CN212531576U - Receive and release membrane device - Google Patents
Receive and release membrane device Download PDFInfo
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- CN212531576U CN212531576U CN202021205621.0U CN202021205621U CN212531576U CN 212531576 U CN212531576 U CN 212531576U CN 202021205621 U CN202021205621 U CN 202021205621U CN 212531576 U CN212531576 U CN 212531576U
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Abstract
The application discloses a film collecting and releasing device, which comprises a film releasing component and a film collecting component matched with the film releasing component; put the membrane subassembly including putting the membrane riser, rotate and install in putting the membrane roller of putting the membrane riser, be used for the drive to put membrane roller pivoted and put membrane actuating mechanism, rotate and install in the former material roller of putting the membrane riser, install in the first band pulley of former material roller, install in the electromagnetic brake piece of putting the membrane riser, install the second band pulley on the electromagnetic brake piece to and locate the first driving belt between first band pulley and the second band pulley. Be provided with on putting the membrane riser with raw materials roller matched with electromagnetic brake block, consequently put the membrane roller and rotate and when rotating through raw materials membrane pulling raw materials roller, the raw materials roller can receive certain resistance, and raw materials roller pivoted speed is unlikely to too fast, puts the raw materials membrane between membrane roller and the raw materials roller and can keep the tensioning state, and then makes the membrane of moving to wafer department comparatively level and smooth, and the pad pasting yields is high.
Description
Technical Field
The application relates to the field of film sticking equipment, in particular to a film winding and unwinding device.
Background
In the film sticking process of products such as wafers and the like, a raw material film needs to be provided for the wafers, waste materials formed by cutting after the film sticking of the raw material film is completed need to be rolled and recycled, and the process is completed by a film collecting and releasing device. The film receiving and releasing device has the advantages that in the film releasing process, the rotating shaft is loose, the film conveying speed is high, the film is loose, the tensioning state cannot be kept, and the subsequent film pasting effect is poor.
SUMMERY OF THE UTILITY MODEL
An object of the application is to provide a receive and release membrane device, aim at solving prior art, the unable problem that keeps the tension state of raw materials membrane when putting the membrane.
To achieve the purpose, the embodiment of the application adopts the following technical scheme:
the film collecting and releasing device comprises a film collecting component and a film releasing component, wherein the film collecting component is matched with the film releasing component; the film placing assembly comprises a film placing vertical plate, a film placing roller rotatably arranged on the film placing vertical plate, a film placing driving mechanism used for driving the film placing roller to rotate, a raw material roller rotatably arranged on the film placing vertical plate, a first belt wheel arranged on the raw material roller, an electromagnetic brake pad arranged on the film placing vertical plate, a second belt wheel arranged on the electromagnetic brake pad, and a first transmission belt arranged between the first belt wheel and the second belt wheel.
In one embodiment, the film placing vertical plate is also provided with a film placing pressing mechanism; the film placing and pressing mechanism comprises a film placing and pressing cylinder arranged on the film placing vertical plate, a film placing and pressing frame arranged at the movable end of the film placing and pressing cylinder, and a film placing and pressing roller rotatably arranged on the film placing and pressing frame; the film releasing and pressing roller is opposite to the film releasing roller.
In one embodiment, the film releasing assembly further comprises a film separating plate mounted on the film releasing vertical plate, a film winding roller rotatably mounted on the film releasing vertical plate, and a film winding driving mechanism for driving the film winding roller to rotate.
In one embodiment, the film releasing assembly further comprises a film covering tensioning mechanism arranged on the film releasing vertical plate; tectorial membrane straining device including rotate install in put the tectorial membrane tensioning support of membrane riser, install in a plurality of tectorial membrane tensioning rollers of tectorial membrane tensioning support, and be used for the drive tectorial membrane tensioning support pivoted tectorial membrane tensioning cylinder.
In one embodiment, the film winding driving mechanism comprises a film driving motor mounted on the film releasing vertical plate, a third belt wheel mounted on the film winding roller, a fourth belt wheel mounted on the film driving motor, and a second transmission belt arranged between the third belt wheel and the fourth belt wheel.
In one embodiment, the film placing driving mechanism comprises a film placing driving motor mounted on the film placing vertical plate, a fifth belt wheel mounted on the film placing roller, a sixth belt wheel mounted on the film placing driving motor, and a third transmission belt arranged between the fifth belt wheel and the sixth belt wheel.
