CN212587450U - Magnetic lens component for charged particle beam device, lens and charged particle beam device - Google Patents

Abstract

A magnetic lens component, a lens and a charged particle beam device for a charged particle beam device are described. The magnetic lens component includes: a coil carrier having a truncated conical body; a wire configured to provide a coil around the coil carrier; and a winding element at least partially surrounding the frustoconical body, the winding element having a slit opening.

Description

Magnetic lens component for charged particle beam device, lens and charged particle beam device

Technical Field

Embodiments of the present disclosure relate to a coil, in particular a truncated conical coil. The coil may be for a magnetic lens or an electromagnetic lens, such as an electromagnetic compound lens. Embodiments also relate to a charged particle beam device, and in particular a scanning electron microscope, having such a coil or such a lens.

Background

The charged particle beam device has many functions in various industrial fields including, but not limited to, critical dimension setting of a semiconductor device during manufacturing, defect inspection of a semiconductor device during manufacturing, an exposure system for lithography, an inspection apparatus, and a test system. Therefore, there is a high demand for structuring, testing and inspection of samples or specimens in the micro-scale and nano-scale.

Micro-scale and nano-scale process control, inspection, or structuring is typically accomplished with a charged particle beam (e.g., an electron beam) that is generated and focused in a charged particle beam device, such as an electron microscope or electron beam pattern generator. Charged particle beams provide superior spatial resolution due to the short wavelength compared to, for example, photon beams.

A charged particle beam device, in particular a scanning charged particle beam device, comprises an objective lens for focusing a primary charged particle beam emitted by an emitter onto a sample. For a scanning charged particle beam device, the spot size of the primary charged particle beam on the sample affects the resolution of the scanning charged particle beam device. Therefore, a small spot size is advantageous. The objective lens may comprise a magnetic lens component, and in particular a truncated conical magnetic lens component. The magnetic lens component comprises a coil, i.e. a winding. The coil or winding is configured for generating a magnetic field of the magnetic lens component.

The coils of the magnetic lens component are energized with an electric current for operation of the objective lens. The heat generated by the current is advantageously removed by cooling. The improved cooling efficiency may improve the operation of the objective lens.

To wind the coil, the wire is wound around the body. This can be challenging for a truncated conical lens shape. In order to wind the coil on the conical body or carrier, particularly for achieving a larger cone angle on the outside of the winding space than on the inside of the winding, it is very likely that the outer coil winding will start to slip off onto the cone tip during winding. In order to prevent the outer layer of the coil from slipping out of the winding space, i.e., the truncated cone-shaped winding space, the position of the wire may be fixed in the winding space using an adhesive or the like. For example, slippage may be reduced or prevented by gluing the layers during the winding process or using self-adhesive wires that are locally heated during the winding process. The adhesive or bonding material partially blocks the small air gap between the wires. After winding, the thermally conductive potting compound cannot, or only a small part of it, enter the inner part of the coil. Thus, the inner part is not cooled efficiently, which limits the applicable coil current.

An improved coil arrangement, particularly for a truncated conical coil, is advantageous.

SUMMERY OF THE UTILITY MODEL

In view of the above, a magnetic lens component, a lens and a charged particle beam device are provided. Further aspects, advantages and features are apparent from the dependent claims, the description and the drawings.

According to one embodiment, a magnetic lens component for a lens of a charged particle device is provided. The magnetic lens component includes: a coil carrier having a truncated conical body; a wire configured to provide a coil around the coil carrier; and a winding element at least partially surrounding the frustoconical body, the winding element having a slit opening.

According to some embodiments, the winding element may provide a winding space delimiter. Additionally or alternatively, the winding element may be shaped to prevent slippage of windings of the coil, the coil being a truncated conical coil.

According to some embodiments, the magnetic lens component may further comprise an potting compound provided at least partially between the coil carrier and the winding element. For example, the potting compound may be a two-part epoxy and/or the potting compound may have a thermal conductivity of 1W/(m × K) or more.

According to some embodiments, the coil carrier may comprise a first disc-shaped element at a first side of the truncated conical body and a second disc-shaped element at a second side of the truncated conical body. For example, the frustoconical body, the first disc-shaped element, the second disc-shaped element, and the winding element may define a winding space.

