CN212542380U - Graphite boat convenient to clean - Google Patents
Graphite boat convenient to clean Download PDFInfo
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- CN212542380U CN212542380U CN202021723361.6U CN202021723361U CN212542380U CN 212542380 U CN212542380 U CN 212542380U CN 202021723361 U CN202021723361 U CN 202021723361U CN 212542380 U CN212542380 U CN 212542380U
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- graphite
- graphite boat
- rods
- ceramic
- clean
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
Abstract
The utility model discloses a graphite boat convenient to wash, including backing plate and a plurality of graphite boat board, graphite boat board one side is provided with a plurality of silicon chips, and has seted up a plurality of mounting holes on one side of a plurality of graphite boat boards, and swing joint has a plurality of graphite poles between a plurality of mounting holes, and is a plurality of graphite pole one end all runs through a plurality of graphite boat boards, and the equal swing joint of a plurality of graphite pole one end has a plurality of filter plate, and filter plate one side edge is provided with the protecting frame, and a plurality of graphite pole one end all runs through a plurality of protecting frames, and a plurality of graphite boat boards and a plurality of filter plate clearance arrange, and is a plurality of graphite boat board and a plurality of filter plate one side swing joint has two ceramic poles and two metal poles respectively, and one of them ceramic pole and one of them metal pole one end all are provided with a plurality of fixed blocks. The utility model discloses can carry out orderly water conservancy diversion and derive the hydrofluoric acid after wasing or other solutions, can carry out high-efficient clean operation to a plurality of graphite boat boards.
Description
Technical Field
The utility model relates to a graphite boat technical field especially relates to a graphite boat convenient to wash.
Background
The graphite boat is a carrier commonly used for producing solar silicon wafers, the graphite boat is used during solar silicon wafer coating, the coating needs to be carried out in a high-temperature and vacuum environment, along with the continuous deepening of an environmental protection idea, solar energy is used as one of important renewable energy sources, the development is very rapid, along with the continuous updating and iteration of a photovoltaic technology, the rising of a PERC battery provides higher requirements for the produced graphite boat, the graphite boat also needs to be clean and dry in the use process, and the influence on the silicon wafer coating operation is avoided.
Through retrieval, the patent with the granted publication number of CN210272285U discloses a graphite boat convenient to clean, which is characterized in that: including graphite boat piece group, first connecting rod, second connecting rod, interval set up in the spacer block and the interval at graphite boat piece group both ends, it set up in spacing ring in the graphite boat piece group, above-mentioned patent exists following not enoughly: the hydrofluoric acid after cleaning does not flow out in order, and the graphite boat is inconvenient to install, influences the machining efficiency of the graphite boat, and can not meet the requirements of people.
SUMMERY OF THE UTILITY MODEL
The utility model aims at solving the defects existing in the prior art and providing a graphite boat convenient to clean.
In order to achieve the above purpose, the utility model adopts the following technical scheme:
a graphite boat convenient to clean comprises a backing plate and a plurality of graphite boat plates, wherein one side of each graphite boat plate is provided with a plurality of silicon wafers, one side of each graphite boat plate is provided with a plurality of mounting holes, a plurality of graphite rods are movably connected among the mounting holes, one ends of the graphite rods penetrate through the graphite boat plates, one ends of the graphite rods are movably connected with a plurality of filter screen plates, one edge of one side of each filter screen plate is provided with a protective frame, one ends of the graphite rods penetrate through the protective frames, the graphite boat plates and the filter screen plates are arranged in a clearance mode, one sides of the graphite boat plates and the filter screen plates are respectively and movably connected with two ceramic rods and two metal rods, one end of one ceramic rod and one end of one metal rod are respectively provided with a plurality of fixed blocks, and one end of the other ceramic rod and one end of the other metal rod are respectively provided with a plurality of connecting blocks, and a plurality of fixed blocks and a plurality of connecting block one side all have been seted up clean groove and water conservancy diversion mouth, and a plurality of graphite boat boards and a plurality of filter screen board clearance arrange and swing joint are in the one end of two ceramic poles and two metal poles.
As a further embodiment of the present invention, it is a plurality of the graphite rod one end is provided with a ceramic nut.
As a further embodiment of the present invention, two ceramic rods are provided with graphite nuts at one end.
As a further embodiment of the present invention, it is a plurality of the graphite rod one end is provided with a plurality of fixing rings.
As a still further embodiment of the present invention, one of the ceramic rods and one of the metal rods are provided with a support block, and one side of the support block is provided with an anti-slip pattern.
As the utility model discloses further embodiment again, the backing plate bottom is provided with a plurality of support frames, and a plurality of support frames and backing plate one side all are provided with a plurality of screws, and swing joint has the hex bolts in the screw.
