CN212440483U

CN212440483U - Filtering mechanism for vapor phase epitaxy furnace

Info

Publication number: CN212440483U
Application number: CN202021128049.2U
Authority: CN
Inventors: 王作义; 马洪文; 魏关成; 高万智; 杨虎; 陈小铎
Original assignee: Shanghai Vastity Electronics Technology Co ltd
Current assignee: Shanghai Vastity Electronics Technology Co ltd
Priority date: 2020-06-18
Filing date: 2020-06-18
Publication date: 2021-02-02
Anticipated expiration: 2030-06-18

Abstract

The utility model discloses a filtering mechanism for vapor phase epitaxy furnace, including the intake stack body, the top of intake stack body inner chamber is provided with filtering mechanism, filtering mechanism is including seting up the annular groove at intake stack body inner wall top. The utility model discloses a filter mechanism's setting, dust and impurity in the air are filtered, setting through stop gear afterwards, remove the frame, change the filter screen body, can reach the purpose of being convenient for change and clearance filter screen, this filter mechanism for vapor phase epitaxy stove, current vapor phase epitaxy stove is in the use has been solved, the air inlet position is installed the filter layer through the mounting means of screw-thread fastening more, this kind of mounting means need frequently rotate the bolt and carry out the dismouting to the filter screen, and because the adsorption affinity in the stove, dust impurity is piled up more easily on the surface of filter screen, user's clearance cycle is shorter, be unfavorable for the problem that the user used.

Description

Filtering mechanism for vapor phase epitaxy furnace

Technical Field

The utility model relates to a vapor phase epitaxy furnace technical field specifically is a filtering mechanism for vapor phase epitaxy furnace.

Background

In the use process of the vapor phase epitaxy furnace, in order to ensure that crystals in the furnace can be subjected to a stable epitaxy process, the position of an air inlet of the vapor phase epitaxy furnace needs to be filtered, impurities in external air are filtered, and the stable epitaxy process in the furnace is ensured.

Current vapour phase epitaxy stove is in the use, and the air inlet position is installed the filter layer through the mounting means of screw-thread fastening more, and this kind of mounting means need frequently rotate the bolt and carry out the dismouting to the filter screen, and because the adsorption affinity in the stove, dust impurity is piled up more easily on the surface of filter screen, and user's clearance cycle is shorter, is unfavorable for the user to use, based on this, the utility model provides a vapour phase epitaxy stove is with filter mechanism for solving above-mentioned problem.

SUMMERY OF THE UTILITY MODEL

An object of the utility model is to provide a vapor phase epitaxy is filtering mechanism for stove possesses the advantage of being convenient for change and clearance filter screen, has solved current vapor phase epitaxy stove in the use, and the air inlet position is installed the filter layer through the mounting means of screw-thread fastening more, and this kind of mounting means need frequently rotate the bolt and carry out the dismouting to the filter screen, and because the adsorption efficiency in the stove, dust impurity is piled up more easily on the surface of filter screen, and user's clearance cycle is shorter, is unfavorable for the problem that the user used.

In order to achieve the above object, the utility model provides a following technical scheme: a filtering mechanism for a vapor phase epitaxy furnace comprises an air inlet pipeline body, wherein the top of an inner cavity of the air inlet pipeline body is provided with the filtering mechanism, the filtering mechanism comprises an annular groove formed in the top of the inner wall of the air inlet pipeline body, a filter screen body is placed at the bottom of the inner cavity of the annular groove, the top of the filter screen body is provided with a pressing ring, the left side of the pressing ring is fixedly connected with a rectangular limiting block, the left side of the inner cavity of the annular groove is provided with a rectangular through hole matched with the rectangular limiting block, the right side of the pressing ring is fixedly connected with an elastic clamping strip, the right side of the inner cavity of the annular groove is provided with a limiting clamping groove matched with the elastic clamping strip, the top of the rear side of the air inlet pipeline body is rotatably connected with a frame through a rotating piece, an air, stop gear includes the U-shaped mount of fixed connection at intake stack body front side top, the inner chamber sliding connection of U-shaped mount has the U-shaped stopper, the front side fixedly connected with of frame and the spacing trip of U-shaped stopper looks adaptation, the front side fixedly connected with pulling post of U-shaped stopper, the front end of pulling post runs through to the front side of U-shaped mount, the surperficial cover of pulling post is equipped with the extension spring, the front end and the rear end of extension spring weld with pulling post and U-shaped mount respectively mutually.

