CN212263632U - Coating machine foreign matter detection mechanism and coating machine - Google Patents

Coating machine foreign matter detection mechanism and coating machine Download PDF

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Publication number
CN212263632U
CN212263632U CN202020717038.1U CN202020717038U CN212263632U CN 212263632 U CN212263632 U CN 212263632U CN 202020717038 U CN202020717038 U CN 202020717038U CN 212263632 U CN212263632 U CN 212263632U
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coating nozzle
substrate
electric signal
foreign matter
coating
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CN202020717038.1U
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Chinese (zh)
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黄丽雄
李均
陈敬华
万博文
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TCL China Star Optoelectronics Technology Co Ltd
TCL Huaxing Photoelectric Technology Co Ltd
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TCL Huaxing Photoelectric Technology Co Ltd
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Abstract

The utility model provides a coating machine foreign matter detection mechanism and coating machine. The coating machine foreign matter detection mechanism is used for detecting foreign matter particles on a substrate to be coated in front of the movement direction of a coating nozzle and comprises a travelling control device, an installation frame, a rotating frame, a rotary interference rod and a sensing device; when the rotary interference rod touches foreign particles on the substrate to be coated, the rotary frame is driven to rotate; the induction system is installed on the rotating frame and used for detecting the rotation angle change of the rotating frame, converting the rotation angle change into an electric signal and sending the electric signal to the advancing control device, and the advancing control device controls the coating nozzle to stop moving after receiving the electric signal and intercepts the electric signal in time when abnormality occurs, so that the detection rate of foreign matter particles is improved, the phenomenon that the product is scrapped in batches due to the fact that the product is abnormal in batch can be effectively avoided, and the yield is improved.