As a further embodiment of the present invention, a plurality of drainage grooves and a plurality of mounting grooves are formed on one side of the base plate.
The utility model has the advantages that:
1. the utility model discloses a clean groove on a plurality of filter plate, a plurality of fixed blocks and a plurality of connecting blocks and the cooperation setting of water conservancy diversion mouth can carry out orderly water conservancy diversion and derive to hydrofluoric acid after wasing or other solutions, can carry out high-efficient clean operation to a plurality of graphite boat boards.
2. The utility model discloses a plurality of graphite boat boards install convenient, the step is simple, the easy operation, and the coating film is efficient, and inside spare part easily dismantles, is of value to the maintenance operation in later stage.
3. The utility model discloses a spare part that multiple hardness and rigidity are all good material group are built for the high temperature resistance and the wear resistance of integrated device are better, and electric conductive property and heat conductivility are good, are of value to the operation precision that promotes the silicon chip coating film.
Drawings
Fig. 1 is a schematic perspective view of a graphite boat convenient for cleaning according to the present invention;
FIG. 2 is a schematic view of the internal structure of a graphite boat convenient for cleaning according to the present invention;
fig. 3 is a schematic view of the graphite boat convenient for cleaning according to the present invention.
In the figure: 1. a base plate; 2. a support frame; 3. a graphite boat plate; 4. a silicon wafer; 5. a protective frame; 6. a filter screen plate; 7. a metal rod; 8. a graphite rod; 9. a ceramic nut; 10. a ceramic rod; 11. a graphite nut; 12. a fixing ring; 13. a fixed block; 14. connecting blocks; 15. a support block; 16. a hex screw.
Detailed Description
The technical solutions in the embodiments of the present invention will be described clearly and completely with reference to the accompanying drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only some embodiments of the present invention, not all embodiments.
Referring to fig. 1-3, a graphite boat convenient for cleaning comprises a backing plate 1 and a plurality of graphite boat plates 3, wherein a plurality of silicon wafers 4 are arranged on one side of each graphite boat plate 3, a plurality of mounting holes are formed on one side of each graphite boat plate 3, a plurality of graphite rods 8 are inserted between the mounting holes, one ends of the graphite rods 8 penetrate through the graphite boat plates 3, one ends of the graphite rods 8 are movably connected with a plurality of filter screen plates 6, the graphite boat plates 3 and the filter screen plates 6 are arranged in a clearance manner, one sides of the graphite boat plates 3 and one sides of the filter screen plates 6 are respectively inserted and fixed in the mounting grooves of the backing plate 1, a protective frame 5 is fixed on one side edge of each filter screen plate 6 through bolts, one ends of the graphite rods 8 penetrate through the protective frame 5, the graphite boat plates 3 and the filter screen plates 6 are arranged in a clearance manner, two ceramic rods 10 and two metal rods 7 are respectively inserted and arranged on one sides of the graphite boat plates 3 and the filter screen plates 6, an operator penetrates two metal rods 7 and two ceramic rods 10 through a plurality of graphite boat plates 3 and a plurality of filter screen plates 6, one end of one ceramic rod 10 and one end of one metal rod 7 are respectively sleeved with a plurality of fixing blocks 13, one end of the other ceramic rod 10 and one end of the other metal rod 7 are respectively sleeved with a plurality of connecting blocks 14, when the whole device needs to be cleaned, hydrofluoric acid solution is respectively and evenly poured at the tops of the plurality of graphite boat plates 3, the hydrofluoric acid solution slides along the graphite boat plates 3 and cleans the surfaces of the graphite boat plates 3, one sides of the plurality of fixing blocks 13 and the plurality of connecting blocks 14 are respectively provided with a cleaning groove and a flow guide port, finally, the hydrofluoric acid solution is led out along the plurality of filter screen plates 6, the cleaning grooves and the flow guide ports, and the plurality of graphite boat plates 3 and the plurality of filter screen plates 6 are arranged in a clearance mode and are sleeved at one ends of the two ceramic rods 10 and the two, the solid waste is also filtered on the surface of the plurality of filter screen plates 6.
