CN212321689U

CN212321689U - Probe apparatus

Info

Publication number: CN212321689U
Application number: CN202020150939.7U
Authority: CN
Inventors: 朴廷喜
Original assignee: Top Engineering Co Ltd
Current assignee: Top Engineering Co Ltd
Priority date: 2020-01-22
Filing date: 2020-02-03
Publication date: 2021-01-08
Anticipated expiration: 2030-02-03
Also published as: KR102353209B1; KR20210095290A

Abstract

The utility model discloses a detection device of embodiment includes: a probe module including a probe configured to have a tip in contact with an electrode formed on a substrate; and the rotating module is connected with the detecting module and enables the detecting module to rotate by taking the rotating shaft as a center, and the rotating shaft is set in the area where the probe is located.

Description

Probe apparatus

Technical Field

The present invention relates to a probe device (probe device) that brings a probe (probe pin) into contact with an electrode of a substrate and applies an electric signal to the electrode through the probe in order to perform energization detection or the like on the substrate.

Background

Typically, the probing device is disposed on the substrate detection device. The probing device contacts the probe to the electrode of the substrate and applies an electrical signal to the electrode through the probe.

The process of inspecting the substrate using such a probe apparatus is performed by: a probe module having a plurality of probes is disposed on the upper portion of a substrate, and the probe module is moved toward the substrate to bring the plurality of probes into contact with a plurality of electrodes provided on the substrate, and then a predetermined electric signal is applied to the plurality of electrodes.

In the process of detecting such a substrate, it is important to align the probe and the electrode with each other while contacting the probe to the electrode with a uniform contact pressure.

In order to align the electrode and the probe with each other, a process of moving the probe module in a horizontal direction and a process of rotating the probe module around a vertical central axis are performed.

As shown in fig. 1, the conventional probe apparatus includes a probe 100, and the probe 100 includes a probe module 101. The probe module 101 includes a probe 102 and a probe block 103 for mounting the probe 102. To rotate the probe module 101 (i.e., the probe 102), the probe 100 is rotated centering on a vertical axis (rotation axis C) passing through an arbitrary point on the probe 100.

Therefore, as shown in fig. 2, the conventional probe apparatus has a problem that the distance between the rotation axis C and the probe 102 is long. That is, the conventional probe apparatus has a problem that the rotational distance (rotational trajectory) L of the probe is large when the probe 100 rotates.

As shown in fig. 3, in the case of another conventional probe apparatus, the probe module 101 rotates about a vertical axis (rotation axis C) passing through an arbitrary point on the probe block 103. That is, when the rotation axis C of the probe module 101 is set, the probe 102 is not set as a reference, but the probe block 103 for fixing the probe 102 is set as a reference. In other words, the rotation axis C of the probing module 101 is not set in the region where the probe 102 is located.

Therefore, as shown in fig. 4, the conventional probe apparatus has a problem that the distance between the rotation axis C of the probe module 101 and the probe 102 is long. That is, the conventional probe apparatus has a problem that the rotational distance (rotational locus) L of the probe is large when the probe module 101 rotates.

As described above, the following problem arises from the problem that the rotational distance of the probe 102 with respect to the rotational axis C is long. That is, when the probe 100 or the probe module 101 is rotated around the rotation axis C in order to align the electrode and the probe 102 with each other, the horizontal position of the probe 102 with respect to the electrode largely varies, and therefore, a problem arises in that the probe 100 or the probe module 101 needs to be horizontally moved by a large distance in order to align the electrode and the probe 102 with each other. Further, in the conventional probe apparatus, there is a problem that the size of an assembly constituting the probe 100 becomes large.

SUMMERY OF THE UTILITY MODEL

An object of the utility model is to provide a can make the detection device of the turning distance minimizing of the probe of using the rotation axis of surveying the module as the center.

In order to achieve the above object, the detection device of the embodiment of the present invention may include: a probe module including a probe configured such that a tip thereof is in contact with an electrode formed on a substrate; and the rotating module is connected with the detecting module and enables the detecting module to rotate by taking a rotating shaft as a center, and the rotating shaft is set in the area where the probe is located.

