CN212209444U

CN212209444U - Multidimensional nanometer displacement device

Info

Publication number: CN212209444U
Application number: CN202021474545.3U
Authority: CN
Inventors: 李琪; 李伟; 施玉书; 黎雄威; 黄鹭; 李适; 张树; 皮磊; 孙淼
Original assignee: National Institute of Metrology
Current assignee: National Institute of Metrology
Priority date: 2020-07-23
Filing date: 2020-07-23
Publication date: 2020-12-22
Anticipated expiration: 2030-07-23

Abstract

The utility model discloses a multidimensional nanometer displacement device, which comprises a fixed frame, a movable platform, a first driving device and a second driving device, wherein the movable frame is sleeved at the periphery of the movable platform and forms flexible connection with the movable platform, a gap is arranged between the inner wall of the movable frame and the outer wall of the movable platform, the fixed frame is sleeved at the periphery of the movable frame and forms flexible connection with the movable frame, a gap is arranged between the inner wall of the fixed frame and the outer wall of the movable frame, the middle part of the movable platform is used for placing a sample to be tested, at least two first driving devices are fixedly arranged on one side frame of the fixed frame, the first driving devices drive the movable frame and the movable platform to reciprocate, at least one second driving device is fixedly arranged on one side frame of the movable frame, the second driving devices drive the movable platform to reciprocate, the driving direction of the first driving devices is vertical to the driving direction of the, the multidimensional nanometer displacement device can improve the nanometer displacement precision of heavy load and large stroke and correct deflection in the motion process.

Description

Multidimensional nanometer displacement device

Technical Field

The utility model relates to a displacement platform technical field specifically relates to a multidimensional nanometer displacement device.

Background

Currently, in the measurement of characteristic parameters of the nano geometric structure of the large-size standard chip of the integrated circuit, the heavy load of a large-size nano displacement system is a key technology. The size of the current integrated circuit standard chip reaches 6-8 inches, and in order to obtain accurate values of geometrical structural features such as line width, grid, step height and the like on the standard chip, a large-size displacement table is required to drive a standard sample plate to carry out scanning measurement with nanoscale resolution. It is a great challenge to have such large platforms producing such small resolution displacements.

At present, small-sized and light-loaded nanometer displacement platforms are produced by domestic and foreign commercial companies; research of domestic and foreign research institutes is mainly focused on small high-resolution nano-platforms, the heavy-load requirement cannot be met, meanwhile, the size of the nano-displacement platform is small, the application scene limitation is large, the processing requirement is high when the large-size nano-displacement platform is available, and the precision and the stability of the nano-displacement platform during multi-dimensional motion are difficult to guarantee due to the fact that the mass of the nano-displacement platform is large. Compared with a miniaturized and light-load nano displacement platform, the large-size and heavy-load nano displacement platform faces greater challenges in the characteristics of high resolution, high sensitivity, low structural deformation, low inertia and the like.

SUMMERY OF THE UTILITY MODEL

The utility model aims at providing a multidimension nanometer displacement device to solve the problem that above-mentioned prior art exists, realized the nanometer displacement of heavy load, big stroke, and can revise the beat in the motion process.

In order to achieve the above object, the utility model provides a following scheme:

the utility model provides a multidimensional nanometer displacement device, which comprises a fixed frame, a movable platform, a first driving device and a second driving device, wherein the movable frame is sleeved on the periphery of the movable platform and forms flexible connection with the movable platform, a gap is arranged between the inner wall of the movable frame and the outer wall of the movable platform, the fixed frame is sleeved on the periphery of the movable frame and forms flexible connection with the movable frame, a gap is arranged between the inner wall of the fixed frame and the outer wall of the movable frame, the middle part of the movable platform is used for placing a sample to be tested, at least two first driving devices are fixedly arranged on one side frame of the fixed frame, the first driving devices can drive the movable frame and the movable platform to move in a reciprocating manner, at least one second driving device is fixedly arranged on one side frame of the movable frame, and the second driving device can drive the moving platform to reciprocate, and the driving direction of the first driving device is vertical to that of the second driving device.

Preferably, the fixed frame, the moving frame and the moving platform are all rectangular frames, the length of the outer side of the fixed frame is 30-50cm, the gap between the fixed frame and the moving frame is 0.8-1.2mm, and the gap between the moving frame and the moving platform is 0.8-1.2 mm.