According to some embodiments, the coil carrier comprises a first disc-shaped element at a first side of the truncated conical body and a second disc-shaped element at a second side of the truncated conical body, wherein the truncated conical body, the first disc-shaped element, the second disc-shaped element and the winding element define a winding space, and wherein the potting compound fills at least 90% of the winding space. For example, the potting compound may uniformly fill the winding space.

According to some embodiments, the magnetic lens component may have a cone angle of 10 ° or more of the truncated conical body.

According to some embodiments, the winding element may be coupled to the coil carrier. For example, the coupling of the winding elements allows for rotational movement during winding of the coil and for fixation (e.g., fixation after winding of the coil). Additionally or alternatively, the fixing may be provided by welding.

According to some embodiments, the wound element may comprise a partial coating on at least the inner side of the wound element. For example, the topical coating may be a low friction layer. Additionally or alternatively, the low friction layer has a static coefficient of friction μ s of 0.1 or less and/or the material of the topical coating is selected from the group consisting of: fluoropolymers, in particular Polytetrafluoroethylene (PTFE), and tungsten disulphide.

According to some embodiments, the slits of the winding element may have rounded corners. For example, the rounded corners have a radius of 0.5mm or more.

According to some embodiments, the winding element may comprise a conical wall portion and optionally a cylindrical wall portion. The conical wall portion and optionally the cylindrical wall portion may comprise the slit and a plurality of first and/or openings, respectively.

According to one embodiment, a lens for a charged particle beam device is provided. The lens includes: a magnetic lens component according to any one of the embodiments of the present disclosure; and an electrostatic lens component having one or more electrodes.

According to some embodiments, the magnetic lens component may further comprise: a first pole piece; and a second pole piece, wherein a gap is provided between the first pole piece and the second pole piece.

According to one embodiment, a charged particle beam device is provided. The charged particle beam device includes: a beam emitter for emitting a primary charged particle beam; and an objective lens having a magnetic lens component according to any one of the embodiments of the present disclosure.

According to some embodiments, the charged particle beam device further comprises a sample stage for supporting a sample. For example, a proxy electrode may also be provided between the lens and the sample stage.

According to some embodiments, the charged particle beam device further comprises at least one of a scanning deflector, an alignment deflector, a condenser lens, a detector for signal electrons and a beam limiting aperture. According to some embodiments, the objective lens is a lens according to any of the embodiments described herein.

Drawings

So that the manner in which the above recited features can be understood in detail, a more particular description, briefly summarized above, may be had by reference to embodiments. The figures relate to embodiments and are described as follows:

fig. 1 shows a schematic view of a charged particle beam device comprising an electromagnetic lens according to an embodiment of the present disclosure;

FIG. 2 shows a schematic view of an electromagnetic lens comprising a winding device according to an embodiment of the present disclosure;

FIGS. 3A and 3B illustrate an electromagnetic lens with a winding device at different times during winding of a coil for the electromagnetic lens;

FIG. 4 shows an enlarged view of the coil arrangement illustrating slippage of the windings;

FIG. 5 shows a schematic view of an electromagnetic lens including a wrap around device according to an embodiment of the present disclosure; and

fig. 6 shows a schematic view of an electromagnetic lens comprising a rolling device according to an embodiment of the present disclosure.

Detailed Description

Reference will now be made in detail to the various embodiments, one or more examples of which are illustrated in the figures. Within the following description of the drawings, like reference numerals refer to like parts. Generally, only the differences with respect to the respective embodiments are described. Each example is provided by way of explanation, not meant as a limitation. In addition, features illustrated or described as part of one embodiment can be used on or in conjunction with other embodiments to yield yet a further embodiment. The description is intended to include such modifications and alterations.

Without limiting the scope of protection of the present application, in the following, a charged particle beam device or a component thereof will be exemplarily referred to as an electron beam device, comprising detection signal electrons such as secondary electrons and/or backscattered electrons, which are also collectively referred to as signal electrons. The embodiments described herein are still applicable to devices and components that detect particles, such as secondary and/or backscattered charged particles in the form of electrons or ions, photons, X-rays or other signals, in order to obtain a sample image or inspection result.