A central axis passing through the tip of the probe may be set as the rotation axis.

The probe may be provided in plurality, and virtual extension lines of at least two probes of the plurality of probes may converge to a convergence point, and a central axis passing through the convergence point may be set as the rotation axis.

The probe module may be formed with a through hole penetrating in a vertical direction, the probe may be exposed to the through hole, and a central axis of the through hole may be set as the rotation axis.

The rotation module may include: a shaft having a central hole formed concentrically with the through hole; and a first member and a second member disposed around the shaft, the first member being connected to the detection module and rotating relative to the second member.

The utility model discloses detection device can further include: and a photographing module disposed above the probe and capable of photographing the probe, wherein an optical axis of the photographing module is set as the rotation axis.

Furthermore, the utility model discloses a detection device of embodiment can include: a probe module having a through hole formed therein and penetrating in a vertical direction, the probe module including a probe configured to contact an electrode formed on a substrate and to be exposed to the through hole at a lower end of the through hole; a shooting module which is configured above the through hole and can shoot the probe; and a rotation module that rotates the detection module with a center axis of the through hole as a reference.

The rotation module may include: a shaft having a central hole formed concentrically with the through hole; and a first member and a second member disposed around the shaft, the first member being connectable to the detection module and rotatable relative to the second member.

According to the utility model discloses a detection device can make the rotation distance minimizing of the probe that uses the rotation axis of surveying the module as the center. Therefore, after the probe module is rotated, there is no need to adjust the horizontal position of the probe, or the distance that the probe module needs to be moved in order to adjust the horizontal position of the probe is minimized.

Furthermore, according to the detection device of the embodiment of the present invention, the size of the probe portion can be made small.

Drawings

Fig. 1 and 2 are plan views schematically showing a probe and a probe module of a conventional probe apparatus.

Fig. 3 and 4 are plan views schematically showing a probe module provided in a conventional probe apparatus.

Fig. 5 is a perspective view schematically showing a detection device according to an embodiment of the present invention.

Fig. 6 is a side view schematically showing a detection apparatus according to an embodiment of the present invention.

Fig. 7 is a cross-sectional view schematically showing a detection module and a rotation module provided in the detection device according to the embodiment of the present invention.

Fig. 8 is a plan view schematically showing a detection module provided in the detection device according to the embodiment of the present invention.

Fig. 9 to 13 are diagrams for explaining the set position of the rotation axis of the detection module in the detection device according to the embodiment of the present invention.

Description of reference numerals

10: a detection module; 20: a moving module; 30: a shooting module; 40: rotary module

Detailed Description

Hereinafter, a detection device according to an embodiment of the present invention will be described with reference to the drawings.

As shown in fig. 5 to 8, the detecting device of the present invention includes: a detection module 10, a moving module 20, a shooting module 30 and a rotating module 40.

For example, the detection module (module)10 includes a first block (block)11 and a second block (12).

The first block 11 is disposed to face a substrate to be detected. The first block 11 is provided with probes 111. The probing module 10 is provided with a plurality of probes 111.

The plurality of probes 111 are arranged in the circumferential direction with reference to the center of the probe module 10. The plurality of probes 111 extend in a radial shape when viewed in a plane (X-Y plane). For example, 24 probes 111 can be arranged at intervals of 90 μm. The plurality of probes 111 are respectively connected to a signal applying unit (not shown). The signal applying unit applies an electric signal to the electrode S1 through the plurality of probes 111.

The probe 111 is configured such that the tip thereof can contact an electrode S1 (see fig. 9 and 10) formed on the substrate. The substrate is provided with a plurality of electrodes S1, and the plurality of electrodes S1 can be arranged in the same arrangement as the plurality of probes 111.

The first block 11 and the second block 12 are connected by a connecting shaft 13. The first block 11 and the second block 12 are relatively movable in the Z-axis direction with respect to each other.

The connecting shaft 13 may be provided with a spring 14. The spring 14 functions to maintain the interval between the first block 11 and the second block 12 and absorb an external force applied to the first block 11 and the second block 12.

