CN212510447U - Drainage exhaust valve and steam system - Google Patents

Drainage exhaust valve and steam system Download PDF

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Publication number
CN212510447U
CN212510447U CN202021127682.XU CN202021127682U CN212510447U CN 212510447 U CN212510447 U CN 212510447U CN 202021127682 U CN202021127682 U CN 202021127682U CN 212510447 U CN212510447 U CN 212510447U
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valve body
connecting rod
temperature
steam
valve
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CN202021127682.XU
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辜东海
高慧翔
尹太兵
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Chengdu Xinya Chunfeng Technology Co ltd
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Chengdu Xinya Chunfeng Technology Co ltd
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Abstract

The utility model relates to a heating system technical field, concretely relates to hydrophobic discharge valve and steam system, hydrophobic discharge valve includes the valve body, the top of valve body is equipped with the exhaust hole, the bottom is equipped with the wash port, lateral wall or top are equipped with steam inlet, be equipped with thalposis thrust unit and first jam head in the valve body, thalposis thrust unit is heated deformation and will exhaust the hole shutoff in order to drive first jam head, but be equipped with vertical removal's floating block in the valve body and the second jam head that is used for the shutoff wash port, floating block vertical movement is close to or keeps away from the wash port in order to drive second jam head, this hydrophobic discharge valve has realized that exhaust and drainage separate, the smooth noiselessness of exhaust drainage, no steam reveals, it is not good to solve the hydrophobic discharge valve exhaust effect of current steam, and the problem that steam revealed.

