CN212513374U

CN212513374U - Thermocouple temperature detection switcher and thermocouple temperature detection system

Info

Publication number: CN212513374U
Application number: CN202021583925.0U
Authority: CN
Inventors: 燕超; 徐嘉
Original assignee: Jilin Sino Microelectronics Co Ltd
Current assignee: Jilin Sino Microelectronics Co Ltd
Priority date: 2020-08-03
Filing date: 2020-08-03
Publication date: 2021-02-09
Anticipated expiration: 2030-08-03

Abstract

The embodiment of the utility model provides a thermocouple temperature detects switch and thermocouple temperature detecting system is related to. The thermocouple temperature detection switcher comprises a shell, a first plug connector arranged on the shell and a second plug connector electrically connected with the first plug connector through a connecting piece and a switch piece, wherein the number of the second plug connectors is multiple, and each second plug connector is electrically connected with one of thermocouples in a quartz tube of a diffusion furnace. When the thermocouple temperature detection switcher is used, the thermocouple temperature detection switcher is electrically connected with the thermometer through the first plug connector, and the conduction state of the thermometer and each thermocouple can be controlled through the operation switch piece, so that the temperature of each thermocouple can be detected. Like this, can avoid plug thermocouple temperature detection switch repeatedly when the temperature of detecting the thermocouple, and then avoid thermocouple temperature detection switch to appear short circuit and open circuit phenomenon, guarantee the accuracy of the temperature value of the thermocouple that reads through the thermometer.

Description

Thermocouple temperature detection switcher and thermocouple temperature detection system

Technical Field

The embodiment of the utility model provides a thermocouple among the semiconductor diffusion technology detects technical field, particularly, relates to a thermocouple temperature detects switch and thermocouple temperature detecting system.

Background

In semiconductor diffusion processes, diffusion furnaces are one of the important production facilities. The diffusion furnace needs to be cleaned after being used for a period of time, and the position of the thermocouple can be changed when the diffusion furnace is disassembled and assembled, so that the temperature value in the diffusion furnace (for example, the temperature value of a constant temperature area of the diffusion furnace) needs to be corrected after the diffusion furnace is cleaned or the thermocouple is replaced every time. However, in the calibration, there may be a deviation in the temperature values of the thermocouples that are read.

SUMMERY OF THE UTILITY MODEL

In view of this, the utility model provides a thermocouple temperature detects switch and thermocouple temperature detecting system, thermocouple temperature detect switch connect between thermometer and a plurality of thermocouple connection, can control the on-state of thermometer and every thermocouple through operating thermocouple temperature detect switch to the realization is to the temperature detection of every thermocouple. Like this, can avoid plug thermocouple temperature detection switch repeatedly when the temperature of detecting the thermocouple, and then avoid thermocouple temperature detection switch to appear short circuit and open circuit phenomenon, guarantee the accuracy of the temperature value of the thermocouple that reads through the thermometer.

In a first aspect of the embodiments of the present invention, a thermocouple temperature detection switcher (100) is provided, which includes a housing (1), a first plug connector (2), a plurality of second plug connectors (3), and a plurality of connecting members (4);

a first through hole (111) is formed in a first side wall (11) of the shell (1), the first plug connector (2) penetrates through the first through hole (111) and is partially inserted into the shell (1), a plug (21) used for being electrically connected with a thermometer is arranged on the first plug connector (2), and the plug (21) is located outside the shell (1);

a second through hole (121) is formed in a second side wall (12) of the shell (1) opposite to the first side wall (11); one end of the connecting piece (4) extends into the shell (1) through the second through hole (121), the other end of the connecting piece is electrically connected with the second plug connector (3), and the second plug connector (3) comprises a plug-in part (31) which is used for being electrically connected with a thermocouple in a quartz tube of the diffusion furnace;

one end of the connecting piece (4) positioned in the shell (1) is electrically connected with a switch piece (5) arranged in the shell (1);

switch spare (5) with first plug connector (2) electric connection, in order to pass through first plug connector (2) with thermometer electric connection is used for control the thermometer with the conducting state of thermocouple, thereby the realization is right the temperature of thermocouple detects.

