CN212338011U - Damping device for crystal growth furnace - Google Patents
Damping device for crystal growth furnace Download PDFInfo
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- CN212338011U CN212338011U CN202020630350.7U CN202020630350U CN212338011U CN 212338011 U CN212338011 U CN 212338011U CN 202020630350 U CN202020630350 U CN 202020630350U CN 212338011 U CN212338011 U CN 212338011U
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Abstract
The utility model provides a damping device for a crystal growth furnace, which comprises a connecting pipeline, wherein the connecting pipeline comprises a vacuum pipeline for connecting the crystal growth furnace and a vacuum pump, and a damping material filling layer and an air pipeline layer are sequentially arranged outside the vacuum pipeline; the air damping device comprises a first air cushion, a second air cushion and an air charging device, the first air cushion is used for being connected with the bottom of the vacuum pump, the second air cushion is used for being connected with the bottom of the crystal growth furnace, and the air charging device is respectively communicated with the first air cushion, the second air cushion and the air pipeline layer. The utility model discloses a set up damping material filling layer and vacuum pipeline layer in the vacuum pipeline outside, through the dual shock attenuation on damping material filling layer and air pipeline layer, be showing the vibrations that have reduced the vacuum pipeline, and use crystal growth stove, vacuum pump and pipeline with the air shock attenuation, improved the shock attenuation effect, make to be in a static state basically in the furnace body.
Description
Technical Field
The utility model relates to a damping device for crystal growth furnace belongs to mechanical damping device's technical field.
Background
The existing crystal growth furnace is connected with a vacuum pump, and the vacuum pump is used for vacuumizing the interior of the furnace body of the crystal growth furnace. The vacuum pump can generate great vibration in the working and running process, even can cause vibration on the ground, meanwhile, the connecting pipeline can also generate great vibration, the touch feeling is very strong, the crystal growth furnace is not in a stable state in the normal running process, the fluctuation of the temperature gradient in the furnace body and the instability of a gas phase are caused, the most serious crystal stagnation generated in the furnace body continuously falls off, the temperature is reduced instantly, and the stability of the furnace body is seriously influenced.
At present to the vibrator design of vacuum pump adopt air damper to and machine vibrations still adopt the rubber cushion layer shock attenuation, compare still that air damper effect is comparatively obvious under the shock attenuation of large-scale machine, but existing design does not use it to whole set of machine but only to the vacuum pump alone, and the range of application is narrow and small. Still adopt bellows shock attenuation and rubber shock attenuation, the bellows is for connecting the vacuum pump pipeline, just uses the bellows at present to see, though played the shock attenuation effect to a certain extent, but the sense of touch is still strong, and the design is comparatively simple under the comparison, and the effect is better to be used by a large tracts of land and is implemented, but to precision equipment's shock attenuation, only with the bellows be far away not enough. Meanwhile, the prior art still adopts a rubber shock absorption mode to reduce ground shock, and although the prior art improves the ground shock, the effect is not particularly good.
SUMMERY OF THE UTILITY MODEL
In order to solve the problem, the utility model provides a damping device for crystal growth stove, the device comprehensive utilization air shock attenuation and damping mode for vacuum pump, furnace body and pipeline have reached fine shock attenuation effect.
The utility model adopts the technical scheme as follows:
a shock absorbing device for a crystal growth furnace, the device comprising:
the device comprises a connecting pipeline, a vacuum pipeline and a control pipeline, wherein the connecting pipeline comprises a vacuum pipeline for connecting a crystal growth furnace and a vacuum pump, and a damping material filling layer and an air pipeline layer are sequentially arranged on the outer side of the vacuum pipeline;
the air damping device comprises a first air cushion, a second air cushion and an air charging device, the first air cushion is used for being connected with the bottom of the vacuum pump, the second air cushion is used for being connected with the bottom of the crystal growth furnace, and the air charging device is respectively communicated with the first air cushion, the second air cushion and the air pipeline layer.
Preferably, the thickness ratio of the damping material filling layer to the air pipeline layer is 1-3: 1-5.
Preferably, the inflator comprises an air compressor and an engine, the engine is connected with the air compressor, the air compressor is respectively connected with a first air cushion and an air pipeline, and the first air cushion is connected with a second air cushion through a pipeline.
