CN212471518U - Novel wafer fixing and detecting device based on manipulator fingers - Google Patents
Novel wafer fixing and detecting device based on manipulator fingers Download PDFInfo
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- CN212471518U CN212471518U CN202021148587.8U CN202021148587U CN212471518U CN 212471518 U CN212471518 U CN 212471518U CN 202021148587 U CN202021148587 U CN 202021148587U CN 212471518 U CN212471518 U CN 212471518U
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Abstract
The utility model relates to a novel wafer is fixed and detection device based on manipulator finger, including fixed block, first sensor and mount, the internal connection of fixed block has the clutch blocks frame, and clutch blocks frame outside one side is provided with the finger, the inside arrangement of finger has the holding frame, and the top outside of holding frame is fixed with the guard plate all around, one side of finger is provided with the mount, and is provided with the second sensor on one side of the inside of mount, the beneficial effects of the utility model are that: when the whole operation system breaks down, the second sensor detects whether a wafer is on the finger, if the wafer is on the finger, the system gives an alarm, the wafer needs to be moved out, the system returns to the original point, when the second sensor and the first sensor work together, if the wafer is in the detection line of the second sensor and the first sensor, the manipulator is carried to the next procedure, and if the wafer is not in the detection line of the first sensor, the system gives an alarm.
Description
Technical Field
The utility model relates to a manipulator transport wafer technical field specifically is a novel wafer is fixed and detection device based on manipulator finger.
Background
The manipulator takes out the wafer from the wafer box of the material loading platform and places the wafer on the calibrating device, the calibrating device detects the notch of the wafer, the center of the circle of the wafer is calculated, and the wafer is moved to a formulated angle and position. And after the calibration is qualified, taking out the wafer by using the manipulator, and then carrying to the next procedure for processing the wafer. In the process of transporting the wafer, the fingers of the robot carry the wafer, and usually the wafer is fixed by vacuum adsorption.
The mechanical arm on the market carries the wafer and discovers in the actual production process that the vacuum adsorption mode depends on whether the air supply system is stable to a great extent, if the air supply system is unstable, the system can frequently give an alarm, the contact area of the finger and the wafer is large, and after the mechanical arm works for a period of time, the finger can drop ash and have impurities, so that the surface of the wafer can be polluted, and the problem of process procedure is seriously influenced.
SUMMERY OF THE UTILITY MODEL
An object of the utility model is to provide a novel wafer is fixed and detection device based on manipulator finger to solve the manipulator transport wafer on the market that proposes in the above-mentioned background art, discover in the actual production process, whether vacuum adsorption mode to a great extent depends on the air supply system stable, if the air supply system is unstable, the system can frequently report to the police, and the finger is big with wafer area of contact moreover, and after manipulator work a period, can drop ash on the finger and have impurity, can pollute the wafer surface, seriously influence the problem of technology process.
In order to achieve the above object, the utility model provides a following technical scheme: the utility model provides a novel wafer is fixed and detection device based on manipulator finger, includes fixed block, first sensor and mount, the internal connection of fixed block has the clutch blocks frame, and clutch blocks frame outside one side is provided with the finger, the inside arrangement of finger has the holding frame, and the top outside of holding frame is fixed with the guard plate all around, one side of finger is provided with the mount, and is provided with the second sensor on one side of the inside of mount, the mount is close to bottom middle part one side of finger and installs first sensor, both ends are provided with the connecting rod about outside one side of mount, and are swing joint between mount and the connecting rod.
Preferably, the fixed block and the friction block frame are in riveted connection, and the fixed block and the fingers form a thread structure through the friction block frame.
Preferably, the fingers and the clamping frame are mutually attached, and the clamping frame is of a semicircular structure.
Preferably, the finger is movably connected with the fixed frame, and the second sensor is in threaded connection with the fixed frame.
Preferably, the mount includes connecting rod, backing plate, splint and screw post, the internal connection backing plate of second sensor, and the top of backing plate is provided with the connecting rod.
Preferably, the connecting rod and the backing plate are mutually attached, and the second sensor forms a dismounting structure through the connecting rod and the backing plate.
Preferably, a clamping plate is distributed in the fixing frame, and a threaded column is arranged at the top end of the clamping plate.