In a preferred embodiment, the switch element (5) is arranged inside the housing (1);

the pressing part (51) of the switch piece (5) penetrates through a third through hole (131) formed in a third side wall (13) of the shell (1) and extends towards the outside of the shell (1); wherein the third side wall (13) meets the edges of the first side wall (11) and the second side wall (12), respectively.

In a preferred embodiment, the temperature gauge further comprises a plurality of indicator lamps (6) fixed on the third side wall (13), and each indicator lamp (6) is electrically connected with one of the pressing parts (51) and used for indicating the conduction state of each thermocouple and the temperature gauge.

In a preferred embodiment, the device further comprises a power supply part (7) detachably connected to the inside of the shell (1), wherein the power supply part (7) is electrically connected with the switch part (5) and the indicator light (6).

In a preferred embodiment, the third through holes (131) are distributed on the third side wall (13) at intervals.

In a preferred embodiment, the housing (1) is opened with an opening (15), the opening (15) is opposite to the third side wall (13), and a closing piece (16) is detachably connected to the opening (15) and used for closing the interior of the housing (1).

In a preferred embodiment, the enclosure (16) includes a sandwich (162) and protective layers (161) disposed on both sides of the sandwich (162), the sandwich (162) including magnetically conductive plates for securing the thermocouple temperature sensing switch (100) to a mounting surface.

In a preferred embodiment, the edge of the closing part (16) close to one surface of the shell (1) is provided with a clamping piece (163), the edge of the opening (15) is provided with a clamping part (151), and the clamping piece (163) is inserted into the clamping part (151) to realize the detachable connection of the shell (1) and the closing part (16).

In a preferred embodiment, the second plug connector (3) further comprises a holding part (32), one end of the holding part (32) is wedge-shaped, and the other end of the holding part is integrally formed with the plug part (31); the cross-sectional area of the insertion part (31) is larger than that of the holding part (32).

In a second aspect of the embodiments of the present invention, there is provided a thermocouple temperature detection system, comprising a thermometer, a quartz sleeve, and the thermocouple temperature detection switcher (100) of the first aspect; the thermometer is electrically connected with a plug (21) of the thermocouple temperature detection switcher (100); each thermocouple in the quartz sleeve is electrically connected with the plug part (31) of one second plug connector (3) of the thermocouple temperature detection switcher (100).

The utility model discloses implement thermocouple temperature detection switch and thermocouple temperature detecting system that provides, including the casing, set up in the first plug connector of casing and through connecting piece and switch spare and first plug connector electric connection's second plug connector, wherein, the quantity of second plug connector is a plurality of, one of them thermocouple electric connection in the quartz capsule of every second plug connector and diffusion furnace. When the thermocouple temperature detection switcher is used, the thermocouple temperature detection switcher is electrically connected with the thermometer through the first plug connector, and the conduction state of the thermometer and each thermocouple is controlled through the operation switch piece, so that the temperature of each thermocouple is detected. Like this, can avoid plug thermocouple temperature detection switch repeatedly when the temperature of detecting the thermocouple, and then avoid thermocouple temperature detection switch to appear short circuit and open circuit phenomenon, guarantee the accuracy of the temperature value of the thermocouple that reads through the thermometer.

Drawings

In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the drawings that are required to be used in the embodiments will be briefly described below, it should be understood that the following drawings only illustrate some embodiments of the present invention, and therefore should not be considered as limiting the scope, and for those skilled in the art, other related drawings can be obtained according to the drawings without inventive efforts.

Fig. 1 is a schematic structural diagram of a thermocouple temperature detection switch according to an embodiment of the present invention.

Fig. 2 is a schematic view of the housing of fig. 1 from a first perspective.

Fig. 3 is a second perspective view of the housing of fig. 1.

Fig. 4 is a third perspective view of the housing of fig. 1.

Fig. 5 is a schematic structural diagram of a closure member according to an embodiment of the present invention.