In one embodiment, a detection bracket is further arranged on the film placing vertical plate, and an ultrasonic sensor for detecting the thickness of the raw material film on the raw material roller is mounted on the detection bracket.
In one embodiment, the film collecting assembly comprises a film collecting vertical plate, a film collecting roller rotatably mounted on the film collecting vertical plate, and a film collecting driving mechanism for driving the film collecting roller to rotate.
In one embodiment, the film collecting driving mechanism comprises a film collecting driving motor installed on the film collecting vertical plate, a seventh belt wheel installed on the film collecting roller, an eighth belt wheel installed on the film collecting driving motor, and a fourth transmission belt arranged between the seventh belt wheel and the eighth belt wheel.
In one embodiment, the film collecting assembly further comprises a film collecting tensioning mechanism mounted on the film collecting vertical plate, and an electrostatic fan mounted on the film collecting vertical plate; the film collecting and tensioning mechanism comprises a film collecting and tensioning support rotatably mounted on the film collecting vertical plate, a plurality of film collecting and tensioning rollers rotatably mounted on the film collecting and tensioning support, and a film collecting and tensioning cylinder used for driving the film collecting and tensioning support to rotate; the film collecting tensioning cylinder and the film collecting tensioning support are respectively positioned on two opposite sides of the film collecting vertical plate.
The beneficial effects of the embodiment of the application are as follows: be provided with on putting the membrane riser with raw materials roller matched with electromagnetic brake block, consequently put the membrane roller and rotate and when rotating through raw materials membrane pulling raw materials roller, the raw materials roller can receive certain resistance, and raw materials roller pivoted speed is unlikely to too fast, puts the raw materials membrane between membrane roller and the raw materials roller and can keep the tensioning state, and then makes the membrane of moving to wafer department comparatively level and smooth, and the pad pasting yields is high.
Drawings
In order to more clearly illustrate the technical solutions in the embodiments of the present application, the drawings needed to be used in the embodiments or the prior art descriptions will be briefly described below, and it is obvious that the drawings in the following description are only some embodiments of the present application, and it is obvious for those skilled in the art to obtain other drawings without creative efforts.
FIG. 1 is a schematic diagram illustrating a first view of a film take-up and pay-off device according to an embodiment of the present disclosure;
FIG. 2 is a schematic diagram of a second viewing angle of a film take-up and pay-off device according to an embodiment of the present disclosure;
FIG. 3 is a schematic diagram illustrating a third viewing angle of a film take-up and pay-off device according to an embodiment of the present disclosure;
in the figure:
1. placing the membrane assembly; 11. placing a film vertical plate; 111. detecting the bracket; 1111. an ultrasonic sensor; 12. a film releasing roller; 13. a film placing driving mechanism; 131. a film placing driving motor; 133. a fifth belt pulley; 134. a third belt; 14. a raw material roller; 15. a first pulley; 16. an electromagnetic brake pad; 17. a second pulley; 18. a first drive belt; 19. a film covering and tensioning mechanism; 191. covering a membrane to tension the stent; 192. a film covering tension roller; 193. a film covering tensioning cylinder;
2. a film collecting component; 21. collecting a film vertical plate; 22. a film collecting roller; 23. a film collecting driving mechanism; 231. a film collecting driving motor; 232. a seventh pulley; 234. a fourth belt; 24. a film collecting and tensioning mechanism; 241. a film collecting and tensioning support; 242. a film collecting tensioning roller; 243. a film collecting and tensioning cylinder; 25. a static electric fan;
3. a film placing and pressing mechanism; 31. a film releasing and pressing cylinder; 32. placing a film and pressing a frame; 33. placing a film pressing roller;
4. a membrane separation plate;
5. a film-covered wind-up roller;
6. a film covering and winding driving mechanism; 61. a film covering driving motor; 62. a third belt pulley; 63. a fourth pulley; 64. a second belt.
Detailed Description
In order to make the objects, technical solutions and advantages of the present application more apparent, the present application is described in further detail below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are merely illustrative of the present application and are not intended to limit the present application.
It will be understood that when an element is referred to as being "secured to" or "disposed on" another element, it can be directly on the other element or be indirectly on the other element. When an element is referred to as being "connected to" another element, it can be directly connected to the other element or be indirectly connected to the other element.