"sample", "specimen" or "wafer" as referred to herein includes, but is not limited to, semiconductor wafers, semiconductor workpieces, and other workpieces, such as memory disks and the like. Embodiments may be applied to any workpiece that is structured or has material deposited thereon. The sample, specimen or wafer includes a surface to be imaged and/or structured or upon which a layer is deposited, an edge, and typically a bevel. According to some embodiments, which can be combined with other embodiments described herein, the apparatus and method are configured for or applied to critical dimension measurement and defect review applications. Embodiments may also be referred to as Electron Beam Inspection (EBI), wherein a microscope according to embodiments described herein may be advantageously used according to the requirements of high throughput for a given application. The wafer imaging system or wafer SEM inspection tool refers to EBI tools, CD tools, or DR tools, which are specific tools understood by those skilled in the art.

Embodiments of the present disclosure relate to a coil winding device for a lens, particularly a lens having a magnetic lens component, such as an electromagnetic lens. The coil winding device may improve coil winding for a truncated cone shaped winding space or a truncated cone shaped coil. The coil winding device may include a winding element having a slit opening. Embodiments of the present disclosure may improve the winding of a truncated conical coil to prevent winding slippage, particularly in the absence of adhesives or bonding materials.

For charged particle beam devices, such as scanning electron beam microscopes (SEMs), the primary beam travels through the charged particle beam device before striking the sample or specimen to be imaged and/or inspected. When the primary beam impinges on the sample, a different reaction may occur on or in the sample or specimen. For example, signal particles (such as secondary or backscattered electrons) are released from the sample. The primary beam impinging on the sample causes other particles in the sample to dissociate, in particular by the energy provided by the particles of the primary beam. Dissociated particles resolved from the sample by the particles of the primary beam are referred to as secondary particles. The secondary particles leave the sample after they have been detached from the sample and can be detected with a suitable detector. The primary beam may cause further effects of scattering. The particles of the primary beam that reflect off the sample and leave the sample are denoted as backscattered particles. Backscatter particles can be detected under certain conditions. In general, the secondary particles and the backscatter particles may together be referred to as signal particles or signal electrons.

Fig. 1 shows a charged particle beam device 100, such as an SEM imaging apparatus, i.e. a wafer imaging system. An electron beam column, such as column 102, may provide a first chamber, a second chamber, and a third chamber. The first chamber, which may also be referred to as a gun chamber, includes an electron beam source 112 having an emitter and, for example, a suppressor.

According to the embodiments described herein, the emitter is connected to a power supply 114 for providing a voltage to the emitter. For the examples described herein, the potential provided to the emitter is such that the electron beam is accelerated to an energy of 12keV or higher. Therefore, the emitter is typically biased to a potential of-12 keV or more negative voltage. As mentioned above, having the emitter at a negative potential is a typical embodiment, with the advantage that the column and the beam guide tube may be at ground potential or at a medium potential. According to alternative embodiments, which can be combined with other embodiments described herein, the emitter may be grounded or at a potential close to ground and the components in the column may be biased to a positive potential.

An electron beam is generated by an electron beam source 112. In the example of fig. 1, the beam is aligned with a beam-limiting aperture 116 that is sized to shape the beam, i.e., block a portion of the beam. The beam may then pass through one or more of the chambers of the column 102. The primary electron beam is focused on the sample or wafer by the objective lens 200. The sample may be positioned at a sample location on the sample stage 122. Upon impact of the electron beam, secondary or backscattered electrons, for example, are released from the sample 124. The detector 130 may detect the signal electrons to produce an image of the area of the sample scanned by the primary electron beam.

According to some embodiments, which can be combined with other embodiments described herein, a condenser lens 142 is provided. A two-stage deflection system 144 may be provided downstream of the condenser lens. A deflection system, such as a two-stage deflection system 144, can align the primary charged particle beam with the optical axis of the objective lens.

As shown in fig. 1, and described in more detail in fig. 2, an objective lens 200, e.g., an objective lens, has a magnetic lens component with a pole piece and a coil that focuses a charged particle beam on a sample 124. In addition, the electrostatic lens component may be provided by one or more electrodes.

According to embodiments described herein, the magnetic lens component and the electrostatic lens component substantially overlap each other to form a compound lens. In order to achieve a combination of magnetic and electrostatic lens components, according to an embodiment, the two fields substantially overlap each other. Within one meaning of the embodiment, it is understood that the regions formed by the half-width values (HWFM) of each field distribution in the graph overlap by at least 10%, typically at least 50%. Additionally or alternatively, the field distribution of the electrostatic lens component is within the field distribution of the magnetic field component.