Fig. 6 is a cross-sectional schematic view of the closure shown in fig. 5.

Fig. 7 is another schematic view of the closure of fig. 5.

Fig. 8 is a schematic view of a housing cooperating with the closure of fig. 5.

Fig. 9 is a schematic structural view of the second connector of fig. 1.

Fig. 10 is a fourth perspective view of the second connector of fig. 1.

Icon:

100-thermocouple temperature detection switcher;

1-a shell; 11-a first side wall; 111-a first via; 12-a second side wall; 121-a second via; 13-a third side wall; 131-a third via; 15-opening; 151-a snap-fit portion; 16-a closure; 161-a protective layer; 162-an interlayer; 163-snap;

2-a first plug connector; 21-a plug;

3-a second plug connector; 31-a plug-in part; 32-a grip portion;

4-a connector;

5-a switch member; 51-a pressing part;

6-indicator light;

7-power supply unit.

Detailed Description

In order to make the objects, technical solutions and advantages of the embodiments of the present invention clearer, the drawings in the embodiments of the present invention are combined to clearly and completely describe the technical solutions in the embodiments of the present invention, and obviously, the described embodiments are only a part of the embodiments of the present invention, not all embodiments. The components of embodiments of the present invention, as generally described and illustrated in the figures herein, may be arranged and designed in a wide variety of different configurations.

Thus, the following detailed description of the embodiments of the present invention, presented in the accompanying drawings, is not intended to limit the scope of the invention, as claimed, but is merely representative of selected embodiments of the invention. Based on the embodiments in the present invention, all other embodiments obtained by a person skilled in the art without creative efforts belong to the protection scope of the present invention.

It should be noted that: like reference numbers and letters refer to like items in the following figures, and thus, once an item is defined in one figure, it need not be further defined and explained in subsequent figures.

In the description of the present invention, unless otherwise expressly specified or limited, the terms "disposed," "connected," and "connected" are to be construed broadly, e.g., as meaning fixedly connected, detachably connected, or integrally connected; can be mechanically or electrically connected; they may be connected directly or indirectly through intervening media, or they may be interconnected between two elements. The specific meaning of the above terms in the present invention can be understood in specific cases to those skilled in the art.

A plurality of thermocouples are usually arranged in a quartz sleeve of the diffusion furnace, and when the temperature of the diffusion furnace after cleaning or the diffusion furnace with the replaced thermocouple is calibrated, the temperature value of the thermocouple needs to be repeatedly read and detected, while a common connector for connecting the thermocouple and a thermometer can only detect the temperature of one thermocouple every time. When the temperature of a plurality of thermocouples is repeatedly detected, the connectors need to be repeatedly plugged and unplugged, which may cause the connectors to be short-circuited and open-circuited, and further cause the detected temperature value to be a false value. Furthermore, repeated plugging and unplugging of the connector can cause severe wear to the connector, which can result in large fluctuations and deviations in the detected temperature values.

In order to solve the above technical problem, an embodiment of the present invention provides a thermocouple temperature detection switch and a thermocouple temperature detection system, please refer to fig. 1, and for the structure diagram of the thermocouple temperature detection switch 100 provided by the present invention, including the casing 1, the first plug connector 2, the second plug connectors 3 and the connecting members 4, the connecting members 4 may be wires.

Referring to fig. 1 and fig. 2, a first through hole 111 is formed in the first side wall 11 of the housing 1, the first connector 2 penetrates through the first through hole 111 and is partially inserted into the housing 1, the first connector 2 is provided with a plug 21 for electrically connecting with a thermometer (not shown in the figure), and the plug 21 is located outside the housing 1.

Referring to fig. 1 and fig. 3, a second through hole 121 is formed in a second sidewall 12 of the housing 1 opposite to the first sidewall 11. One end of the connecting piece 4 extends into the inside of the shell 1 through the second through hole 121, the other end of the connecting piece is electrically connected with the second plug connector 3, and the second plug connector 3 is electrically connected with a thermocouple in a quartz tube of the diffusion furnace.

