CN212542352U - Indium carrier for determining needle-shaped sample by glow discharge mass spectrometer - Google Patents

Indium carrier for determining needle-shaped sample by glow discharge mass spectrometer Download PDF

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CN212542352U
CN212542352U CN202021647833.4U CN202021647833U CN212542352U CN 212542352 U CN212542352 U CN 212542352U CN 202021647833 U CN202021647833 U CN 202021647833U CN 212542352 U CN212542352 U CN 212542352U
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needle
sample
glow discharge
mass spectrometer
discharge mass
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姚力军
边逸军
潘杰
王学泽
钟伟华
任聪聪
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Ningbo Jiangfeng Electronic Material Co Ltd
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Ningbo Jiangfeng Electronic Material Co Ltd
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Abstract

The utility model provides an indium carrier for glow discharge mass spectrometer survey needle sample, an indium carrier for glow discharge mass spectrometer survey needle sample presents the stick-like, offers the hole on the terminal surface of its one end, and its side with the recess is offered to the corresponding position in hole, is equipped with the base at its other end. In the actual sample preparation process, the indium carrier is firstly erected on a table top through the base, then a fine needle-shaped sample is inserted into the hole, then the needle-shaped sample is fixed by applying pressure through the positioning of the groove, and then the whole body is fixed through a sample clamp in the glow discharge mass spectrometer and is measured. The utility model provides a bar-shaped indium carrier not only can used repeatedly, still can adjust the hole to the sample size because the texture is softer, neither can cause the sample to drop, need not to customize again, labour saving and time saving, convenient and fast, the extensive using widely of being convenient for.

Description

Indium carrier for determining needle-shaped sample by glow discharge mass spectrometer
Technical Field
The utility model belongs to the technical field of the semiconductor, a survey needle-like sample's carrier is related to, concretely relates to indium carrier that is used for glow discharge mass spectrograph survey needle-like sample.
Background
Glow Discharge Mass Spectrometry (GDMS) is an analysis method for Mass Spectrometry by using a Glow Discharge source as an ion source and connecting the Glow Discharge source with a Mass spectrometer, and is mainly used for detecting the content of trace elements in materials, and the corresponding analysis instrument is called a Glow Discharge Mass spectrometer. One of the core components of the glow discharge mass spectrometer is a glow discharge chamber, which is used for glow discharge of a sample to be detected and ionization into ion beams after neutral particles are sputtered. Aiming at the shape and size of a sample to be detected, the glow discharge chamber is divided into a sheet-shaped glow discharge chamber and a needle-shaped glow discharge chamber, wherein the size requirement of the sheet-shaped glow discharge chamber on the sheet-shaped sample to be detected is generally 20mm multiplied by 2mm, and the size requirement of the needle-shaped glow discharge chamber on the needle-shaped sample to be detected is generally 20mm multiplied by 2 mm. However, in the actual production, processing and use processes, the sample to be tested has various forms, including irregular block, powder, granule, chip, needle and the like, and cannot be effectively fixed by the sample clamp in the glow discharge chamber, which seriously hinders the GDMS analysis.
Aiming at the problem that a fine sample to be detected cannot be effectively fixed by a sample clamp in a glow discharge mass spectrometer, the prior art discloses a plurality of novel sample loading parts to be detected. For example, CN205374369U discloses a loading device for measuring powder samples by a glow discharge mass spectrometer, which includes a base, on which four vertical faces are disposed, wherein two vertical faces are parallel and oppositely arranged planes, and the other two vertical faces are circular arc faces for connecting the two planes; the center of base top surface sets up a through-hole detachably connects an elastic gasket in the through-hole, the diameter of gasket through-hole is 10 ~ 15 millimeters. Although the loading device can reduce the using amount of the powder sample, improve the pressing strength of the powder sample, and quickly and conveniently measure the powder sample by using the glow discharge mass spectrometer, the loading device is not suitable for glow discharge mass spectrometers of all models, greatly increases the instrument cost, and is not suitable for large-scale popularization.