The working principle is as follows: when in use, an operator firstly fixes a plurality of support frames 2 at the bottom of a backing plate 1 through a plurality of hexagon screws 16, the operator screws the hexagon screws 16 one by using a mechanical wrench, lifts the backing plate 1 by the plurality of support frames 2, then arranges a plurality of graphite boat plates 3 and filter screen plates 6 in a clearance way, respectively inserts and fixes one sides of the graphite boat plates 3 and the filter screen plates 6 in the mounting groove of the backing plate 1, sequentially penetrates the graphite boat plates 3 and the filter screen plates 6 through a plurality of graphite rods 8, then screws a plurality of ceramic nuts 9 one by using the mechanical wrench, penetrates two metal rods 7 and two ceramic rods 10 through the graphite boat plates 3 and the filter screen plates 6, sleeves a plurality of fixed blocks 13 and a plurality of connecting blocks 14 on the two metal rods 7 and the two ceramic rods 10, sleeves a plurality of fixing rings 12 on the graphite rods 8, and sleeving the two supporting blocks 15 on the metal rod 7 and the ceramic rod 10 at the bottom, screwing the graphite nuts 11 one by an operator by using a mechanical wrench, after the installation is finished, performing film coating operation on the silicon wafer 4, when the whole device needs to be cleaned, uniformly pouring a hydrofluoric acid solution on the tops of the graphite boat plates 3 respectively, sliding the hydrofluoric acid solution along the graphite boat plates 3 and cleaning the surfaces of the graphite boat plates 3, finally, leading out the hydrofluoric acid solution along cleaning grooves and flow guide ports on the multiple filter screen plates 6, the multiple fixed blocks 13 and the multiple connecting blocks 14, and filtering solid garbage on the surfaces of the multiple filter screen plates 6 to finish the cleaning operation.
The above, only be the concrete implementation of the preferred embodiment of the present invention, but the protection scope of the present invention is not limited thereto, and any person skilled in the art is in the technical scope of the present invention, according to the technical solution of the present invention and the utility model, the concept of which is equivalent to replace or change, should be covered within the protection scope of the present invention.
In the description of this patent, it is to be understood that the terms "center," "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," "outer," and the like are used in the orientations and positional relationships indicated in the drawings for the convenience of describing the patent and for the simplicity of description, and are not intended to indicate or imply that the referenced devices or elements must have a particular orientation, be constructed and operated in a particular orientation, and are not to be considered limiting of the patent.
Claims (7)
1. A graphite boat convenient to clean comprises a backing plate (1) and a plurality of graphite boat plates (3), and is characterized in that a plurality of silicon wafers (4) are arranged on one side of each graphite boat plate (3), a plurality of mounting holes are formed in one side of each graphite boat plate (3), a plurality of graphite rods (8) are movably connected among the mounting holes, one end of each graphite rod (8) penetrates through the corresponding graphite boat plate (3), one end of each graphite rod (8) is movably connected with a plurality of filter screen plates (6), a protective frame (5) is arranged on one side edge of each filter screen plate (6), one end of each graphite rod (8) penetrates through the corresponding protective frame (5), the graphite boat plates (3) and the filter screen plates (6) are arranged in a clearance mode, the graphite boat plates (3) and the filter screen plates (6) are respectively and movably connected with two ceramic rods (10) and two metal rods (7), wherein one ceramic rod (10) and one of them metal pole (7) one end all is provided with a plurality of fixed blocks (13), another ceramic rod (10) and another metal pole (7) one end all are provided with a plurality of connecting blocks (14), and clean groove and water conservancy diversion mouth have all been seted up to a plurality of fixed blocks (13) and a plurality of connecting blocks (14) one side, and a plurality of graphite boat boards (3) and a plurality of filter screen board (6) clearance are arranged and swing joint in the one end of two ceramic rods (10) and two metal poles (7).
2. The graphite boat easy to clean as claimed in claim 1, wherein one end of each of the plurality of graphite rods (8) is provided with a ceramic nut (9).
3. The graphite boat easy to clean as claimed in claim 1, wherein the two ceramic rods (10) are each provided with a graphite nut (11) at one end.
4. The graphite boat as claimed in claim 2, wherein a plurality of the graphite rods (8) are provided at one end with a plurality of fixing rings (12).
5. The graphite boat convenient to clean as claimed in claim 1, wherein one of the ceramic rods (10) and one of the metal rods (7) are provided with a supporting block (15) at one end, and one side of the supporting block (15) is provided with an anti-slip pattern.
6. The graphite boat convenient to clean as claimed in claim 1, wherein the bottom of the backing plate (1) is provided with a plurality of support frames (2), and a plurality of screw holes are arranged on the support frames (2) and one side of the backing plate (1), and hexagonal screws (16) are movably connected in the screw holes.
7. The graphite boat convenient to clean as claimed in claim 1, wherein one side of the backing plate (1) is provided with a plurality of drainage grooves and a plurality of mounting grooves.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202021723361.6U CN212542380U (en) | 2020-08-18 | 2020-08-18 | Graphite boat convenient to clean |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202021723361.6U CN212542380U (en) | 2020-08-18 | 2020-08-18 | Graphite boat convenient to clean |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN212542380U true CN212542380U (en) | 2021-02-12 |
Family
ID=74528031
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202021723361.6U Active CN212542380U (en) | 2020-08-18 | 2020-08-18 | Graphite boat convenient to clean |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN212542380U (en) |
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2020
- 2020-08-18 CN CN202021723361.6U patent/CN212542380U/en active Active
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