Preferably, the friction block frame comprises studs and grooves, the grooves are formed in the friction block frame, the studs are arranged on two sides of the grooves, the clamping frame comprises clamping grooves and semicircular grooves, the semicircular grooves are formed in the clamping frame, and the clamping grooves are connected to the top ends of the semicircular grooves.
Compared with the prior art, the beneficial effects of the utility model are as follows:
1. the utility model discloses be connected for the riveting between fixed block and the clutch blocks frame, and the fixed block passes through the clutch blocks frame and constitutes helicitic texture with the finger, and the number of clutch blocks frame and fixed block subassembly can be decided according to actual conditions for the wafer contacts with a plurality of clutch blocks frame, relies on the structure frictional force of clutch blocks frame to guarantee that the wafer does not take place to remove in handling, relies on the internal structure of clutch blocks, has great frictional force, can make not take place to remove in the handling.
2. The utility model discloses be swing joint between finger and the mount, and be threaded connection between second sensor and the mount, when whole operating system broke down, whether there is the wafer on the second sensor detection finger, if the wafer is on the finger, the system reports to the police, need shift out the wafer, the system gets back to the original point, when second sensor and first sensor common work, if the wafer is in second sensor and first sensor detection line, the manipulator transports next process, if the wafer is not in first sensor detection line, the system reports to the police, first sensor passes through the bolt fastening on mount bilateral symmetry position, can detect position control.
3. The utility model discloses laminate each other between connecting rod and the backing plate, and the second sensor passes through the connecting rod and the backing plate constitutes dismantlement structure, and the manual connecting rod of twisting of user can make connecting rod and backing plate take place the screw thread not hard up, can dismantle the second sensor, and convenient to use person changes the second sensor, is convenient for carry out second sensor detection position and adjusts the change.
4. The utility model discloses the part has splint in the inside of mount, and the top of splint is provided with the screw thread post, can distribute screw thread post and splint and install in the inside of mount, does benefit to the inside of mount and carries out equipment fixing, when the finger is installed between the mount, can run through the buckle with screw thread post and splint between the mount, can consolidate the effect between finger and the mount.
5. The utility model discloses the inside of clutch blocks frame is seted up flutedly, and the inside both sides of recess are provided with the key post, settles between the clutch blocks frame when the fixed block, can be with key post threaded connection between fixed block and clutch blocks frame, and the manual regulation key post of convenient to use person can dismantle the change to the fixed block between clutch blocks frame and the recess, can change the fixed block, in case fixed block wearing and tearing or dust pollution are serious can directly change the subassembly.
Drawings
Fig. 1 is a schematic front view of the present invention;
FIG. 2 is a schematic view of the internal structure of the present invention;
FIG. 3 is a schematic view of the internal structure of the present invention;
fig. 4 is an enlarged schematic structural view of a point a in fig. 2 according to the present invention;
fig. 5 is a schematic view of the internal structure of the present invention.
In the figure: 1. a fixed block; 2. a friction block frame; 3. a finger; 4. a first sensor; 5. a second sensor; 6. a fixed mount; 7. a clamping frame; 8. a protection plate; 9. a connecting rod; 10. a base plate; 11. a stud; 12. a groove; 13. a splint; 14. a threaded post; 15. a clamping groove; 16. a semicircular groove.
Detailed Description
The technical solutions in the embodiments of the present invention will be described clearly and completely with reference to the accompanying drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only some embodiments of the present invention, not all embodiments. Based on the embodiments in the present invention, all other embodiments obtained by a person skilled in the art without creative work belong to the protection scope of the present invention.
In the description of the present invention, "a plurality" means two or more unless otherwise specified; the terms "upper", "lower", "left", "right", "inner", "outer", "front", "rear", "head", "tail", and the like indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings, and are merely for convenience of description and simplicity of description, and do not indicate or imply that the device or element being referred to must have a particular orientation, be constructed and operated in a particular orientation, and thus, should not be construed as limiting the present invention. Furthermore, the terms "first," "second," "third," and the like are used for descriptive purposes only and are not to be construed as indicating or implying relative importance.