CN210923569U discloses a sample table for testing small-size samples by a glow discharge mass spectrometer with the model number of ELEMENT GD, which consists of a high-purity copper sample table body and soldering tin, wherein a groove is formed in the high-purity copper sample table body, and the soldering tin is arranged in the groove; the diameter of the surface of the high-purity copper sample table body is 25 mm-50 mm, and the height is 5 mm-20 mm; the groove is a cylindrical groove, the diameter is more than 20mm, and the depth is more than or equal to 3 mm. The sample platform is provided with the groove through the high-purity copper body, and the proper amount of soldering tin is placed in the groove, so that a small-size sample can be fixed on the high-purity copper sample, the soldering tin can not expose the lower surface of the sample, and the influence of the soldering tin on the sample during testing is avoided.
In order to better analyze samples to be tested with various shapes and sizes by using GDMS, researchers improve and optimize the sample preparation method and develop a pressing method and a tantalum slot method. The pressing method is that a fine sample to be detected and conductive powder are uniformly mixed and then pressed into a sheet or a needle shape with qualified size through a special mold, and then the sheet or the needle shape is analyzed in a corresponding glow discharge chamber and is commonly used for powdery, granular and chip samples to be detected. The tantalum slot method is that a tantalum carrier with a sample slot is manufactured according to the size requirement of a sample feeding device, and a tiny sample to be tested is put into the sample slot for analysis.
However, if a pressing method is adopted for preparing a sample to be measured, fine needle-shaped samples are easy to introduce impurities, the accuracy of a measurement result is seriously influenced due to the problem of uneven mixing with conductive powder, and the method is not suitable for samples with low viscosity; if adopt the tantalum groove method to make appearance, not only cause the measurable area reduction of the sample that awaits measuring, reduce signal strength for the detection limit variation still can not be fixed because the sample that awaits measuring in the sample groove, drops from the sample groove easily, seriously influences detection speed, in addition, opens the tantalum carrier that has the sample groove and need customize, can't adjust again after the customization, greatly increased detection cost.
In view of the above, there is a need to develop an indium carrier for a glow discharge mass spectrometer to measure a needle-shaped sample, which can make a fine needle-shaped sample to be measured into a size that can be detected by GDMS without introducing impurities.
SUMMERY OF THE UTILITY MODEL
The utility model provides a not enough to prior art exists, the utility model provides an indium carrier for glow discharge mass spectrometer survey needle sample to set up the hole at the terminal surface of the one end of indium carrier, set up the recess to the side, at the actual system appearance in-process, stand the indium carrier on the desktop through the base earlier, insert tiny needle sample again in the hole, then pass through the location of recess is applyed pressure and is realized the fixed of needle sample, presss from both sides the sample through the sample in the glow discharge mass spectrometer afterwards and fixes and survey whole. The utility model provides a bar-shaped indium carrier not only can used repeatedly, still can adjust the hole to the sample size because the texture is softer, neither can cause the sample to drop, need not to customize again, labour saving and time saving, convenient and fast, the extensive using widely of being convenient for.
To achieve the purpose, the utility model adopts the following technical proposal:
an object of the utility model is to provide an indium carrier for glow discharge mass spectrometer survey needle sample, an indium carrier for glow discharge mass spectrometer survey needle sample presents the stick-like, offers the hole on the terminal surface of indium carrier one end, and in indium carrier side with the recess is offered to the corresponding position in hole, is equipped with the base at the indium carrier other end.
A indium carrier for glow discharge mass spectrometer survey needle sample sets up the hole on the terminal surface of one end to set up the recess on the side of same end, insert tiny needle sample in the hole, the rethread the location of recess is applyed pressure and is realized the fixed of needle sample, thereby makes the size of a dimension that available GDMS detected. Compared with the pressing method adopting conductive powder, the rod-shaped indium carrier provided by the utility model can be reused, and can be reused by cutting and acid washing even if polluted; compare in tantalum groove method, the utility model provides a bar-shaped indium carrier can adjust the hole to the sample size because the texture is softer, neither can cause the sample to drop, need not to customize again, labour saving and time saving, convenient and fast, the extensive using widely of being convenient for.