Preferably, the inflation device comprises an inflation pump, the inflation pump is respectively connected with the first air cushion and the air pipeline layer, and the first air cushion is connected with the second air cushion through a pipeline.
Preferably, the number of the second air cushions is matched with the number of the upright posts of the crystal growth furnace.
Preferably, the number of the second air cushions is four.
Preferably, the first air cushion is matched with the bottom of the vacuum pump.
Preferably, the inflation device is provided with a bidirectional connector, and the bidirectional connector is respectively connected with the first air cushion and the air pipeline layer through pipelines.
Preferably, pressure control valves are mounted on the pipelines connected with the first air cushion and the air pipeline layer of the inflation device.
Preferably, a connection port communicated with the inflation device is arranged on the air pipeline layer, and the connection port is located close to a connection end of the vacuum pipeline and the vacuum pump.
The utility model has the advantages that:
(1) the utility model discloses a set up damping material filling layer and vacuum pipeline layer at the vacuum pipeline skin, through the dual shock attenuation on damping material filling layer and vacuum pipeline layer, be showing the vibrations that have reduced the vacuum pipeline, the shock attenuation effect has had obvious improvement.
(2) The utility model discloses a be connected aerating device and first air pad, second air pad and vacuum pipeline layer, first air pad, second air pad and vacuum pipeline layer are in a constant voltage state, use crystal growth stove, vacuum pump and pipeline with the air shock attenuation for the furnace body is in a stable state.
(3) The utility model discloses a with damping shock attenuation and air shock attenuation comprehensive utilization, and use crystal growth stove, vacuum pump and pipeline with air shock attenuation for be in a static state basically in the furnace body, the shock attenuation effect is improved by a wide margin.
Drawings
The accompanying drawings, which are described herein, serve to provide a further understanding of the invention and constitute a part of this specification, and the exemplary embodiments and descriptions thereof are provided for explaining the invention without unduly limiting it.
In the drawings:
fig. 1 is a schematic structural view of the damping device of the present invention;
FIG. 2 is a schematic sectional view of a connecting pipe in the shock absorbing device of the present invention;
wherein, 1, a vacuum pipeline; 2. a damping material filling layer; 3. an air pipeline layer; 4. a first air cushion; 5. a second air cushion; 6. an inflator.
Detailed Description
The present invention will be described in detail with reference to the following examples, but the present invention is not limited to these examples.
In the following description, numerous specific details are set forth in order to provide a thorough understanding of the present invention, however, the present invention may be practiced in other ways than those specifically described herein, and therefore the scope of the present invention is not limited by the specific embodiments disclosed below.
In addition, in the description of the present invention, it is to be understood that the terms "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", and the like indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings, and are only for convenience of description and simplicity of description, and do not indicate or imply that the device or element referred to must have a particular orientation, be constructed and operated in a particular orientation, and thus, should not be construed as limiting the present invention.
The embodiments in the present specification are described in a progressive manner, and the same and similar parts among the embodiments are referred to each other, and each embodiment focuses on the differences from the other embodiments.
Furthermore, the terms "first", "second" and "first" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of that feature. In the description of the present invention, "a plurality" means two or more unless specifically limited otherwise.
In the present invention, unless otherwise expressly specified or limited, the terms "mounted," "connected," and the like are to be construed broadly and can include, for example, fixed connections, removable connections, or integral connections; the connection can be mechanical connection, connection or communication; either directly or indirectly through intervening media, either internally or in any other relationship. The specific meaning of the above terms in the present invention can be understood according to specific situations by those skilled in the art.
In the present application, unless expressly stated or limited otherwise, the first feature may be directly on or directly under the second feature or indirectly via intermediate members. In the description herein, references to the description of the term "one embodiment," "some embodiments," "an example," "a specific example," or "some examples," etc., mean that a particular feature, structure, material, or characteristic described in connection with the embodiment or example is included in at least one embodiment or example of the invention. In this specification, the schematic representations of the terms used above are not necessarily intended to refer to the same embodiment or example. Furthermore, the particular features, structures, materials, or characteristics described may be combined in any suitable manner in any one or more embodiments or examples.
