CN212482623U

CN212482623U - Fluid measuring tool

Info

Publication number: CN212482623U
Application number: CN202021618739.6U
Authority: CN
Inventors: 李林; 程晋文
Original assignee: Nexchip Semiconductor Corp
Current assignee: Nexchip Semiconductor Corp
Priority date: 2020-08-06
Filing date: 2020-08-06
Publication date: 2021-02-05
Anticipated expiration: 2030-08-06

Abstract

The utility model provides a fluid measurement tool, include: the lifting base is positioned at the bottom of the weighing measuring instrument and can adjust the height of the weighing measuring instrument, and the bearing container is positioned on the weighing measuring instrument. The lifting base can adjust the height of the weighing and measuring instrument to adjust the height to different heights according to the actual measuring requirement of the machine platform to measure the volume of the fluid; the variable cylinder measurement is the measurement of a weighing measuring instrument, so that the measurement precision is improved; the bearing container is arranged above the weighing and measuring instrument, fluid can be measured by being placed on the bearing container without being transferred to a measuring cylinder for measurement, the operation time and the material consumption are reduced, the operation is convenient, the measuring speed is high, and the operation efficiency is improved.

Description

Fluid measuring tool

Technical Field

The utility model belongs to the technical field of integrated circuit makes, concretely relates to fluid measurement tool.

Background

In the integrated circuit manufacturing process, reagents such as photoresist, developing solution and other fluids are commonly used, whether the flow rate of the photoresist sprayed from a nozzle is normal or not is often monitored by measuring the volume of the fluid flowing out, because the volume (flow rate) flowing out per unit time multiplied by the working time is equal to the flowing out volume. The volume of the test agent is also required when dosing the agent.

The existing liquid volume measuring tool (such as a measuring cylinder and the like) has insufficient precision and larger measuring error; the position measurement requirement of the process cannot be met, and the accuracy of machine flow calibration is influenced. In addition, the compatibility of the bearing container is not good, and the operation of equipment personnel is time-consuming and labor-consuming.

On the one hand, the volume measurement of the small flow of the machine table is measured by adopting a measuring cylinder, numerical values are judged by human eyes, and individual differences exist and are uncontrollable. The common measuring cylinder can only be accurate to one position behind a decimal point, the machine table flow is accurate to three positions behind the decimal point, and the accuracy of the existing tool is too low.

On the other hand, the requirement for measuring the technological position of the photoresist nozzle cannot be met, the height of the photoresist nozzle is low, the existing measuring cylinder jig cannot measure, and material waste is easily caused.

On the other hand, the fluid carrying container has poor compatibility, inconvenient operation and time and labor consuming use. The volume of the developing solution is measured, the large-flow volume of the machine station is measured by adopting a bearing container to take, and then the bearing container is poured into a measuring cylinder to read the volume. Different kinds of nozzles need different bearing containers, and the liquid easily drips during pouring, and the operation is inconvenient.

SUMMERY OF THE UTILITY MODEL

An object of the utility model is to provide a fluid measurement tool can adjust to not co-altitude according to the board demand of actually measuring and carry out the fluid measurement, improves measurement accuracy, and convenient operation promotes the operating efficiency.

The utility model provides a fluid measurement tool, include:

the lifting base is positioned at the bottom of the weighing measuring instrument and can adjust the height of the weighing measuring instrument, and the bearing container is positioned on the weighing measuring instrument.

Further, the lifting base includes: the sleeve is fixed at the bottom of the weighing and measuring instrument, the movable column is sleeved in the sleeve, and the height of the sleeve relative to the movable column is adjustable.

Further, the activity post is provided with a plurality of first trompils of interval distribution along the vertical, the sleeve is provided with at least one second trompil, the second trompil with first trompil passes through the spacer pin fixed, in order to realize telescopic altitude mixture control.

Further, a knob is arranged at the bottom of the movable column and drives the movable column to rotate in the sleeve.

Further, the load-measuring instrument includes: weighing sensor, data processing module and display module.

Further, the weighing sensor is used for measuring the mass of the measured fluid, the data processing module calculates the volume of the measured fluid according to the density and the mass of the measured fluid, and the display module displays the volume of the measured fluid.