Preferably, the air inlet mechanism includes the cross fixed plate of fixed connection at the frame inner chamber, the top fixedly connected with motor of cross fixed plate, the output shaft of motor runs through to the bottom of cross fixed plate and fixedly connected with flabellum.

Preferably, the bottom of the pressing ring is bonded with a rubber ring.

Preferably, the rear ends of the two sides of the U-shaped limiting block are fixedly connected with limiting sliding blocks, and the two sides of the U-shaped fixing frame are provided with limiting sliding grooves for the limiting sliding blocks to slide.

Preferably, the bottom fixedly connected with installed part on intake stack body surface, six screw thread through-holes have been seted up to the top annular of installed part.

Compared with the prior art, the beneficial effects of the utility model are as follows:

1. the utility model discloses a filter mechanism's setting, dust and impurity in the air are filtered, simultaneously through the setting of air inlet mechanism, the air inlet is assisted to the inner chamber of intake stack body, finally through stop gear's setting, move the frame, change the filter screen body, can reach the purpose of being convenient for change and clearance filter screen, this filter mechanism for vapor phase epitaxy stove, current vapor phase epitaxy stove is in the use has been solved, the air inlet position is installed the filter layer through the mounting means of screw-thread fastening more, this kind of mounting means need frequently rotate the bolt and carry out the dismouting to the filter screen, and because the adsorption efficiency in the stove, dust impurity is piled up more easily on the surface of filter screen, user's clearance cycle is shorter, be unfavorable for the problem that the user used.

2. The utility model has the advantages that through the arrangement of the air inlet mechanism, the matching use of the motor and the fan blades, the air blowing effect is realized on the inner cavity of the air inlet pipeline body, on one hand, the aperture of the filter screen body is prevented from being too tight, the inner cavity of the air inlet pipeline body can not reach enough air inlet amount, on the other hand, the air is blown on the surface of the filter screen body, so that excessive dust can not be retained at the top of the filter screen body, the cleaning times of the filter screen body by a user are reduced, through the arrangement of the rubber ring, the rubber ring has certain elastic deformation force, after the clamping ring is buckled, the installation of the filter screen body and the clamping ring is more stable, through the matching use of the limiting slide block and the limiting slide groove, the limiting effect is realized on the U-shaped limiting stopper, the stability of the U-shaped stopper in the sliding process is improved, through the arrangement of the mounting piece, the filter mechanism is arranged at the air inlet of the vapor phase epitaxy furnace.

Drawings

Fig. 1 is a schematic perspective view of the structure of the present invention;

FIG. 2 is an enlarged view of a portion of point A of FIG. 1 according to the present invention;

FIG. 3 is a schematic, exploded, perspective view of the filter mechanism and frame of the present invention;

fig. 4 is a split three-dimensional schematic view of the air inlet pipe body and the filtering mechanism of the present invention.

In the figure: 1. an air inlet pipeline body; 2. a filtering mechanism; 21. an annular groove; 22. a filter screen body; 23. pressing a ring; 24. a rectangular limiting block; 25. a rectangular through hole; 26. an elastic clamping strip; 27. a limiting clamping groove; 3. a frame; 4. an air inlet mechanism; 41. a cross-shaped fixing plate; 42. a motor; 43. a fan blade; 5. a limiting mechanism; 51. a U-shaped fixing frame; 52. a U-shaped limiting block; 53. a limiting clamping hook; 54. pulling the column; 55. a tension spring; 6. a rubber ring; 7. a limiting slide block; 8. a limiting chute; 9. and (4) a mounting piece.

Detailed Description

The technical solutions in the embodiments of the present invention will be described clearly and completely with reference to the accompanying drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only some embodiments of the present invention, not all embodiments. Based on the embodiments in the present invention, all other embodiments obtained by a person skilled in the art without creative work belong to the protection scope of the present invention.