The needle-like sample of the present invention has a diameter of < 2mm and a length of 5-15mm, for example, 5mm, 7mm, 9mm, 10mm, 12mm, 14mm or 15mm, but is not limited to the values listed, and other values not listed in the numerical range are also applicable.
The preparation method of the indium carrier for determining the needle-shaped sample by the glow discharge mass spectrometer comprises the following steps:
(1) carrying out acid pickling treatment on indium ingots with the purity of more than or equal to 7N, and then putting the indium ingots into a mold;
(2) sequentially heating and cooling the die in the step (1) to obtain an indium carrier crude product with a base at one end;
(3) and (3) forming a hole in the end surface of the other end of the indium carrier crude product with the base at one end in the step (2), and forming a groove in the position, corresponding to the hole, of the side surface of the same end to obtain the indium carrier for measuring the needle-shaped sample by the glow discharge mass spectrometer.
Preferably, the acid washing treatment in the step (1) adopts concentrated nitric acid as acid washing liquid.
Preferably, the mold in step (1) is a polytetrafluoroethylene mold.
Preferably, the heating of step (2) is performed in a drying oven.
Preferably, the heating temperature in step (2) is 200-300 ℃, such as 200 ℃, 220 ℃, 240 ℃, 250 ℃, 260 ℃, 280 ℃ or 300 ℃, but not limited to the recited values, and other unrecited values within the range of values are equally applicable.
Preferably, the heating time in step (2) is 50-70min, such as 50min, 52min, 55min, 58min, 60min, 65min or 70min, but not limited to the recited values, and other values not recited in the range of values are also applicable.
Preferably, the cooling temperature in step (2) is 20-30 ℃, such as 20 ℃, 23 ℃, 25 ℃, 27 ℃, 29 ℃ or 30 ℃, but not limited to the recited values, and other values not recited in the range of values are equally applicable.
Preferably, the cooling time in step (2) is 30-40min, such as 30min, 31min, 33min, 35min, 37min, 39min or 40min, but not limited to the recited values, and other values not recited in the range of values are also applicable.
Preferably, the holes in the step (3) are formed by toothpicks.
Preferably, the grooves in the step (3) are formed by a flat head file.
The utility model discloses a use method for glow discharge mass spectrometer survey needle sample's indium carrier includes: firstly needle-shaped sample, polytetrafluoroethylene tweezers and an indium carrier for glow discharge mass spectrometer determination needle-shaped sample is pickled, then stands the indium carrier on the desktop through the base, adopts polytetrafluoroethylene tweezers to insert the needle-shaped sample in the hole, then adopt polytetrafluoroethylene tweezers to exert pressure under the location of recess, make the hole shrink and clamp tightly needle-shaped sample, then will wholly put into the glow discharge mass spectrometer that the model is VG9000 or Nu Astrum and survey.
Preferably, the acid washing treatment uses hydrofluoric acid and/or concentrated nitric acid as an acid washing solution.
Following conduct the utility model discloses preferred technical scheme, nevertheless do not conduct the utility model provides a technical scheme's restriction, through following technical scheme, can reach and realize better the utility model discloses a technical purpose and beneficial effect.
As a preferred technical solution of the present invention, the indium carrier for determining the needle-shaped sample by the glow discharge mass spectrometer has a cross-sectional shape of any one of a circle, a triangle, a rectangle, and a pentagon, preferably a circle, that is, the indium carrier has a cylindrical rod shape.