Further, the weighing and measuring instrument further comprises: and the charging module is electrically connected with the data processing module.

Further, the bearing container is provided with a first groove, and a sub container is arranged in the first groove.

Further, the material of the carrying container includes: teflon.

Further, a second groove is formed in the top of the weighing and measuring instrument, and the bearing container is located in the second groove.

Compared with the prior art, the utility model discloses following beneficial effect has:

the utility model discloses a fluid measurement tool, include: the lifting base is positioned at the bottom of the weighing measuring instrument and can adjust the height of the weighing measuring instrument, and the bearing container is positioned on the weighing measuring instrument. The lifting base can adjust the height of the weighing and measuring instrument to different heights according to the actual measuring requirement of the machine platform to measure the volume of the fluid; the variable cylinder measurement is the measurement of a weighing measuring instrument, so that the measurement precision is improved; the bearing container is arranged above the weighing and measuring instrument, fluid can be measured by being placed on the bearing container without being transferred to a measuring cylinder for measurement, the operation time and the material consumption are reduced, the operation is convenient, the measuring speed is high, and the operation efficiency is improved.

Drawings

Fig. 1 is a front view of a fluid measuring jig according to an embodiment of the present invention.

Fig. 2 is a top view of a fluid measuring device according to an embodiment of the present invention.

Figure 3 is a cross-sectional view of the carrying container of figure 2 at AA'.

Fig. 4 is a schematic view of a lifting base in the fluid measurement fixture according to an embodiment of the present invention.

Fig. 5 is a schematic view of a measurement flow of a fluid measurement tool according to an embodiment of the present invention.

Wherein the reference numbers are as follows:

10-a lifting base; 11-a knob; 12-a movable column; 12 a-a first opening; 13-a sleeve; 13 a-a second opening; 20-a weight measuring instrument; 21-a display module; 22-a key; 23-a second groove; 30-a carrying container; 31-a first groove; 32-child container.

Detailed Description

Based on the research, the embodiment of the utility model provides a fluid measurement tool is provided. The present invention will be described in further detail with reference to the accompanying drawings and specific embodiments. The advantages and features of the present invention will become more apparent from the following description. It is to be noted that the drawings are designed in a simplified form and are not to scale, but rather are provided for the purpose of facilitating and distinctly claiming the embodiments of the present invention.

The embodiment of the utility model provides a fluid measurement tool, include:

Specifically, as shown in fig. 1 and 4, the fluid measuring jig of the present embodiment includes: a lifting base 10, a load-measuring instrument 20 and a carrying container 30. The lifting base 10 includes: sleeve 13, activity post 12 and spacer pin, sleeve 13 is fixed the bottom of weighing and measuring instrument 20, activity post 12 cover is established in sleeve 13, sleeve 13 for the height-adjustable of activity post 12. The movable column 12 is vertically provided with a plurality of first open holes 12a distributed at intervals, the sleeve 13 is provided with at least one second open hole 13a, the second open hole 13a and the first open hole 12a are fixed through a limiting pin, and the height adjustment of the sleeve 13 is realized through the fixation of the first open hole 12a with different heights in the vertical direction. Since the sleeve 13 is fixed to the bottom of the load-measuring device 20, the height of the sleeve 13, that is, the height of the load-measuring device 20, is adjusted. The bottom of the movable column 12 is provided with a knob 11, and the knob 11 can be manually rotated to drive the movable column 12 to rotate in the sleeve 13, so as to align the first opening 12a and the second opening 13 a.

Illustratively, a sleeve 13 is fixedly arranged at each corner of the bottom of the square weighing and measuring instrument 20, the sleeve 13 is connected with the movable column 12 and is matched with a limit pin to realize coarse adjustment of the height of the lifting base 10, and then the sleeve 13 is matched with a knob 11 at the bottom of the movable column 12 to perform fine adjustment. The sleeve 13 cooperates with the movable column 12 as a support leg for the load-measuring instrument 20. Therefore, the fluid measuring jig can reach the required height during measurement, and is matched with the level gauge to enable the fluid measuring jig to be in a horizontal state during measurement. In the fluid measuring apparatus of the present embodiment, the lifting base 10 can adjust the height of the weighing and measuring instrument 20, so that the fluid measuring apparatus can be adjusted to different heights according to the actual measurement requirement of the machine for fluid volume measurement.