Referring to fig. 1-4, the present invention provides a technical solution: a filtering mechanism for a vapor phase epitaxy furnace comprises an air inlet pipeline body 1, wherein a mounting part 9 is fixedly connected to the bottom of the surface of the air inlet pipeline body 1, six threaded through holes are annularly formed in the top of the mounting part 9, through the arrangement of the mounting part 9, a user can conveniently match with the threaded through holes in the tops of an external bolt and the mounting part 9, the filtering mechanism is arranged at the air inlet position of the vapor phase epitaxy furnace, a filtering mechanism 2 is arranged at the top of an inner cavity of the air inlet pipeline body 1, the filtering mechanism 2 comprises an annular groove 21 formed in the top of the inner wall of the air inlet pipeline body 1, a filtering screen body 22 is arranged at the bottom of the inner cavity of the annular groove 21, a pressing ring 23 is arranged at the top of the filtering screen body 22, a rubber ring 6 is bonded to the bottom of the pressing ring 23, and due to the fact that the rubber ring 6 has certain elastic deformation force, after the, the left side of the pressing ring 23 is fixedly connected with a rectangular limiting block 24, the left side of the inner cavity of the annular groove 21 is provided with a rectangular through hole 25 matched with the rectangular limiting block 24, the right side of the pressing ring 23 is fixedly connected with an elastic clamping strip 26, the right side of the inner cavity of the annular groove 21 is provided with a limiting clamping groove 27 matched with the elastic clamping strip 26, the top of the rear side of the air inlet pipeline body 1 is rotatably connected with a frame 3 through a rotating piece, the inner cavity of the frame 3 is provided with an air inlet mechanism 4, the air inlet mechanism 4 comprises a cross fixing plate 41 fixedly connected with the inner cavity of the frame 3, the top of the cross fixing plate 41 is fixedly connected with a motor 42, an output shaft of the motor 42 penetrates through to the bottom of the cross fixing plate 41 and is fixedly connected with fan blades 43, through the arrangement of the air inlet mechanism 4, the motor 42 and the fan blades 43, the inner cavity of the air inlet pipeline body 1 cannot reach enough air inlet volume, and on the other hand, the air inlet pipeline blows the surface of the filter screen body 22, so that excessive dust cannot be retained at the top of the filter screen body 22, the cleaning frequency of a user on the filter screen body 22 is reduced, the top of the front side of the air inlet pipeline body 1 is provided with the limiting mechanism 5, the limiting mechanism 5 comprises a U-shaped fixing frame 51 fixedly connected to the top of the front side of the air inlet pipeline body 1, the inner cavity of the U-shaped fixing frame 51 is slidably connected with a U-shaped limiting block 52, the rear ends of the two sides of the U-shaped limiting block 52 are fixedly connected with limiting sliding blocks 7, the two sides of the U-shaped fixing frame 51 are respectively provided with a limiting sliding chute 8 for the sliding of the limiting sliding block 7, the U-shaped limiting block 52 is limited by the matching use of the limiting sliding, the front side fixedly connected with of frame 3 and the spacing trip 53 of U-shaped stopper 52 looks adaptation, the front side fixedly connected with pulling post 54 of U-shaped stopper 52, the front end of pulling post 54 runs through to the front side of U-shaped mount 51, and the surface cover of pulling post 54 is equipped with extension spring 55, and the front end and the rear end of extension spring 55 weld with pulling post 54 and U-shaped mount 51 respectively mutually.

The working principle is as follows: when the utility model is used, the user pulls the pulling column 54 to the front side, the pulling column 54 pulls the tension spring 55, simultaneously drives the U-shaped limiting block 52 to be separated from the inner cavity of the limiting hook 53, and then lifts the frame 3 upwards, so that the frame 3 is separated from the top of the air inlet duct body 1, the user pulls the elastic clamping strip 26 to the left side to lift the right side of the pressing ring 23, then pulls the pressing ring 23 to the right side, so that the rectangular limiting block 24 is separated from the inner cavity of the rectangular through hole 25, at the moment, the filter screen body 22 can be taken out, the filter screen body 22 is replaced or cleaned, then the pressing ring 23 is clamped on the top of the filter screen body 22 again, the frame 3 is rotated back to the original position, so that the U-shaped limiting block 52 is re-clamped on the limiting clamping hook 53, the motor 42 is started, the motor 42 drives the fan blades 43 to rotate, the inner cavity of the air inlet pipeline body 1 is blown, and the purpose of replacing and cleaning the filter layer can be achieved.