Referring to fig. 1 and 2, the embodiment of the utility model discloses a damping device for crystal growth furnace, the device includes a connecting pipeline and an air damping device, the connecting pipeline includes a vacuum pipeline 1 for connecting the crystal growth furnace and a vacuum pump, the outside of the vacuum pipeline is provided with a damping material filling layer 2 and an air pipeline layer 3 in sequence; the air damping device comprises a first air cushion 4, a second air cushion 5 and an air charging device 6, wherein the first air cushion 4 is used for being connected with a vacuum pump, the second air cushion 5 is used for being connected with a crystal growth furnace, and the air charging device 6 is respectively communicated with the first air cushion 4, the second air cushion 5 and the air pipeline layer 3. The inflation device 6 is used for introducing gas into the first air cushion 4, the second air cushion 5 and the air pipeline layer 3.
This application is through being connected first air cushion 4 and vacuum pump, and second air cushion 5 is connected with the crystal growth stove, utilizes air absorbing's mode to reduce the influence of ground vibrations to the crystal growth stove furnace body to and the influence of the ground vibrations that the vacuum pump vibrations drove to the furnace body. The damping material filling layer 2 and the air pipeline layer 3 are arranged on the outer side of the vacuum pipeline 1, air is introduced into the air pipeline layer 3 and can be used for reducing vibration of the vacuum pipeline, the damping material is added into the damping material filling layer 2 to play a role in damping, and the vacuum pipeline is in a stable state by utilizing dual damping of air damping and damping.
In a preferred embodiment of the application, the thickness ratio of the damping material filling layer 2 to the air pipeline layer 3 is 1-3: 1-5; preferably, the thickness ratio of the damping material filling layer to the air pipeline layer is 1-2: 1-2. Specifically, the thickness of the damping material filling layer 2 is 0.5-3 cm, the thickness of the air pipeline layer 3 is 0.5-3 cm, and the inner diameter of the vacuum pipeline is 5-6 cm; preferably, the thickness of the damping material filling layer 2 is 1-1.5 cm, and the thickness of the air pipeline layer 3 is 1-1.5 cm. When the thickness ratio of the damping material filling layer 2 to the air pipeline layer 3 is too small or too large, the damping material filling layer and the air pipeline layer cannot achieve a good damping effect. Through setting up the appropriate thickness of damping material filling layer 2 and air shock-absorbing layer 3, full play damping shock attenuation and air shock attenuation's effect, pipeline side stability is good, and the shock attenuation effect reaches the best.
In a preferred embodiment of the present application, the material of the damping material filling layer 2 is selected from thermoplastic elastomer materials; preferably, the material of the damping material filling layer 2 is selected from polystyrene-butadiene block copolymer (SBS), (our SBS does not have asphalt modification treatment here, but only has rubber property, if asphalt modification treatment can be performed for water resistance and other properties), the filling mode is a mode of pouring into a pipe interlayer after heating and melting and solidifying after cooling, or a polystyrene-polyisoprene-polystyrene block copolymer (SIS) is adopted, and the like, the density of the material of the damping material filling layer 2 is 0.9-0.95 g/cm, and the like3The material of the damping material filling layer with not very high density is selected to ensure the light elasticity of the interlayer. The damping material has viscoelasticity, and when the damping material is acted by external force, the strain lags behind the stress, so that a hysteresis phenomenon exists. In each cycle, mechanical dissipation occurs, and energy consumption generates internal consumption, thereby playing a role in very muchThe damping effect is achieved.
In a preferred embodiment of the present application, the outer layer material of the air pipe layer 3 is the same as the material of a radial tire; and/or the material of the first air cushion 4 and the second air cushion 5 is the same as the material of the radial tire. Wherein, the raw materials of the radial tire comprise the following components in percentage by weight: 20-25% of carbon black, 40-45% of natural rubber, 10-15% of other chemical materials, 8-12% of steel wire cords, 2-4% of tire bead steel wires and 5-10% of synthetic rubber. The material of the outer layer of the air pipeline layer 3 is the same as that of the radial tire, so that the outer layer of the air pipeline layer 3 is large in radial elasticity, good in buffering performance and large in load capacity, and particularly, the air pipeline layer 3 is filled with gas with a certain pressure, and the air pipeline layer 3 is not prone to damage and deformation under a long-time high-pressure working condition. When the materials of the first air cushion 4 and the second air cushion 5 are the same as those of the radial tire, the first air cushion 4 and the second air cushion 5 have good adhesion performance with the ground, the unit pressure on the ground is small, the air cushion slippage is small, and the first air cushion 4 and the second air cushion 5 not only ensure the damping effect on the bottom of the vacuum pumping device under long-time high pressure, but also do not deform under long-time high pressure and have long service life.