In a preferred embodiment of the present invention, the indium carrier used for the glow discharge mass spectrometer measurement of the needle-like sample has a length of 15 to 25mm, for example, 15mm, 17mm, 19mm, 20mm, 22mm, 24mm or 25mm, and an equivalent diameter of 3.5 to 4.5mm, for example, 3.5mm, 3.7mm, 3.9mm, 4mm, 4.2mm, 4.4mm or 4.5mm, but is not limited to the above-mentioned values, and other values not listed in the above-mentioned range of values are also applicable.
The utility model provides a shape and size of bar-shaped indium carrier with glow discharge mass spectrograph in the size requirement unanimous can, technical personnel in the field can carry out reasonable selection according to actual conditions.
As the utility model discloses preferred technical scheme, the degree of depth of hole is greater than half of the needle-like sample length that awaits measuring, and is less than the needle-like sample length that awaits measuring.
The degree of depth restriction of hole not only can guarantee to press from both sides tight more than half of sample after follow-up hole shrink fixedly, prevents dropping of sample, can also prevent the inside cavity that produces of hole, causes the influence to glow discharge mass spectrograph's survey.
In a preferred embodiment of the present invention, the diameter of the hole is 2-3mm, such as 2mm, 2.3mm, 2.5mm, 2.7mm, 2.9mm or 3mm, but not limited to the values listed, and other values not listed in the numerical range are also applicable.
As the utility model discloses preferred technical scheme, the recess presents the ring-type, and the pressure of applying when can guaranteeing follow-up fixed needle sample is even unanimous.
In a preferred embodiment of the present invention, the width of the groove is 2-4mm, such as 2mm, 2.5mm, 3mm, 3.5mm or 4mm, and the depth is 1-2mm, such as 1mm, 1.2mm, 1.4mm, 1.5mm, 1.7mm, 1.9mm or 2mm, but the invention is not limited to the values listed, and other values not listed in the above range of values are also applicable.
As the utility model discloses preferred technical scheme, the central line of recess with set up distance between the terminal surface of hole is less than the two-thirds of the hole degree of depth, and is greater than the one-third of the hole degree of depth.
As the preferred technical scheme of the utility model, the cross sectional shape of base with be used for glow discharge mass spectrometer survey needle sample's indium carrier's cross sectional shape the same.
The cross sectional shape of base can be the same with the cross sectional shape of indium carrier, also can be different, as long as reach firm purpose can, technical personnel in the field can carry out the rational selection according to actual conditions.
In a preferred embodiment of the present invention, the base has an equivalent diameter of 6 to 8mm, for example, 6mm, 6.5mm, 7mm, 7.5mm, or 8mm, but the number is not limited to the above-mentioned values, and other values not listed in the above-mentioned range of values are also applicable.
Compared with the prior art, the beneficial effects of the utility model are that:
(1) the utility model provides an indium carrier for glow discharge mass spectrometer survey needle sample to set up the hole at the terminal surface of one end of indium carrier, set up the recess to the side, in the actual system appearance in-process, stand the indium carrier on the desktop through the base earlier, insert tiny needle sample in the hole again, then through the location of recess is exerted pressure and is realized the fixing of needle sample, later through the sample clamp in the glow discharge mass spectrometer whole fixed and survey, labour saving and time saving, convenient and fast is convenient for use widely on a large scale;
(2) to tiny needle-shaped sample, an indium carrier for glow discharge mass spectrometer survey needle-shaped sample, not only can used repeatedly, even receive the pollution, also can be through excision and pickling processing reuse, still because the texture is softer can adjust the hole to the sample size, neither can cause the sample to drop, need not to customize again.
Drawings
Fig. 1 is a schematic diagram of an indium carrier for a glow discharge mass spectrometer for measuring a needle-shaped sample according to embodiment 1 of the present invention;
FIG. 2 is a schematic diagram of a tantalum carrier according to comparative example 1 of the present invention;
wherein, 1-hole; 2-a groove; 3-a base; 4-sample tank.
Detailed Description
The technical solutions in the embodiments of the present invention will be described clearly and completely with reference to the accompanying drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only some embodiments of the present invention, not all embodiments. Based on the embodiments in the present invention, all other embodiments obtained by a person skilled in the art without creative efforts belong to the protection scope of the present invention.
