CN212372007U - Screw fastening device for probe card - Google Patents

Screw fastening device for probe card Download PDF

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Publication number
CN212372007U
CN212372007U CN202020672968.XU CN202020672968U CN212372007U CN 212372007 U CN212372007 U CN 212372007U CN 202020672968 U CN202020672968 U CN 202020672968U CN 212372007 U CN212372007 U CN 212372007U
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CN
China
Prior art keywords
plate
fixing
bolt
probe card
baffle plate
Prior art date
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Active
Application number
CN202020672968.XU
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Chinese (zh)
Inventor
于海超
赵梁玉
周明
刘明星
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Strong Half Conductor Suzhou Co ltd
Original Assignee
Maxone Semiconductor Suzhou Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
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Application filed by Maxone Semiconductor Suzhou Co Ltd filed Critical Maxone Semiconductor Suzhou Co Ltd
Priority to CN202020672968.XU priority Critical patent/CN212372007U/en
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Publication of CN212372007U publication Critical patent/CN212372007U/en
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  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Measuring Leads Or Probes (AREA)

Abstract

The utility model discloses a screw fastening device for a probe card, which comprises an elastic resetting mechanism and a fixing mechanism, wherein the fixing mechanism is arranged above a bottom plate in a bilateral symmetry manner, the elastic resetting mechanism is arranged in the front and back of the fixing mechanism in a bilateral symmetry manner, the elastic resetting mechanism comprises a stand column and a fixing rod, one end of the stand column close to the fixing plate is provided with a groove, the fixing rod is vertically arranged in the groove, the outer surface of the fixing rod is sleeved with a connecting block, the outer surface of the fixing rod is sleeved with a spring, the fixing mechanism comprises a fixing plate, a first bolt and a baffle plate, a first bolt is arranged in the fixing plate in a middle part, the baffle plate is arranged in a bilateral symmetry manner between the two fixing plates, the first bolt rotates to connect the baffle plate, the baffle plate is transversely arranged at the lower part of one end of a baffle plate close to a placing frame, an inner thread, the device can fix probe cards with different sizes and has strong adaptability.