In summary, the following steps: this filter mechanism for vapor phase epitaxy furnace, setting through filter mechanism 2, dust and impurity in to the air filter, simultaneously through the setting of air inlet mechanism 4, the air inlet is assisted to the inner chamber of intake stack body 1, finally through stop gear 5's setting, move frame 3, change filter screen body 22, can reach the purpose of being convenient for change and clearance filter screen, this filter mechanism for vapor phase epitaxy furnace, current vapor phase epitaxy furnace in the use has been solved, the mounting means that the air inlet position was crossed the screw-thread fastening more installs the filter layer, this kind of mounting means need frequently rotate the bolt and carry out the dismouting to the filter screen, and because the adsorption efficiency in the stove, dust impurity is piled up more easily on the surface of filter screen, user's clearance cycle is shorter, be unfavorable for the problem that the user used.

It is noted that, herein, relational terms such as first and second, and the like may be used solely to distinguish one entity or action from another entity or action without necessarily requiring or implying any actual such relationship or order between such entities or actions. Also, the terms "comprises," "comprising," or any other variation thereof, are intended to cover a non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements does not include only those elements but may include other elements not expressly listed or inherent to such process, method, article, or apparatus.

The electrical components presented in the document are all electrically connected with an external master controller and 220V mains, and the master controller can be a conventional known device controlled by a computer or the like.

Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that changes, modifications, substitutions and alterations can be made in these embodiments without departing from the principles and spirit of the invention, the scope of which is defined in the appended claims and their equivalents.

Claims

1. The utility model provides a filter mechanism for vapor phase epitaxy furnace, includes intake stack body (1), its characterized in that: the air inlet pipeline comprises an air inlet pipeline body (1), wherein a filtering mechanism (2) is arranged at the top of an inner cavity of the air inlet pipeline body (1), the filtering mechanism (2) comprises an annular groove (21) formed in the top of the inner wall of the air inlet pipeline body (1), a filtering net body (22) is placed at the bottom of the inner cavity of the annular groove (21), a clamping ring (23) is arranged at the top of the filtering net body (22), a rectangular limiting block (24) is fixedly connected to the left side of the clamping ring (23), a rectangular through hole (25) matched with the rectangular limiting block (24) is formed in the left side of the inner cavity of the annular groove (21), an elastic clamping strip (26) is fixedly connected to the right side of the clamping ring (23), a limiting clamping groove (27) matched with the elastic clamping strip (26) is formed in the right side of the inner cavity of the annular groove (21), an air inlet mechanism (4) is arranged in the inner cavity of the frame (3), a limiting mechanism (5) is arranged at the top of the front side of the air inlet pipeline body (1), the limiting mechanism (5) comprises a U-shaped fixing frame (51) fixedly connected to the top of the front side of the air inlet pipeline body (1), the inner cavity of the U-shaped fixing frame (51) is connected with a U-shaped limiting block (52) in a sliding way, the front side of the frame (3) is fixedly connected with a limiting clamping hook (53) matched with the U-shaped limiting block (52), the front side of the U-shaped limiting block (52) is fixedly connected with a pulling column (54), the front end of the pulling column (54) penetrates through the front side of the U-shaped fixed frame (51), the surface cover of pulling post (54) is equipped with extension spring (55), the front end and the rear end of extension spring (55) weld with pulling post (54) and U-shaped mount (51) respectively mutually.

2. The filter mechanism for a vapor phase epitaxy furnace according to claim 1, wherein: the air inlet mechanism (4) comprises a cross fixing plate (41) fixedly connected to the inner cavity of the frame (3), a motor (42) is fixedly connected to the top of the cross fixing plate (41), and an output shaft of the motor (42) penetrates through the bottom of the cross fixing plate (41) and is fixedly connected with fan blades (43).

3. The filter mechanism for a vapor phase epitaxy furnace according to claim 1, wherein: the bottom of the pressing ring (23) is bonded with a rubber ring (6).

4. The filter mechanism for a vapor phase epitaxy furnace according to claim 1, wherein: the rear ends of the two sides of the U-shaped limiting block (52) are fixedly connected with limiting sliding blocks (7), and the two sides of the U-shaped fixing frame (51) are provided with limiting sliding grooves (8) for the limiting sliding blocks (7) to slide.

5. The filter mechanism for a vapor phase epitaxy furnace according to claim 1, wherein: the bottom fixedly connected with installed part (9) on intake stack body (1) surface, six screw thread through-holes have been seted up to the top annular of installed part (9).