On the other hand, the detection module 10 is provided with a through hole 19 penetrating in the Z-axis direction. At the lower end of the through-hole 19, the probe 111 is exposed to the inside of the through-hole 19. Therefore, the imaging module 30 can image the probe 111 through the through hole 19.

The moving module 20 can be connected to the detecting module 10 and the photographing module 30 through the connection member 50. The moving module 20 is configured to move the detection module 10 and the imaging module 30 in the X-axis direction, the Y-axis direction, and the Z-axis direction.

For example, the moving module 20 includes: an X-axis drive unit 21, a Y-axis drive unit 22, and a Z-axis drive unit 23. The X-axis drive unit 21 is configured to move the detection module 10 and the imaging module 30 in the X-axis direction. The Y-axis driving unit 22 is configured to move the detection module 10 and the imaging module 30 in the Y-axis direction. The Z-axis drive unit 23 is configured to move the detection module 10 and the imaging module 30 in the Z-axis direction.

For example, each of the X-axis drive unit 21, the Y-axis drive unit 22, and the Z-axis drive unit 23 is configured by a moving mechanism such as an actuator (actuator) that operates by a pneumatic pressure or a hydraulic pressure, a linear motor (linear motor) that operates by an electromagnetic interaction, or a ball screw (Ballscrew) mechanism.

The position of the probe 111 in the X-axis direction and the Y-axis direction can be adjusted by the movement of the detecting module 10 in the X-axis direction and the Y-axis direction by the moving module 20. Therefore, the probe 111 can be aligned with the electrode S1.

In addition, the probe 111 moves toward the substrate by the movement of the probing module 10 toward the substrate in the Z-axis direction by the moving module 20, so that the tip of the probe 111 can contact the electrode S1.

The camera module 30 includes a camera (camera)31 disposed above the through hole 19. The optical axis of the camera 31 may coincide with the central axis of the through hole 19. The camera 31 may be disposed directly above the probe 111. The camera 31 is configured to be able to photograph the probe 111 exposed from the through hole 19.

The photographing module 30 is connected to the moving module 20 together with the detection module 10 through a connection member 50. Even if the photographing module 20 moves together with the detection module 10 by the moving module 20, the state in which the optical axis of the camera 31 coincides with the center of the through hole 19 can be maintained.

The rotation module 40 is directly connected to the detection module 10. The rotation module 40 is coaxially connected with the detection module 10. The rotation module 40 is configured to rotate the detection module 10 about the same rotation axis as the rotation axis of the rotation module 40. For example, the rotation module 40 may be connected with the connection member 50 through a cradle (blacket) 60. The detection module 10 and the rotation module 40 may be assembled as a single body. The detection module 10 and the rotation module 40 may be connected together to the connection member 50 through the bracket 60. The bracket 60 may be provided with a through hole 61 formed concentrically with the through hole 19.

The rotation module 40 may include: a shaft (draft) 43 having a center hole 431 formed concentrically with the through hole 19; the first member 41 and the second member 42 are disposed around the shaft 43.

The through hole 61 of the holder 60, the center hole 431 of the shaft 43, and the through hole 19 of the detection module 10 are formed concentrically with each other. Therefore, the through hole 61 of the holder 60, the center hole 431 of the shaft 43, and the through hole 19 of the probe module 10 are coaxially communicated with each other. Accordingly, the camera module 30 can shoot the probe 111 through the through hole 61 of the bracket 60, the central hole 431 of the shaft 43, and the through hole 19 of the probe module 10.

The first member 41 is configured as a rotor that is connected to the detection module 10 and is rotatable with respect to the second member 42. The second member 42 is configured as a stator that electromagnetically interacts with the first member 41.

For example, as shown in fig. 7, the first member 41 may be disposed outside the second member 42. However, the present invention is not limited to this configuration, and although not shown, the first member 41 may be disposed inside the second member 42.

The rotation axis C of the probe module 10 is set in the region where the probe 111 is located. For example, the region where the probe 111 is located is a region inside the through hole 19 of the probe module 10 when viewed on a plane. As another example, the region where the probe 111 is located may be set to a region adjacent to the optical axis of the image module 30 when the image module 30 images the probe 111, that is, a central region of the image area of the image module 30.