Description

Screw fastening device for probe card
Technical Field
The utility model relates to a fastener specifically is a screw fastener for probe card.
Background
The probe card is a test interface, and is mainly used for testing a bare chip, and testing parameters of the chip by connecting a test machine and the chip and transmitting signals. Before a probe test, a probe on a probe card needs to be directly contacted with a welding spot on a chip to lead out a chip signal, and the probe card is installed on a probe table through a probe card fixing device. The probe card fixing device in the prior art can only fix a probe card with a single size, and has poor adaptability. Accordingly, we provide a screw fastening device for a probe card to solve the above problems in the background art.
Disclosure of Invention
An object of the utility model is to provide a screw fastening device for probe card to solve the problem that proposes among the above-mentioned background art.
In order to achieve the above object, the utility model provides a following technical scheme:
a screw fastening device for a probe card comprises a bottom plate, elastic reset mechanisms and fixing mechanisms, wherein the fixing mechanisms are symmetrically and longitudinally arranged on the left and right above the bottom plate, a placing frame is arranged at the upper end of the bottom plate and is positioned between the two fixing mechanisms, the elastic reset mechanisms are symmetrically and vertically arranged on the front side and the rear side of each fixing mechanism, and the elastic reset mechanisms are fixedly connected with the bottom plate;
the elastic reset mechanism comprises an upright post and a fixed rod, wherein a groove is formed in one end, close to the fixed plate, of the upright post, the fixed rod is vertically installed in the groove, a connecting block is sleeved on the outer surface of the fixed rod, and a spring is sleeved on the outer surface of the fixed rod;
the fixing mechanism comprises a fixing plate, a first bolt and a baffle plate, the front end and the rear end of the fixing plate are respectively fixedly connected with two connecting blocks, the first bolt is installed in the middle of the fixing plate and is in threaded connection with the fixing plate, the baffle plate is symmetrically arranged between the two fixing plates in the left-right direction, the first bolt is rotatably connected with the baffle plate, a supporting plate is transversely installed at the lower part of one end, close to the baffle plate, of the placing frame, an inner threaded plate is transversely installed at the upper part of one end, close to the baffle plate, of the placing frame, a second bolt is vertically arranged in the inner threaded plate and is in threaded connection with the inner threaded plate, a pressing plate is arranged below the inner threaded plate and is in sliding connection with the baffle plate, the pressing plate is rotatably connected with the second bolt, a first rubber pad is arranged at one end, a second, and the diameter of the limiting block is larger than that of the limiting rod.
As a further aspect of the present invention, four support legs are installed at the bottom plate lower end bilateral symmetry, and four support legs are respectively distributed at four corners of the bottom plate lower end surface.
As the utility model discloses the scheme of furthering again, spring upper end fixed connection connecting block, bottom in the spring lower extreme fixed connection recess.
As the utility model discloses the scheme of furthering again, dead lever surface mounting blotter, and top in the blotter fixed connection recess.
As the utility model discloses scheme further again, bolt one is nearly baffle one end installation bearing frame one, and a bearing frame fixed connection baffle.
As the utility model discloses the scheme of furthering again, clamp plate upper end installation bearing frame two, and two fixed connection bolts of bearing frame two.
The utility model provides a key mechanism for screw fastener for probe card, is elasticity canceling release mechanical system, includes stand, dead lever, and the recess is seted up to the one end of the nearly fixed plate of stand, vertical installation dead lever in the recess, and the connecting block is established to dead lever overcoat, and the spring is established to dead lever overcoat.
A key mechanism for a screw fastening device for a probe card comprises a fixing plate, a first bolt and a baffle plate, wherein the front end and the rear end of the fixing plate are respectively and fixedly connected with two connecting blocks, the first bolt is arranged in the middle of the fixing plate and is in threaded connection with the fixing plate, the baffle plate is symmetrically arranged on the left side and the right side between the two fixing plates, the first bolt is rotatably connected with the baffle plate, a supporting plate is transversely arranged on the lower portion of one end, close to a placing frame, of the baffle plate, an inner threaded plate is transversely arranged on the upper portion of one end, close to the placing frame, of the baffle plate, a second bolt is vertically arranged in the inner threaded plate and is in threaded connection with the inner threaded plate, a pressing plate is arranged below the inner threaded plate and is in sliding connection with the pressing plate, the pressing plate is rotatably connected with the second bolt, a first rubber pad is, a limiting block is arranged at one end of the limiting rod, and the diameter of the limiting block is larger than that of the limiting rod.
Compared with the prior art, the beneficial effects of the utility model are that:
the utility model discloses rotating bolt one and driving the baffle and removing to the probe card, making the both sides of two baffle contact probe cards, fixing the horizontal position of probe card, then rotating bolt two and driving the clamp plate and move down, the edge of extrusion probe card fixes the vertical position of probe card, drives baffle and clamp plate removal respectively through bolt one and bolt two, makes this device can fix not unidimensional probe card, strong adaptability.
Drawings
Fig. 1 is a schematic structural view of a screw fastening device for a probe card.
Fig. 2 is a plan view of a screw fastening device for a probe card.
Fig. 3 is a schematic structural view of an elastic reset mechanism in a screw fastening device for a probe card.
In the figure: 1. a base plate; 11. supporting legs; 2. placing the frame; 3. a column; 31. a groove; 4. fixing the rod; 41. a spring; 42. connecting blocks; 43. a cushion pad; 5. a fixing plate; 51. a first bolt; 52. a first bearing seat; 6. a baffle plate; 61. a first rubber pad; 62. a limiting rod; 63. a limiting block; 7. a support plate; 71. a second rubber pad; 8. an internally threaded plate; 81. a second bolt; 82. a second bearing seat; 9. pressing a plate; 91. and a third rubber pad.
