CN212404262U - Wear test spare magnetron sputtering coating film device - Google Patents

Abstract

The utility model discloses a wear test spare magnetron sputtering coating film device, including the coating machine, the coating machine includes the coating film room, and installs the mount in the coating film room, the mount includes base, location ring, rest stand, rotates and detains, back shaft and disc, the surface mounting of base has a plurality of rotations to detain, and rotates and detain fixedly connected with cover seat one, the base passes through the back shaft and rotates to be installed in the coating film room, and the base setting is under the ring of location, the perpendicular centre of a circle at the disc of connecting of one end of keeping away from the base on the back shaft. This kind of wear test spare magnetron sputtering coating film device through setting up the mount that can dismantle the rest stand, can carry out the coating film at wear test spare after, the wear test spare of quick replacement non-coating film, detachable rest stand moreover, the staff can put wear test spare in advance, and the both ends difference swing joint of rest stand is between two cover seats, both convenient fixed can in time dismantle again.

Description

Wear test spare magnetron sputtering coating film device

Technical Field

The utility model relates to a coating machine technical field specifically is a wear test spare magnetron sputtering coating device.

Background

Magnetron sputtering is one type of Physical Vapor Deposition (PVD). The general sputtering method can be used for preparing multi-materials such as metal, semiconductor, insulator and the like, and has the advantages of simple equipment, easy control, large film coating area, strong adhesive force and the like. The magnetron sputtering method developed in the last 70 th century realizes high speed, low temperature and low damage. Since the high-speed sputtering is performed under a low pressure, it is necessary to effectively increase the ionization rate of the gas. Magnetron sputtering increases the sputtering rate by introducing a magnetic field at the surface of the target cathode, using the confinement of the magnetic field to charged particles to increase the plasma density.

When the film plating machine is used for plating films, a placement frame is arranged in the film plating chamber and used for placing unused film plating parts, the placement frame cannot be disassembled, the space of the film plating chamber is limited during feeding and discharging at each time, and operation is limited. Therefore, the magnetron sputtering coating device for the wear test piece is improved.

SUMMERY OF THE UTILITY MODEL

In order to solve the technical problem, the utility model provides a following technical scheme:

the utility model relates to a wear test piece magnetron sputtering coating device, which comprises a coating machine, wherein the coating machine comprises a coating chamber, a placing frame is arranged in the coating chamber, the placing frame comprises a base, a positioning ring, a rest, a rotating buckle, a supporting shaft and a disc, a plurality of rotating buckles are arranged on the surface of the base, a sleeve seat I is fixedly connected on the rotating buckle, the base is rotatably arranged in the coating chamber through the supporting shaft, the base is arranged under the positioning ring, one end of the supporting shaft, which is far away from the base, is vertically connected with the circle center of the disc, the outer side of the disc is connected with the positioning ring through a plurality of reinforcing rods, a plurality of clamping grooves are equidistantly arranged at the inner ring of the positioning ring, the clamping grooves are respectively arranged between two reinforcing rods, a sleeve seat II is movably arranged in the clamping grooves, one side of the sleeve seat II is provided with a clamping plate, the clamping plates are respectively connected with the disc through hinge rods, two ends of the rest rack are respectively connected to the rotary buckle and the sleeve seat II, and a box door is installed on one side of the coating chamber.

As a preferred technical scheme of the utility model, the rotation is detained and is contained locating piece and switching piece, and locating piece fixed connection is on the surface of base, the switching piece rotates to be connected on the base, rotate and detain and two one-to-one settings of cover seat.

As a preferred technical scheme of the utility model, including mobile jib and fixed plate on the shelf, and the length direction setting of fixed plate edge mobile jib, insert respectively at the both ends of mobile jib on cover seat one and cover seat two, cover seat two is circular structure, and the shape phase-match in cover seat two and screens groove.

As an optimal technical scheme of the utility model, the cardboard is the arc structure, and the cardboard setting is on the surface of cover seat two, one side of keeping away from cover seat two on the cardboard is connected with the movable plate.

As a preferred technical scheme of the utility model, the hinge bar contains two branches, and rotates through the pivot between the branch and connect, the both ends of hinge bar rotate respectively and are connected with the installation piece, and installation piece fixed connection is on movable plate and disc respectively.

As an optimal technical scheme of the utility model, two between the anchor strut respectively the spacing arc board of fixedly connected with, and pass through spring coupling between spacing arc board and the movable plate, the spring sets up the below at the hinge bar.