In a preferred embodiment of the present application, the material of the vacuum pipeline 1 is mild steel, the material of the intermediate layer between the damping material filling layer 2 and the air pipeline layer 3 is mild steel, and the material of the outermost layer of the air pipeline layer 3 is the material of the radial tire. The outermost side of the connecting pipeline is made of radial tire material, and the uppermost part and the lowermost part of the connecting pipeline can be directly fused with mild steel material when the pipeline is processed.
In a preferred embodiment of the present application, the inflator 6 comprises an air compressor and an engine, the engine is connected with the air compressor, the air compressor is respectively connected with the first air cushion 4 and the air pipeline layer 3, and the first air cushion 4 is connected with the second air cushion 5 through a pipeline. The engine powers an air compressor which is used to feed air into the air conduit layer 3, the first air cushion 4 and the second air cushion 5. Since the pressure of the air pipe layer 3, the first air mattress 4 and the second air mattress 5 fluctuates due to large vibration generated during the operation of the machine equipment, in order to maintain the constant pressure state of the air pipe layer 3, the first air mattress 4 and the second air mattress 5, it is necessary to introduce air into the air pipe layer 3, the first air mattress 4 and the second air mattress 5.
In a preferred embodiment of the present application, the inflation device 6 comprises an inflator pump connected to the first air mattress 4 and the air pipe layer 3, respectively, and the first air mattress 4 is connected to the second air mattress 5 through a pipe. The inflator pump is used for introducing gas into the air pipeline layer 3, the first air cushion 4 and the second air cushion 5.
In a preferred embodiment of the present application, the first air cushion 4 is matched to the bottom of the vacuum pump. The vacuum pump can generate great mechanical vibration in the process of vacuumizing the furnace body, and in order to reduce the vibration of the vacuum pump, the bottom of the vacuum pump is connected with an air cushion, so that the vibration of the vacuum pump can be relieved to a great extent.
In a preferred embodiment of the present application, the number of the second air cushions 5 matches the number of columns of the crystal growth furnace. The number of the second air cushions 5 is four. The crystal growth furnace is a commonly used crystal growth device, and generally, four upright posts are arranged at the bottom end of the crystal growth furnace and used for supporting a furnace body and facilitating the movement of the crystal growth furnace. The bottom cushion of the upright post is provided with a second air cushion 5 which can be used for reducing the influence of ground vibration on the furnace body.
In a preferred embodiment of the present application, the cross-sectional shape of the first air mattress 4 is square, and the cross-sectional shape of the second air mattress 5 is circular; the first air cushion 4 is matched with the bottom of the vacuum pump, and the second air cushion 5 is matched with the bottom of the upright post. The vacuumizing device can generate great mechanical vibration in the process of vacuumizing the furnace body, and in order to reduce the shaking of the vacuumizing device, the bottom of the vacuumizing device is connected with a matched air cushion, so that the vibration of the vacuumizing device can be relieved to a great extent.
In a preferred embodiment of the present application, the inflator 6 is provided with two-way connectors, and the two-way connectors are respectively connected with the first air mattress 4 and the air pipeline layer 3 through pipelines. Because the air charging device 6 is required to feed air into the air pipeline layer 3, the air charging device 6 is provided with two-way connectors for respectively connecting the first air cushion 4 and the air pipeline layer 3, so that comprehensive utilization of the device can be realized.
In a preferred embodiment of the present application, a pressure controller is installed on a pipe connecting the inflator 6 with the first air mattress 4. In order to ensure good air damping effect of the air pipeline layer 3, the first air cushion 4 and the second air cushion 5, the pressure in the air pipeline layer 3, the first air cushion 4 and the second air cushion 5 needs to be kept constant, and a pressure controller is arranged to keep constant pressure in the air pipeline layer 3, the first air cushion 4 and the second air cushion 5.
