CN212512960U - Detection tool for displacement sensor of magnetic suspension molecular pump - Google Patents
Detection tool for displacement sensor of magnetic suspension molecular pump Download PDFInfo
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- CN212512960U CN212512960U CN202021676665.1U CN202021676665U CN212512960U CN 212512960 U CN212512960 U CN 212512960U CN 202021676665 U CN202021676665 U CN 202021676665U CN 212512960 U CN212512960 U CN 212512960U
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- molecular pump
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Abstract
The utility model provides a pair of magnetic suspension molecular pump displacement sensor's detection frock belongs to check out test set technical field, include: the XYZ moving platform is arranged on the bottom plate; the test piece fixing frame is connected to the XYZ moving platform and is provided with an extending end used for connecting the test piece and a connecting rod which is detachably and vertically connected to the extending end; the testing piece is connected to the bottom end of the connecting rod; the test piece has: a bottom plane and an arcuate sidewall plane; or the test piece comprises a first test piece and a second test piece, wherein the first test piece is provided with a bottom plane, and the second test piece is provided with a side wall arc-shaped surface; the utility model discloses a magnetic suspension molecular pump displacement sensor's detection frock, simple structure measures accurately, can use repeatedly, under same frock, only needs to change the test piece, can realize the measurement of different sensors.
Description
Technical Field
The utility model relates to a check out test set technical field, concretely relates to magnetic suspension molecular pump displacement sensor's detection frock.
Background
The displacement sensor is a linear device which belongs to metal induction, and the sensor is used for converting various measured physical quantities into electric quantities. When measuring the distance, directly use the output data of displacement sensor actual measurement, but along with the increase of live time, displacement sensor precision descends, has caused displacement sensor precision low, shortcoming such as repeatability difference, uses correcting unit to calibrate usually.
In the measuring process, the single probe is measured, the micrometer is connected with a testing piece, and the calibration of the displacement sensor is realized by comparing the data displayed by the displacement sensor with the data of the micrometer.
In use, a single probe is required to be mounted on a mounting seat for fixing to form an axial sensor or a radial sensor, but in the prior art, the axial sensor and the radial sensor need to be detected under different tools respectively.
SUMMERY OF THE UTILITY MODEL
Therefore, the to-be-solved technical problem of the utility model lies in overcoming a detection frock among the prior art and can't all carry out measuring defect to axial and radial sensor to a magnetic suspension molecular pump displacement sensor's detection frock is provided.
The utility model provides a pair of magnetic suspension molecular pump displacement sensor's detection frock, include:
the XYZ moving platform is arranged on the bottom plate;
the test piece fixing frame is connected to the XYZ moving platform and is provided with an extending end used for connecting the test piece and a connecting rod which is detachably and vertically connected to the extending end;
the testing piece is connected to the bottom end of the connecting rod;
the test piece has: a bottom plane and an arcuate sidewall plane;
alternatively, the test piece includes: the test device comprises a first test piece and a second test piece, wherein the first test piece is provided with a bottom plane, and the second test piece is provided with a side wall arc-shaped surface.
Preferably, the protruding end of the test piece fixing frame is provided with a through hole suitable for vertically inserting the connecting rod, the side wall of the through hole is provided with an opening, and two sides of the opening are respectively provided with an extending plate extending towards the radial direction.
Preferably, the extension sections of the two extension plates are respectively provided with a through hole suitable for penetrating the same fastener.
Preferably, the second test piece has two side wall arc surfaces which are symmetrically arranged.
Preferably, the second test piece further has two sidewall vertical surfaces symmetrically arranged.
Preferably, the upper surface of the second test piece is provided with a threaded hole; and the connecting rod is provided with an external thread matched with the threaded hole.
As a preferred scheme, the test piece fixing frame comprises:
the vertical plate is connected with the XYZ moving platform;
the transverse plate is perpendicular to the vertical plate and extends towards the test piece;
and one end of the cantilever is connected with the transverse plate, and the other end of the cantilever is provided with a through hole suitable for being vertically inserted into the connecting rod.