The utility model has the advantages that: this kind of wear test spare magnetron sputtering coating film device, through setting up the mount that can dismantle the rest stand, can carry out the coating film after the wear test spare, the wear test spare that the quick replacement did not coat the film, and detachable rest stand, the staff can put the wear test spare in advance, the both ends difference swing joint of rest stand is between two cover seats, both convenient fixed can in time dismantle again, the top is shored through the cardboard of same radian, the spring plays the effect of elastic support, and carry on spacingly through the hinge bar, it is more stable when supporting, make the movable plate centre gripping in the outside of cover seat two, this device need not put things in good order in the coating machine, can be with the coating machine that the rest stand that puts the test spare in good order prevented, accelerate the efficiency of material loading and unloading.

Drawings

FIG. 1 is a schematic structural view of a magnetron sputtering coating device for a wear test piece of the present invention;

FIG. 2 is a schematic side view of a mounting frame of the magnetron sputtering coating apparatus for a wear test piece of the present invention;

FIG. 3 is a schematic view of a top view structure of a placement frame of the magnetron sputtering coating device for wear test pieces of the present invention.

In the figure: 1. a film coating machine; 2. a box door; 3. a base; 4. a support shaft; 5. a first sleeve seat; 6. a shelf; 7. positioning the circular ring; 8. a hinged lever; 9. moving the plate; 10. a sleeve seat II; 11. mounting blocks; 12. a reinforcing rod; 13. clamping a plate; 14. a spring; 15. a disc; 16. a limiting arc plate; 17. the clasp is rotated.

Detailed Description

The preferred embodiments of the present invention will be described in conjunction with the accompanying drawings, and it will be understood that they are presented herein only to illustrate and explain the present invention, and not to limit the present invention.

Example (b): as shown in figures 1-3, the utility model relates to a wear test piece magnetron sputtering coating device, which comprises a coating machine 1, wherein the coating machine 1 comprises a coating chamber, a placement frame is arranged in the coating chamber, the placement frame comprises a base 3, a positioning ring 7, a placement frame 6, a rotating buckle 17, a supporting shaft 4 and a disk 15, a plurality of rotating buckles 17 are arranged on the surface of the base 3, a sleeve seat I5 is fixedly connected on the rotating buckle 17, the base 3 is rotatably arranged in the coating chamber through the supporting shaft 4, the base 3 is arranged under the positioning ring 7, one end of the supporting shaft 4 far away from the base 3 is vertically connected with the center of the disk 15, the outer side of the disk 15 is connected with the positioning ring 7 through a plurality of reinforcing rods 12 with equal distance, a plurality of clamping grooves are arranged at the inner ring of the positioning ring 7, the clamping grooves are respectively arranged between the two reinforcing rods 12, a sleeve seat II 10 is movably arranged in the clamping grooves, and one side of the sleeve seat II 10 is provided with a clamping plate 13, the clamping plate 13 is connected with the disc 15 through a hinge rod 8, two ends of the rest stand 6 are connected with the rotating buckle 17 and the sleeve seat II 10 respectively, and one side of the coating chamber is provided with a chamber door 2.

The rotating buckle 17 comprises a positioning block and a switching block, the positioning block is fixedly connected to the surface of the base 3, the switching block is rotatably connected to the base 3, the rotating buckle 17 and the sleeve seat II 10 are arranged in a one-to-one correspondence manner, and the sleeve seat II 10 and the rotating buckle 17 are fixedly connected to two ends of the placement frame.

Wherein, including mobile jib and fixed plate on the shelf 6, and the fixed plate sets up along the length direction of mobile jib, on the both ends of mobile jib inserted cover seat one 5 and cover seat two 10 respectively, cover seat two 10 is circular structure, and the shape phase-match of cover seat two 10 and screens groove, and cover seat two 10 can stable card establishes in the screens groove.

Wherein, cardboard 13 is the arc structure, and cardboard 13 sets up on the surface of two 10 of cover seats, and one side of keeping away from two 10 of cover seats on cardboard 13 is connected with movable plate 9, through promoting movable plate 9 to drive cardboard 13's removal.

Wherein, hinge bar 8 contains two branches, and rotates through the pivot between the branch and connect, and hinge bar 8's both ends rotate respectively and are connected with installation piece 11, and installation piece 11 fixed connection respectively is on movable plate 9 and disc 15, and hinge bar 8 supports movable plate 9.

Wherein, be connected with spacing arc 16 between two anchor bars 12 respectively fixedly, and be connected through spring 14 between spacing arc 16 and the movable plate 9, spring 14 sets up in the below of articulated rod 8, and spring 14 plays the effect of elastic support to movable plate 9.