Detailed Description
The technical solutions in the embodiments of the present invention will be described clearly and completely with reference to the accompanying drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only some embodiments of the present invention, not all embodiments. Based on the embodiments in the present invention, all other embodiments obtained by a person skilled in the art without creative work belong to the protection scope of the present invention.
Detailed description of the preferred embodiment
The present embodiment is an embodiment of a screw fastening device for a probe card.
Referring to fig. 1-3, in the embodiment of the present invention, a screw fastening device for a probe card comprises a bottom plate 1, an elastic reset mechanism and a fixing mechanism, wherein four support legs 11 are symmetrically installed at the lower end of the bottom plate 1, the four support legs 11 are respectively distributed at four corners of the lower end surface of the bottom plate 1, the fixing mechanism is symmetrically and longitudinally arranged at the upper side of the bottom plate 1, a placing frame 2 is installed at the upper end of the bottom plate 1, the placing frame 2 is positioned between the two fixing mechanisms, the elastic reset mechanism is symmetrically and vertically arranged at the front side and the rear side of the fixing mechanism, the elastic reset mechanism is fixedly connected with the bottom plate 1, the elastic reset mechanism comprises a stand column 3 and a fixing rod 4, a groove 31 is formed at one end of the stand column 3 close to a fixing plate 5, the fixing rod 4 is vertically installed in the groove 31, a connecting block 42, the lower end of the spring 41 is fixedly connected with the inner bottom of the groove 31, the cushion 43 is arranged on the outer surface of the fixed rod 4, the cushion 43 is fixedly connected with the inner top of the groove 31, the fixing mechanism comprises a fixed plate 5, a first bolt 51 and a baffle plate 6, the front end and the rear end of the fixed plate 5 are respectively fixedly connected with two connecting blocks 42, the first bolt 51 is arranged in the middle of the fixed plate 5, the first bolt 51 is in threaded connection with the fixed plate 5, the baffle plate 6 is symmetrically arranged between the two fixed plates 5 in the left-right direction, the first bolt 51 is provided with a first bearing seat 52 near one end of the baffle plate 6, the first bearing seat 52 is fixedly connected with the baffle plate 6, the baffle plate 6 is transversely provided with a supporting plate 7 near the lower part of one end of the frame 2, the baffle plate 6 is transversely provided with an inner thread plate 8 near the upper part of one end of the, the second bearing seat 82 is installed at the upper end of the pressing plate 9, the second bearing seat 82 is fixedly connected with the second bolt 81, the first rubber pad 61 is arranged at one end, close to the placing frame 2, of the baffle 6, the second rubber pad 71 is installed at the upper end of the supporting plate 7, the third rubber pad 91 is installed at the lower end of the pressing plate 9, the limiting rods 62 are symmetrically installed at the front and back of one end, close to the fixing plate 5, of the baffle 6, the limiting rods 62 penetrate through the fixing plate 5, the limiting blocks 63 are installed at one ends.
The utility model discloses a theory of operation is: the semiconductor element to be measured is placed in the placing frame 2, the probe card is placed between the two baffles 6, the first bolt 51 is rotated, the first bolt 51 is in threaded connection with the fixing plate 5, the first bolt 51 rotates to drive the baffles 6 to move towards the probe card, the two baffles 6 are in contact with the two sides of the probe card, the probe card is placed on the supporting plate 7, the second bolt 81 is rotated, the second bolt 81 is in threaded connection with the internal thread plate 8, the second bolt 81 rotates to drive the pressure plate 9 to move downwards to press out the edge of the probe card, the position of the probe card is fixed, then the probe card is driven to descend to be in contact with the semiconductor element to be measured by a precision translation table (such as a Touhuang light, a Beijing optical instrument and a large constant photoelectric instrument), and meanwhile, the spring 41 is compressed.
Detailed description of the invention
This embodiment is an embodiment of an elastic return mechanism for a screw fastening device for a probe card.
The elastic reset mechanism comprises a stand column 3 and a fixing rod 4, wherein a groove 31 is formed in one end, close to the fixing plate 5, of the stand column 3, the fixing rod 4 is vertically installed in the groove 31, a connecting block 42 is sleeved on the outer surface of the fixing rod 4, and a spring 41 is sleeved on the outer surface of the fixing rod 4.
Detailed description of the preferred embodiment
This embodiment is an embodiment of a fixing mechanism for a screw fastening device for a probe card.
The fixing mechanism comprises a fixing plate 5, a first bolt 51 and a baffle plate 6, wherein the front end and the rear end of the fixing plate 5 are respectively fixedly connected with two connecting blocks 42, the middle part in the fixing plate 5 is provided with the first bolt 51, the first bolt 51 is in threaded connection with the fixing plate 5, the baffle plate 6 is symmetrically arranged between the two fixing plates 5 from left to right, the first bolt 51 is rotatably connected with the baffle plate 6, the lower part of the baffle plate 6 close to one end of a placing frame 2 is transversely provided with a supporting plate 7, the upper part of the baffle plate 6 close to one end of the placing frame 2 is transversely provided with an inner threaded plate 8, the inner threaded plate 8 is vertically provided with a second bolt 81, the second bolt 81 is in threaded connection with the inner threaded plate 8, the lower part of the inner threaded plate 8 is provided with a pressing plate 9, the pressing plate 9 is in sliding connection with the baffle plate 6, the pressing plate 9 is rotatably connected with the second bolt 81, one end, and the limiting rod 62 passes through the fixing plate 5, the limiting block 63 is installed at one end of the limiting rod 62, and the diameter of the limiting block 63 is larger than that of the limiting rod 62.
The above, only be the concrete implementation of the preferred embodiment of the present invention, but the protection scope of the present invention is not limited thereto, and any person skilled in the art is in the technical scope of the present invention, according to the technical solution of the present invention and the utility model, the concept of which is equivalent to replace or change, should be covered within the protection scope of the present invention.