Referring to fig. 1-5, the present invention provides a technical solution: a novel wafer fixing and detecting device based on manipulator fingers comprises a fixing block 1, a friction block frame 2, fingers 3, a first sensor 4, a second sensor 5, a fixing frame 6, a clamping frame 7, a protection plate 8, a connecting rod 9, a base plate 10, studs 11, grooves 12, clamping plates 13, threaded columns 14, clamping grooves 15 and semicircular grooves 16, wherein the friction block frame 2 is connected inside the fixing block 1, and one side of the outer part of the friction block frame 2 is provided with a finger 3, the inside of the finger 3 is provided with a clamping frame 7, and the periphery of the top end of the clamping frame 7 is fixed with a protective plate 8, one side of the finger 3 is provided with a fixed frame 6, a second sensor 5 is arranged on one side inside the fixed frame 6, a first sensor 4 is arranged on one side of the fixed frame 6, which is close to the middle part of the bottom end of the finger 3, a connecting rod 9 is arranged at the upper end and the lower end of one side outside the fixed frame 6, and the fixed frame 6 is movably connected with the connecting rod 9;
the fixed block 1 is in riveted connection with the friction block frame 2, the fixed block 1 and the fingers 3 form a threaded structure through the friction block frame 2, the fixed block 1 and the friction block frame 2 which are in riveted connection are in threaded connection between the fingers 3, so that the fixed block 1 and the friction block frame 2 are in threaded reinforcement installation between the fingers 3, the number of the friction block frame 2 and the fixed block 1 can be determined according to actual conditions, the wafer is in contact with the friction block frames 2, the wafer is guaranteed not to move in the carrying process by the structural friction force of the friction block frame 2, and the friction force is large by the internal structure of the friction block 2, so that the wafer is not moved in the carrying process;
the fingers 3 and the clamping frames 7 are mutually attached, the clamping frames 7 are in semicircular structures, and the clamping frames 7 are mutually attached between the fingers 3, so that the clamping frames 7 in the semicircular structures are installed between the fingers 3 in a protection mode, and the friction force between the fingers 3 is increased;
the fingers 3 are movably connected with the fixed frame 6, the second sensor 5 is in threaded connection with the fixed frame 6, the fixed frame 6 is movably arranged between the fingers 3, so that the finger 3 is buckled between the fixed frames 6 through threads, the second sensor 5 can be installed between the fixed frames 6 through threads, when the whole operation system is in failure, the second sensor 5 detects whether the wafer is on the finger 3, if the wafer is on the finger 3, the system alarms, the wafer needs to be removed, the system returns to the origin, when the second sensor 5 and the first sensor 4 work together, if the wafer is in the line of the second sensor 5 and the first sensor 4, the robot is carried to the next process, if the wafer is not in the detection line of the first sensor 4, the system gives an alarm, and the first sensor 4 is fixed at the symmetrical positions on the two sides of the fixing frame 6 through bolts, so that the detection position can be adjusted;
the fixing frame 6 comprises a connecting rod 9, a base plate 10, a clamping plate 13 and a threaded column 14, the base plate 10 is connected inside the second sensor 5, the connecting rod 9 is arranged at the top end of the base plate 10, and when the finger 3 is installed between the fixing frames 6, the connecting rod 9 and the base plate 10 can be installed between the fixing frames 6 in a threaded mode, so that the second sensor 5 is installed between the fixing frames 6;
the connecting rod 9 and the backing plate 10 are mutually attached, the second sensor 5 and the backing plate 10 form a detaching structure through the connecting rod 9, the second sensor 5 is installed between the connecting rod 9 and the backing plate 10 which are mutually attached, a user manually twists the connecting rod 9 to enable the connecting rod 9 and the backing plate 10 to be loosened in threads, the second sensor 5 can be detached, the user can replace the second sensor 5 conveniently, and the detection position of the second sensor 5 can be adjusted and replaced conveniently;
the friction block frame 2 comprises studs 11 and grooves 12, the grooves 12 are formed in the friction block frame 2, the studs 11 are arranged on two sides of the inner portion of each groove 12, the clamping frame 7 comprises clamping grooves 15 and semicircular grooves 16, the semicircular grooves 16 are formed in the clamping frame 7, the top ends of the semicircular grooves 16 are connected with the clamping grooves 15, the grooves 12 are formed between the friction block frames, the studs 11 are in threaded connection between the grooves 12 and the friction block frame 2, when the friction block frames 2 are arranged on the fixed block 1, the studs 11 can be in threaded connection between the fixed block 1 and the friction block frame 2, a user can conveniently and manually adjust the studs 11, the fixed block 1 between the friction block frame 2 and the grooves 12 can be detached and replaced, the fixed block 1 can be replaced, and once the fixed block 1 is abraded or seriously polluted by dust, the assembly can be directly replaced; when the holders 7 are attached to each other between the fingers 3, the semicircular grooves 16 are formed between the holders 7, the engaging grooves 15 can be formed between the semicircular grooves 16, and the engaging grooves 15 and the semicircular grooves 16 can be effectively attached between the fingers 3 in a protected manner.
