CN212586748U

CN212586748U - Mass flow controller

Info

Publication number: CN212586748U
Application number: CN202021472160.3U
Authority: CN
Inventors: 马健; 宋玉国
Original assignee: Beijing Jieming Weiye Environmental Engineering Co ltd
Current assignee: Beijing Jieming Weiye Environmental Engineering Co ltd
Priority date: 2020-07-23
Filing date: 2020-07-23
Publication date: 2021-02-23
Anticipated expiration: 2030-07-23

Abstract

The utility model provides a mass flow controller, but accurate control flow can prevent effectively that the liquid of annotating the liquid branch pipe from backflowing. The utility model relates to a mass flow controller's technical scheme includes: the shunt, the inside shunt passageway that is equipped with of shunt, the shunt passageway is connected into inlet pipeline and outlet pipeline respectively, outlet pipeline is equipped with governing valve and buffer container in proper order on the road, buffer container and annotate liquid branch connection, buffer container is equipped with the flowing back valve and stretches into annotate the level gauge of liquid branch pipe, the level gauge still with the governing valve is connected, works as liquid level in the notes liquid branch pipe surpasss the level timing, the governing valve is closed, the flowing back valve is opened.

Description

Mass flow controller

Technical Field

The utility model relates to a flow controller technical field, concretely relates to mass flow controller.

Background

Gas mass flow controllers are instruments used to precisely measure and control the mass flow of a gas. They have important applications in scientific research and production in various fields such as semiconductor microelectronic industry, special material development, chemical industry, petroleum industry, medicine, environmental protection, vacuum and the like. Typical applications include: electronic process equipment such as diffusion, oxidation, epitaxy, CVD, plasma etching, sputtering, ion implantation; and vacuum coating equipment, optical fiber smelting, a micro-reaction device, a gas mixing and distributing system, capillary measurement, a gas chromatograph and other analytical instruments.

The existing mass flow controller has low measurement precision for small flow gas or liquid and cannot effectively measure and control.

SUMMERY OF THE UTILITY MODEL

The utility model provides a mass flow controller, but accurate control flow can prevent effectively that the liquid of annotating the liquid branch pipe from backflowing.

The utility model relates to a mass flow controller's technical scheme includes:

the shunt, the inside shunt passageway that is equipped with of shunt, the shunt passageway is connected into inlet pipeline and outlet pipeline respectively, outlet pipeline is equipped with governing valve and buffer container in proper order on the road, buffer container and annotate liquid branch connection, buffer container is equipped with the flowing back valve and stretches into annotate the level gauge of liquid branch pipe, the level gauge still with the governing valve is connected, works as liquid level in the notes liquid branch pipe surpasss the level timing, the governing valve is closed, the flowing back valve is opened.

Preferably, the first and second liquid crystal materials are,

and an ultrasonic generator is arranged on the outer wall of the buffer container.

Preferably, the first and second liquid crystal materials are,

the sensor comprises a sensing tube with two ends communicated with each other, and the two ends of the sensing tube are respectively communicated with the shunt cavity; the sensing tube comprises a sensing tube body and a sensing tube body, wherein the sensing tube body is provided with a first winding and a second winding, the first winding and the second winding are connected in series, the first winding is further connected with a first resistor, the second winding is further connected with a second resistor, and the first resistor and the second resistor are connected in series.

Preferably, the first and second liquid crystal materials are,

the transformer further comprises an amplifier, wherein the amplifier is respectively connected with a node between the first resistor and the second resistor and a node between the first winding and the second winding.

Preferably, the first and second liquid crystal materials are,

the sensing tube is a U-shaped tube, the U-shaped tube is composed of a first vertical tube, a horizontal tube and a second vertical tube, and the first winding and the second winding are wound on the horizontal tube.

Preferably, the first and second liquid crystal materials are,

the sensing tubes are arranged in bilateral symmetry relative to the central line of the shunt cavity.

Preferably, the first and second liquid crystal materials are,

and the outside of the first winding and the second winding is wrapped with heat insulation cotton.

Preferably, the first and second liquid crystal materials are,

the first winding and the second winding are both thermistor wires, and the thermistor wires are attached to the outer wall of the sensing tube.

Preferably, the first and second liquid crystal materials are,

the first resistor and the second resistor are equal.

Preferably, the first and second liquid crystal materials are,

a filter screen is arranged in the flow divider cavity and is close to the inlet of the inlet pipeline.