It should be noted that, if directional indications (such as up, down, left, right, front, back, inside, outside, etc.) are involved in the embodiments of the present invention, the directional indications are only used to explain the relative position relationship between the components, the motion situation, etc. in a specific posture (as shown in the drawings), and if the specific posture is changed, the directional indications are correspondingly changed accordingly.
The following are typical but non-limiting examples of the present invention:
example 1
The embodiment provides an indium carrier for determining a needle-shaped sample by a glow discharge mass spectrometer, which is used for preparing a sample of the needle-shaped sample with the diameter less than 2mm and the length of 8mm, as shown in fig. 1, the indium carrier for determining the needle-shaped sample by the glow discharge mass spectrometer is rod-shaped, a hole 1 is formed in the end face of one end of the indium carrier, a groove 2 is formed in the side face of the indium carrier corresponding to the hole 1, and a base 3 is arranged at the other end of the indium carrier;
the indium carrier for determining the needle-shaped sample by the glow discharge mass spectrometer is circular in section, 20mm in length and 4mm in equivalent diameter;
the depth of the hole 1 is more than half of the length of the needle-shaped sample to be detected and less than the length of the needle-shaped sample to be detected, and the diameter of the hole 1 is 2.5 mm;
the groove 2 is annular, the width is 2.5mm, the depth is 1.5mm, and the distance between the middle line of the groove 2 and the end surface provided with the hole 1 is less than two thirds of the depth of the hole 1 and more than one third of the depth of the hole 1;
the cross section of the base 3 is the same as that of the indium carrier for determining the needle-shaped sample by the glow discharge mass spectrometer, namely, the cross section is circular, and the diameter of the base 3 is 7 mm.
Firstly, carrying out acid pickling treatment on the needle-shaped sample, polytetrafluoroethylene tweezers and an indium carrier for determining the needle-shaped sample by a glow discharge mass spectrometer by concentrated nitric acid, then standing the indium carrier on a table top through a base 3, then adopting the polytetrafluoroethylene tweezers to insert the needle-shaped sample into a hole 1, and then adopting the polytetrafluoroethylene tweezers to apply pressure under the positioning of a groove 2, so that the hole 1 shrinks and clamps the needle-shaped sample, and then putting the whole body into the glow discharge mass spectrometer with the model of VG9000 for determination.
By adopting the indium carrier for determining the needle-shaped sample by the glow discharge mass spectrometer, the needle-shaped sample is not dropped, and the repeatability of the measuring result is high.
Example 2
The embodiment provides an indium carrier for determining a needle-shaped sample by a glow discharge mass spectrometer, which is used for preparing a sample of the needle-shaped sample with the diameter less than 2mm and the length of 5mm, wherein the indium carrier for determining the needle-shaped sample by the glow discharge mass spectrometer is rod-shaped, a hole 1 is formed in the end face of one end of the indium carrier, a groove 2 is formed in the side face of the indium carrier corresponding to the hole 1, and a base 3 is arranged at the other end of the indium carrier;
the indium carrier for determining the needle-shaped sample by the glow discharge mass spectrometer is circular in cross section, 15mm in length and 3.5mm in diameter;
the depth of the hole 1 is more than half of the length of the needle-shaped sample to be detected and less than the length of the needle-shaped sample to be detected, and the diameter of the hole 1 is 2 mm;
the groove 2 is annular, the width is 2mm, the depth is 1mm, and the distance between the center line of the groove 2 and the end face provided with the hole 1 is less than two thirds of the depth of the hole 1 and more than one third of the depth of the hole 1;
the cross section of the base 3 is the same as that of the indium carrier for determining the needle-shaped sample by the glow discharge mass spectrometer, namely, the cross section is circular, and the diameter of the base 3 is 6 mm.
