CN212569293U - Augmented reality waveguide lens - Google Patents

Augmented reality waveguide lens Download PDF

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Publication number
CN212569293U
CN212569293U CN202021493091.4U CN202021493091U CN212569293U CN 212569293 U CN212569293 U CN 212569293U CN 202021493091 U CN202021493091 U CN 202021493091U CN 212569293 U CN212569293 U CN 212569293U
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waveguide substrate
waveguide
refractive index
index layer
graded
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CN202021493091.4U
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罗明辉
乔文
李瑞彬
方宗豹
陈林森
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NICROTEK CO Ltd
SVG Tech Group Co Ltd
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NICROTEK CO Ltd
SVG Tech Group Co Ltd
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Abstract

The utility model discloses an augmented reality waveguide lens, be in including waveguide substrate, setting the graded index layer on waveguide substrate surface, and set up the graded index layer is kept away from waveguide substrate side surface has nanostructured's functional area, the refractive index on graded index layer changes certainly the waveguide substrate is past the functional area direction progressively diminishes. The utility model also discloses a preparation method of augmented reality waveguide lens, this method includes: providing a waveguide substrate; preparing a graded index layer on the waveguide substrate; preparing a photoresist layer on the surface of one side, far away from the waveguide substrate, of the graded index layer; and preparing a nano structure on the photoresist layer. Through the gradual decrease of the refractive index change of the gradient refractive index layer from the waveguide substrate to the functional area, the light crosstalk caused by the matching of the low refractive index functional area and the high refractive index waveguide substrate is avoided, and the display resolution and the experience effect are improved.