Description

Drainage exhaust valve and steam system
Technical Field
The utility model relates to a heating system technical field, concretely relates to drainage discharge valve and steam system.
Background
The basic function of the steam trap exhaust valve is to exhaust condensed water, air and carbon dioxide gas in the steam system as quickly as possible, and simultaneously to prevent steam leakage to the maximum extent automatically. The varieties of trap are many, and the delivery port and the gas vent use a oral area simultaneously generally, and the opening is located valve body upper portion, leads to the exhaust effect not good, and steam reveals easily, and the easy siltation dirt of valve body lower part leads to valve body functional failure.
SUMMERY OF THE UTILITY MODEL
An object of the utility model is to provide a hydrophobic discharge valve and steam system solves current hydrophobic discharge valve exhaust effect of steam not good to the problem that steam was revealed easily.
For solving the above technical problem, the utility model discloses a first technical scheme be:
a drainage exhaust valve comprises a valve body, wherein the top of the valve body is provided with an exhaust hole, the bottom of the valve body is provided with a drain hole, and the side wall or the top of the valve body is provided with a steam inlet;
a temperature-sensing pushing device and a first plugging head are arranged in the valve body, and the temperature-sensing pushing device is deformed by heating to drive the first plugging head to plug the exhaust hole;
the valve body is internally provided with a floating block capable of moving vertically and a second plugging head for plugging the drain hole, and the floating block moves vertically to drive the second plugging head to be close to or far away from the drain hole.
A further technical scheme is that a first connecting rod is transversely arranged in the valve body, the upper side of the middle section of the first connecting rod is hinged to the inner side of the top of the valve body, the upper side of one end of the first connecting rod is connected with a first blocking head, the other end of the first connecting rod is connected with a temperature-sensing pushing device, and the temperature-sensing pushing device is heated and deformed to push the first connecting rod to rotate around the hinged position, so that the first blocking head blocks the exhaust hole.
The temperature-sensing pushing device comprises an outer cylinder, a sealing shell and a deformer, wherein the sealing shell is vertically through and comprises an outer cylinder connecting channel and a sliding connecting channel, the outer cylinder connecting channel and the sliding connecting channel are separated by the deformer, a sliding block is arranged on the upper side of the end part of the first connecting rod, the sliding block is slidably arranged in the sliding connecting channel, and the upper end of the sliding block is attached to the deformer;
the outer barrel is vertically arranged and is of a lower opening structure, the upper end of the outer barrel is connected with the top of the valve body, the lower end of the outer barrel is connected with the outer barrel connecting channel, and a heat-sensitive object which expands when heated is arranged in the outer barrel.
The further technical proposal is that the thermosensitive substance is in a liquid state at normal temperature and is vaporized and expanded after being heated.
The further technical scheme is that the temperature-sensing pushing device is a bimetallic strip, and the bimetallic strip is heated and bent to push the first connecting rod to rotate around the hinged part, so that the first plugging head plugs the exhaust hole.
The technical scheme is that a first spring for the rotation reset of the first connecting rod is arranged on the upper side of the first connecting rod.
According to a further technical scheme, a limiting convex edge used for limiting the moving direction of the floating block is vertically arranged in the valve body.
Still further technical scheme is, still be equipped with second connecting rod and second spring in the valve body, the second connecting rod transversely sets up, and the downside of second connecting rod one end is articulated with the bottom of valve body, and the downside and the second of the other end block up the head and link to each other, the floating block sets up in the upside of the second connecting rod other end, the vertical setting of second spring, the lower extreme of second spring links to each other with the bottom of valve body, and the upper end links to each other with second connecting rod middle section.
A further technical scheme is that an exhaust funnel is arranged on the outer side of the top of the valve body, an air inlet and outlet hole is formed in the top of the exhaust funnel, a floating barrel capable of moving vertically is arranged in the exhaust funnel, and the floating barrel is used for plugging or opening the air inlet and outlet hole.
The utility model discloses a second kind technical scheme be:
a steam system, characterized by: including a hydrophobic vent valve of any of the preceding.
Compared with the prior art, the beneficial effects of the utility model are that: steam, condensed water and the like enter through a steam inlet on the side wall or the top of the valve body, the exhaust hole on the top exhausts, the drain hole on the lower end exhausts the condensed water, when the temperature does not reach the deformation temperature of the temperature-sensing pushing device, the first plugging head does not plug the exhaust hole, the exhaust hole can normally exhaust cold air, when the temperature is higher and the temperature-sensing pushing device is heated and deformed, the temperature-sensing pushing device drives the first plugging head to plug the exhaust hole, thereby avoiding the energy waste caused by the high-temperature steam exhausted from the exhaust hole, when the condensed water gradually enters the valve body, the floating block floats upwards to drive the second plugging head to be far away from the drain hole, opening the drain hole, enabling the condensed water to be normally exhausted, and after the condensed water is exhausted, the floating block gradually moves downwards and enables the second plugging head to plug the drain hole, thereby realizing the drainage closing, the scheme has simple components, no wearing parts, reliable and smooth drainage and exhaust, no steam leakage, no condensed water leakage, no noise and no dirt deposition in the valve body 1.