Preferably, the transverse plate is provided with a groove which is consistent with the extending direction of the cantilever, and the cantilever is clamped in the groove.
Preferably, one end, close to the transverse plate, of the lower surface of the cantilever is provided with a limiting surface, and the limiting surface is abutted to the side wall of the transverse plate.
The utility model discloses technical scheme has following advantage:
1. the utility model provides a magnetic suspension molecular pump displacement sensor's detection frock, include: the device comprises an XYZ moving platform, a test piece fixing frame and a test piece; the XYZ moving platform can realize accurate movement in X, Y, Z three directions; the test piece is provided with a bottom plane and an arc-shaped side wall surface; the bottom plane can be used for measuring the axial sensor, the XYZ moving platform drives the test piece to be close to the axial sensor in the vertical direction, the distance of the XYZ moving platform is recorded, and the distance is compared with the corresponding electrical parameters of the axial sensor at the detection distance, so that the detection and the verification of the axial sensor can be realized;
the arc-shaped side wall surface can be used for measuring the radial sensor, the XYZ moving platform drives the test piece to be close to or far away from the radial sensor in the horizontal direction, the distance of the XYZ moving platform is recorded, and the distance is compared with the corresponding electrical parameter of the radial sensor at the detection distance, so that the detection and the verification of the radial sensor can be realized;
the detection tool is simple in structure, accurate in measurement and capable of being used repeatedly;
meanwhile, the detection piece can also comprise a first test piece with a bottom plane and a second test piece with a side wall arc-shaped surface, and under the same tool, the measurement of different sensors can be realized only by replacing the test piece.
2. The utility model provides a detection frock of magnetic suspension molecular pump displacement sensor, be provided with on the extension end of test piece mount and pass the hole, have the opening on the lateral wall that passes the hole, the both sides of opening have the extension board that extends towards radial direction respectively, be provided with the through-hole on the extension board; the connecting rod is vertically inserted into the through hole, the through hole is penetrated through the fastener, the fastener is adjusted, so that the two extending plates are close to each other, the inner wall penetrating the hole is attached to the connecting rod, and the fixing of the connecting rod and the test piece fixing frame is realized.
3. The utility model provides a detection tool of a displacement sensor of a magnetic suspension molecular pump, wherein a second test piece is symmetrically provided with two side wall arc-shaped surfaces and two side wall vertical surfaces; a plurality of sensor probes are symmetrically arranged in the mounting seat, and the second test piece can measure the sensor probes simultaneously.
4. The utility model provides a magnetic suspension molecular pump displacement sensor's detection frock, be provided with the recess on the diaphragm, the cantilever joint in the recess, realize spacing to the cantilever, prevent that cantilever and test piece mount from taking place relative removal, the influence detects the precision.
Drawings
In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings used in the embodiments or the technical solutions in the prior art will be briefly described below, and it is obvious that the drawings in the following description are some embodiments of the present invention, and for those skilled in the art, other drawings can be obtained according to these drawings without creative efforts.
Fig. 1 is the utility model discloses an axial sensor's the spatial structure sketch map of detecting frock.
Fig. 2 is the utility model discloses a three-dimensional structure schematic diagram of radial sensor's detection frock.
Fig. 3 is a schematic perspective view of the test piece holder shown in fig. 1.
Fig. 4 is a schematic perspective view of the cantilever shown in fig. 1.
Fig. 5 is a schematic top view of the cantilever shown in fig. 1.
Fig. 6 is a schematic perspective view of the second test piece shown in fig. 2.
Fig. 7 is a schematic perspective view of the first mounting base of the present invention.
Fig. 8 is a schematic perspective view of a second mounting base according to the present invention.
Fig. 9 is a schematic perspective view of a third mounting seat according to the present invention.