Preferably, the fixed frame and the moving table are respectively connected through flexible hinges in the form of superimposed branched chains, and the flexible hinges are respectively arranged at four corners of the moving frame and four corners of the moving table.

Preferably, the first driving device is used for driving the motion of the X axis, the second driving device is used for driving the motion of the Y axis, and both the first driving device and the second driving device are PZT drivers.

Preferably, the first driving device comprises a first PZT rod, a first sleeve and a first end cover, the first sleeve is sleeved on the periphery of the first PZT rod, two ends of the first sleeve are both opened, one end of the first sleeve is detachably connected with the fixed frame, the other end of the first sleeve is detachably connected with the first end cover, the first end cover is arranged close to the tail end of the first PZT rod, a first adjusting assembly is arranged on the first end cover, the first adjusting assembly is connected with the tail end of the first PZT rod and used for adjusting initial pre-tightening of the first PZT rod, and the head end of the first PZT rod can push the moving frame to move; the PZT rod comprises a first sleeve, a second sleeve and a third sleeve, wherein the first sleeve is arranged on the outer side wall of the first sleeve, the second sleeve is arranged on the outer side wall of the second sleeve, the third sleeve is arranged on the outer side wall of the second sleeve, one end of the second elastic element is detachably fixed in the middle of the outer side wall of the first sleeve, the other end of the second elastic element penetrates through the side wall of.

Preferably, first sleeve outer wall be equipped with respectively with first preceding annular bulge coaxial of first sleeve, first middle annular bulge and first back annular bulge, just first preceding annular bulge with first back annular bulge sets up respectively between the annular bulge of first sleeve, first middle annular bulge is located first preceding annular bulge with between the annular bulge of first back, first preceding annular bulge is close to first PZT stick head end sets up, first preceding annular bulge with fixed frame can dismantle the connection, just first elastic element passes first preceding annular bulge, just first elastic element's one end with first middle annular bulge can dismantle the connection, first back annular bulge with first end cover can dismantle the connection.

Preferably, the head end of the first PZT rod is in threaded connection with one end of a first plug, the other end of the first plug is hemispherical and is in contact with the moving frame, the moving frame is provided with a first gasket at a position corresponding to the first plug, one side of the first gasket, which is far away from the first plug, is provided with a first positioning pin, the moving frame is provided with a first positioning hole at a position corresponding to the first positioning pin, and the first positioning pin is connected with the first positioning hole;

the first elastic element is a tension spring, a first tension spring adjusting screw is respectively arranged on two sides of the first gasket, which are perpendicular to the first PZT rod, one end of the first tension spring adjusting screw is in threaded connection with the side wall of the movable frame, the other end of the first tension spring adjusting screw is detachably connected with one end of the first elastic element, the other end of the first elastic element is detachably connected with a first tension spring adjusting screw rod, two first adjusting through holes are arranged on the first middle annular bulge, the two first adjusting through holes are symmetrically arranged along the central axis of the first sleeve, and one end of the first tension spring adjusting screw rod, which is far away from the first elastic element, penetrates through the first adjusting through holes and is fastened through a nut;

first end cover with the connection can be dismantled to cyclic annular arch in first back, first adjusting part includes first PZT excellent adjusting screw and first guide block, the one end of first guide block with first PZT excellent tail threaded connection, the other end are equipped with first recess, first recess is conical and the opening orientation first end cover, first end cover middle part is equipped with first adjusting screw hole, first PZT excellent adjusting screw's one end is the hemisphere, and passes first adjusting screw hole and contact first recess cell wall, the other end is to keeping away from the direction of first PZT excellent extends to fasten through the nut.

Preferably, the second driving device comprises a second PZT rod, a second sleeve and a second end cover, the second sleeve is sleeved on the periphery of the second PZT rod, two ends of the second sleeve are both opened, one end of the second sleeve is detachably connected with the mobile station, the other end of the second sleeve sequentially penetrates through the mobile frame and the fixed frame and is detachably connected with the second end cover, the second end cover is arranged close to the tail end of the second PZT rod, a second adjusting assembly is arranged on the second end cover, the second adjusting assembly is connected with the tail end of the second PZT rod and is used for adjusting initial pre-tightening of the second PZT rod, and the head end of the second PZT rod can push the mobile station to move; the PZT rod is characterized by further comprising a second elastic element, one end of the second elastic element is detachably fixed in the middle of the outer side wall of the second sleeve, the other end of the second elastic element penetrates through the side wall of the mobile platform and is detachably fixed on the mobile platform, the second elastic element is parallel to the second PZT rod, and the telescopic amount of the second elastic element is adjustable.