It will be understood that the terms "length," "width," "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," "outer," and the like, refer to an orientation or positional relationship illustrated in the drawings for convenience in describing the present application and to simplify description, and do not indicate or imply that the referenced device or element must have a particular orientation, be constructed and operated in a particular orientation, and thus should not be construed as limiting the present application.
Furthermore, the terms "first", "second" and "first" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of that feature. In the description of the present application, "a plurality" means two or more unless specifically limited otherwise.
The following detailed description of implementations of the present application is provided in conjunction with specific embodiments.
As shown in fig. 1-3, an embodiment of the present application provides a film retracting device, which includes a film retracting assembly 1 and a film retracting assembly 2, where the film retracting assembly is matched with the film retracting assembly 1; the film releasing assembly 1 comprises a film releasing vertical plate 11, a film releasing roller 12 rotatably mounted on the film releasing vertical plate 11, a film releasing driving mechanism 13 for driving the film releasing roller 12 to rotate, a raw material roller 14 rotatably mounted on the film releasing vertical plate 11, a first belt wheel 15 mounted on the raw material roller 14, an electromagnetic brake pad 16 mounted on the film releasing vertical plate 11, a second belt wheel 17 mounted on the electromagnetic brake pad 16, and a first transmission belt 18 arranged between the first belt wheel 15 and the second belt wheel 17.
In the embodiment of the application, the film collecting and releasing process of the film collecting and releasing device is as follows: put the raw materials roller 14 of membrane module 1 and roll up and be equipped with the raw materials membrane, put membrane actuating mechanism 13 and drive and put membrane roller 12 and rotate, put membrane roller 12 and drive raw materials roller 14 through the pulling raw materials membrane when rotating and rotate for the raw materials membrane is to being close to the direction motion of receiving membrane module 2, the tectorial membrane and the dry film separation back of raw materials membrane, the dry film pastes the surface of locating products such as wafer, the quilt that does not paste the cover is cut into the waste film, and is received the rolling of membrane module 2. Because the electromagnetic brake block 16 matched with the raw material roller 14 is arranged on the film placing vertical plate 11, when the film placing roller 12 rotates and the raw material roller 14 is pulled to rotate through a raw material film, the raw material roller 14 can bear certain resistance, the rotating speed of the raw material roller 14 is not too high, the raw material film between the film placing roller 12 and the raw material roller 14 can keep a tensioning state, the film moving to a wafer position is smooth, and the film sticking yield is high.
Referring to fig. 1-2, as another embodiment of the film winding and unwinding device provided in the present application, a film winding and unwinding vertical plate 11 is further provided with a film winding and unwinding pressing mechanism 3; the film releasing and pressing mechanism 3 comprises a film releasing and pressing cylinder 31 arranged on the film releasing vertical plate 11, a film releasing and pressing frame 32 arranged at the movable end of the film releasing and pressing cylinder 31, and a film releasing and pressing roller 33 rotatably arranged on the film releasing and pressing frame 32; the film placing pressure roller 33 is arranged opposite to the film placing roller 12. The film placing and pressing roller 33 can press the raw material film with the film placing roller 12, so that the raw material roller 14 can be smoothly pulled to rotate when the film placing roller 12 rotates.
Referring to fig. 1-2, as another specific embodiment of the film winding and unwinding device provided in the present application, the film winding and unwinding assembly 1 further includes a film separating plate 4 mounted on the film winding and unwinding plate 11, a film winding roller 5 rotatably mounted on the film winding and unwinding plate 11, and a film winding and driving mechanism 6 for driving the film winding roller 5 to rotate. The raw material film is divided into a dry film and a coating film at the position of the film separating plate 4, the dry film is provided with glue and used for being attached to the surface of a wafer, and the coating film is wound and recovered by a coating film winding roller 5.
Referring to fig. 1-2, as another embodiment of the film releasing and releasing device provided in the present application, the film releasing assembly 1 further includes a film tensioning mechanism 19 mounted on the film releasing vertical plate 11; the film tensioning mechanism 19 comprises a film tensioning bracket 191 rotatably mounted on the film placing vertical plate 11, a plurality of film tensioning rollers 192 mounted on the film tensioning bracket 191, and a film tensioning cylinder 193 for driving the film tensioning bracket 191 to rotate. When the film tensioning cylinder 193 drives the film tensioning support 191 to rotate, the film tensioning roller 192 on the film tensioning support 191 can also move by a certain angle, and the film wound on the film tensioning roller 192 can be tightly pressed.