Description

Augmented reality waveguide lens
Technical Field
The utility model relates to an augmented reality shows technical field, especially relates to an augmented reality waveguide lens.
Background
The diffractive light waveguide scheme is a scheme commonly used in the Augmented Reality (AR) technology. In the diffraction light waveguide scheme, the accurate direction control of the light not only depends on the diffraction angle of the diffraction grating, but also needs to combine the total reflection of the waveguide and the refractive indexes of the waveguide and the diffraction grating, and the mismatching of the parameters can cause the direction deviation of the light.
As shown in fig. 1, the angular light with the same optical width includes partial information of the image in the field of view, and in the process of transmitting and diffracting the angular light with the same optical width at the total reflection angle, the light outgoing width of the previous optical width and the light outgoing width of the next optical width cannot be overlapped, so that when human eyes watch the image in the whole coupling-out region 33 in a displacement manner, only light with a certain optical width is incident in the moving process, and the uniqueness of only seeing partial information of the image in the field of view is ensured.
However, when the field angle of the diffraction optical waveguide scheme needs to be increased, light with a larger field angle is often accommodated by increasing the refractive index of the waveguide for internal conduction, but the refractive index of the waveguide substrate is increased, and meanwhile, the refractive index of the material of the surface diffraction grating needs to be increased.
As shown in fig. 2, under the condition that the remaining parameters are not changed in the case shown in fig. 1, the increase of the refractive index of the waveguide substrate may cause the diffraction angle entering the waveguide to decrease, thereby causing the light outgoing width of the previous light width and the light outgoing width of the next light width to partially overlap, and the angular light of the same light width includes partial information of the image of the field of view, when the human eye views the image in the whole coupling-out region 33 by displacement, during the movement, not only light of a certain light width enters at a certain position, but also partial information of the light of the next light width is seen while viewing the information of the light of the whole previous light width, which may cause crosstalk of the light, and as the incident angle changes, the light of different field angles is mixed, which brings an extremely poor visual experience.
For example, as shown in fig. 3, the refractive index of the waveguide substrate of the existing augmented reality waveguide lens is 1.84, the incident angle is 20 °, the grating period is 420nm, the incident wavelength is 520nm, the diffraction angle is 59.18 ° calculated according to the diffraction equation formula, the total reflection condition is satisfied according to the total reflection formula, and the corresponding maximum light beam width is 3.352mm at this time, which means that in the case of a waveguide with a thickness of 1mm and a light beam aperture of 3.352mm, if the refractive index of the functional region is selected to be smaller than the refractive index of the waveguide substrate, according to the diffraction equation, the diffraction angle is smaller than 59.18 °, that is, according to the theory of fig. 2, the light exit width of the previous light width and the light exit width of.
The foregoing description is provided for general background information and is not admitted to be prior art.
SUMMERY OF THE UTILITY MODEL
An object of the utility model is to provide a prevent light crosstalk's augmented reality waveguide lens.
The utility model provides an augmented reality waveguide lens, be in including waveguide substrate, setting the graded index layer of waveguide substrate surface, and set up the graded index layer is kept away from waveguide substrate side surface has nanostructured's functional area, the refracting index of waveguide substrate is greater than the refracting index of functional area, the refracting index on graded index layer changes certainly the waveguide substrate is past the functional area direction progressively diminishes.
In one embodiment, the refractive index change is a linear or non-linear stepwise decrease.
In one embodiment, the refractive index of the waveguide substrate is not less than 1.6, the refractive index of the functional region is not less than 1.4, and the graded index layer has a graded range between the refractive index of the waveguide substrate and the refractive index of the functional region.
In one embodiment, the graded index layer has a size not smaller than the area covered by the functional region.
In one embodiment, the functional region includes a coupling-in region for coupling in image light to the waveguide substrate and a coupling-out region for coupling out image light totally reflected by the waveguide substrate to a human eye.
The utility model provides an augmented reality waveguide lens, through the refractive index change on gradual change refractive index layer certainly the waveguide substrate is past the functional area direction progressively steadilys decrease, avoids low refracting index functional area to match the high refracting index waveguide base and causes light to crosstalk, has promoted display resolution and has experienced the effect.
Drawings
FIG. 1 is a schematic diagram of light ray transmission in which the refractive indexes of a waveguide substrate and a functional region in an existing augmented reality waveguide lens are slightly different from each other;
FIG. 2 is a schematic diagram of light transmission with a large difference in refractive index between the waveguide substrate and the functional region in FIG. 1;
fig. 3 is a schematic view of incident light rays at an incident angle of 20 ° when the refractive indexes of the waveguide substrate and the functional region in the conventional augmented reality waveguide lens are greatly different from each other;
fig. 4 is a schematic structural diagram of an augmented reality waveguide lens according to an embodiment of the present invention;
FIG. 5 is a schematic light transmission diagram of the structure shown in FIG. 4;
fig. 6 is a flowchart illustrating steps of a method for manufacturing an augmented reality waveguide lens according to an embodiment of the present invention.
Detailed Description
The following detailed description of the embodiments of the present invention is provided with reference to the accompanying drawings and examples. The following examples are intended to illustrate the invention, but are not intended to limit the scope of the invention.
Referring to fig. 4 and 5, an embodiment of the augmented reality waveguide lens includes a waveguide substrate 1, a graded index layer 2 disposed on a surface of the waveguide substrate 1, and a functional region 3 disposed on a side surface of the graded index layer 2 away from the waveguide substrate 1 and having a nano structure. The refractive index of the waveguide substrate 1 is larger than that of the functional region 3, and the refractive index change of the graded-index layer 2 gradually decreases from the waveguide substrate 1 to the functional region 3.
The waveguide substrate 1 is made of a material with high transparency to visible light, and the refractive index of the waveguide substrate 1 is not less than 1.6.
The graded index layer 2 has a size not smaller than the area covered by the functional region 3. That is, the size of the graded index layer 2 is equal to the size of the waveguide substrate 1, or the size of the graded index layer 2 is equal to the size of the functional region 3.
When the graded index layer 2 is equal in size to the functional region 3, the graded index layer 2 is provided with at least two mutually independent and mutually non-contact portions.
The graded index layer 2 is a multi-layer structure having at least 2 refractive layers 21. The refractive index of the same refractive layer 21 is the same, and the refractive indices of different refractive layers 21 are different. Specifically, the graded-index layer 2 has a gradually decreasing refractive index from the waveguide substrate 1 toward the functional region 3, that is, the refractive index of the refractive layer 21 near the waveguide substrate 1 is larger than the refractive index of the refractive layer 21 near the functional region 3.