Drawings
Fig. 1 is a schematic structural diagram of the middle drainage exhaust valve of the present invention.
Fig. 2 is a cross-sectional view of the middle drainage exhaust valve of the present invention.
Icon: 1-valve body, 2-vent hole, 3-drain hole, 4-steam inlet, 5-first connecting rod, 6-first plugging head, 7-outer cylinder, 8-sealing shell, 9-shape changer, 10-outer cylinder connecting channel, 11-sliding connecting channel, 12-sliding block, 13-first spring, 14-floating block, 15-second plugging head, 16-limiting convex edge, 17-second connecting rod, 18-second spring, 19-vent cylinder, 20-air inlet and outlet hole, and 21-float bowl.
Detailed Description
In order to make the objects, technical solutions and advantages of the present invention more clearly understood, the present invention is further described in detail below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are merely illustrative of the invention and are not intended to limit the invention.
Fig. 1-2 illustrate an embodiment of a trap vent valve and steam system of the present invention.
Example 1:
the embodiment provides a drainage exhaust valve, including valve body 1, the top of valve body 1 is equipped with exhaust hole 2, the bottom is equipped with wash port 3, lateral wall or top are equipped with steam inlet 4, be equipped with temperature sensing thrust unit and first jam head 6 in the valve body 1, temperature sensing thrust unit is heated deformation and will be driven first jam head 6 and block up exhaust hole 2 shutoff, but be equipped with vertical removal's floating block 14 in the valve body 1 and be used for the second jam head 15 of shutoff wash port 3, 14 vertical removal of floating block is close to or keep away from wash port 3 with driving second jam head 15.
Steam, condensed water and the like enter through a steam inlet 4 on the side wall or the top of the valve body 1, the exhaust hole 2 on the top exhausts, the drain hole 3 on the lower end exhausts the condensed water, when the temperature does not reach the deformation temperature of the temperature-sensing pushing device, the first plugging head 6 does not plug the exhaust hole 2, at the moment, the exhaust hole 2 can normally exhaust cold air, when the temperature is higher and the temperature-sensing pushing device is deformed by heating, the temperature-sensing pushing device drives the first plugging head 6 to plug the exhaust hole 2, so that energy waste caused by the exhaust of high-temperature steam from the exhaust hole 2 is avoided, when the condensed water gradually enters the valve body 1, the floating block 14 floats upwards to drive the second plugging head 15 to be far away from the drain hole 3, the drain hole 3 is opened, and the condensed water can be normally exhausted, and after the condensed water is exhausted, the floating block 14 gradually moves downwards to enable the second plugging head 15 to plug the drain hole 3, thereby realizing the drainage closing.
As shown in fig. 2, a first connecting rod 5 is transversely arranged in the valve body 1, the upper side of the middle section of the first connecting rod 5 is hinged with the inner side of the top of the valve body 1, the upper side of one end of the first connecting rod 5 is connected with a first plugging head 6, the other end of the first connecting rod is connected with a temperature-sensing pushing device, and the temperature-sensing pushing device is heated and deformed to push the first connecting rod 5 to rotate around the hinged part, so that the first plugging head 6 plugs the exhaust hole 2.
When the higher temperature that makes temperature sensing thrust unit receive thermal deformation, temperature sensing thrust unit promotes the tip downstream of first connecting rod 5, and then makes first connecting rod 5 rotate around the articulated department at middle part, and 5 other ends upward movement of first connecting rod this moment, alright utilize first plugging head 6 with the shutoff of exhaust hole 2 to avoid high temperature steam to discharge from exhaust hole 2 and cause the energy extravagant.
As shown in FIG. 2, the working principle of the drain valve is as follows: the valve body 1 is connected into a steam system, water vapor, cold air and the like in the steam system can enter the valve body 1 from a steam inlet 4, after condensed water enters the valve body 1, the floating block 14 floats upwards, because the lower end of the floating block 14 is connected with the upper side of the second plugging head 15, after the floating block 14 floats upwards, the second plugging head 15 can be gradually away from the drain hole 3, the drain hole 3 is opened, the condensed water can be discharged from the drain hole 3, when the temperature is lower than the thermal expansion temperature of the temperature-sensing pushing device, the cold air in the steam system can be discharged from the exhaust hole 2, and when the temperature is higher than the thermal expansion temperature of the temperature-sensing pushing device, the temperature-sensing pushing device is heated to expand to drive the first connecting rod 5 to rotate so as to enable the first plugging head 6 to plug the exhaust hole 2, and energy loss caused by overflow of high-temperature steam is avoided.