As shown in fig. 1 to 3, the carrying container 30 has a first groove 31, a sub-container 32 is disposed in the first groove 31, illustratively, the top of the sub-container 32 is open, and the periphery and the bottom of the sub-container 32 form a sealing structure. The sub-tank 32 has a circular ring-shaped cross-sectional shape in a cross-section parallel to the upper surface of the weigh scale 20. The sub-tank 32 is adapted to contain a relatively small volume of fluid, for example a volume of 20cm³～50cm³The fluid of (1). Fluid body of larger capacityWhen measured in volume, e.g. capacity 200cm³～500cm³A larger volume of fluid may flow into the first recess 31 and the sub-tank 32. The carrier container 30 can satisfy both smaller capacity and larger capacity volumetric measurements.

The material of the carrying container 30 includes: teflon (Teflon), a material that is inert to most chemicals and solvents, resistant to acids and bases, water, and various organic solvents. The material of the sub-tank 32 may be Teflon (Teflon). The bearing container 30 of the embodiment is designed by taking characteristics of various nozzles of a machine table as reference, is completely compatible with fluid measurement requirements of all nozzles of the existing machine types, and is made of Teflon (Teflon) materials, so that the bearing container has the characteristics of lightness, smallness, acid and alkali resistance, strong practicability and the like.

The weighing and measuring instrument 20 is provided with a second groove 23 at the top, and the carrying container 30 is positioned in the second groove 23.

The load measuring instrument 20 includes: a load cell, a data processing module and a display module 21. The weighing sensor is used for measuring the mass of the measured fluid, the data processing module calculates the volume of the measured fluid according to the density and the mass of the measured fluid, and the display module 21 displays the volume of the measured fluid. The weighing scale further comprises: and the charging module is electrically connected with the data processing module. The data processing module has a programming function and a debugging interface, data conversion and calculation programs written by a computer language are written by using a development tool, and corresponding volume data can be obtained by performing division operation on measured mass data and known density and displayed on the display module. Illustratively, the display module 21 uses a segment-type liquid crystal display, and the keys 22 on the display module include, for example: On/OFF, Zero, SET, Select, + and-keys, SET key goes into the setup menu where CH/PR/ρ (channel/photoresist/density) values can be customized. The reading is more accurate, the precision is high, and the error is little.

The density of the liquid is mainly determined by the composition of the liquid, and is less affected by temperature, and the higher pressure has a significant effect. According to the application of density formula rho-M/V, the volume calculation formula V-M/V can be obtainedM/rho (where rho represents density (g/cm)³) M represents the mass (g) of the object, V represents the volume (cm) of the object³)). When the density rho of the currently used liquid is known, the data processing module outputs the value of the volume V to the display module for volume value display after finishing data processing by measuring the value of the mass M.

For example, the channel CH1 of the weigh scale 20 sets the liquid to be a developer solution having a density of: rho₁The mass M of the liquid is measured by a weighing and measuring instrument₁Then the data processing module calculates the volume V₁＝M₁/ρ₁And the volume V₁And displaying the data on a display module.

The existing measuring cylinder is adopted for measurement, and the average single measurement needs 5 min; if the liquid leaks in the process of pouring into the measuring cylinder, the time for measuring again is about 10 min; if the flow of the machine is not measured accurately, more time is needed for calibration and adjustment. The fluid measuring tool of the embodiment is placed in the machine table, and the mechanical arm is operated to move the nozzle to the upper part of the bearing container, so that the measuring result can be seen after spraying, and the time consumption is about 2 Min.