The working principle of the embodiment is as follows: the novel wafer fixing and detecting device based on the manipulator fingers is characterized in that a fixing frame 6 is movably arranged between fingers 3, so that the fingers 3 are buckled between the fixing frames 6 in a threaded mode, a second sensor 5 is installed between the fixing frames 6 in a threaded mode, when the whole operation system breaks down, the second sensor 5 detects whether wafers exist on the fingers 3 or not, if the wafers exist on the fingers 3, the system gives an alarm, the wafers need to be moved out, the system returns to the original point, when the second sensor 5 and a first sensor 4 work together, if the wafers exist in a detection line of the second sensor 5 and the first sensor 4, a manipulator carries the wafers to the next working procedure, if the wafers are not in the detection line of the first sensor 4, the system gives an alarm, the first sensor 4 is fixed on the symmetrical positions of the two sides of the fixing frame 6 through bolts, the detection position adjustment can be carried out, a groove 12 is formed between, the bolt 11 is connected between the groove 12 and the friction block frame 2 in a threaded manner, when the friction block frame 2 is arranged on the fixed block 1, the bolt 11 can be connected between the fixed block 1 and the friction block frame 2 in a threaded manner, the bolt 11 can be manually adjusted by a user conveniently, the fixed block 1 between the friction block frame 2 and the groove 12 can be disassembled and replaced, the fixed block 1 can be replaced, once the fixed block 1 is worn or seriously polluted by dust, the assembly can be directly replaced, meanwhile, the clamping plates 13 are distributed and installed inside the fixed frame 6, the thread column 14 is buckled between the clamping plates 13 in a threaded manner, the thread column 14 and the clamping plates 13 can be distributed and installed inside the fixed frame 6, equipment installation inside the fixed frame 6 is facilitated, when the finger 3 is installed between the fixed frame 6, the thread column 14 and the clamping plates 13 can be buckled between the fixed frame 6 in a penetrating manner, and the reinforcing effect can be achieved, finally, when the clamping frames 7 are mutually attached between the fingers 3, the semicircular grooves 16 are arranged between the clamping frames 7, the clamping grooves 15 can be arranged between the semicircular grooves 16, the clamping grooves 15 and the semicircular grooves 16 are effectively installed between the fingers 3 in a protective way, the second sensor 5 is installed between the connecting rod 9 and the backing plate 10 which are mutually attached, a user manually twists the connecting rod 9 to enable the connecting rod 9 and the backing plate 10 to be loosened in thread, the second sensor 5 can be disassembled, the user can conveniently replace the second sensor 5 to facilitate the adjustment and replacement of the detection position of the second sensor 5, when the fingers 3 are installed between the fixing frames 6, the connecting rod 9 and the backing plate 10 can be installed between the fixing frames 6 in a threaded way, the second sensor 5 is installed between the fixing frames 6, the clamping frames 7 are mutually attached between the fingers 3, and the clamping frames 7 in a semicircular structure are installed between the fingers 3 in a protective way, increase the frictional force between 3 fingers, through fixed block 1 and the 2 threaded connection of clutch blocks frame that will rivet the connection between 3 fingers, make fixed block 1 and 2 threaded reinforcement of clutch blocks frame install between 3 fingers, the quantity of clutch blocks frame 2 and 1 subassembly of fixed block can be decided according to actual conditions, make wafer and a plurality of clutch blocks frame 2 contact, the structure frictional force that relies on clutch blocks frame 2 guarantees that the wafer does not take place to remove in handling, rely on 2 inner structure of clutch blocks, great frictional force has, can make not take place to remove in the handling.