Generally, in some applications, it is desirable that the number of electrons impinging on the sample be equal to the amount released or exiting the sample. Charging of the sample can be reduced or avoided. However, in the case where the application requires charging of the sample, positive or negative sample charging can also be achieved by appropriately controlling the voltage in conjunction with a suitable landing energy. Thus, sample charging may be controlled, for example, via charging of the sample stage 122.

Further, a scanning deflector assembly 146 is provided. The scanning deflector assembly 146 may be, for example, a magnetic scanning deflector assembly, as shown in fig. 1. An electrostatic scanning deflector assembly or an electrostatic scanning deflector component as part of a scanning deflector assembly may be provided, configured for high pixel rates. For example, magnetic scanning and electrostatic scanning may be combined. According to an exemplary embodiment, which can be combined with other embodiments described herein, the scanning deflector assembly 146 can be a single stage assembly as shown in fig. 1. Alternatively, two or even three stages of deflector assemblies may also be provided. Each stage may be located at a different position along the optical axis of the charged particle beam device.

According to some embodiments, a proxy electrode 148 may be provided. For example, a proxy electrode 148 may be provided between the objective lens 200 and the sample stage 122.

The charged particle beam device as shown in fig. 1 may comprise a detector 130. The detection element or detector 130 may comprise, for example, a scintillator, a pin diode, or other electronically sensitive device.

In the following description, a lens according to an embodiment of the present disclosure is described as an objective lens. However, other lenses having truncated conical windings may also be provided according to embodiments described herein and may benefit from a winding arrangement according to embodiments described herein. The objective lens shown in fig. 2 comprises an outer pole piece 232 and an inner pole piece 234. A gap 235 is provided between the outer and inner pole pieces. According to some embodiments, which can be combined with other embodiments described herein, the magnetic lens component can comprise a first pole piece and a second pole piece, wherein a gap is provided between the first pole piece and the second pole piece.

The coils are provided by providing windings of the coils through wires 215. The coil is provided on the coil carrier 210. Further, a winding space of the coil is defined by the winding element 220. According to some embodiments, which can be combined with other embodiments described herein, the winding space is formed by the coil carrier 210 and the winding element 220.

According to a further alternative modification of the lens (e.g. objective lens), the lens may comprise an electrostatic lens component, which may be formed by the electrode 262, for example. The electrode 262 may provide a retardation field for focusing the primary electron beam. According to some embodiments, a further electrode 264 may be provided. The other electrode 264 may provide a potential difference relative to the electrode 262. A retardation field may be formed between the further electrode 264 and the electrode 262. According to some embodiments, which can be combined with other embodiments described herein, the lens can comprise an electrostatic lens component having one or more electrodes.

According to an embodiment of the present disclosure, a lens for a charged particle beam device is provided, having a magnetic lens component. The magnetic lens member or lens, respectively, includes a coil carrier 210 having a truncated conical body 212. A wire 215 providing a coil is arranged around the coil carrier. The winding element at least partially surrounds the frustoconical body. As explained in more detail with reference to fig. 3A and 3B, the winding element has a slit opening.

The winding element, in particular the combination of the winding element and the coil carrier, provides a winding space delimiter. The winding element is shaped to prevent slippage of the windings of the coil. Slippage may occur, particularly when the coil is manufactured as a truncated conical coil. The coil carrier includes a truncated conical body 212 and a first disk-shaped element 214. Furthermore, a second disc-shaped element 216 may be provided at one side of the truncated cone-shaped body. The second disc-shaped element may be provided on a side opposite to the side of the first disc-shaped element. The frustoconical body, the first disc-shaped element, the second disc-shaped element and the winding element define a winding space. The disc-shaped element is shown in the figure as part of the coil carrier. According to a further or alternative modification, one or both of the disc-shaped elements are part of one or both of the disc-shaped elements, which may be provided as part of the winding element.

Fig. 3A and 3B show a part of the lens or coil, respectively, during the coil winding phase. The wire 215 enters the winding space through the slit 320. Wire feed is provided through slot 320. The coil carrier may be rotated to form a winding on the coil carrier. As shown in fig. 4, the winding layer provided by the wire 215 is provided on the coil carrier 210. At the initial stage of coil winding, the wire position may be limited by the first disc-shaped element 214. The rows of conductors are provided on top of each other. For more and more coil windings, for example, as the coil diameter increases, the disk-shaped elements may not be sufficient to support the wire at the desired wire location. As shown by arrow 402 in fig. 4, without winding element 220, wire slippage may occur so that wire from a subsequent winding may be disposed between wires from a previous winding (see arrow 404).