The working principle is as follows: when the device is used, the box door 2 is opened, the placing frame 6 is taken out of the placing frame, when the placing frame 6 is taken out, the moving plate 9 is respectively pushed to move at one side of the positioning ring 7, when the placing frame 6 is moved, the hinge rod 8 is extruded, so that the moving plate 9 drives the clamping plate 13 to be far away from the sleeve seat II 10, the sleeve seat II 10 can be taken out of the clamping groove and taken down from the main rod of the placing frame 6, the other end of the placing frame 6 can move and be taken out of the sleeve seat I5, the placing frame 6 can be taken down, the placing frame 6 on which the abrasion test piece is placed is replaced, one end of the placing frame 6 is inserted into the sleeve seat I5, the sleeve seat II 10 is sleeved at the other end, the sleeve seat II 10 is moved to be moved into the clamping groove, the moving plate 9 is released, the moving plate 9 is supported by the elasticity of the spring 14, the clamping plate 13 is pushed to be close to the sleeve seat II 10, and the hinge rod 8 supports the position of the clamping, the first sleeve seat 5 and the second sleeve seat 10 are respectively provided with a circular groove, so that the main rod can be conveniently and movably inserted.

Finally, it should be noted that: in the description of the present invention, it should be noted that the terms "vertical", "upper", "lower", "horizontal", and the like indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings, and are only for convenience of description and simplification of description, but do not indicate or imply that the device or element referred to must have a specific orientation, be constructed in a specific orientation, and be operated, and thus should not be construed as limiting the present invention.

In the description of the present invention, it should also be noted that, unless otherwise explicitly specified or limited, the terms "disposed," "mounted," "connected," and "connected" are to be construed broadly, e.g., as meaning either a fixed connection, a removable connection, or an integral connection; can be mechanically or electrically connected; they may be connected directly or indirectly through intervening media, or they may be interconnected between two elements. The specific meaning of the above terms in the present invention can be understood according to specific situations by those skilled in the art.

Although the present invention has been described in detail with reference to the foregoing embodiments, it will be apparent to those skilled in the art that modifications may be made to the embodiments described in the foregoing embodiments, or equivalents may be substituted for elements thereof. Any modification, equivalent replacement, or improvement made within the spirit and principle of the present invention should be included in the protection scope of the present invention.

Claims (6)

1. A wear test piece magnetron sputtering coating device comprises a coating machine (1) and is characterized in that the coating machine (1) comprises a coating chamber, a mounting frame is mounted in the coating chamber and comprises a base (3), a positioning ring (7), a shelf (6), a rotating buckle (17), a support shaft (4) and a disc (15), a plurality of rotating buckles (17) are mounted on the surface of the base (3), a sleeve seat I (5) is fixedly connected to the rotating buckle (17), the base (3) is rotatably mounted in the coating chamber through the support shaft (4), the base (3) is arranged under the positioning ring (7), one end, far away from the base (3), of the support shaft (4) is perpendicularly connected to the circle center of the disc (15), and the outer side of the disc (15) is connected with the positioning ring (7) through a plurality of reinforcing rods (12), a plurality of screens grooves have been seted up to the inner ring department equidistance of location ring (7), and the screens groove sets up respectively between two anchor strut (12), the activity of screens inslot is provided with cover seat two (10), and one side of cover seat two (10) is provided with cardboard (13), be connected through hinge bar (8) respectively between cardboard (13) and disc (15), the both ends of rest frame (6) are connected respectively and are detained (17) and cover seat two (10) in the rotation, chamber door (2) are installed to one side of coating film room.

2. The magnetron sputtering coating device for the wear test piece according to claim 1, wherein the rotating buckle (17) comprises a positioning block and a switching block, the positioning block is fixedly connected to the surface of the base (3), the switching block is rotatably connected to the base (3), and the rotating buckle (17) and the second sleeve seat (10) are arranged in a one-to-one correspondence manner.

3. The magnetron sputtering coating device for the wear test piece according to claim 1, wherein the rest stand (6) comprises a main rod and a fixed plate, the fixed plate is arranged along the length direction of the main rod, two ends of the main rod are respectively inserted into the first sleeve seat (5) and the second sleeve seat (10), the second sleeve seat (10) is of a circular structure, and the second sleeve seat (10) is matched with the clamping groove in shape.

4. The magnetron sputtering coating device for the wear test piece according to claim 1, wherein the clamping plate (13) is of an arc-shaped structure, the clamping plate (13) is arranged on the surface of the second sleeve seat (10), and a moving plate (9) is connected to one side of the clamping plate (13) far away from the second sleeve seat (10).

5. The magnetron sputtering coating device for the wear test piece according to claim 4, wherein the hinged rod (8) comprises two supporting rods which are rotatably connected through a rotating shaft, two ends of the hinged rod (8) are respectively rotatably connected with a mounting block (11), and the mounting blocks (11) are respectively fixedly connected to the moving plate (9) and the disc (15).

6. The magnetron sputtering coating device for the wear test piece according to claim 4, wherein a limiting arc plate (16) is fixedly connected between the two reinforcing rods (12), the limiting arc plate (16) is connected with the moving plate (9) through a spring (14), and the spring (14) is arranged below the hinge rod (8).

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