The beneficial effect of adopting above-mentioned technical scheme is:

when the liquid level in the liquid injection branch pipe is close to the liquid level timing of the buffer container, the regulating valve on the outlet pipeline is closed, the liquid in the liquid injection branch pipe is prevented from flowing back to the flow divider channel, the liquid discharge valve of the buffer container is opened to discharge liquid, the mass flow controller can accurately control the flow of gas or liquid on line, the amount of gas or liquid flowing into the liquid injection branch pipe is controlled, the liquid backflow in the liquid injection branch pipe can be effectively prevented, the regulating valve greatly improves the control precision, and the online real-time control of the flow is realized.

Drawings

In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings required to be used in the description of the embodiments or the prior art will be briefly described below, it is obvious that the drawings in the following description are only embodiments of the present invention, and for those skilled in the art, other drawings can be obtained according to the provided drawings without creative efforts.

Fig. 1 is a structural diagram of a mass flow controller according to the present invention.

Detailed Description

The technical solutions in the embodiments of the present invention will be described clearly and completely with reference to the accompanying drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only some embodiments of the present invention, not all embodiments. Based on the embodiments in the present invention, all other embodiments obtained by a person skilled in the art without creative work belong to the protection scope of the present invention.

In the description of the present invention, it is to be understood that the terms "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "circumferential", and the like indicate orientations or positional relationships based on those shown in the drawings, and are merely for convenience of description and simplicity of description, and do not indicate or imply that the device or element referred to must have a particular orientation, be constructed and operated in a particular orientation, and therefore, should not be construed as limiting the present invention.

In the present invention, unless otherwise expressly stated or limited, the terms "mounted," "connected," and "fixed" are to be construed broadly and may, for example, be fixedly connected, detachably connected, or integrally formed; can be mechanically or electrically connected; they may be directly connected or indirectly connected through intervening media, or they may be connected internally or in any other suitable relationship, unless expressly stated otherwise. The specific meaning of the above terms in the present invention can be understood according to specific situations by those skilled in the art.

In the present application, unless expressly stated or limited otherwise, the first feature may be directly on or directly under the second feature or indirectly via intermediate members. Also, a first feature "on," "over," and "above" a second feature may be directly or diagonally above the second feature, or may simply indicate that the first feature is at a higher level than the second feature. A first feature being "under," "below," and "beneath" a second feature may be directly under or obliquely under the first feature, or may simply mean that the first feature is at a lesser elevation than the second feature.

In the description herein, references to the description of the term "one embodiment," "some embodiments," "an example," "a specific example," or "some examples," etc., mean that a particular feature, structure, material, or characteristic described in connection with the embodiment or example is included in at least one embodiment or example of the invention. In this specification, the schematic representations of the terms used above are not necessarily intended to refer to the same embodiment or example. Furthermore, the particular features, structures, materials, or characteristics described may be combined in any suitable manner in any one or more embodiments or examples. Furthermore, various embodiments or examples and features of different embodiments or examples described in this specification can be combined and combined by one skilled in the art without contradiction.

the flow divider comprises a sensor, a flow divider 1 and an amplifier 4, wherein the flow divider 1 comprises a flow divider channel 101, the sensor comprises a sensing tube 301 with two communicated ends, and two ends of the sensing tube 301 are respectively communicated with the flow divider channel 101; the sensing tube 301 is wound with a first winding 302 and a second winding 303 on the outer wall, the first winding 302 and the second winding 303 are connected in series, the first winding 302 is further connected with a first resistor 304, the second winding 303 is further connected with a second resistor 305, and the first resistor 304 and the second resistor 305 are connected in series.

The less heat absorbed by the sensing tube 301 itself, the more sufficient the heat exchange between the first winding 302 and the second winding 303 and the gas/liquid, so as to enhance the detection capability of the sensor for the gas/liquid flow, therefore, the thin-wall capillary tube is used as the sensing tube 301, and the two sets of windings which are used as the heater and the detection component are wound around the outer wall of the thin-wall capillary tube.

The sensing tube 301 is a U-shaped tube, the U-shaped tube is composed of a first vertical tube, a horizontal tube and a second vertical tube, and a first winding 302 and a second winding 303 are wound on the horizontal tube.

To achieve a temperature profile distribution of the outer wall of the sensing tube 301 that is left-right symmetric when no gas/liquid flows through the sensor, this requires the internal structure of the sensor to be symmetric. In order to achieve the heat removal of the gas/liquid flowing through the sensor, it is necessary to ensure that the temperature at the inlet and at the outlet of the sensor is always equal due to the design.