Description of reference numerals:
1. an XYZ moving platform; 2. a support frame; 3. a first test piece; 4. a second test piece; 5. a base plate; 6. a vertical plate; 7. a transverse plate; 8. a cantilever; 9. a groove; 10. a limiting surface; 11. passing through the aperture; 12. an extension plate; 13. a through hole; 14. a side wall arc-shaped surface; 15. a sidewall vertical surface; 16. a first mounting seat; 17. a first mounting hole; 18. a first fixing hole; 19. a second mounting seat; 20. a first accommodating chamber; 21. a second mounting hole; 22. a second fixing hole; 23. a third mounting seat; 24. a second accommodating chamber; 25. a third mounting hole; 26. a single probe of the sensor; 27. a radial sensor; 28. an axial sensor; 29. a connecting rod; 30. a threaded bore.
Detailed Description
The technical solution of the present invention will be described clearly and completely with reference to the accompanying drawings, and obviously, the described embodiments are some, but not all embodiments of the present invention. Based on the embodiments in the present invention, all other embodiments obtained by a person skilled in the art without creative work belong to the protection scope of the present invention.
In the description of the present invention, it should be noted that the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", and the like indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings, and are only for convenience of description and simplification of description, but do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and thus, should not be construed as limiting the present invention.
In the description of the present invention, it is to be noted that, unless otherwise explicitly specified or limited, the terms "mounted," "connected," and "connected" are to be construed broadly, and may be, for example, fixedly connected, detachably connected, or integrally connected; can be mechanically or electrically connected; they may be connected directly or indirectly through intervening media, or they may be interconnected between two elements. The specific meaning of the above terms in the present invention can be understood in specific cases to those skilled in the art.
Furthermore, the technical features mentioned in the different embodiments of the invention described below can be combined with each other as long as they do not conflict with each other.
The detection tool for the displacement sensor of the magnetic suspension molecular pump provided by the embodiment, as shown in fig. 1 and 2, includes: the device comprises an XYZ moving platform, a test piece fixing frame and a test piece; the test piece has a bottom plane and an arc side wall surface, the bottom plane and the arc side wall surface can be arranged on one test piece and can also be arranged on two test pieces respectively, the bottom plane and the arc side wall surface of the embodiment are arranged on the two test pieces respectively, and the test piece comprises: a first test piece 3 having a bottom plane and a second test piece 4 having an arc-shaped side wall surface; the XYZ moving platform 1 can realize accurate movement in X, Y, Z three directions, the first test piece 3 is arranged on the test piece fixing frame, the XYZ moving platform 1 drives the first test piece 3 to move up and down, the distance between the first test piece 3 and the axial sensor 28 is changed, and the corresponding electrical parameters of the axial sensor 28 at the detection distance are read, so that the detection and the verification of the axial sensor 28 can be realized;
the second test piece 4 is arranged on the test piece fixing frame, the XYZ moving platform 1 drives the first test piece 3 to move back and forth and left and right, the distance between the first test piece 3 and the radial sensor 27 is changed, and the corresponding electrical parameters of the radial sensor 27 at the detection distance are read, so that the detection and the verification of the radial sensor 27 can be realized;
this detect frock, simple structure measures accurately, can use repeatedly, under same frock, only needs to change the test piece, can realize the measurement of different sensors.
As shown in fig. 1 and 2, a bottom plate 5 is arranged at the bottom for supporting, an XYZ moving platform 1 is fixedly mounted at the upper end of the bottom plate 5, the XYZ moving platform 1 comprises an X-axis moving part, a Y-axis moving part and a Z-axis moving part, and can drive the device to realize accurate movement in X, Y, Z directions; specifically, the extending direction of the cantilever is taken as the X direction, the direction vertical to the cantilever on the same horizontal plane is taken as the Y direction, and the direction vertical to X, Y is taken as the Z direction; the front end of XYZ moving platform 1 is provided with riser 6, and the perpendicular to riser 6 is provided with diaphragm 7, and diaphragm 7 is on a parallel with the horizontal plane, and extends towards the direction of test piece, fixed cantilever 8 that is provided with on the diaphragm 7, the other end of cantilever 8 is connected with the test piece through connecting rod 29.
