CN212299388U - Circulating fluid system with accurate temperature control function - Google Patents
Circulating fluid system with accurate temperature control function Download PDFInfo
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- CN212299388U CN212299388U CN202020554911.XU CN202020554911U CN212299388U CN 212299388 U CN212299388 U CN 212299388U CN 202020554911 U CN202020554911 U CN 202020554911U CN 212299388 U CN212299388 U CN 212299388U
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Abstract
The utility model discloses a circulation fluid system with accurate accuse temperature function, including main circulation fluid system, main circulation fluid system is provided with first check valve in pump import side, the circulation fluid tube sheet parallel connection between pump and the first check valve has the water intake pipe of factory affairs, the import side circulation fluid pipeline parallel connection of first check valve has the water outlet pipe way of factory affairs, the on-off proportion of control factory affairs water flow control valve, and then the mixed proportion of control main circulation fluid and factory affairs water, guarantee that the temperature precision of main circulation fluid reaches 0.1 ℃, the system is simple, temperature response time is fast, accuse temperature accuracy.
Description
Technical Field
The utility model relates to a heat exchange system, in particular to circulating fluid system with accurate accuse temperature function.
Background
In a semiconductor manufacturing process, in order to ensure the accuracy and stability of the process, temperature control is often required to be performed on the semiconductor manufacturing process, and plant water is used to remove heat generated by the process. Because the industrial cooling circulation system mostly uses an industrial water chiller as a PCW (process cooling water system) generating device, the temperature control precision index of the industrial water is generally not high, the temperature stability of the finally output PCW is poor, and the temperature control precision requirement of a temperature control unit is difficult to meet.
The conventional high-precision temperature control equipment usually adopts secondary circulation liquid to realize high-precision temperature control, and during operation, a plant cooling circulation system provides constant-temperature plant water which is connected to a heat exchanger through a plant water supply pipeline and cools the secondary circulation liquid flowing through a load in the heat exchanger, and the plant water with the increased temperature after cooling returns to the plant water supply equipment through a plant water return pipeline to be cooled, and then flows into the heat exchanger through a plant water supply pipeline, so that the secondary circulation liquid is cooled repeatedly.
Because the secondary circulation liquid system is added, the heat exchange efficiency is low, the response time of the temperature control precision is influenced, and meanwhile, the whole temperature control equipment is large in size, so that the use space of the temperature control equipment is limited.
SUMMERY OF THE UTILITY MODEL
Utility model purpose: the utility model aims at providing a circulation fluid system with accurate accuse temperature function for satisfy high accuracy temperature control's requirement.
The technical scheme is as follows: a circulation fluid system with accurate temperature control function, including the pump, the import of pump has the factory service water intake pipe in parallel, the export intercommunication of pump has electric heater unit, electric heater unit includes electrical heating barrel, electric heating component and temperature protection switch, is provided with the flow sensor who is used for detecting circulation fluid flow between the export of pump and the import of electrical heating barrel, is provided with the pressure sensor who is used for detecting the temperature sensor of circulation fluid temperature and pump outlet pressure on the pipeline of electrical heating barrel export.
Furthermore, the inlet pipeline of the pump is provided with a first check valve which is connected with a plant water inlet pipeline in parallel.
Furthermore, the plant water inlet pipeline is provided with a flow regulating valve and a filter, the flow regulating valve is connected with a first electromagnetic valve in parallel, and the inlet side circulating fluid pipeline of the first check valve is connected with a plant water outlet pipeline in parallel.
Furthermore, the plant service water outlet pipeline is provided with a second check valve, and the second check valve is connected with a second electromagnetic valve in parallel.
Further, the electric heating cylinder is connected with a safety relief valve, and an outlet of the safety relief valve is communicated with a factory service water outlet pipeline
Has the advantages that: compared with the prior art, the utility model: the mixing proportion of the main circulating fluid and the plant water is controlled by controlling the switching proportion of the plant water flow regulating valve, so that the temperature precision of the main circulating fluid is ensured; the direct contact mode of the circulating fluid and the plant water is adopted to control the temperature, the system is simple, the temperature response time is fast, and the temperature control is accurate.
Drawings
FIG. 1 is a schematic diagram of a circulating fluid system with precise temperature control function.
Detailed Description
As shown in fig. 1, a circulating fluid system with accurate temperature control function includes a pump 1, an inlet of the pump 1 is connected in parallel with a plant water inlet pipeline, an outlet of the pump 1 is communicated with an electric heating device, the electric heating device includes an electric heating cylinder 3, an electric heating component 4 and a temperature protection switch 5, a flow sensor 2 for detecting the flow rate of circulating fluid is arranged between the outlet of the pump 1 and the inlet of the electric heating cylinder 3, and a pipeline at the outlet of the electric heating cylinder 3 is provided with a temperature sensor 7 for detecting the temperature of circulating fluid and a pressure sensor 6 for detecting the pressure at the outlet of the pump 1.