Further, referring to fig. 1 and 4, one end of the connecting element 4 located inside the housing 1 is electrically connected to the switch element 5 disposed inside the housing 1. The switch part 5 is electrically connected with the first plug connector 2 so as to pass through the first plug connector 2 and the thermometer electrically connected. The switch 5 is used for controlling the conduction state of the thermometer and the thermocouple, so that the temperature of the thermocouple can be detected.

Like this, after being connected every second plug connector 3 with one of them thermocouple, can control conducting or breaking of thermometer and every thermocouple through switch 5 to realize the repeated detection to every thermocouple under the prerequisite of avoiding plug thermocouple temperature detection switch repeatedly, and then avoid thermocouple temperature detection switch to appear short circuit and open circuit phenomenon because of the plug repeatedly. Thus, the temperature value of the thermocouple can be accurately read and detected through the thermometer.

With reference to fig. 1 and fig. 2, the pressing portion 51 of the switch 5 passes through a third through hole 131 formed in the third sidewall 13 of the housing 1 and extends toward the outside of the housing 1. The third through holes 131 are distributed at intervals on the third sidewall 13, the number of the pressing portions 51 may be multiple, and the third sidewall 13 is respectively connected to the edges of the first sidewall 11 and the second sidewall 12. When the thermocouple temperature detection switcher 100 is used, the conduction or disconnection between the temperature meter and the different thermocouple can be realized by acting on the different pressing portions 51.

The inventor of the present invention has found that when the pressing portion 51 is pressed, the electric connection state between the thermometer and the thermocouple may not be switched due to insufficient pressing force. This can lead to errors in later reading of the thermometer values. To solve the above problem, please continue to refer to fig. 1, the thermocouple temperature detecting switch 100 further includes a plurality of indicator lamps 6 fixed on the third sidewall 13, and each indicator lamp 6 is electrically connected to one of the pressing portions 51 for indicating a conduction state between each thermocouple and the thermometer.

For example, the indicator light 6 is turned on to indicate that the thermometer is in conduction with the thermocouple, and the indicator light 6 is turned off to indicate that the thermometer is in disconnection with the thermocouple. In this manner, the indication lamp 6 can ensure an effective operation of the pressing portion 51, and the electrical connection state between the thermometer and the thermocouple can be switched for each operation.

Referring to fig. 4, the thermocouple temperature detecting switch 100 further includes a power supply unit 7 detachably connected to the inside of the housing 1, the power supply unit 7 is electrically connected to the switch unit 5 and the indicator 6, and the power supply unit 7 is configured to supply power to the switch unit 5 and the indicator 6.

Referring to fig. 4 and 5, an opening 15 is formed in the housing 1, the opening 15 is opposite to the third side wall 13, a sealing member 16 is detachably connected to the opening 15, and the sealing member 16 is used for sealing the inside of the housing 1. Further, referring to fig. 6, the sealing member 16 may include a sandwich layer 162 and a protective layer 161 disposed on both sides of the sandwich layer 162, wherein the sandwich layer 162 includes a magnetic conductive plate for fixing the thermocouple temperature detection switch 100 on a mounting surface, so as to fix the thermocouple temperature detection switch 100. In this embodiment, the mounting surface may be a wall surface, a door surface, or an outer wall of other equipment.

Referring to fig. 7 and 8, an edge of one surface of the sealing element 16 close to the housing 1 is provided with a clamping element 163, an edge of the opening 15 is provided with a clamping portion 151, and the clamping element 163 is inserted into the clamping portion 151 to achieve the detachable connection between the housing 1 and the sealing element 16. Alternatively, the removable connection of the closing element 16 to the housing 1 can be realized by means of a nut connection, which is not described herein.