In the present embodiment, the gradation range of the graded-index layer 2 is between the refractive index of the waveguide substrate 1 and the refractive index of the functional region 3. The graded index layer 2 has a graded index of refraction that decreases in a linear or non-linear manner from the waveguide substrate 1 in a direction toward the functional region 3. Preferably, the graded-index layer 2 is divided into a plurality of layers in such a manner that the arithmetic progression decreases stepwise. As shown in fig. 5 in 5 layers.
The refractive index of the functional region 3 is not less than 1.4. The functional region 3 includes a coupling-in region 31 that couples image light into the waveguide substrate 1 and a coupling-out region 33 that couples out image light totally reflected by the waveguide substrate 1 to the human eye. The coupling-in region 31 and the coupling-out region 33 are both provided with gratings (i.e., nanostructures), and the structures and periods of the gratings may be the same or different.
Specific light transmission paths are as follows: incident light is firstly diffracted and conducted through the functional area 3, enters the waveguide substrate through the graded index layer 2, is totally reflected and conducted in the waveguide substrate, then enters the functional area 3 through the graded index layer 2 again, part of the light is coupled out through the functional area 3, and part of the light is totally reflected and continuously conducted along the length direction of the waveguide, so that augmented reality pupil conduction is realized. That is, the single-angle light is diffracted into the waveguide substrate through the coupling-in region 31 with a certain optical width, the diffraction angle performs transverse pupil-expanding conduction under the condition of satisfying the total internal reflection of the waveguide, part of the light is diffracted and emitted through the coupling-out region 33, and part of the light continues to be conducted in the waveguide.
As shown in fig. 5, the graded index layer 2 is in a multilayer mode, and the refractive index does not change within a single layer. The refractive index change of the graded-index layer 2 gradually decreases from the waveguide substrate toward the functional region 3. Light rays are diffracted by the surface nano structure and enter the uppermost layer of the graded index layer 2, the refractive index of the graded index layer 2 is sequentially increased from top to bottom, the refraction angle is gradually reduced according to the law of refraction, and finally the light rays enter the waveguide substrate layer, are totally reflected, pass through the graded index layer 2 and are diffracted and emitted by the functional area 3, and the previous light width and the next light width are not overlapped by a distance b. The dotted line in fig. 5 indicates the light transmission when the graded index layer 2 is made of the same material as the waveguide substrate, and it can be seen that there is an overlapping distance a between the former optical width and the latter optical width. Therefore, through the graded-index layer 2 in a multilayer mode, light crosstalk caused by matching of the low-index diffraction grating with the high-index waveguide substrate is avoided to a certain extent, and display resolution and effect experience are influenced.
Referring to fig. 6, an embodiment of the present invention further provides a method for manufacturing an augmented reality waveguide lens, where the method includes:
s1: providing a waveguide substrate;
s2: preparing a graded index layer on a waveguide substrate;
s3: preparing a photoresist layer on the surface of one side of the graded index layer, which is far away from the waveguide substrate;
s4: and preparing a functional region with a nano structure on the photoresist layer.
In step S2, a graded index layer is prepared on the surface of the waveguide substrate by a single-source co-evaporation or dual-source co-evaporation or multi-source co-evaporation coating method. The size of the graded index layer can be equal to the size of the surface of the waveguide substrate; it is also possible to select a region on the surface of the waveguide substrate in which the graded index layer is fabricated. In the process, the mixing ratio of the mixed materials and the coating rate are controlled to control the gradient of the refractive index layer, i.e. the refractive index is gradually changed, for example, in a linear or nonlinear manner, gradually decreased from the waveguide substrate to the outside.
The mixed material comprises one or more of niobium pentoxide, zirconium dioxide, tantalum pentoxide, hafnium dioxide, silicon dioxide and titanium dioxide.
In other embodiments, the above method may be used to fabricate a desired graded index film on another substrate, and then the graded index film is cut into a desired size and attached to a waveguide substrate to form a graded index layer. The method can be used on graded index layers that need to have multiple portions that are independent of each other and do not touch each other.
In step S3, a photoresist layer is formed by covering the surface of the graded index layer away from the waveguide substrate with a photoresist by spin coating or spray coating or blade coating. When the photoresist is actually coated, the photoresist is generally coated on the whole surface of the waveguide substrate, namely the size of the photoresist layer is equivalent to that of the surface of the waveguide substrate, and the operation is simple. Of course, the photoresist can be coated on the designated area according to the requirement, so that the material and the cost can be saved.
In step S4, a nanostructure is formed on the photoresist layer by photolithography. Specifically, the photoresist layer is exposed, developed, and then etched according to a desired pattern to form a patterned topography, i.e., a nanostructure, on the photoresist layer. And then cleaning the redundant part to form the functional region with the nano structure. In the cleaning process, only the redundant photoresist is cleaned according to the requirement, so that the size of the graded index layer is equal to the surface size of the waveguide substrate. Or when cleaning the redundant photoresist, cleaning a part of the graded index layer which is distributed on the surface of the whole waveguide substrate, and reserving the residual photoresist (the residual photoresist forms the functional region at the moment) to cover a part of the graded index layer, wherein the size of the graded index layer is equal to that of the functional region.
In other embodiments, the nanostructures may be formed on the photoresist by imprinting. Specifically, a master plate is provided, the master plate is imprinted on a photoresist layer, the structure of the master plate is transferred to the photoresist layer, pattern morphology is obtained on the photoresist layer through photoetching, exposure and other modes, the master plate is separated from the photoresist layer after solidification, and a nano structure is formed on the photoresist layer.
In the drawings, the size and relative sizes of layers and regions may be exaggerated for clarity. It will be understood that when an element such as a layer, region or substrate is referred to as being "formed on," "disposed on" or "located on" another element, it can be directly on the other element or intervening elements may also be present. In contrast, when an element is referred to as being "directly formed on" or "directly disposed on" another element, there are no intervening elements present.
In this document, the terms "upper", "lower", "front", "rear", "left", "right", "top", "bottom", "inner", "outer", "vertical", "horizontal", and the like indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings, and are only for the sake of clarity and convenience of description of the technical solutions, and thus, should not be construed as limiting the present invention.
As used herein, the meaning of "a plurality" or "a plurality" is two or more unless otherwise specified.
As used herein, the terms "comprises," "comprising," or any other variation thereof, are intended to cover a non-exclusive inclusion, including not only those elements listed, but also other elements not expressly listed.
The above description is only for the specific embodiments of the present invention, but the protection scope of the present invention is not limited thereto, and any person skilled in the art can easily think of the changes or substitutions within the technical scope of the present invention, and all should be covered within the protection scope of the present invention. Therefore, the protection scope of the present invention shall be subject to the protection scope of the claims.