The inlet pipeline of the pump 1 is provided with a first check valve 8, the first check valve 8 is connected with a plant water inlet pipeline in parallel, the plant water inlet pipeline is provided with a flow regulating valve 10 and a filter 9, the flow regulating valve 10 is connected with a first electromagnetic valve 11 in parallel, and the inlet side circulating fluid pipeline of the first check valve 8 is connected with a plant water outlet pipeline in parallel. The plant service water outlet pipeline is provided with a second check valve 13, and the second check valve 13 is connected with a second electromagnetic valve 12 in parallel.
The first electromagnetic valve 11 is opened and the second electromagnetic valve 12 is closed at the initial stage of operation of the circulating fluid system, and the plant water flows through the filter 9 and the first electromagnetic valve 11 through the plant water inlet pipeline, enters the pump 1, is pressurized by the pump 1, enters the electric heating part 4, is heated and then is output to the circulating fluid return pipe. A part of the circulating fluid passes through the first check valve 8, the pump 1 and the electric heating element 4 back to the circulating fluid return line, wherein another part of the circulating fluid is discharged through the second check valve 13 and through the service water outlet line back to the service water system.
The electric heating cylinder 3 is connected with a safety pressure relief valve 14, an outlet of the safety pressure relief valve 14 is communicated with a plant service water outlet pipeline, and when the pressure of the main circulating fluid system is too high, the safety pressure relief valve 14 is opened to ensure the safety of the system.
And the whole pipeline of the circulating fluid system is exhausted, and after water injection is finished, the first electromagnetic valve 11 is closed, and the second electromagnetic valve 12 is opened. And starting the temperature protection switch 5, adjusting the switching proportion of a plant water flow adjusting valve 10 by the circulating fluid system according to the temperature of the main circulating fluid detected by the temperature sensor 7 after the temperature is analyzed and calculated by the micro-processing controller, controlling the plant water flow entering the main circulating fluid system, and outputting the plant water flow after the temperature is controlled by the electric heating component 4. When the flow regulating valve 10 is opened in proportion in the temperature control process, part of the plant water enters the main circulating fluid system, is mixed with the main circulating fluid in proportion for temperature control, and redundant fluid in the main circulating fluid system flows out through the plant water outlet pipeline and returns to the plant water system.
Claims (5)
1. The utility model provides a circulating fluid system with accurate accuse temperature function, including pump (1), the import of pump (1) is parallelly connected has the factory water inlet pipe, a serial communication port, the export intercommunication of pump (1) has electric heater unit, electric heater unit includes electrical heating barrel (3), electrical heating part (4) and temperature protection switch (5), be provided with flow sensor (2) that are used for detecting circulation fluid flow between the export of pump (1) and electrical heating barrel (3) import, be provided with on the pipeline of electrical heating barrel (3) export and be used for detecting temperature sensor (7) of circulation fluid temperature and pressure sensor (6) of pump (1) outlet pressure.
2. The circulating fluid system with the function of accurately controlling the temperature according to claim 1, wherein a first check valve (8) is arranged on an inlet pipeline of the pump (1), and the first check valve (8) is connected with a plant service water inlet pipeline in parallel.
3. The circulating fluid system with precise temperature control function according to claim 2, wherein the plant service water inlet pipeline is provided with a flow control valve (10) and a filter (9), the flow control valve (10) is connected in parallel with a first electromagnetic valve (11), and the inlet side circulating fluid pipeline of the first check valve (8) is connected in parallel with a plant service water outlet pipeline.
4. The circulating fluid system with precise temperature control function according to claim 3, wherein the plant water outlet pipeline is provided with a second check valve (13), and the second check valve (13) is connected with a second electromagnetic valve (12) in parallel.
5. The circulating fluid system with the function of accurately controlling the temperature according to claim 1, wherein a safety pressure relief valve (14) is connected to the electric heating cylinder (3), and an outlet of the safety pressure relief valve (14) is communicated with a plant service water outlet pipeline.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202020554911.XU CN212299388U (en) | 2020-04-15 | 2020-04-15 | Circulating fluid system with accurate temperature control function |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202020554911.XU CN212299388U (en) | 2020-04-15 | 2020-04-15 | Circulating fluid system with accurate temperature control function |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN212299388U true CN212299388U (en) | 2021-01-05 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
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| CN202020554911.XU Active CN212299388U (en) | 2020-04-15 | 2020-04-15 | Circulating fluid system with accurate temperature control function |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112965543A (en) * | 2021-02-03 | 2021-06-15 | 合肥亦威科技有限公司 | Temperature control system with ultrahigh temperature control precision |
| CN113082858A (en) * | 2021-03-03 | 2021-07-09 | 佛山市冠恒丰机电设备有限公司 | Tail gas processing apparatus for feed production |
-
2020
- 2020-04-15 CN CN202020554911.XU patent/CN212299388U/en active Active
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112965543A (en) * | 2021-02-03 | 2021-06-15 | 合肥亦威科技有限公司 | Temperature control system with ultrahigh temperature control precision |
| CN113082858A (en) * | 2021-03-03 | 2021-07-09 | 佛山市冠恒丰机电设备有限公司 | Tail gas processing apparatus for feed production |
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