Referring to fig. 9 and 10, the second connector 3 includes a plug portion 31 and a holding portion 32 for electrically connecting with a thermocouple in a quartz tube of the diffusion furnace. One end of the holding portion 32 is wedge-shaped, and the other end is integrally formed with the insertion portion 31. The cross-sectional area of the insertion part 31 is larger than that of the holding part 32. Thus, when the second connector 3 is connected to the thermocouple, the shutter structure formed by the connector 31 can prevent the worker from being burned due to contact with the thermocouple.

On the basis, the embodiment of the present invention further provides a thermocouple temperature detection system, which includes a thermometer, a quartz sleeve and the thermocouple temperature detection switcher 100. The thermometer is electrically connected to the plug 21 of the thermocouple temperature detection switcher 100. Each thermocouple in the quartz sleeve is electrically connected with the plug part 31 of one of the second plug connectors 3 of the thermocouple temperature detection switcher 100.

When the thermocouple temperature detection system operates, the thermocouple temperature detection switcher 100 is connected between the thermometer and the plurality of thermocouple connections, and the conduction state of the thermometer and each thermocouple can be controlled by operating the thermocouple temperature detection switcher 100, so that the temperature detection of each thermocouple is realized. Can avoid the repeated plug to thermocouple temperature detection switch, and then avoid thermocouple temperature detection switch to appear short circuit and open circuit phenomenon, ensure the accuracy of the temperature value of the thermocouple that reads through the thermometer.

The above description is only a preferred embodiment of the present invention and is not intended to limit the present invention, and various modifications and changes may be made by those skilled in the art. Any modification, equivalent replacement, or improvement made within the spirit and principle of the present invention should be included in the protection scope of the present invention.

Claims

1. A thermocouple temperature detection switcher (100) is characterized by comprising a shell (1), a first plug connector (2), a plurality of second plug connectors (3) and a plurality of connecting pieces (4);

2. The thermocouple temperature detection switch (100) according to claim 1, wherein said switching element (5) is disposed inside said housing (1);

3. The thermocouple temperature detection switcher (100) according to claim 2, further comprising a plurality of indicator lights (6) fixed to the third side wall (13), each indicator light (6) being electrically connected to one of the pressing portions (51) for indicating a conduction state of each thermocouple with the thermometer.

4. The thermocouple temperature detecting switcher (100) according to claim 3, further comprising a power supply member (7) detachably connected to the inside of the housing (1), wherein the power supply member (7) is electrically connected to the switch member (5) and the indicator light (6).

5. The thermocouple temperature sensing switcher (100) according to claim 2, wherein the third through holes (131) are spaced apart on the third side wall (13).

6. The thermocouple temperature detecting switcher (100) according to claim 2, wherein the housing (1) is opened with an opening (15), the opening (15) is opposite to the third side wall (13), and a closing member (16) is detachably connected to the opening (15) for closing the inside of the housing (1).

7. The thermocouple temperature sensing switch (100) of claim 6, wherein said enclosure (16) includes a sandwich (162) and protective layers (161) disposed on either side of said sandwich (162), said sandwich (162) including magnetically conductive plates for securing said thermocouple temperature sensing switch (100) to a mounting surface.

8. The thermocouple temperature detecting switcher (100) according to claim 6, wherein an edge of a face of the closing member (16) close to the housing (1) is provided with a catching member (163), an edge of the opening (15) is provided with a catching portion (151), and the catching member (163) is inserted into the catching portion (151) to achieve detachable connection of the housing (1) and the closing member (16).

9. The thermocouple temperature detecting switcher (100) according to claim 1, wherein the second connector (3) further comprises a holding portion (32), one end of the holding portion (32) is wedge-shaped, and the other end is integrally formed with the insertion portion (31); the cross-sectional area of the insertion part (31) is larger than that of the holding part (32).

10. A thermocouple temperature sensing system comprising a thermometer, a quartz sleeve and a thermocouple temperature sensing switch (100) according to any of the preceding claims 1 to 9;

the thermometer is electrically connected with a plug (21) of the thermocouple temperature detection switcher (100);

each thermocouple in the quartz sleeve is electrically connected with the plug part (31) of one second plug connector (3) of the thermocouple temperature detection switcher (100).