Firstly, carrying out acid pickling treatment on the needle-shaped sample, polytetrafluoroethylene tweezers and an indium carrier for determining the needle-shaped sample by a glow discharge mass spectrometer by concentrated nitric acid, then standing the indium carrier on a table top through a base 3, then adopting the polytetrafluoroethylene tweezers to insert the needle-shaped sample into a hole 1, and then adopting the polytetrafluoroethylene tweezers to apply pressure under the positioning of a groove 2, so that the hole 1 shrinks and clamps the needle-shaped sample, and then putting the whole body into the glow discharge mass spectrometer with the model of VG9000 for determination.
By adopting the indium carrier for determining the needle-shaped sample by the glow discharge mass spectrometer, the needle-shaped sample is not dropped, and the repeatability of the measuring result is high.
Example 3
The embodiment provides an indium carrier for determining a needle-shaped sample by a glow discharge mass spectrometer, which is used for preparing a sample of the needle-shaped sample with the diameter less than 2mm and the length of 15mm, wherein the indium carrier for determining the needle-shaped sample by the glow discharge mass spectrometer is rod-shaped, a hole 1 is formed in the end face of one end of the indium carrier, a groove 2 is formed in the side face of the indium carrier corresponding to the hole 1, and a base 3 is arranged at the other end of the indium carrier;
the indium carrier for determining the needle-shaped sample by the glow discharge mass spectrometer is circular in cross section, 25mm in length and 4.5mm in diameter;
the depth of the hole 1 is more than half of the length of the needle-shaped sample to be detected and less than the length of the needle-shaped sample to be detected, and the diameter of the hole 1 is 3 mm;
the groove 2 is annular, the width is 4mm, the depth is 2mm, and the distance between the center line of the groove 2 and the end face provided with the hole 1 is less than two thirds of the depth of the hole 1 and more than one third of the depth of the hole 1;
the cross section of the base 3 is the same as that of the indium carrier for determining the needle-shaped sample by the glow discharge mass spectrometer, namely, the cross section is circular, and the diameter of the base 3 is 8 mm.
Will earlier needle sample, polytetrafluoroethylene tweezers with the indium carrier that is used for glow discharge mass spectrometer survey needle sample carries out the pickling of concentrated nitric acid and handles, then stands the indium carrier on the desktop through base 3, adopts polytetrafluoroethylene tweezers will again the needle sample inserts in hole 1, afterwards adopt polytetrafluoroethylene tweezers to exert pressure under the location of recess 2, make 1 shrink in hole presss from both sides tightly the needle sample, then will wholly put into the model and survey in the glow discharge mass spectrometer of Nu Astrum.
By adopting the indium carrier for determining the needle-shaped sample by the glow discharge mass spectrometer, the needle-shaped sample is not dropped, and the repeatability of the measuring result is high.
Comparative example 1
The present comparative example provides a tantalum carrier having a long rod shape with a diameter of 4mm, a length of 20mm and a circular cross-sectional shape, and a sample groove with a length of 8mm, a width of 3mm and a depth of 5mm opened in a side surface of the tantalum carrier, as shown in fig. 2.
The needle-like sample of example 1 was first placed in the sample holder and the whole was subsequently measured in a glow discharge mass spectrometer model VG 9000.
By adopting the comparative example to prepare the sample by the tantalum carrier, the needle-shaped sample often drops, so that the measurement cannot be smoothly carried out, and the tantalum carrier with the sample groove belongs to customization, so that the measurement cost is increased.
To sum up, the utility model provides an indium carrier for glow discharge mass spectrometer survey needle sample to set up the hole at the terminal surface of one end of indium carrier, set up the recess to the side, in the actual system appearance in-process, stand the indium carrier on the desktop through the base earlier, insert tiny needle sample in the hole again, then through the location of recess applys pressure and realizes the fixing of needle sample, later through the sample clamp in the glow discharge mass spectrometer whole fix and survey, labour saving and time saving, convenient and fast, be convenient for use widely on a large scale; moreover, to tiny needle-like sample, an indium carrier for glow discharge mass spectrometer survey needle-like sample, not only can used repeatedly, even receive the pollution, also can be through excision and pickling processing reuse, still because the texture softer can adjust the hole to the sample size, neither can cause the sample to drop, need not to customize again.