Thus, sense tube 301 is arranged symmetrically left and right with respect to the center line of shunt cavity 101, winding one 302 and winding two 303 are arranged symmetrically left and right with respect to the center line of sense tube 301, and resistor one 304 and resistor two 305 are arranged symmetrically left and right with respect to the center line of sense tube 301, and resistor one and resistor two are equal.

The first winding 302 and the second winding 303 are both thermistor wires, and the thermistor wires are attached to the outer wall of the sensing tube 301. This requires a very thin layer of insulation for the thermistor wire in order to ensure that the windings of the sensor are able to better pick up the wall temperature of the sensor tube 301. If the insulation layer of the thermistor wire is thick, the thermistor wire is not favorable for collecting the temperature of the tube wall of the sensing tube 301, and the detection function of the sensor on the gas/liquid flow is reduced. This requires that the thermistor wire be in close proximity to the outer wall of the sensor tube 301 in order to ensure that the windings of the sensor are able to better sense the wall temperature of the sensor tube 301. The outer parts of the first winding 302 and the second winding 303 are wrapped with heat insulation cotton, and heat insulation measures are adopted in the sensor to prevent heat dissipation.

The amplifier 4 is connected to a node between the first resistor 304 and the second resistor 305, and a node between the first winding 303 and the second winding 303, respectively.

Shunt passageway 101 is connected into oral siphon and outlet pipeline respectively, be equipped with the filter screen in the shunt passageway 101, gas/liquid is through shunt 1's entry, the filter screen gets into sensing tube 301, shunt passageway 101 still connects outlet pipeline, be equipped with governing valve 2 and buffer container 5 on the outlet pipeline in proper order, buffer container 5 is connected with notes liquid branch pipe 6, buffer container 5 is equipped with the flowing back valve and stretches into the level gauge of annotating liquid branch pipe 6, the level gauge still is connected with governing valve 2, liquid level when annotating in the liquid branch pipe 6 surpasss the level timing, governing valve 2 closes, the flowing back valve is opened, because can further be equipped with supersonic generator on buffer container 5's the outer wall, accelerate the flowing back.

The above embodiments are only used to illustrate the technical solution of the present invention, and not to limit it; although the present invention has been described in detail with reference to the foregoing embodiments, it should be understood by those skilled in the art that: the technical solutions described in the foregoing embodiments may still be modified, or some technical features may be equivalently replaced; such modifications and substitutions do not depart from the spirit and scope of the present invention in its corresponding aspects.

Claims

1. The utility model provides a mass flow controller, includes the shunt, the inside shunt passageway that is equipped with of shunt, its characterized in that, the shunt passageway is connected respectively into oral siphon and outlet pipe way, be equipped with governing valve and buffer container on the outlet pipe way in proper order, buffer container with annotate liquid branch connection, buffer container is equipped with the flowing back valve and stretches into annotate the level gauge of liquid branch pipe, the level gauge still with the governing valve is connected, works as liquid level in the liquid branch pipe surpasss the level timing, the governing valve is closed, the flowing back valve is opened.

2. A mass flow controller according to claim 1, wherein the buffer vessel is provided with an ultrasonic generator on an outer wall thereof.

3. The mass flow controller of claim 1, further comprising a sensor, wherein the sensor comprises a sensing tube with two ends communicated, and the two ends of the sensing tube are respectively communicated with the splitter cavity; the sensing tube comprises a sensing tube body and a sensing tube body, wherein the sensing tube body is provided with a first winding and a second winding, the first winding and the second winding are connected in series, the first winding is further connected with a first resistor, the second winding is further connected with a second resistor, and the first resistor and the second resistor are connected in series.

4. A mass flow controller according to claim 3, further comprising an amplifier connected to a node between the first and second resistors and a node between the first and second windings, respectively.

5. The mass flow controller of claim 3, wherein the sense tube is a U-shaped tube comprised of a first vertical tube, a horizontal tube, and a second vertical tube, the first and second windings being wound around the horizontal tube.

6. A mass flow controller according to claim 3, wherein the sense tubes are arranged side-to-side symmetrically with respect to a centerline of the splitter cavity.

7. The mass flow controller of claim 3, wherein the exterior of the first winding and the second winding are wrapped with insulation wool.

8. The mass flow controller of claim 3, wherein the first winding and the second winding are both thermistor wires, and the thermistor wires are attached to the outer wall of the sensor tube.

9. A mass flow controller according to claim 3, wherein the first and second resistances are equal.

10. A mass flow controller according to claim 1, wherein a filter screen is provided in the diverter chamber, the filter screen being adjacent the inlet of the inlet conduit.