Use the utility model discloses fluid measurement tool measures flow schematic diagram as shown in figure 5, include:

starting the fluid measuring jig, checking whether the electric quantity of the fluid measuring jig is sufficient, and if the electric quantity is sufficient, adjusting the height of the flow measuring jig according to the measurement requirement; if the electric quantity is insufficient, the height of the fluid measurement jig is adjusted according to the measurement requirement after the power supply is switched on for charging. Specifically, a fluid measuring jig is placed in a position to be measured in a machine table, a knob of a lifting base is finely adjusted, the state of a level meter is observed to ensure that the level is normal, a channel (channel) corresponding to the measured fluid is selected, a bearing container is placed on a measuring platform (a weighing measuring instrument) to perform zero calibration, a nozzle of the machine table is moved to the position above the bearing container to perform machine table flow spraying, the sprayed liquid flows into the bearing container, a weighing sensor measures the mass of the measured fluid, a data processing module calculates the volume of the measured fluid by combining the density of the measured fluid, a display module 21 displays the volume of the measured fluid, the volume value of the measured fluid is recorded, and the measurement is finished.

The fluid measurement tool of this embodiment adopts electronic scale theory of operation, combines the actual difficulty that meets in the semiconductor manufacturing equipment maintenance, has improved board fluid volume measurement accuracy, reaches the accurate control to the material quantity and has promoted equipment personnel operating efficiency.

The fluid measurement jig of this embodiment is applicable to the narrow and small space flow measurement of relevant board in the semiconductor manufacturing field, and measured liquid density is known, and the accessible is measured liquid mass and is converted out the liquid volume to this tool measurement, is used for less capacity and the fluid measurement of great capacity.

To sum up, the utility model discloses a fluid measurement tool, include: the lifting base is positioned at the bottom of the weighing measuring instrument and can adjust the height of the weighing measuring instrument, and the bearing container is positioned on the weighing measuring instrument. The lifting base can adjust the height of the weighing and measuring instrument to adjust the height to different heights for flow measurement according to the actual measurement requirement of the machine platform; the variable cylinder is used for measuring by the weighing and measuring instrument, so that the measuring precision is improved, the flow can be effectively monitored, and the spraying precision of the chemical reagent of the machine table is improved. The bearing container is arranged above the weighing and measuring instrument, fluid can be measured by being placed on the bearing container without being transferred to a measuring cylinder for measurement, the operation time and the material consumption are reduced, the operation is convenient, the measuring speed is high, and the operation efficiency is improved.

The embodiments in the present description are described in a progressive manner, each embodiment focuses on differences from other embodiments, and the same and similar parts among the embodiments are referred to each other. For the method disclosed by the embodiment, the description is relatively simple because the method corresponds to the device disclosed by the embodiment, and the relevant points can be referred to the description of the method part.

The above description is only for the preferred embodiment of the present invention and is not intended to limit the scope of the present invention, and any modification and modification made by those skilled in the art according to the above disclosure are all within the scope of the claims.

Claims

1. A fluid measurement jig, comprising:

2. The fluid measurement tool of claim 1 wherein the lift base comprises: the sleeve is fixed at the bottom of the weighing and measuring instrument, the movable column is sleeved in the sleeve, and the height of the sleeve relative to the movable column is adjustable.

3. The fluid measuring jig according to claim 2, wherein the movable column is vertically provided with a plurality of first openings which are distributed at intervals, the sleeve is provided with at least one second opening, and the second opening and the first opening are fixed by a limit pin so as to realize height adjustment of the sleeve.

4. The fluid measuring fixture according to claim 2, wherein a knob is disposed at a bottom of the movable post, and the knob rotates the movable post in the sleeve.

5. The fluid measurement jig of any one of claims 1 to 4, wherein the weight measuring instrument comprises: weighing sensor, data processing module and display module.

6. The fluid measuring jig of claim 5, wherein the weighing sensor is used for measuring the mass of the measured fluid, the data processing module calculates the volume of the measured fluid according to the density and the mass of the measured fluid, and the display module displays the volume of the measured fluid.

7. The fluid measurement fixture of claim 5, wherein the weight measurement gauge further comprises: and the charging module is electrically connected with the data processing module.

8. The fluid measuring jig according to any one of claims 1 to 4, wherein the carrying container has a first groove, and a sub-container is provided in the first groove.

9. The fluid measuring jig according to any one of claims 1 to 4, wherein the material of the carrying container includes: teflon.

10. The fluid measuring jig of any one of claims 1 to 4, wherein the weigh scale top is provided with a second recess in which the load-bearing container is located.