A winding element 220, which may also be denoted as a winding device or a winding limiter, is provided during the manufacturing process to delimit the winding space. After the coil is manufactured, i.e. after the windings of the coil are wound, the winding element is provided as a part of the magnetic lens component or the coil assembly of the magnetic lens component. According to some embodiments, the winding element may comprise a material having a high thermal conductivity to additionally serve as a cooling element. The wound element may dissipate heat generated in the coil during operation.

According to embodiments of the present disclosure, including the winding element for delimiting the winding space, adhesives or adhesive materials for self-adhering the wires may be avoided. Thus, an adhesive or bonding material in the winding space can be avoided. Embodiments of the present disclosure may include a potting compound provided at least partially between the coil carrier and the winding element. The potting compound may have a thermal conductivity of 1W/(m × K) or more. Thus, improved heat dissipation may be provided compared to coils utilizing adhesives or bonding materials having a smaller thermal conductivity. According to some embodiments, which may be combined with other embodiments described herein, the potting compound may be a two-part epoxy.

Since there is no adhesive or bonding material for fixing the wire position of the truncated conical coil, the coil device may include a first disk-shaped element at the first side of the truncated conical body and a second disk-shaped element at the second side of the truncated conical body, wherein the truncated conical body, the first disk-shaped element, the second disk-shaped element and the winding element define a winding space. The potting compound may fill at least 90% of the winding space not filled by the wire. Additionally or alternatively, the potting compound uniformly fills the winding space not filled by the wire.

In accordance with embodiments of the present disclosure, potting compounds may be used to improve the thermal conductivity of the coil assembly, particularly in view of the improved thermal conductivity of the potting material compared to the adhesive or bonding material. Furthermore, since no glue or bonding material is present, in particular at the outer windings of the coil, it is advantageous to position the potting compound in the coil and/or at the inner space between the coil windings. The adhesive or bonding material at the outer windings of the coil may prevent positioning of the potting compound towards other layers of the coil windings.

Thus, an improved heat dissipation of the coil may be provided. Embodiments of the present disclosure are particularly advantageous for coils having a coil carrier with a truncated conical body having a taper angle of 10 ° to 15 ° or more. The angle is defined as the half angle of the cone, i.e. the angle between the side of the body and the axis of the body or the optical axis of the lens.

Embodiments of the present disclosure may enable, for example, a potting compound having high thermal conductivity to fill all or most of the air gap of the coil. In view of the improved heat dissipation, the coil can be used at a higher current or at a lower temperature with a normal current, due to the improved cooling. This reduces thermal drift, for example, when changing coil excitation.

As shown in fig. 5, according to some embodiments, the winding element 220 may be coupled to the coil carrier 210. The winding element may also be referred to as a winding limiter, because the winding element limits the space for the winding, i.e. the winding space. The winding element prevents the wire from slipping out of the desired winding space. During manufacture, the coil carrier is rotated on a winding machine and the wire is fed through the slit 320 of the winding element. This is shown in fig. 3A and 3B.

The winding device or the winding limiter may be stationary or may be substantially stationary. Substantially fixed refers to adjustment of the slit position, e.g. rotation. To increase the coil thickness, the position of the slit 320 may be adapted to the wire position. According to some embodiments, which can be combined with other embodiments described herein, the slit of the winding element can comprise rounded corners. For example, the rounded corners may have a radius of 0.5mm or greater. Thus, wire feeding through the slit can be facilitated.

According to still further embodiments, which can be combined with other embodiments described herein, the coupling of the winding elements allows rotational movement of the coil carrier during manufacturing. Furthermore, the coupling of the winding elements allows the fixing to be carried out after the manufacture of the coil. The fixation may be provided, for example, by welding the winding element to the coil carrier. Soldering may be beneficial because good thermal conductivity may be provided between the coil carrier and the wound element to further improve overall heat dissipation from the coil.