Referring to fig. 1-2, as another embodiment of the film winding and unwinding device provided in the present application, the film winding and unwinding driving mechanism 6 includes a film tension motor 61 mounted on the film unwinding vertical plate 11, a third pulley 62 mounted on the film winding roller 5, a fourth pulley 63 mounted on the film tension motor 61, and a second transmission belt 64 disposed between the third pulley 62 and the fourth pulley 63. The film coating driving motor 61 drives the fourth belt wheel 63 to rotate, the fourth belt wheel 63 drives the third belt wheel 62 to rotate through the second transmission belt 64, and then the film coating wind-up roll 5 is driven to rotate.
Referring to fig. 1-2, as another embodiment of the film releasing and collecting device provided in the present application, the film releasing driving mechanism 13 includes a film releasing driving motor 131 installed on the film releasing vertical plate 11, a fifth belt pulley 133 installed on the film releasing roller 12, a sixth belt pulley installed on the film releasing driving motor 131, and a third driving belt 134 installed between the fifth belt pulley 133 and the sixth belt pulley. Put membrane driving motor 131 and drive the sixth band pulley and rotate, the sixth band pulley drives fifth band pulley 133 through third drive belt 134 and rotates, and then realizes driving and put the rotation of membrane roller 12.
Referring to fig. 1-2, as another embodiment of the film winding and unwinding device provided in the present application, a detection bracket 111 is further disposed on the film winding and unwinding vertical plate 11, and an ultrasonic sensor 1111 for detecting the thickness of the raw material film on the raw material roller 14 is mounted on the detection bracket 111 to detect the remaining amount of the raw material film on the raw material roller 14 in real time.
Referring to fig. 1-2, as another embodiment of the film collecting and releasing device provided in the present application, the film collecting assembly 2 includes a film collecting vertical plate 21, a film collecting roller 22 rotatably mounted on the film collecting vertical plate 21, and a film collecting driving mechanism 23 for driving the film collecting roller 22 to rotate. The film collecting driving mechanism 23 drives the film collecting roller 22 to rotate, and the waste film cut from the edge of the wafer is collected.
Referring to fig. 1-2, as another embodiment of the film winding and unwinding device provided in the present application, the film winding driving mechanism 23 includes a film winding driving motor 231 mounted on the film winding vertical plate 21, a seventh pulley 232 mounted on the film winding roller 22, an eighth pulley mounted on the film winding driving motor 231, and a fourth transmission belt 234 disposed between the seventh pulley 232 and the eighth pulley. Receive membrane driving motor 231 and drive the eighth band pulley and rotate, and the eighth band pulley drives seventh band pulley 232 through fourth drive belt 234 and rotates, and then drives to receive membrane roller 22 and rotate.
Referring to fig. 2-3, as another specific embodiment of the film collecting and releasing device provided in the present application, the film collecting assembly 2 further includes a film collecting tensioning mechanism 24 mounted on the film collecting vertical plate 21, and an electrostatic fan 25 mounted on the film collecting vertical plate 21, so as to remove the static electricity on the surface of the waste film and facilitate the subsequent winding operation; the film collecting and tensioning mechanism 24 comprises a film collecting and tensioning support 241 rotatably mounted on the film collecting vertical plate 21, a plurality of film collecting and tensioning rollers 242 rotatably mounted on the film collecting and tensioning support 241, and a film collecting and tensioning cylinder 243 for driving the film collecting and tensioning support 241 to rotate; the film collecting tensioning cylinder 243 and the film collecting tensioning support 241 are respectively located on two opposite sides of the film collecting vertical plate 21. Receive membrane tensioning cylinder 243 and drive and receive membrane tensioning support 241 and rotate, receive membrane tensioning roller 242 and rotate along with receiving membrane tensioning support 241, and then with the waste film tensioning for receive that membrane roller 22 can be better with the waste film rolling.
It is to be understood that aspects of the present invention may be practiced otherwise than as specifically described.
It should be understood that the above examples are merely examples for clearly illustrating the present application, and are not intended to limit the embodiments of the present application. Other variations and modifications will be apparent to persons skilled in the art in light of the above description. And are neither required nor exhaustive of all embodiments. Any modification, equivalent replacement, and improvement made within the spirit and principle of the present application shall be included in the protection scope of the claims of the present application.
