SUMMERY OF THE UTILITY MODEL
The utility model aims at providing a burning rifle can realize safer silane coating film.
In order to achieve the purpose, the utility model provides a combustion gun, which comprises a gun body with a cavity and a spray head communicated with the gun body; a plurality of channels are arranged in the gun body, and the spray head is provided with a plurality of nozzles which are respectively communicated with the channels in a one-to-one correspondence manner; the plurality of nozzles are sequentially sleeved from inside to outside, and the lengths of the plurality of nozzles increase from inside to outside.
In the combustion gun, the innermost nozzle comprises a plurality of thin through pipes which are connected with the corresponding channels and pass through.
In the combustion gun, the thin through pipes are circumferentially arranged.
In the combustion gun, a plurality of cylindrical partition plates which are sequentially sleeved are arranged in the cavity along the axis of the gun body, and the channels are formed between the adjacent partition plates.
In the combustion gun, the gun body is also provided with a plurality of air inlet pipes which are communicated with the channels in a one-to-one correspondence manner.
The combustion gun further comprises a plurality of connecting pipes for communicating the channels with the corresponding nozzles.
In the combustion gun, the plurality of nozzles are concentrically sleeved.
In the combustion gun, the number of the passages is three.
Compared with the prior art, the combustion gun provided by the technical scheme has the beneficial effects that: the outer side nozzle is longer than the inner side nozzle, so that the inner side nozzle is coated by the outer side nozzle; under the cladding of outside nozzle, combustion gas burns under inert gas protective atmosphere and generates silica and attach to quartz boat surface to can effectual isolated outside air when obtaining the protection film and burn, with burning control in the nozzle scope, realize safer burning coating.
Detailed Description
The following detailed description of the embodiments of the present invention is provided with reference to the accompanying drawings and examples. The following examples are intended to illustrate the invention, but are not intended to limit the scope of the invention.
Referring to fig. 1-3, the present invention provides a combustion gun, which includes a gun body 1 having a cavity and a nozzle 2 connected to the gun body 1; a plurality of channels 11 are arranged in the gun body 1, and a plurality of nozzles 21 which are respectively communicated with the channels 11 in a one-to-one correspondence manner are arranged on the spray head 2; the nozzles 21 are sequentially sleeved from inside to outside, and the lengths of the nozzles 21 increase from inside to outside.
Based on the technical characteristics, combustion gas is conveyed to the spray head 2 through the gun body 1 to realize combustion, different combustion gases are conveyed through the plurality of channels 11, the different combustion gases are sprayed out through different nozzles 21 to realize mixed combustion at the spray head 2, the spray head 2 is close to the inner surface of the quartz boat, and silicon dioxide generated by silane combustion is attached to the surface of the quartz to form a protective film; because the plurality of nozzles 21 are sleeved from inside to outside and the lengths of the nozzles are increased from inside to outside, the length of the nozzle 21 positioned on the outer side is larger than that of the nozzle 21 positioned on the inner side, and the outer nozzle 21 coats the nozzle 21 on the inner side; through carrying argon gas, oxygen and silane to nozzle 21 from outside to inside, under the cladding of outside nozzle 21, silane and oxygen are burnt under the protective atmosphere of argon gas and are generated silica and adhere to quartz boat surface to can effectual isolated outside air when obtaining the protection film and burning control in the nozzle 21 scope, realize safer burning coating.
The innermost nozzle 21 comprises a plurality of thin through pipes 22 which are connected with the corresponding channels 11 to pass through, and the innermost nozzle 21 is decomposed into the plurality of thin through pipes 22, so that the combustion contact area of the innermost nozzle 21 is increased through the plurality of thin through pipes 22 when gas combustion is carried out, the combustion efficiency is improved, and the film coating effect is further improved.
The plurality of thin through pipes 22 are arranged in a circumferential manner, so that the arrangement of the thin through pipes 22 is more uniform, and the combustion effect is optimized.
A plurality of cylindrical partition plates 12 which are sequentially sleeved are arranged in the cavity along the axis of the gun body 1, a channel 11 is formed between every two adjacent partition plates 12, and gas is conveyed through the channel 11 between the partition plates 12.
The rifle body 1 still is provided with a plurality of intake pipes 3 with passageway 11 one-to-one intercommunication, and the gaseous transport of will difference is arrived in the passageway 11 that corresponds and then extremely through intake pipe 3 realization.
The burning gun also comprises a plurality of connecting pipes 4 used for communicating the channels 11 with the corresponding nozzles 21, and the connection between the spray head 2 and the gun body 1 is realized through the connecting pipes 4 for realizing the gas delivery.
The plurality of nozzles 21 are concentrically sleeved, so that the stability of mixed combustion among the gases is improved.
In this embodiment, the number of the passages 11 is three, wherein the nozzles 21 from the inside to the outside realize the supply combustion of silane, argon and oxygen, and the nozzles 21 at the outermost layer and the nozzles 21 at the intermediate layer are of a concentric ring structure.
In summary, the nozzles in the concentric circle structure are arranged, and the length of the outer nozzle is longer than that of the inner nozzle, so that the gas of the outer nozzle wraps the gas of the inner nozzle during gas delivery, the outer nozzle can effectively isolate the outer air for the inner nozzle, the combustion is controlled within the range of the nozzles, and the safety is ensured; and because the innermost nozzle 21 is composed of a plurality of thin-tube pipes 22, the combustion contact area can be increased, and the film coating effect is improved.
In the description of the present invention, it should be noted that the terms "center", "longitudinal", "lateral", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", and the like indicate the orientation or positional relationship based on the orientation or positional relationship shown in the drawings, and are only for convenience of description and simplification of the description, but do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and thus, should not be construed as limiting the present invention. Furthermore, the terms "first," "second," and "third" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance.
In the description of the present invention, it is to be noted that, unless otherwise explicitly specified or limited, the terms "mounted," "connected," and "connected" are to be construed broadly, and may be, for example, fixedly connected, detachably connected, or integrally connected; can be mechanically or electrically connected; they may be connected directly or indirectly through intervening media, or they may be interconnected between two elements. The specific meaning of the above terms in the present invention can be understood in specific cases to those skilled in the art.
In addition, in the description of the present invention, "a plurality" means two or more unless otherwise specified.
The above is only a preferred embodiment of the present invention, and it should be noted that, for those skilled in the art, a plurality of modifications and substitutions can be made without departing from the technical principle of the present invention, and these modifications and substitutions should also be regarded as the protection scope of the present invention.