Advantageously, wear of the wire insulation is prevented or reduced. Accordingly, some embodiments may include at least a partial coating of the wound element. The partial coating may be provided on the interior of the wound element. For example, a coating with a low friction material may be provided. The coating may be a thin layer. The partial coating with the low friction layer may be provided with a material having a static friction coefficient μ s of 0.1 or less. According to some embodiments, which can be combined with other embodiments described herein, the material of the partial coating is selected from the group consisting of: fluoropolymers, in particular Polytetrafluoroethylene (PTFE), and tungsten disulphide (WS 2).

Fig. 5 shows a winding element 220 having a conical wall portion 524 and a cylindrical wall portion 522. According to some embodiments, which can be combined with other embodiments described herein, the cone angle of the conical wall portion 524 can be larger than the cone angle of the coil carrier. The coiled element may include an opening 520. Opening 520 may serve as a potting compound inlet and/or as a suction opening for achieving improved injection of potting compound during the potting process. According to further embodiments, which can be combined with other embodiments described herein, further openings (not shown) may be provided in the coil carrier 210.

Embodiments of the present disclosure also relate to a charged particle beam device as shown in fig. 1. The charged particle beam device may comprise a beam emitter for emitting a primary charged particle beam. Furthermore, the charged particle beam device may comprise an objective lens, which is a lens according to any of the embodiments described herein. According to yet another optional variant of the charged particle beam device, one or more of the following components may be provided. The charged particle beam device may comprise a sample stage for supporting the sample. The charged particle beam device may comprise a proxy electrode between the lens and the sample stage. In addition, at least one of a scanning deflector, an alignment deflector, a condenser lens, a detector for signal electrons, and a beam limiting aperture may be provided.

In view of the above, various embodiments are provided. For example, the embodiments include the embodiments mentioned below.

Embodiment 1: a magnetic lens component for a lens of a charged particle device, characterized by: a coil carrier having a truncated conical body; a wire configured to provide a coil around the coil carrier; and a winding element at least partially surrounding the frustoconical body, the winding element having a slit opening.

Embodiment 2: the magnetic lens component of embodiment 1, wherein the wrap-around element provides a wrap-around spatial delimiter.

Embodiment 3: the magnetic lens component of any of embodiments 1-2, wherein the winding element is shaped to prevent slippage of windings of the coil, the coil being a truncated conical coil.

Embodiment 4: the magnetic lens component according to any one of embodiments 1 to 3, may further include: an infusion compound provided at least partially between the coil carrier and the wound element.

Embodiment 5: the magnetic lens component of embodiment 4, wherein the potting compound is a two-part epoxy.

Embodiment 6: the magnetic lens component according to any one of embodiments 4 to 5, wherein the potting compound has a thermal conductivity of 1W/(m × K) or more.

Embodiment 7: the magnetic lens component of any of embodiments 1-6, wherein the coil carrier comprises a first disk-shaped element at a first side of the frustum-shaped body and a second disk-shaped element at a second side of the frustum-shaped body.

Embodiment 8: the magnetic lens component of embodiment 7, wherein the frustoconical body, the first disc-shaped element, the second disc-shaped element, and the winding element define a winding space.

Embodiment 9: the magnetic lens component of embodiment 4, wherein the coil carrier comprises a first disc-shaped element at a first side of the frustum-shaped body and a second disc-shaped element at a second side of the frustum-shaped body, wherein the frustum-shaped body, the first disc-shaped element, the second disc-shaped element, and the winding element define a winding space, and wherein the potting compound fills at least 90% of the winding space.

Embodiment 10: the magnetic lens component of embodiment 9, wherein the potting compound uniformly fills the winding space.

Embodiment 11: a magnetic lens component according to any one of embodiments 1 to 10, wherein the cone angle of the truncated conical body is 10 ° or more.

Embodiment 12: the magnetic lens component of any of embodiments 1-11, wherein the winding element is coupled to the coil carrier.

Embodiment 13: the magnetic lens component of embodiment 12, wherein the coupling of the winding element allows rotational movement during coil winding and allows fixation, e.g., fixation after the coil winding.

Embodiment 14: the magnetic lens component of embodiment 13, wherein said fixation is provided by welding.

Embodiment 15: the magnetic lens component according to any one of embodiments 1 to 14, wherein the coiled element comprises a partial coating on at least an interior of the coiled element.

Embodiment 16: a magnetic lens component according to embodiment 15, wherein said partial coating is a low friction layer.

