with one inlet in the vacuum equipment through a pipeline, one end of the pipeline is communicated with one inlet in the vacuum equipment through a sealing connecting piece, and the end of the pipeline is in sealing connection with one inlet end in the vacuum equipment through a sealing connecting piece.

The bedplate 11 of the detection platform 1 is made of a stainless steel plate. Four corners of the lower end face of the detection platform 1 are respectively provided with a universal wheel 12. The universal wheel 12 is provided with a brake device, and the universal wheel 12 provided with the brake device is the prior art, which is not described herein any more, and is convenient for fixing the position of the detection platform 1 after displacement.

An extension pipe 32 is installed at an air outlet of a helium tank 31 in the helium unit 3, an air tap 33 is installed at an air outlet of the extension pipe 32, the extension pipe 32 is a hose, and a valve 34 is arranged at an air outlet of the helium tank 31. The portable helium tank is characterized by further comprising a moving vehicle 5, a helium tank mounting rack 51 is arranged at the upper end of the moving vehicle 5, and a rubber pad 52 is arranged on the inner wall surface of the helium tank mounting rack 51, so that a miniature movable helium supply station is formed.

When in use, a vacuum device to be detected is placed on the upper end surface of the detection platform 1; communicating an air suction port of a vacuum pump 4 with an inlet in a vacuum device through a pipeline, and sealing redundant air suction ports; then the vacuum pump 4 pumps out air in the vacuum device to be detected, and the helium unit 2 fills helium into the external space of the vacuum device to be detected; the helium is flushed into the external environment air, so that the concentration of the helium in the external environment air is increased, if the tightness of the vacuum device to be detected does not reach the standard, the helium can enter the vacuum device to be detected through the gap, and the entered helium enters the helium mass spectrometer 3 under the pumping action of the vacuum pump 4 and is detected by the helium mass spectrometer 3.

It is to be understood that: although above-mentioned embodiment is right the utility model discloses a design has done more detailed word description, but these word descriptions, are only right the utility model relates to a simple word description of idea, rather than right the utility model relates to a restriction of idea, any do not surpass the utility model relates to a combination, increase or the modification of idea all fall into the utility model discloses a within the protection scope.

Claims

1. The utility model provides a vacuum detection device for vacuum apparatus seals, includes detection platform (1), helium unit (2), helium mass spectrum detector (3) and vacuum pump (4), characterized by: the smooth finish of the upper end face of the detection platform (1) reaches 8 grades or above, and when the vacuum equipment to be detected is placed on the upper end face of the detection platform (1), the lower end face of a seal of the vacuum equipment is in surface-to-surface contact with the upper end face of the detection platform (1).

2. The vacuum testing apparatus for vacuum equipment sealing of claim 1, wherein: and a pumping outlet of the vacuum pump (4) is communicated with an air inlet in the helium mass spectrometer (3) through a pipeline, a pumping inlet of the vacuum pump (4) is communicated with one inlet in vacuum equipment through a pipeline, and other inlets in the vacuum equipment are sealed in a sealing manner.

3. The vacuum testing apparatus for vacuum equipment sealing of claim 1, wherein: the bedplate (11) of the detection platform (1) is made of a stainless steel plate.

4. The vacuum testing apparatus for vacuum equipment sealing of claim 1, wherein: four corners of the lower end face of the detection platform (1) are respectively provided with a universal wheel (12).

5. The vacuum testing apparatus for vacuum equipment sealing of claim 1, wherein: extension pipe (32) and air cock (33) are installed to the gas outlet department of helium tank (31) in helium unit (2), gas outlet department of helium tank (31) is equipped with valve (34).

6. The vacuum testing apparatus for vacuum equipment sealing of claim 1, wherein: still include locomotive (5), the upper end of locomotive (5) is equipped with helium tank mounting bracket (51), be equipped with rubber pad (52) on the internal wall face of helium tank mounting bracket (51).