Description

Coating machine foreign matter detection mechanism and coating machine
Technical Field
The utility model relates to a coating technology field especially relates to a coating machine foreign matter detection mechanism and coating machine.
Background
As is well known, the coating technique is a process of spraying certain substances onto certain devices or equipment, and the coating nozzle is an actuator in the coating technique, and since the coating nozzle is an actuator in the coating technique, protection of the coating nozzle is an important issue.
As shown in fig. 1, fig. 1 is a schematic diagram of a conventional vertically fixed interference bar, and fig. 1 shows that a vertically fixed interference bar 91 is fixedly disposed in front of a traveling path of a coating nozzle 92 in a production process for blocking particles 93(Part icle), but when large-particle-size particles (Part icle) exist in a coating stage, the vertically fixed interference bar 91 is scratched, and the vertically fixed interference bar 91 has no alarm device, which is very easy to generate abnormal batch scratching of a liquid crystal substrate 94, resulting in batch scrapping in a subsequent process.
In the process of realizing the protection of the coating nozzle, at least the following problems are found in the prior art: if foreign particles fall on the liquid crystal substrate, the coating nozzle needs to be lowered to a position 60um away from the liquid crystal substrate for film formation during coating, the distance between the vertically fixed interference bar and the liquid crystal substrate is about 75mm-80mm, and the vertically fixed interference bar presses the foreign particles, so that the liquid crystal substrate is deteriorated and cracks are caused; the equipment is wasted due to the fact that long-time shutdown is needed when particles on the liquid crystal substrate are removed, and meanwhile, the success rate of one-time treatment is not high and multiple treatments are needed; if the liquid crystal substrates are not scratched abnormally in batches in time, the cross-factory batch abnormality is easy to occur after the liquid crystal substrates flow into the subsequent processing procedure, and the manpower and material resources are greatly wasted.
SUMMERY OF THE UTILITY MODEL
The utility model provides a coating machine foreign matter detection mechanism and coating machine has solved current vertical fixation formula and has interfered the stick and lead to causing vertical fixation formula to interfere the stick scratch when having big granule for fixed mode setting leads to in the coating stage, and vertical fixation formula interferes excellent no alarm device, very easily produces the batchibility scratch to the liquid crystal substrate, leads to flowing into follow-up flow and causes scrapped technical problem in batches.
In view of the above technical problem, the present invention provides a coating machine foreign matter detection mechanism for detecting foreign matter particles on a substrate to be coated in front of a movement direction of a coating nozzle, the coating machine foreign matter detection mechanism comprises a traveling control device, a mounting frame, a rotating frame, a rotary interference rod and an induction device; specifically, the travel control device is connected with the coating nozzle and used for controlling the travel and stop of the coating nozzle; the mounting frame is connected with the side wall of the coating nozzle; the rotating frame is rotatably connected with the mounting frame; the rotary interference rod is arranged at the lower part of the rotating frame along the vertical direction, and when the rotary interference rod touches foreign particles on a substrate to be coated, the foreign particles block the foreign particles to drive the rotating frame to rotate; the induction device is arranged on the rotating frame and used for detecting the rotation angle change of the rotating frame and converting the rotation angle change into an electric signal to be sent to the advancing control device, and the advancing control device receives the electric signal and then controls the coating nozzle to stop moving.
Further, coating machine foreign matter detection mechanism still includes alarm device, alarm device with induction system electric connection, as it receives the signal of telecommunication back warning.
Furthermore, the material of the rotary interference rod comprises silicon nitride.
Further, the distance between the rotary interference rod and the coating nozzle is 5-8 cm.
Further, the distance between the rotary interference rod and the substrate to be coated is smaller than the distance between the coating nozzle and the substrate to be coated.
Further, the width of the single-motion detection area of the rotary interference rod is matched with the width of the single-motion spraying area of the coating nozzle.
Further, the sensing device is an angle sensor.
Further, the sensing device is provided with an angle threshold; when the rotation angle change is larger than or equal to the angle threshold value, the sensing device converts the rotation angle change into an electric signal; when the rotation angle change is smaller than the angle threshold, the sensing device does not convert the rotation angle change into an electric signal.
The utility model also provides a coating machine, including above-mentioned coating machine foreign matter detection mechanism.
Further, the coating machine also comprises a stage and a coating nozzle; the object stage is used for placing a substrate to be coated; the coating nozzle is arranged above the objective table, a spray head of the coating nozzle faces the substrate to be coated, and the coating nozzle can move above the objective table along any direction.
The utility model provides a coating machine foreign matter detection mechanism and coating machine, the rotatory mode that sets up through the fixed mode that sets up with vertical fixation formula interference stick more changes the rotation and interferes the stick, form similar swing motion, the rotation is interfered the stick and can be rotatory avoid the scratch if when big foreign matter granule in the coating stage, set up induction system simultaneously, advance controlling means and alarm device control coating nozzle and stop and report to the police, can in time intercept when taking place unusually, greatly improve the relevance ratio of foreign matter granule, can effectively avoid the product to take place the mass and unusually cause batch to scrap, thereby the yields has been improved.
Drawings
In order to more clearly illustrate the technical solutions in the embodiments of the present application, the drawings used in the description of the embodiments will be briefly introduced below. It is obvious that the drawings in the following description are only some embodiments of the application, and that for a person skilled in the art, other drawings can be derived from them without inventive effort.
FIG. 1 is a schematic diagram of a prior art vertically fixed interference bar;
fig. 2 is a schematic structural view of the coating machine according to the embodiment of the present invention;
fig. 3 is a schematic view of the operation of the coating machine according to the embodiment of the present invention.
The components in the figure are identified as follows:
1. a control device 2, a mounting rack 3 and a rotating rack,
4. a rotary interference rod 5, a sensing device 10, a coating machine foreign matter detection mechanism,
20. a coating nozzle 30, a substrate to be coated 40, foreign particles,
50. objective table, 100, coating machine.
Detailed Description
The technical solutions in the embodiments of the present application will be clearly and completely described below with reference to the drawings in the embodiments of the present application. It is to be understood that the embodiments described are only a few embodiments of the present application and not all embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present application.
In the description of the present application, the terms "first", "second" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance or implying any number of technical features indicated. Thus, features defined as "first", "second", may explicitly or implicitly include one or more of the described features. In the description of the present application, "a plurality" means two or more unless specifically limited otherwise.