In a preferred embodiment of the present application, the air line layer 3 is provided with a connection port for communicating with the inflation device 6, the connection port being located near the connection end of the vacuum line 1 to the vacuum pump. Because the connecting port is easy to leak gas, the connecting port is positioned close to the connecting end of the vacuum pipeline 1 and the vacuum pump, and the influence of the vibration of the pipeline on the conditions such as temperature and pressure in the furnace body can be reduced to a certain extent.
In a specific preferred embodiment of this application, be provided with the connector that communicates with connecting tube on furnace body and the evacuating device, connecting tube department is provided with inside sunken recess, be provided with O type sealing washer in the recess, connecting tube's the outside edge and the sealed contact of O type sealing washer, connecting tube passes through the buckle to be fixed in connecting tube department. The O-shaped sealing ring is mainly made of fluororubber which has high temperature resistance, oil resistance, chemical resistance, good physical and mechanical properties, weather resistance, electrical insulation, radiation resistance and the like
In a preferred embodiment of the present application, the air pressure of the air pipe layer 3 is 0.1 to 1bar, and preferably, the air pressure of the air pipe layer 3 is 0.2 to 0.5 bar. The air pressure of the first air cushion 4 is 0.1-1 bar, and the air pressure of the second air cushion 5 is 0.1-1 bar. Preferably, the air pressure of the first air cushion 4 is 0.2 to 0.5bar, and the air pressure of the second air cushion 5 is 0.2 to 0.5 bar. Under the air pressure, the air pipeline layer 3, the first air cushion 4 and the second air cushion 5 can play a good role in air shock absorption.
This application uses crystal growth stove, vacuum pump and pipeline with air shock attenuation, and through setting up damping material filling layer and vacuum pipeline layer at the vacuum pipeline outer, utilizes damping shock attenuation and air shock attenuation synthesis for be in a static state basically in the stove, the shock attenuation effect has had obvious improvement.
Detect the shock attenuation effect of this application crystal growth stove:
the vibration frequency f of a vacuum pump in the crystal growth furnace is 10-1000 Hz, namely the rotating speed n is 600-60000 r/min, specifically 36000r/min, and the speed mm/s is taken as the vibration standard.
Specifically, an AS63D pen-type vibration meter is used for measuring detailed data, and an axial measuring method is adopted for the vacuum pump to respectively measure (1) the uppermost part of the vacuum pump; (2) the axial center of the vacuum pump; (3) the lowest part of the vacuum pump; (4) the vacuum pump is in direct contact with the ground. For a pipeline connected with a vacuum pump, an axial three-point measurement method is still adopted, and the axial three-point measurement method comprises the following steps of (1) connecting the pipeline with a furnace body end; (2) the axial center of the pipeline; (3) the pipeline is connected with the vacuum pump end.
Respectively detecting:
the first operation condition is as follows: a vacuum pump and a pipeline without any damping device are added;
and a second operation condition: the vacuum pump and the pipelines of the damping device are added, the thicknesses of the damping material filling layer and the air pipeline layer at the position of the connecting pipeline are both 1.4cm, and the air pressures of the first air cushion, the second air cushion and the air pipeline layer are all 0.5 mbar;
and operation conditions are as follows: increase damping device's vacuum pump and pipeline, the department only has damping material filling layer in the connecting line, does not increase air pipe way layer promptly, the thickness of damping material filling layer is 2.4cm, and the atmospheric pressure on first air cushion, second air cushion and air pipe way layer is 0.5mbar, and all the other is the same with this application damping device.
And the operation condition is four: increase damping device's vacuum pump and pipeline, only have the air pipe layer in the connecting line, the thickness on air pipe layer is 2.4cm, and the atmospheric pressure on first air pad, second air pad and air pipe layer is 0.5mbar, and all the other is the same with this application damping device.