Although the present invention has been described in detail with reference to the foregoing embodiments, it will be apparent to those skilled in the art that modifications may be made to the embodiments or portions thereof without departing from the spirit and scope of the invention.
Claims (8)
1. The utility model provides a novel wafer is fixed and detection device based on manipulator finger, includes fixed block (1), first sensor (4) and mount (6), its characterized in that: the utility model discloses a sensor, including fixed block (1), the internal connection of fixed block (1) has rubbing block frame (2), and outside one side of rubbing block frame (2) is provided with finger (3), the inside arrangement of finger (3) has holding frame (7), and the top outside of holding frame (7) is fixed with guard plate (8) all around, one side of finger (3) is provided with mount (6), and inside one side of mount (6) is provided with second sensor (5), mount (6) are close to bottom middle part one side of finger (3) and install first sensor (4), both ends are provided with connecting rod (9) about outside one side of mount (6), and are swing joint between mount (6) and connecting rod (9).
2. The novel wafer fixing and detecting device based on the manipulator finger as claimed in claim 1, wherein: the fixed block (1) is connected with the friction block frame (2) in a riveting mode, and the fixed block (1) forms a thread structure with the fingers (3) through the friction block frame (2).
3. The novel wafer fixing and detecting device based on the manipulator finger as claimed in claim 1, wherein: the fingers (3) and the clamping frame (7) are mutually attached, and the clamping frame (7) is of a semicircular structure.
4. The novel wafer fixing and detecting device based on the manipulator finger as claimed in claim 1, wherein: the finger (3) is movably connected with the fixing frame (6), and the second sensor (5) is in threaded connection with the fixing frame (6).
5. The novel wafer fixing and detecting device based on the manipulator finger as claimed in claim 1, wherein: the fixing frame (6) comprises a connecting rod (9), a base plate (10), a clamping plate (13) and a threaded column (14), the inner portion of the second sensor (5) is connected with the base plate (10), and the top end of the base plate (10) is provided with the connecting rod (9).
6. The novel wafer fixing and detecting device based on the manipulator finger as claimed in claim 5, wherein: the connecting rod (9) and the backing plate (10) are mutually attached, and the second sensor (5) forms a dismounting structure with the backing plate (10) through the connecting rod (9).
7. The novel wafer fixing and detecting device based on the manipulator finger as claimed in claim 5, wherein: the middle part of the inner part of the fixing frame (6) is distributed with a clamping plate (13), and the top end of the clamping plate (13) is provided with a threaded column (14).
8. The novel wafer fixing and detecting device based on the manipulator finger as claimed in claim 1, wherein: the friction block frame (2) comprises studs (11) and grooves (12), the grooves (12) are formed in the friction block frame (2), the studs (11) are arranged on two sides of the inner portion of each groove (12), the clamping frame (7) comprises clamping grooves (15) and semicircular grooves (16), the semicircular grooves (16) are formed in the clamping frame (7), and the clamping grooves (15) are connected to the top ends of the semicircular grooves (16).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202021148587.8U CN212471518U (en) | 2020-06-19 | 2020-06-19 | Novel wafer fixing and detecting device based on manipulator fingers |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202021148587.8U CN212471518U (en) | 2020-06-19 | 2020-06-19 | Novel wafer fixing and detecting device based on manipulator fingers |
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| Publication Number | Publication Date |
|---|---|
| CN212471518U true CN212471518U (en) | 2021-02-05 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN202021148587.8U Active CN212471518U (en) | 2020-06-19 | 2020-06-19 | Novel wafer fixing and detecting device based on manipulator fingers |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111546361A (en) * | 2020-06-19 | 2020-08-18 | 上海微松工业自动化有限公司 | Novel wafer fixing and detecting mode based on manipulator fingers |
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2020
- 2020-06-19 CN CN202021148587.8U patent/CN212471518U/en active Active
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111546361A (en) * | 2020-06-19 | 2020-08-18 | 上海微松工业自动化有限公司 | Novel wafer fixing and detecting mode based on manipulator fingers |
| CN111546361B (en) * | 2020-06-19 | 2023-05-26 | 上海微松工业自动化有限公司 | Novel wafer fixing and detecting mode based on manipulator fingers |
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