The temperature-sensitive pushing device can be a bimetallic strip, the bimetallic strip is also called as a thermal bimetallic strip, and because the thermal expansion coefficients of all component layers are different, when the temperature changes, the deformation of the active layer is larger than that of the passive layer, so that the whole bimetallic strip can be bent towards one side of the passive layer, and the curvature of the composite material changes to generate deformation. The bimetallic strip is arranged on the inner side of the top of the valve body 1, when the temperature in the valve body 1 is lower than the deformation temperature of the bimetallic strip, the bimetallic strip bends upwards, the exhaust hole 2 is opened at the moment, and when a steam system is started, cold air in a steam pipe network enters the valve body 1 and is exhausted from the exhaust hole 2 at the top; when high temperature steam entered into valve body 1 and made the temperature in the valve body 1 reach the deformation temperature of bimetallic strip, the bimetallic strip is heated and is buckled to first connecting rod 5 department, and the bimetallic strip alright promote the tip downstream of first connecting rod 5, and then makes first connecting rod 5 rotate around the articulated department at middle part, and the 5 other ends upward movement of first connecting rod this moment, alright utilize first plugging head 6 with the shutoff of exhaust hole 2, the valve body 1 inside and atmosphere separation this moment, steam can not spill.
If in the operation in-process still the noncondensable gas enters into valve body 1, because noncondensable gas density is greater than steam, make steam can't get into the inner chamber, gas thermal conductivity is low, lead to the interior gas of valve body 1 no longer the heat to get into, 1 self heat dissipation of valve body leads to the gaseous temperature decline in the valve chamber, the bimetallic strip is incurved once more, first shutoff head 6 will no longer block up exhaust hole 2, exhaust hole 2 is opened, noncondensable gas is released under the effect of steam pressure, bimetallic strip blocks up exhaust hole 2 and seals steam in the valve chamber when high temperature steam gets into the valve chamber once more.
As shown in fig. 2, the temperature-sensitive pushing device can also be configured to include an outer cylinder 7, a sealing housing 8 and a deformer 9, wherein the sealing housing 8 is vertically transparent, and includes an outer cylinder connecting channel 10 and a sliding connecting channel 11, the outer cylinder connecting channel 10 and the sliding connecting channel 11 are separated by the deformer 9, the upper side of the end portion of the first connecting rod 5 is provided with a slider 12, the slider 12 is slidably mounted in the sliding connecting channel 11, the upper end of the slider 12 is attached to the deformer 9, the outer cylinder 7 is vertically arranged and has a lower opening structure, the upper end of the outer cylinder 7 is connected to the top of the valve body 1, the lower end of the outer cylinder connecting channel 10 is connected to the outer cylinder, and a.
When the temperature in the valve body 1 is lower than the thermal expansion temperature of the heat-sensitive object, the exhaust hole 2 is in an open state, and when the steam system is started, cold air in the steam pipe network enters the valve body 1 and is exhausted from the exhaust hole 2 at the top; when high-temperature steam enters the valve body 1 and the temperature in the valve body 1 reaches the thermal expansion temperature of a thermosensitive object, the thermosensitive object is heated to expand to drive the deformation device 9 to deform, the deformation device 9 is displaced in the sliding connection channel 11, so that the sliding block 12 in the sliding connection channel 11 is gradually pushed outwards, the end part of the first connecting rod 5 can be pushed downwards by gradually pushing outwards the sliding block 12, the first connecting rod 5 is further rotated around the hinged part in the middle part, at the moment, the other end of the first connecting rod 5 moves upwards, the exhaust hole 2 can be blocked by the first blocking head 6, at the moment, the inside of the valve body 1 is blocked from the atmosphere, and the steam cannot leak.
The outer cylinder 7 is made of materials with high heat conduction efficiency such as copper, the non-opening end of the outer cylinder 7 is exposed in the steam pipe network system and used for sensing the temperature of a medium in the valve body 1, when the temperature of the medium is high, a thermosensitive object in the outer cylinder 7 is heated to expand, and the thermosensitive object drives the shape changer 9 to deform and displace downwards after being heated to enable the shape changer 9 to push the sliding block 12 downwards in the sliding connection channel 11, so that the first connecting rod 5 rotates around the hinged position in the middle, and the exhaust hole 2 is blocked by the first blocking head 6.
As shown in fig. 2, the lower end of the outer cylinder 7 is connected with the upper side of the sealed shell 8 by a threaded connection, and other detachable sealed connection methods can also be adopted.
The thermosensitive substance is in a liquid state at normal temperature, is vaporized and expanded after being heated, and is restored to the liquid state again after the temperature is reduced, and the thermosensitive substance comprises solutions such as alcohol and the like.
The upside of first connecting rod 5 is equipped with the first spring 13 that is used for first connecting rod 5 to rotate and resets, as shown in fig. 2, first spring 13 is vertical to be set up in the position department that is close to the articulated elements, and the upper end of first spring 13 links to each other with valve body 1 top, and the lower extreme links to each other with the upside of first connecting rod 5. When the first plugging head 6 plugs the exhaust hole 2, the first spring 13 is in a contracted state; when the temperature reduces in first plugging head 6 will exhaust hole 2 shutoff back and the valve body 1, the thalposis thrust unit will no longer be to the application of force of first connecting rod 5, through the motion of replying of first spring 13 this moment, drives first connecting rod 5 antiport, and then makes first plugging head 6 keep away from exhaust hole 2 to make valve body 1 can discharge the air.