In the description of the present application, it is to be noted that, unless otherwise explicitly specified or limited, the terms "mounted," "connected," and "connected" are to be construed broadly, e.g., as meaning either a fixed connection, a removable connection, or an integral connection; may be mechanically connected, may be electrically connected or may be in communication with each other; either directly or indirectly through intervening media, either internally or in any other relationship. The specific meaning of the above terms in the present application can be understood by those of ordinary skill in the art as appropriate.
Referring to fig. 1 and 2, an embodiment of the present invention provides a coater 100 including a coater foreign object detection mechanism 10. The coating machine foreign matter detection mechanism 10 is used for detecting foreign matter particles 40 on a substrate 30 to be coated in front of the movement direction of a coating nozzle 20, and comprises a traveling control device 1, a mounting frame 2, a rotating frame 3, a rotary interference rod 4 and a sensing device 5; specifically, the travel control device 1 is connected to the coating nozzle 20, and controls the travel and stop of the coating nozzle 20; the mounting frame 2 is connected with the side wall of the coating nozzle 20, preferably in a threaded connection through a fastener, so that the mounting height can be conveniently detached and adjusted; the rotating frame 3 is rotatably connected with the mounting frame 2; the rotary interference rod 4 is arranged in a strip shape along the vertical direction and is arranged at the lower part of the rotating frame 3, and when the rotary interference rod 4 touches the foreign particles 40 on the substrate 30 to be coated, the foreign particles 40 block the rotary interference rod to drive the rotating frame 3 to rotate; the induction device 5 is installed on the rotating frame 3, and is used for detecting the rotation angle change of the rotating frame 3, converting the rotation angle change into an electric signal and sending the electric signal to the advancing control device 1, and the advancing control device 1 receives the electric signal and then controls the coating nozzle 20 to stop moving.
Referring to fig. 3, the foreign matter detection mechanism 10 of the coating machine according to the embodiment changes the fixed setting mode of the vertically fixed interference rod into the rotary setting mode of the rotary interference rod 4 to form a swing-like motion mechanism, so that the rotary interference rod 4 can rotate to avoid scratching when large foreign matter particles 40 exist in the coating stage, and meanwhile, the sensing device 5 and the advancing control device 1 are arranged to control the coating nozzle 20 to stop, so that the large foreign matter particles can be intercepted in time when abnormality occurs, the detection rate of the foreign matter particles 40 is greatly improved, batch scrapping caused by abnormal mass of products can be effectively avoided, and the yield is improved.
In this embodiment, the coating machine foreign matter detection mechanism 10 further includes an alarm device (not shown), the alarm device is electrically connected to the sensing device 5, and when receiving the electric signal, the alarm device gives an alarm to remind an operator to clean the foreign matter particles 40.
In this embodiment, the material of the rotary interference rod 4 includes silicon nitride, and the material of the rotary interference rod is similar to or the same as that of the substrate 30 to be coated, so as to prevent the substrate 30 to be coated from being scratched.
Referring to fig. 3, in the present embodiment, the distance between the rotary interference rod 4 and the coating nozzle 20 is 5-8 cm, and the rotary interference rod 4 is disposed at a distance 5-8 cm in front of the moving direction of the coating nozzle 20, so as to detect in advance whether there is a foreign particle 40 on the substrate 30 to be coated, and effectively protect the coating nozzle 20 from being contaminated.
In this embodiment, the distance between the rotary interference rod 4 and the substrate 30 to be coated is smaller than the distance between the coating nozzle 20 and the substrate 30 to be coated. The rotary interference rod 4 is lower than the coating nozzle 20 by about 20 micrometers, so that the foreign particles 40 with large particle size can be detected in time in advance, the particle size of the foreign particles 40 passing through the rotary interference rod 4 is smaller, and the coating nozzle 20 is higher than the rotary interference rod 4, so that the foreign particles 40 with small particle size do not affect the coating nozzle 20.
In this embodiment, the width of the single-motion detection area of the rotary interference rod 4 is matched with the width of the single-motion spraying area of the coating nozzle 20, so that the false alarm or the false judgment can be avoided, and the foreign particles 40 on the substrate 30 to be coated in front of the moving direction of the coating nozzle 20 can be more accurately detected.
In this embodiment, the sensing device 5 is an angle sensor, and can detect the change of the rotation angle of the rotating frame 3.
In this embodiment, the sensing device 5 is provided with an angle threshold; when the rotation angle change is greater than or equal to the angle threshold, the sensing device 5 converts the rotation angle change into an electric signal; when the rotation angle change is smaller than the angle threshold, the sensing device 5 does not convert the rotation angle change into an electric signal, so that the foreign particles 40 with small particle size smaller than the angle threshold and the foreign particles 40 with large particle size larger than or equal to the angle threshold can be screened out, the foreign particles 40 with small particle size cannot influence the coating nozzle 20, the foreign particles 40 with large particle size can pollute the coating nozzle 20, the two states are respectively identified and treated, and the accuracy is improved.
Referring to fig. 1 and 2, the coater 100 of the present embodiment includes any one of the above-mentioned coater foreign substance detection mechanisms 10. This embodiment coating machine 100 is through the fixed mode of setting that will have the vertical fixation formula to interfere the stick now and more change the rotation mode of setting into that stick 4 is interfered to the rotation, form similar swing motion, if stick 4 can rotate to avoid the scratch when big foreign matter granule 40 is existed in the coating stage, set up induction system 5 simultaneously, advance controlling means 1 and alarm device control coating nozzle 20 and stop and report to the police, can in time intercept when taking place unusually, greatly improve foreign matter granule 40's relevance ratio, can effectively avoid the product to take place that the mass is unusual to cause batch to scrap, thereby the yields has been improved.
In this embodiment, the coating machine 100 further includes a stage 50 and a coating nozzle 20; the stage 50 is used for placing a substrate 30 to be coated; the coating nozzle 20 is disposed above the stage 50 and has a nozzle head facing the substrate 30 to be coated, and can travel in any direction above the stage 50, and the travel direction includes any one of a horizontal direction, a longitudinal direction, and a vertical direction, and a combination thereof.
The utility model provides a coating machine foreign matter detection mechanism and coating machine, the rotatory mode that sets up through the fixed mode that sets up with vertical fixation formula interference stick more changes the rotation and interferes the stick, form similar swing motion, the rotation is interfered the stick and can be rotatory avoid the scratch if when big foreign matter granule in the coating stage, set up induction system simultaneously, advance controlling means and alarm device control coating nozzle and stop and report to the police, can in time intercept when taking place unusually, greatly improve the relevance ratio of foreign matter granule, can effectively avoid the product to take place the mass and unusually cause batch to scrap, thereby the yields has been improved.
The foregoing is only a preferred embodiment of the present invention, and it should be noted that, for those skilled in the art, a plurality of improvements and decorations can be made without departing from the principle of the present invention, and these improvements and decorations should also be regarded as the protection scope of the present invention.