Embodiment 17: a magnetic lens component according to embodiment 16, wherein said low-friction layer has a static coefficient of friction, μ s, of 0.1 or less.

Embodiment 18: a magnetic lens component according to any one of embodiments 15 to 17, wherein the material of the partial coating is selected from the group consisting of: fluoropolymers, in particular Polytetrafluoroethylene (PTFE), and tungsten disulphide.

Embodiment 19: the magnetic lens component according to any one of embodiments 1 to 18, wherein the slits of the rolling element have rounded corners.

Embodiment 20: a magnetic lens component according to embodiment 19, wherein said rounded corners have a radius of 0.5mm or greater.

Embodiment 21: the magnetic lens component according to any one of embodiments 1 to 20, wherein the wrap element comprises a tapered wall portion.

Embodiment 22: the magnetic lens component of embodiment 21, wherein said tapered wall portion comprises said slits and a plurality of first openings.

Embodiment 23: the magnetic lens component of embodiment 21, wherein said wrap around element further comprises a cylindrical wall portion.

Embodiment 24: the magnetic lens component of embodiment 23, wherein said cylindrical wall portion comprises said slit and a plurality of second openings.

Embodiment 25: a lens for a charged particle beam device, comprising: the magnetic lens component according to any one of embodiments 1 to 24, and an electrostatic lens component having one or more electrodes.

Embodiment 26: the lens of any of embodiments 1-25, wherein the magnetic lens component further comprises: a first pole piece; and a second pole piece, wherein a gap is provided between the first pole piece and the second pole piece.

Embodiment 27: a charged particle beam device, comprising: a beam emitter for emitting a primary charged particle beam; and an objective lens having the magnetic lens component according to any one of embodiments 1 to 4.

Embodiment 28: the charged particle beam device of embodiment 27, further comprising: a sample stage for supporting a sample.

Embodiment 29: the charged particle beam device of embodiment 28, further comprising: a proxy electrode between the lens and the sample stage.

Embodiment 30: the charged particle beam device according to any one of embodiments 27 to 29, further comprising at least one of a scanning deflector, an alignment deflector, a condenser lens, a detector for signal electrons, and a beam limiting aperture.

Embodiment 31: the charged particle beam device, wherein the objective lens is a lens according to any one of embodiments 25 to 26.

While the foregoing is directed to embodiments, other and further embodiments of the disclosure may be devised without departing from the basic scope thereof, and the scope thereof is determined by the claims that follow.

Claims (35)

1. A magnetic lens component for a charged particle beam device, characterized by:

a coil carrier having a truncated conical body;

a wire configured to provide a coil around the coil carrier; and

a winding element at least partially surrounding the frustoconical body, the winding element having a slit opening.

2. The magnetic lens component of claim 1, wherein the wrap-around element provides a wrap-around spatial delimiter.

3. The magnetic lens component of claim 1, wherein the winding element is shaped to prevent slippage of windings of the coil, the coil being a truncated conical coil.

4. The magnetic lens component of claim 2, wherein the winding element is shaped to prevent slippage of windings of the coil, the coil being a truncated conical coil.

5. The magnetic lens component of any of claims 1 to 4, further comprising:

an infusion compound provided at least partially between the coil carrier and the wound element.

6. The magnetic lens component of claim 5, wherein the potting compound is a two-part epoxy.

7. The magnetic lens component of claim 5, wherein the potting compound has a thermal conductivity of 1W/(m K) or greater.

8. The magnetic lens component of claim 6, wherein the potting compound has a thermal conductivity of 1W/(m K) or greater.

9. The magnetic lens component of any of claims 1 to 4, wherein the coil carrier comprises a first disk-shaped element at a first side of the frustum-shaped body and a second disk-shaped element at a second side of the frustum-shaped body.

10. The magnetic lens component of claim 5, wherein the coil carrier comprises a first disk-shaped element at a first side of the frustum-shaped body and a second disk-shaped element at a second side of the frustum-shaped body.

11. The magnetic lens component of claim 9, wherein the truncated conical body, the first disc-shaped element, the second disc-shaped element, and the wrap-around element define a wrap-around space.