In order to facilitate that the floating block 14 can only vertically move, the floating block 14 is ensured not to influence the second blocking head 15 to block the drain hole 3 after floating, a plurality of limiting convex ridges 16 are vertically arranged in the valve body 1, and the limiting convex ridges 16 are used for limiting the moving direction of the floating block 14.
The utility model discloses an among other embodiments, wash port 3 can open and shut through the mode control of lever principle, still be provided with second connecting rod 17 and second spring 18 in valve body 1 this moment, second connecting rod 17 transversely sets up, the downside of second connecting rod 17 one end is articulated with valve body 1's bottom, the downside of the other end links to each other with second choke plug 15, floating block 14 sets up in the upside of the second connecting rod 17 other end, the vertical setting of second spring 18, second spring 18's lower extreme links to each other with valve body 1's bottom, the upper end links to each other with second connecting rod 17 middle section. When the condensed water does not enter the valve body 1, the free end of the second connecting rod 17 is pressed downwards under the action of the gravity of the floating block 14, the second spring 18 is in a contracted state, and the second plugging head 15 at the lower side of the second connecting rod 17 plugs the drain hole 3; when the condensed water gradually enters the valve body 1, the floating block 14 floats upwards, the floating block 14 does not apply force to the free end of the second connecting rod 17 after floating upwards, and at the moment, the free end of the second connecting rod 17 is driven to rotate upwards under the automatic return motion of the second spring 18, so that the second plugging head 15 at the lower end of the second connecting rod 17 is far away from the drain hole 3, the drain hole 3 is opened, and the condensed water can be normally discharged. In order to facilitate that the floating block 14 can only vertically float, a plurality of limiting convex ridges 16 can also be vertically arranged in the valve body 1, and the limiting convex ridges 16 are used for limiting the floating direction of the floating block 14.
An exhaust funnel 19 is arranged on the outer side of the top of the valve body 1, an air inlet and outlet hole 20 is arranged on the top of the exhaust funnel 19, a floating cylinder 21 capable of moving vertically is arranged in the exhaust funnel 19, and the floating cylinder 21 is used for sealing or opening the air inlet and outlet hole 20. When the speed of the drain hole 3 at the lower end discharging the condensed water is less than the water inlet speed of the condensed water, the condensed water can be discharged from the exhaust hole 2 at the upper end, after the exhaust funnel 19 is arranged, the condensed water can enter the exhaust funnel 19, and then the float bowl 21 is driven to gradually float upwards, and then the air inlet and outlet hole 20 at the top of the exhaust funnel 19 is plugged by utilizing the float bowl 21, so that the condensed water is prevented from being discharged from the top of the valve body 1, the condensed water can only be discharged from the drain hole 3 at the lower end, and the collection of the condensed water is convenient.
The vertical protruding stupefied that is equipped with in the aiutage 19, protruding stupefied sets up to more than two to encircle aiutage 19 inner wall and distribute, the protruding stupefied of vertical setting is used for floating float bowl 21 spacing, makes float bowl 21 float about only can going on in the region that protruding stupefied surrounds, and not be provided with protruding stupefied region alright and float bowl 21 between form the clearance, water and the air that get into in the aiutage 19 can pass through in the clearance between float bowl 21 and the inner wall.
The top of flotation pontoon 21 or aiutage 19 is equipped with annular arch at the inboard of business turn over gas pocket 20 terminal surface, through setting up annular arch to reduce the area of contact of flotation pontoon 21 top and business turn over gas pocket 20 terminal surface, thereby increase contact atress, reinforcing leakproofness. Meanwhile, a flexible surface layer is arranged on the top of the buoy 21 and on any one of the end faces of the air inlet and outlet hole 20, and the contact tightness can be enhanced.
The inner side of the exhaust hole 2 and the inner side of the drain hole 3 can be provided with a taper shape, so that the first plugging head 6 and the second plugging head 15 can be plugged conveniently.
Example 2:
this embodiment provides a steam system, installs the drainage discharge valve among the aforementioned embodiment 1 in this steam system's the steam pipe network, and then the discharge of the air of being convenient for among the steam pipe network and comdenstion water, makes this steam system have the reliable smoothness of drainage exhaust simultaneously, and no steam leakage, no comdenstion water seepage, the advantage of the basically no filth siltation in noiselessness and the valve body 1.
Although the invention has been described herein with reference to a number of illustrative embodiments thereof, it should be understood that numerous other modifications and embodiments can be devised by those skilled in the art that will fall within the spirit and scope of the principles of this invention. More specifically, various variations and modifications are possible in the component parts and/or arrangements of the subject combination arrangement within the scope of the disclosure, the drawings and the appended claims. In addition to variations and modifications in the component parts and/or arrangements, other uses will also be apparent to those skilled in the art.