Claims (10)

1. A coating machine foreign matter detection mechanism is used for detecting foreign matter particles on a substrate to be coated in front of the movement direction of a coating nozzle, and is characterized by comprising:
a travel control device connected to the coating nozzle and configured to control travel and stop of the coating nozzle;
a mounting bracket connected to a sidewall of the coating nozzle;
the rotating frame is rotatably connected with the mounting frame;
the rotary interference rod is arranged at the lower part of the rotating frame along the vertical direction, and when the rotary interference rod touches foreign particles on a substrate to be coated, the foreign particles are blocked by the rotary interference rod so as to drive the rotating frame to rotate; and
and the induction device is arranged on the rotating frame and used for detecting the rotation angle change of the rotating frame and converting the rotation angle change into an electric signal to be sent to the advancing control device, and the advancing control device receives the electric signal and then controls the coating nozzle to stop moving.
2. The mechanism of claim 1, further comprising:
and the alarm device is electrically connected with the sensing device and alarms after receiving the electric signal.
3. The mechanism of claim 1, wherein the rotary interference rod comprises silicon nitride.
4. The mechanism of claim 1, wherein the distance between the rotary interference rod and the coating nozzle is 5-8 cm.
5. The mechanism of claim 1, wherein the distance between the rotary interference rod and the substrate is smaller than the distance between the coating nozzle and the substrate.
6. The mechanism of claim 1, wherein the width of the single-motion detection area of the rotary interference bar matches the width of the single-motion spraying area of the coating nozzle.
7. The mechanism of claim 1, wherein the sensor is an angle sensor.
8. The mechanism of claim 1, wherein the sensing device is provided with an angle threshold; when the rotation angle change is larger than or equal to the angle threshold value, the sensing device converts the rotation angle change into an electric signal; when the rotation angle change is smaller than the angle threshold, the sensing device does not convert the rotation angle change into an electric signal.
9. A coater comprising the mechanism for detecting foreign matters in a coater according to any one of claims 1 to 8.
10. The coater of claim 9, further comprising:
the object stage is used for placing a substrate to be coated; and
and the coating nozzle is arranged above the objective table, a spray head of the coating nozzle faces the substrate to be coated, and the coating nozzle can move in any direction above the objective table.
CN202020717038.1U 2020-04-30 2020-04-30 Coating machine foreign matter detection mechanism and coating machine Active CN212263632U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN202020717038.1U CN212263632U (en) 2020-04-30 2020-04-30 Coating machine foreign matter detection mechanism and coating machine

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN202020717038.1U CN212263632U (en) 2020-04-30 2020-04-30 Coating machine foreign matter detection mechanism and coating machine

Publications (1)

Publication Number Publication Date
CN212263632U true CN212263632U (en) 2021-01-01

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN112965116A (en) * 2021-03-29 2021-06-15 上海和辉光电股份有限公司 Device for detecting metal foreign matters on substrate in coating

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN112965116A (en) * 2021-03-29 2021-06-15 上海和辉光电股份有限公司 Device for detecting metal foreign matters on substrate in coating

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