Claims (6)

1. A screw fastening device for a probe card is characterized by comprising a bottom plate (1), elastic reset mechanisms and fixing mechanisms, wherein the fixing mechanisms are longitudinally arranged above the bottom plate (1) in a bilateral symmetry mode, a placing frame (2) is installed at the upper end of the bottom plate (1), the placing frame (2) is located between the two fixing mechanisms, the elastic reset mechanisms are vertically arranged on the front side and the rear side of each fixing mechanism in a symmetrical mode, and the elastic reset mechanisms are fixedly connected with the bottom plate (1);
the elastic reset mechanism comprises an upright post (3) and a fixed rod (4), a groove (31) is formed in one end, close to the fixed plate (5), of the upright post (3), the fixed rod (4) is vertically installed in the groove (31), a connecting block (42) is sleeved on the outer surface of the fixed rod (4), and a spring (41) is sleeved on the outer surface of the fixed rod (4);
the fixing mechanism comprises a fixing plate (5), a first bolt (51) and a baffle plate (6), the front end and the rear end of the fixing plate (5) are fixedly connected with two connecting blocks (42) respectively, the first bolt (51) is installed in the middle of the fixing plate (5) and is in threaded connection with the fixing plate (5), the baffle plate (6) is arranged between the two fixing plates (5) in a bilateral symmetry mode, the first bolt (51) is rotatably connected with the baffle plate (6), a supporting plate (7) is transversely installed at the lower portion of one end, close to a placing frame (2), of the baffle plate (6), an inner thread plate (8) is transversely installed at the upper portion of one end, close to the placing frame (2), of the baffle plate (6), a second bolt (81) is vertically arranged in the inner thread plate (8), the second bolt (81) is in threaded connection with the inner thread plate (8), a pressing plate (9) is arranged below the inner thread plate (8), the pressing plate (9), baffle (6) are nearly placed frame (2) one end and are set up rubber pad one (61), and layer board (7) upper end installation rubber pad two (71), and clamp plate (9) lower extreme installation rubber pad three (91), and baffle (6) are nearly fixed plate (5) one end front and back symmetry installation gag lever post (62), and gag lever post (62) pass fixed plate (5), and gag lever post (62) one end installation stopper (63), and stopper (63) diameter is greater than gag lever post (62).
2. The screw fastening device for a probe card according to claim 1, wherein four support legs (11) are symmetrically installed at the lower end of the base plate (1) in left-right direction, and the four support legs (11) are respectively distributed at four corners of the lower end surface of the base plate (1).
3. The screw fastening device for a probe card according to claim 1, wherein the upper end of the spring (41) is fixedly connected with the connecting block (42), and the lower end of the spring (41) is fixedly connected with the bottom in the groove (31).
4. The screw fastening device for a probe card according to claim 1, wherein a cushion (43) is installed on an outer surface of the fixing rod (4), and the cushion (43) is fixed to an inner top of the coupling groove (31).
5. The screw fastening device for the probe card according to claim 1, wherein the first bolt (51) is provided with a first bearing seat (52) at the end close to the baffle plate (6), and the first bearing seat (52) is fixedly connected with the baffle plate (6).
6. The screw fastening device for the probe card according to claim 1, wherein a second bearing seat (82) is mounted on the upper end of the pressure plate (9), and the second bearing seat (82) is fixedly connected with a second bolt (81).
CN202020672968.XU 2020-04-28 2020-04-28 Screw fastening device for probe card Active CN212372007U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN202020672968.XU CN212372007U (en) 2020-04-28 2020-04-28 Screw fastening device for probe card

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN202020672968.XU CN212372007U (en) 2020-04-28 2020-04-28 Screw fastening device for probe card

Publications (1)

Publication Number Publication Date
CN212372007U true CN212372007U (en) 2021-01-19

Family

ID=74161720

Family Applications (1)

Application Number Title Priority Date Filing Date
CN202020672968.XU Active CN212372007U (en) 2020-04-28 2020-04-28 Screw fastening device for probe card

Country Status (1)

Country Link
CN (1) CN212372007U (en)

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GR01 Patent grant
GR01 Patent grant
CP01 Change in the name or title of a patent holder

Address after: 2 / F, building 39, 18 Dongchang Road, Suzhou Industrial Park, 215000

Patentee after: Strong Half Conductor (Suzhou) Co.,Ltd.

Address before: 2 / F, building 39, 18 Dongchang Road, Suzhou Industrial Park, 215000

Patentee before: MAXONE SEMICONDUCTOR (SUZHOU) Co.,Ltd.

CP01 Change in the name or title of a patent holder