Claims (10)
1. The film collecting and releasing device is characterized by comprising a film collecting component and a film releasing component, wherein the film collecting component is matched with the film releasing component; the film placing assembly comprises a film placing vertical plate, a film placing roller rotatably arranged on the film placing vertical plate, a film placing driving mechanism used for driving the film placing roller to rotate, a raw material roller rotatably arranged on the film placing vertical plate, a first belt wheel arranged on the raw material roller, an electromagnetic brake pad arranged on the film placing vertical plate, a second belt wheel arranged on the electromagnetic brake pad, and a first transmission belt arranged between the first belt wheel and the second belt wheel.
2. The film collecting and releasing device according to claim 1, wherein a film collecting and releasing pressing mechanism is further mounted on the film collecting vertical plate; the film placing and pressing mechanism comprises a film placing and pressing cylinder arranged on the film placing vertical plate, a film placing and pressing frame arranged at the movable end of the film placing and pressing cylinder, and a film placing and pressing roller rotatably arranged on the film placing and pressing frame; the film releasing and pressing roller is opposite to the film releasing roller.
3. The film collecting and releasing device according to claim 1, wherein the film releasing assembly further comprises a film separating plate mounted on the film releasing vertical plate, a film winding roller rotatably mounted on the film releasing vertical plate, and a film winding driving mechanism for driving the film winding roller to rotate.
4. The film collecting and releasing device according to claim 3, wherein the film releasing assembly further comprises a film covering tensioning mechanism arranged on the film releasing vertical plate; tectorial membrane straining device including rotate install in put the tectorial membrane tensioning support of membrane riser, install in a plurality of tectorial membrane tensioning rollers of tectorial membrane tensioning support, and be used for the drive tectorial membrane tensioning support pivoted tectorial membrane tensioning cylinder.
5. The film winding and unwinding device according to claim 3, wherein the film winding and unwinding driving mechanism comprises a film driving motor mounted on the film unwinding vertical plate, a third belt wheel mounted on the film winding roller, a fourth belt wheel mounted on the film driving motor, and a second transmission belt arranged between the third belt wheel and the fourth belt wheel.
6. The film unwinding and winding device according to claim 1, wherein the film unwinding driving mechanism comprises a film unwinding driving motor mounted on the film unwinding vertical plate, a fifth belt wheel mounted on the film unwinding roller, a sixth belt wheel mounted on the film unwinding driving motor, and a third transmission belt arranged between the fifth belt wheel and the sixth belt wheel.
7. The film collecting and releasing device according to claim 1, wherein a detection bracket is further arranged on the film collecting vertical plate, and an ultrasonic sensor for detecting the thickness of the raw material film on the raw material roller is mounted on the detection bracket.
8. The film collecting and releasing device according to any one of claims 1 to 7, wherein the film collecting assembly comprises a film collecting vertical plate, a film collecting roller rotatably mounted on the film collecting vertical plate, and a film collecting driving mechanism for driving the film collecting roller to rotate.
9. The film collecting and releasing device according to claim 8, wherein the film collecting driving mechanism comprises a film collecting driving motor installed on the film collecting vertical plate, a seventh belt wheel installed on the film collecting roller, an eighth belt wheel installed on the film collecting driving motor, and a fourth transmission belt arranged between the seventh belt wheel and the eighth belt wheel.
10. The film collecting and releasing device according to claim 8, wherein the film collecting assembly further comprises a film collecting tensioning mechanism mounted on the film collecting vertical plate, and an electrostatic fan mounted on the film collecting vertical plate; the film collecting and tensioning mechanism comprises a film collecting and tensioning support rotatably mounted on the film collecting vertical plate, a plurality of film collecting and tensioning rollers rotatably mounted on the film collecting and tensioning support, and a film collecting and tensioning cylinder used for driving the film collecting and tensioning support to rotate; the film collecting tensioning cylinder and the film collecting tensioning support are respectively positioned on two opposite sides of the film collecting vertical plate.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202021205621.0U CN212531576U (en) | 2020-06-24 | 2020-06-24 | Receive and release membrane device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202021205621.0U CN212531576U (en) | 2020-06-24 | 2020-06-24 | Receive and release membrane device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN212531576U true CN212531576U (en) | 2021-02-12 |
Family
ID=74546703
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202021205621.0U Active CN212531576U (en) | 2020-06-24 | 2020-06-24 | Receive and release membrane device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN212531576U (en) |
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2020
- 2020-06-24 CN CN202021205621.0U patent/CN212531576U/en active Active
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