And operation condition five: a vacuum pump and a pipeline of the damping device are added, the thickness ratio of a damping material filling layer to an air pipeline layer in a connecting pipeline is 1:6, the thickness of the damping material filling layer is 0.4cm, the thickness of the air pipeline layer is 2.4cm, the air pressure of a first air cushion, a second air cushion and the air pipeline layer is 0.5mbar, and the rest is the same as that of the damping device;
the operation condition is six: a vacuum pump and a pipeline of the damping device are added, the thickness ratio of a damping material filling layer to an air pipeline layer in a connecting pipeline is 4:1, the thickness of the damping material filling layer is 2.24cm, the thickness of the air pipeline layer is 0.56cm, the air pressure of a first air cushion, a second air cushion and the air pipeline layer is 0.5mbar, and the rest is the same as that of the damping device.
TABLE 1
As can be seen from the results in table 1, compared with the crystal growth furnace without any damping device, and the crystal growth furnace with the damping device having only the damping material filling layer and the air pipeline layer outside the vacuum pipeline, the damping device of the present application has a significantly reduced vibration displacement in spite of the vibration displacement, and the crystal growth furnace is approximately in a static state by optimizing the thickness ratio of the damping material filling layer and the air pipeline layer.
The above description is only an example of the present invention, and the protection scope of the present invention is not limited by these specific examples, but is defined by the claims of the present invention. Various modifications and changes may occur to those skilled in the art. Any modification, equivalent replacement, or improvement made within the technical idea and principle of the present invention should be included in the protection scope of the present invention.
Claims (10)
1. A shock absorbing device for a crystal growth furnace, the device comprising:
the device comprises a connecting pipeline, a vacuum pipeline and a control pipeline, wherein the connecting pipeline comprises a vacuum pipeline for connecting a crystal growth furnace and a vacuum pump, and a damping material filling layer and an air pipeline layer are sequentially arranged on the outer side of the vacuum pipeline;
the air damping device comprises a first air cushion, a second air cushion and an air charging device, the first air cushion is used for being connected with the bottom of the vacuum pump, the second air cushion is used for being connected with the bottom of the crystal growth furnace, and the air charging device is respectively communicated with the first air cushion, the second air cushion and the air pipeline layer.
2. The damping device for the crystal growth furnace according to claim 1, wherein the ratio of the thickness of the damping material filling layer to the thickness of the air pipeline layer is 1-3: 1-5.
3. The damping device for the crystal growth furnace according to claim 1, wherein the air charging device comprises an air compressor and an engine, the engine is connected with the air compressor, the air compressor is respectively connected with a first air cushion and an air pipeline, and the first air cushion is connected with a second air cushion through a pipeline.
4. The shock absorbing device for the crystal growth furnace according to claim 1, wherein the air charging device comprises an air charging pump, the air charging pump is respectively connected with a first air cushion and an air pipeline, and the first air cushion is connected with a second air cushion through a pipeline.
5. The shock absorbing device for a crystal growth furnace according to claim 1, wherein the number of the second air cushions matches the number of columns of the crystal growth furnace.
6. The shock absorbing device for a crystal growth furnace according to claim 5, wherein the number of the second air cushions is four.
7. The shock absorbing device for a crystal growth furnace according to claim 1, wherein the first air cushion is matched with a bottom of a vacuum pump.
8. The damping device for the crystal growth furnace according to claim 1, wherein a bidirectional connector is arranged on the gas charging device, and the bidirectional connector is connected with the first air cushion and the air pipeline layer through pipelines respectively.
9. The shock absorbing device for the crystal growth furnace according to claim 8, wherein pressure control valves are mounted on the pipelines of the air charging device connected with the first air cushion and the air pipeline.
10. The damping device for the crystal growth furnace according to claim 1, wherein a connection port communicating with the air charging device is provided on the air pipeline layer, and the connection port is located near a connection end of the vacuum pipeline and the vacuum pump.
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| Publication number | Priority date | Publication date | Assignee | Title |
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| WO2021212862A1 (en) * | 2020-04-23 | 2021-10-28 | 山东天岳先进科技股份有限公司 | Shock absorption device for vacuum reaction furnace and crystal growing furnace |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2021212862A1 (en) * | 2020-04-23 | 2021-10-28 | 山东天岳先进科技股份有限公司 | Shock absorption device for vacuum reaction furnace and crystal growing furnace |
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