As shown in fig. 3 and 4, a groove 9 arranged in the extending direction of the cantilever 8 is arranged on the transverse plate 7, and the cantilever 8 is clamped in the groove 9 to limit the cantilever 8 in the left-right direction; a limiting surface 10 is arranged at one end, close to the transverse plate 7, of the cantilever 8, the limiting surface 10 is abutted against the side wall of the transverse plate 7 to limit the cantilever 8, and the cantilever 8 is prevented from moving towards the vertical plate 6; the relative fixation of the positions of the cantilever 8 and the XYZ moving platform 1 is realized, and the detection accuracy is ensured.
As shown in fig. 5, the front end of the cantilever 8 is disposed through a hole 11, the side wall of the hole 11 has an opening, the two sides of the opening respectively have an extension plate 12 extending in the radial direction, and the extension plate 12 has a through hole 13 on its extension section; the connecting rod 29 is inserted into the through hole 11, is inserted into the through hole 13 by a fastener,
one end of the cantilever 8 is connected with a test piece through a connecting rod 29; the test piece includes: a first test piece 3 and a second test piece 4;
as shown in fig. 6, the upper surface of the first test piece 3 is provided with a threaded hole 30, and the threaded hole 30 is matched with the external thread of the outer surface of the connecting rod 29 to realize the connection of the first test piece 3 and the connecting rod 29; the second test piece 4 is provided with two symmetrically arranged side wall arc-shaped surfaces 14 and two symmetrically arranged side wall vertical surfaces 15;
as shown in fig. 1, the second test piece 4 has a bottom plane.
A support frame 2 is fixed on the bottom plate 5, and the support frame 2 is arranged below the test piece.
As shown in fig. 7, a first mounting base 16 of the sensor is provided with a first mounting hole 17 at a central position of the mounting base, a first fixing hole 18 is provided on a side wall, and a fixing member passes through the first fixing hole 18; vertically placing the single sensor probe 26 in the first mounting hole 17 of the first mounting seat 16, and enabling a fixing piece to penetrate through the first fixing hole 18 to fix the single sensor probe 26, so as to form an axial sensor 28 capable of measuring the change of the position between the axial direction and a test piece;
as shown in fig. 8, the second mounting seat 19 is a second mounting seat 19 of the sensor, a first accommodating cavity 20 is provided in the middle of the second mounting seat 19, the first accommodating cavity 20 is suitable for accommodating the second test piece 4, a second mounting hole 21 is provided through the side wall of the second mounting seat 19, the position of the second mounting hole 21 corresponds to that of the second mounting hole 21, and a second fixing hole 22 is provided on the upper surface of the second mounting seat 19; the single sensor probe 26 is horizontally placed in the second mounting hole 21 of the second mounting seat 19, the fixing of the single sensor probe 26 is realized by the fixing piece passing through the second fixing hole 22, a radial sensor 27 is formed, and the change of the position between the single sensor probe and a test piece in the radial direction can be measured;
as shown in fig. 9, a second accommodating cavity 24 is provided in the middle of the third mounting seat 23, the second accommodating cavity 24 is adapted to accommodate the second test piece 4, the inner side wall of the first accommodating cavity 20 is provided with a second mounting hole 21, the third mounting hole 25 is internally threaded, and the single sensor probe 26 is screwed to the third mounting hole 25 through an external thread to fix the single sensor probe to the third mounting seat 23, so as to form a radial sensor 27 capable of measuring a change in position between the radial direction and the test piece.
Method of use and principles
When measuring the axial sensor 28, the axial sensor 28 is mounted on the support frame 2, the first test piece 3 is mounted on the connecting rod 29, the XYZ moving platform 1 drives the first test piece 3 to approach the axial sensor 28 in the Z direction, the electric parameters corresponding to the axial sensor 28 are read, compared with the known data of the XYZ platform, and the axial sensor 28 is detected and calibrated;
when the radial sensor 27 is measured, the radial sensor 27 is installed on the support frame 2, the second test piece 4 is installed on the connecting rod 29, the XYZ moving platform 1 drives the second test piece 4 to move in the X, Y direction in the accommodating cavity of the radial sensor 27, the corresponding electrical parameter of the radial sensor 27 is read, and the electrical parameter is compared with the known data of the XYZ platform to detect and calibrate the radial sensor 27;
it should be understood that the above examples are only for clarity of illustration and are not intended to limit the embodiments. Other variations and modifications will be apparent to persons skilled in the art in light of the above description. And are neither required nor exhaustive of all embodiments. And obvious variations or modifications can be made without departing from the scope of the invention.