12. The magnetic lens component of claim 5, wherein the coil carrier comprises a first disk-shaped element at a first side of the truncated conical body and a second disk-shaped element at a second side of the truncated conical body, wherein the truncated conical body, the first disk-shaped element, the second disk-shaped element, and the winding element define a winding space, and wherein the potting compound fills at least 90% of the winding space.

13. The magnetic lens component of claim 12, wherein the potting compound uniformly fills the winding space.

14. The magnetic lens component of any of claims 1 to 4, wherein the coupling of the winding elements allows rotational movement during coil winding and allows fixation.

15. The magnetic lens component of any of claims 1 to 4, wherein the coiled element comprises a partial coating on at least an interior of the coiled element.

16. The magnetic lens component of claim 15, wherein the partial coating is a low friction layer.

17. The magnetic lens component according to any one of claims 1 to 4, wherein the slits of the rolled element have rounded corners.

18. The magnetic lens component according to any one of claims 1 to 4, wherein the wrap-around element comprises a tapered wall portion, and wherein the tapered wall portion comprises the slits and a plurality of first openings.

19. The magnetic lens component of claim 18, wherein the wrap element further comprises a cylindrical wall portion comprising the slit and a plurality of second openings.

20. The magnetic lens component of claim 5, wherein the wrap element comprises a tapered wall portion, wherein the tapered wall portion comprises the slit and a plurality of first openings, and further comprising a cylindrical wall portion, wherein the cylindrical wall portion comprises the slit and a plurality of second openings.

21. A lens for a charged particle beam device, characterized in that the lens comprises:

the magnetic lens component of any of claims 1 to 4, and

an electrostatic lens component having one or more electrodes.

22. The lens of claim 21, further comprising:

an infusion compound provided at least partially between the coil carrier and the wound element.

23. The lens of claim 21, in which the coil carrier comprises a first disk-shaped element at a first side of the frustum-shaped body and a second disk-shaped element at a second side of the frustum-shaped body.

24. The lens of claim 22, in which the coil carrier comprises a first disk-shaped element at a first side of the frustum-shaped body and a second disk-shaped element at a second side of the frustum-shaped body.

25. The lens of claim 22, wherein the coil carrier comprises a first disk-shaped element at a first side of the frustum-shaped body and a second disk-shaped element at a second side of the frustum-shaped body, wherein the frustum-shaped body, the first disk-shaped element, the second disk-shaped element, and the coiled element define a coiled space, and wherein the potting compound fills at least 90% of the coiled space.

26. The lens of claim 21, in which the coupling of the winding elements allows rotational movement during coil winding and allows fixation.

27. The lens of claim 21, in which the wrap element comprises a tapered wall portion, in which the tapered wall portion comprises the slit and a plurality of first openings, and the wrap element further comprises a cylindrical wall portion, in which the cylindrical wall portion comprises the slit and a plurality of second openings.

28. The lens of claim 21, wherein the magnetic lens component further comprises:

a first pole piece; and

a second pole piece, wherein a gap is provided between the first pole piece and the second pole piece.

29. A charged particle beam device, comprising:

a beam emitter for emitting a primary charged particle beam; and

an objective lens having a magnetic lens component according to any one of claims 1 to 4.

30. The charged particle beam device of claim 29, further comprising:

an infusion compound provided at least partially between the coil carrier and the wound element.

31. Charged particle beam device according to claim 29, wherein the coil carrier comprises a first disk shaped element at a first side of the truncated conical body and a second disk shaped element at a second side of the truncated conical body.

32. Charged particle beam device according to claim 30, wherein the coil carrier comprises a first disk shaped element at a first side of the truncated conical body and a second disk shaped element at a second side of the truncated conical body.

33. Charged particle beam device according to claim 30, wherein the coil carrier comprises a first disk-shaped element at a first side of the truncated cone-shaped body and a second disk-shaped element at a second side of the truncated cone-shaped body, wherein the truncated cone-shaped body, the first disk-shaped element, the second disk-shaped element and the coiled element define a coiled space, and wherein the potting compound fills at least 90% of the coiled space.

34. Charged particle beam device according to claim 29, wherein the coupling of the winding elements allows rotational movement during coil winding and allows fixation.

35. The charged particle beam device of claim 29, wherein the coiled element comprises a conical wall portion, wherein the conical wall portion comprises the slit and a plurality of first openings, and further comprising a cylindrical wall portion, wherein the cylindrical wall portion comprises the slit and a plurality of second openings.

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