Claims (10)

1. A hydrophobic vent valve, characterized by: the steam valve comprises a valve body (1), wherein the top of the valve body (1) is provided with an exhaust hole (2), the bottom of the valve body is provided with a drain hole (3), and the side wall or the top of the valve body is provided with a steam inlet (4);
a temperature-sensing pushing device and a first plugging head (6) are arranged in the valve body (1), and the temperature-sensing pushing device is deformed by heating to drive the first plugging head (6) to plug the exhaust hole (2);
the valve body (1) is internally provided with a floating block (14) capable of moving vertically and a second plugging head (15) for plugging the drain hole (3), and the floating block (14) moves vertically to drive the second plugging head (15) to be close to or far away from the drain hole (3).
2. The hydrophobic vent valve of claim 1, wherein: transversely be equipped with first connecting rod (5) in valve body (1), the upside in first connecting rod (5) middle section is articulated with the inboard at valve body (1) top, and the upside of first connecting rod (5) one end links to each other with first jam head (6), and the other end links to each other with temperature sensing thrust unit, temperature sensing thrust unit is heated deformation and rotates around articulated department in order to promote first connecting rod (5) to make first jam head (6) will exhaust hole (2) shutoff.
3. The hydrophobic vent valve of claim 2, wherein: the temperature-sensing pushing device comprises an outer cylinder (7), a sealing shell (8) and a deformer (9), wherein the sealing shell (8) is vertically through and comprises an outer cylinder (7) connecting channel and a sliding connecting channel (11), the outer cylinder (7) connecting channel and the sliding connecting channel (11) are separated through the deformer (9), a sliding block (12) is arranged on the upper side of the end part of the first connecting rod (5), the sliding block (12) is slidably installed in the sliding connecting channel (11), and the upper end of the sliding block (12) is attached to the deformer (9);
the outer barrel (7) is vertically arranged and is of a lower opening structure, the upper end of the outer barrel (7) is connected with the top of the valve body (1), the lower end of the outer barrel is connected with a connecting channel of the outer barrel (7), and a heat-sensitive object which expands when heated is arranged in the outer barrel (7).
4. The hydrophobic vent valve of claim 3, wherein: the thermosensitive substance is in a liquid state at normal temperature and is vaporized and expanded after being heated.
5. The hydrophobic vent valve of claim 2, wherein: the temperature-sensing pushing device is a bimetallic strip, and the bimetallic strip is heated and bent to push the first connecting rod (5) to rotate around the hinged part, so that the first plugging head (6) plugs the exhaust hole (2).
6. The hydrophobic vent valve of any of claims 2-5, wherein: and a first spring (13) for the rotation reset of the first connecting rod (5) is arranged on the upper side of the first connecting rod (5).
7. The hydrophobic vent valve of any of claims 1-5, wherein: and a limiting convex edge (16) used for limiting the moving direction of the floating block (14) is vertically arranged in the valve body (1).
8. The hydrophobic vent valve of any of claims 1-5, wherein: still be equipped with second connecting rod (17) and second spring (18) in valve body (1), second connecting rod (17) transversely sets up, and the downside of second connecting rod (17) one end is articulated with the bottom of valve body (1), and the downside of the other end links to each other with second choke plug (15), floating block (14) set up in the upside of second connecting rod (17) other end, the vertical setting of second spring (18), the lower extreme of second spring (18) links to each other with the bottom of valve body (1), and the upper end links to each other with second connecting rod (17) middle section.
9. The hydrophobic vent valve of any of claims 1-5, wherein: the outside at valve body (1) top is equipped with aiutage (19), the top of aiutage (19) is equipped with business turn over gas pocket (20), is equipped with in aiutage (19) but vertical removal's flotation pontoon (21), flotation pontoon (21) are used for making business turn over gas pocket (20) shutoff or open.
10. A steam system, characterized by: comprising a hydrophobic vent valve according to any of claims 1-9.
CN202021127682.XU 2020-06-17 2020-06-17 Drainage exhaust valve and steam system Active CN212510447U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN202021127682.XU CN212510447U (en) 2020-06-17 2020-06-17 Drainage exhaust valve and steam system

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Application Number Priority Date Filing Date Title
CN202021127682.XU CN212510447U (en) 2020-06-17 2020-06-17 Drainage exhaust valve and steam system

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Publication Number Publication Date
CN212510447U true CN212510447U (en) 2021-02-09

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CN202021127682.XU Active CN212510447U (en) 2020-06-17 2020-06-17 Drainage exhaust valve and steam system

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN117066241A (en) * 2023-10-13 2023-11-17 江苏芯梦半导体设备有限公司 Exhaust and liquid discharge device, wafer container carrier and wafer container cleaning equipment

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN117066241A (en) * 2023-10-13 2023-11-17 江苏芯梦半导体设备有限公司 Exhaust and liquid discharge device, wafer container carrier and wafer container cleaning equipment
CN117066241B (en) * 2023-10-13 2024-01-23 江苏芯梦半导体设备有限公司 Exhaust and liquid discharge device, wafer container carrier and wafer container cleaning equipment

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