Claims (5)

1. The augmented reality waveguide lens is characterized by comprising a waveguide substrate, a graded index layer arranged on the surface of the waveguide substrate, and a functional area which is arranged on the surface of one side, far away from the waveguide substrate, of the graded index layer and is provided with a nano structure, wherein the refractive index of the waveguide substrate is larger than that of the functional area, and the refractive index change of the graded index layer gradually decreases from the waveguide substrate to the functional area.
2. The augmented reality waveguide lens of claim 1 wherein the refractive index change is linearly or non-linearly stepwise decreasing.
3. The augmented reality waveguide lens of claim 1 or 2 wherein the refractive index of the waveguide substrate is not less than 1.6, the refractive index of the functional region is not less than 1.4, and the graded range of the graded index layer is between the refractive index of the waveguide substrate and the refractive index of the functional region.
4. The augmented reality waveguide lens of claim 1 wherein the graded index layer is not smaller in size than the area covered by the functional region.
5. The augmented reality waveguide lens of claim 1 or 4 wherein the functional region comprises an incoupling region that incouples image light into the waveguide substrate and an outcoupling region that outcouples image light totally reflected by the waveguide substrate to the human eye.
CN202021493091.4U 2020-07-24 2020-07-24 Augmented reality waveguide lens Active CN212569293U (en)

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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN113075767A (en) * 2021-05-06 2021-07-06 宁波舜宇奥来技术有限公司 Optical waveguide structure and near-eye display
CN115343795A (en) * 2022-08-25 2022-11-15 深圳迈塔兰斯科技有限公司 Diffraction light waveguide and imaging system

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN113075767A (en) * 2021-05-06 2021-07-06 宁波舜宇奥来技术有限公司 Optical waveguide structure and near-eye display
CN113075767B (en) * 2021-05-06 2022-11-25 宁波舜宇奥来技术有限公司 Optical waveguide structure and near-eye display
CN115343795A (en) * 2022-08-25 2022-11-15 深圳迈塔兰斯科技有限公司 Diffraction light waveguide and imaging system
CN115343795B (en) * 2022-08-25 2024-04-30 深圳迈塔兰斯科技有限公司 Diffraction optical waveguide and imaging system

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