The applicant states that the above description is only a specific embodiment of the present invention, but the protection scope of the present invention is not limited thereto, and those skilled in the art should understand that any changes or substitutions easily conceivable by those skilled in the art within the technical scope of the present invention are within the protection scope and the disclosure scope of the present invention.

Claims (10)

1. The indium carrier for the glow discharge mass spectrometer to measure the needle-shaped sample is characterized by being rod-shaped, a hole is formed in the end face of one end of the indium carrier, a groove is formed in the side face of the indium carrier corresponding to the hole, and a base is arranged at the other end of the indium carrier.
2. The indium carrier for glow discharge mass spectrometer measurement needle-shaped samples according to claim 1, wherein the cross-sectional shape of the indium carrier for glow discharge mass spectrometer measurement needle-shaped samples is any one of a circle, a triangle, a rectangle or a pentagon.
3. The indium carrier for glow discharge mass spectrometer measurement needle-shaped samples according to claim 1 or 2, wherein the indium carrier for glow discharge mass spectrometer measurement needle-shaped samples is 15-25mm in length and 3.5-4.5mm in equivalent diameter.
4. The indium carrier for the glow discharge mass spectrometer for measuring the needle-shaped sample according to claim 1, wherein the depth of the hole is more than half of the length of the needle-shaped sample to be measured and less than the length of the needle-shaped sample to be measured.
5. The indium carrier for glow discharge mass spectrometer measurement of needle-like samples according to claim 4, wherein the diameter of the hole is 2-3 mm.
6. The indium carrier for glow discharge mass spectrometer measurement of needle-like samples according to claim 1, wherein said groove is in the shape of a ring.
7. The indium carrier for glow discharge mass spectrometer measurement of needle-like samples according to claim 6, wherein the groove has a width of 2-4mm and a depth of 1-2 mm.
8. The indium carrier for the glow discharge mass spectrometer for the measurement of the needle-shaped sample according to claim 6 or 7, wherein the distance between the middle line of the groove and the end surface provided with the hole is less than two thirds of the depth of the hole and more than one third of the depth of the hole.
9. The indium carrier for glow discharge mass spectrometer measurement needle-like samples according to claim 1, wherein the cross-sectional shape of the mount is the same as the cross-sectional shape of the indium carrier for glow discharge mass spectrometer measurement needle-like samples.
10. The indium carrier for glow discharge mass spectrometer measurement of needle-like samples according to claim 9, wherein the equivalent diameter of the mount is 6-8 mm.
CN202021647833.4U 2020-08-10 2020-08-10 Indium carrier for determining needle-shaped sample by glow discharge mass spectrometer Active CN212542352U (en)

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Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN113030237A (en) * 2021-03-01 2021-06-25 宁波江丰电子材料股份有限公司 Sample preparation method of molybdenum chips in glow discharge mass spectrometry
CN113237945A (en) * 2021-05-14 2021-08-10 宁波江丰电子材料股份有限公司 Sample preparation method of high-purity indium in glow discharge mass spectrum
CN115436460A (en) * 2022-09-29 2022-12-06 宁波江丰电子材料股份有限公司 Glow discharge mass spectrum detection method for tantalum powder

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN113030237A (en) * 2021-03-01 2021-06-25 宁波江丰电子材料股份有限公司 Sample preparation method of molybdenum chips in glow discharge mass spectrometry
CN113237945A (en) * 2021-05-14 2021-08-10 宁波江丰电子材料股份有限公司 Sample preparation method of high-purity indium in glow discharge mass spectrum
CN115436460A (en) * 2022-09-29 2022-12-06 宁波江丰电子材料股份有限公司 Glow discharge mass spectrum detection method for tantalum powder

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