As shown in fig. 9 and 10, the rotation axis C of the detection module 10 may coincide with the central axis of the through hole 19. Accordingly, the rotation axis C of the detection module 10, the center axis of the through hole 19, and the optical axis of the imaging module 30 can be aligned with each other. Therefore, even when the detection module 10 is rotated 360 degrees, the rotation axis C of the detection module 10, the center axis of the through hole 19, and the optical axis of the imaging module 30 can be matched. Therefore, the probe 111 is always present in the field of view (imaging area) of the imaging module 30.

As shown in fig. 9 and 10, the horizontal position of the probe module 10 is adjusted such that the center axis of the through hole 19 of the probe module 10 is positioned at the center of the shape formed by the plurality of electrodes S1, and then the probe module 10 is rotated, thereby aligning the plurality of probes 111 with the plurality of electrodes S1. Therefore, the process of adjusting the horizontal position of the probe 111 again after rotating the probing module 10 can be omitted.

As another example, as shown in fig. 11 and 12, virtual extension lines of at least two probes 111 of the plurality of probes 111 may converge to one convergence point. In this case, the central axis passing through the convergence point may be set as the rotation axis C of the detection module 10. In this way, the rotation axis of the probe module 10 can be set with the probe 111 as a reference. Therefore, the turning distance of the probe 111 around the rotation axis C of the probe module 10 can be minimized. Therefore, after the probe module 10 is rotated, there is no need to adjust the horizontal position of the probe 111, or the distance that the probe module 10 needs to be moved in order to adjust the horizontal position of the probe 111 is minimized.

As another example, as shown in fig. 13, a central axis passing through the tip of one of the plurality of probes 111 or a position adjacent to the tip may be set as the rotation axis C of the detection module 10. In this way, the rotation axis of the probe module 10 can be set with the probe 111 as a reference. Therefore, the turning distance of the probe 111 around the rotation axis C of the probe module 10 can be minimized. Therefore, after the probe module 10 is rotated, there is no need to adjust the horizontal position of the probe 111, or the distance that the probe module 10 needs to be moved in order to adjust the horizontal position of the probe 111 is minimized.

The preferred embodiments of the present invention have been described above by way of example, but the scope of the present invention is not limited to the specific embodiments, and may be modified as appropriate within the scope described in the claims.

Claims

1. A probe apparatus, comprising:

a probe module including a probe configured such that a tip thereof is in contact with an electrode formed on a substrate; and

a rotation module connected to the detection module and rotating the detection module around a rotation axis,

the rotation axis is set in the region where the probe is located.

2. The detection apparatus according to claim 1,

a central axis passing through the tip of the probe is set as the rotation axis.

3. The detection apparatus according to claim 1,

the probe is provided with a plurality of probes,

the virtual extension lines of at least two probes of the plurality of probes converge at a convergence point,

a central axis passing through the convergence point is set as the rotation axis.

4. The detection apparatus according to claim 1,

the detection module is formed with a through hole penetrating in the vertical direction,

the probe is exposed out of the through hole,

the center axis of the through hole is set as the rotation axis.

5. A probe device according to claim 4,

the rotation module includes:

a shaft having a central hole formed concentrically with the through hole; and

a first member and a second member disposed around the shaft,

the first component is connected to the detection module and rotates relative to the second component.

6. The detection apparatus according to claim 1,

further comprising: an imaging module disposed above the probe and capable of imaging the probe,

the optical axis of the shooting module is set as the rotating shaft.

7. A probe apparatus, comprising:

a probe module having a through hole formed therein and penetrating in a vertical direction, the probe module including a probe configured to contact an electrode formed on a substrate and to be exposed to the through hole at a lower end of the through hole;

an imaging module which is disposed above the through hole and can image the probe; and

and a rotation module that rotates the detection module with a center axis of the through hole as a reference.

8. The detection apparatus according to claim 7,

the rotation module includes:

a shaft having a center hole formed concentrically with the through hole; and

a first member and a second member disposed around the shaft,