Claims (9)
1. The utility model provides a magnetic suspension molecular pump displacement sensor's detection frock which characterized in that includes:
an XYZ moving platform (1) which is installed on a bottom plate (5);
the test piece fixing frame is connected to the XYZ moving platform (1) and is provided with an extending end used for connecting the test piece and a connecting rod (29) which is detachably and vertically connected to the extending end;
the testing piece is connected to the bottom end of the connecting rod (29);
the test piece has: a bottom plane and an arcuate sidewall plane;
alternatively, the test piece includes: a first test piece (3) and a second test piece (4), the first test piece (3) having a bottom plane, the second test piece (4) having a side wall arc face (14).
2. The detection tool of the magnetic suspension molecular pump displacement sensor according to claim 1, characterized in that the protruding end of the test piece fixing frame is provided with a through hole (11) suitable for vertically inserting the connecting rod (29), the side wall of the through hole (11) is provided with an opening, and two sides of the opening are respectively provided with an extension plate (12) extending towards the radial direction.
3. The detection tool of the magnetic suspension molecular pump displacement sensor according to claim 2, characterized in that the extension sections of the two extension plates (12) are respectively provided with a through hole (13) suitable for penetrating the same fastener.
4. The detection tool of the magnetic suspension molecular pump displacement sensor according to claim 1, characterized in that the second test piece (4) has two side wall arc-shaped surfaces (14) which are symmetrically arranged.
5. The detection tool of the displacement sensor of the magnetic suspension molecular pump as claimed in claim 4, wherein the second test piece (4) further has two side wall vertical surfaces (15) which are symmetrically arranged.
6. The detection tool of the magnetic suspension molecular pump displacement sensor according to claim 5, wherein the upper surface of the second test piece (4) is provided with a threaded hole (30); and the connecting rod (29) is provided with an external thread matched with the threaded hole (30).
7. The detection tool of the magnetic suspension molecular pump displacement sensor of claim 1, wherein the test piece fixing frame comprises:
the vertical plate (6) is connected with the XYZ moving platform (1);
a transverse plate (7) which is arranged perpendicular to the vertical plate (6) and extends towards the test piece;
a cantilever (8) connected at one end to the cross plate (7) and at the other end having a through hole (11) adapted for vertical insertion of the connecting rod (29).
8. The detection tool of the magnetic suspension molecular pump displacement sensor according to claim 7, wherein a groove (9) which is consistent with the extending direction of the cantilever (8) is formed in the transverse plate (7), and the cantilever (8) is clamped in the groove (9).
9. The detection tool of the magnetic suspension molecular pump displacement sensor according to claim 8, wherein a limiting surface (10) is arranged at one end, close to the transverse plate (7), of the lower surface of the cantilever (8), and the limiting surface (10) is abutted against the side wall of the transverse plate (7).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202021676665.1U CN212512960U (en) | 2020-08-12 | 2020-08-12 | Detection tool for displacement sensor of magnetic suspension molecular pump |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202021676665.1U CN212512960U (en) | 2020-08-12 | 2020-08-12 | Detection tool for displacement sensor of magnetic suspension molecular pump |
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| Publication Number | Publication Date |
|---|---|
| CN212512960U true CN212512960U (en) | 2021-02-09 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202021676665.1U Active CN212512960U (en) | 2020-08-12 | 2020-08-12 | Detection tool for displacement sensor of magnetic suspension molecular pump |
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| Country | Link |
|---|---|
| CN (1) | CN212512960U (en) |
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- 2020-08-12 CN CN202021676665.1U patent/CN212512960U/en active Active
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