Preferably, the outer wall of the second sleeve is provided with a second front annular protrusion, a second middle annular protrusion and a second rear annular protrusion which are coaxial with the second sleeve respectively, the second front annular protrusion and the second rear annular protrusion are arranged at two ends of the second sleeve respectively, the second middle annular protrusion is arranged between the second front annular protrusion and the second rear annular protrusion, the second front annular protrusion is close to the second PZT rod head end, the second front annular protrusion is detachably connected with the moving table, the second elastic element penetrates the second front annular protrusion, one end of the second elastic element is detachably connected with the second middle annular protrusion, and the second rear annular protrusion is detachably connected with the second end cover.

Preferably, the head end of the second PZT rod is in threaded connection with one end of a second plug, the other end of the second plug is hemispherical and is in contact with the mobile station, the mobile station is provided with a second gasket at a position corresponding to the second plug, one side of the second gasket, which is far away from the second plug, is provided with a second positioning pin, the mobile station is provided with a second positioning hole at a position corresponding to the second positioning pin, and the second positioning pin is connected with the second positioning hole;

the second elastic element is a tension spring, a second tension spring adjusting screw is respectively installed on two sides of the second gasket, which are perpendicular to the second PZT rod, one end of the second tension spring adjusting screw is in threaded connection with the side wall of the mobile station, the other end of the second tension spring adjusting screw is detachably connected with one end of the second elastic element, the other end of the second elastic element is detachably connected with a second tension spring adjusting screw rod, two second adjusting through holes are formed in the second middle annular bulge, the two second adjusting through holes are symmetrically arranged along the central axis of the second sleeve, and one end, far away from the second elastic element, of the second tension spring adjusting screw rod penetrates through the second adjusting through holes and is fastened through a nut;

the second end cover with the connection can be dismantled to annular arch behind the second, second adjusting part includes second PZT excellent adjusting screw and second guide block, the one end of second guide block with second PZT excellent afterbody threaded connection, the other end are equipped with the second recess, the second recess is conical and the opening orientation the second end cover, second end cover middle part is equipped with second adjusting screw hole, the one end of second PZT excellent adjusting screw is the hemisphere, and passes second adjusting screw hole and contact second recess cell wall, the other end is to keeping away from the direction of second PZT excellent extends to fasten through the nut.

The utility model discloses for prior art gain following technological effect:

the utility model provides a multidimensional nanometer displacement device, which comprises a fixed frame, a movable platform, a first driving device and a second driving device, wherein the movable frame is sleeved on the periphery of the movable platform and flexibly connected with the movable platform, relative motion between the movable frame and the movable platform is ensured, a gap is arranged between the inner wall of the movable frame and the outer wall of the movable platform to provide space for the motion of the movable platform, the fixed frame is sleeved on the periphery of the movable frame and flexibly connected with the movable frame to ensure that the movable frame can move relative to the fixed frame, a gap is arranged between the inner wall of the fixed frame and the outer wall of the movable frame to provide space for the reciprocating motion of the movable frame, and the application of a series connection mode ensures that two-dimensional motion is integrated to the same motion plane, so that the multidimensional nanometer displacement device has good overall structure design, and a motion part can bear objects with larger mass, the middle part of the mobile platform is used for placing a sample to be tested, in the practical application process, technicians in the field can make adaptive change to the mobile platform according to the actual sample conditions, for example, whether a through hole is arranged in the middle part of the mobile platform or not, and the specific size of the through hole when the through hole is arranged, so that the sample to be tested can be placed in different shapes and sizes, and can be suitable for different application occasions, at least two first driving devices are fixedly arranged on one side frame of the fixed frame, the first driving devices can drive the mobile frame and the mobile platform to reciprocate, the two first driving devices can be respectively controlled to drive so as to finish different driving amounts, thereby realizing micro-radian rotation of the mobile frame and the mobile platform, at least one second driving device is fixedly arranged on one side frame of the mobile frame, the second driving devices can drive the mobile platform to reciprocate, the driving direction of the first driving devices is vertical to the driving direction of the second driving devices, when the first driving device generates deflection during driving, the deflection error in the driving direction of the second driving device can be corrected in real time by setting different driving amounts of the two first driving devices.

Drawings

In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings required to be used in the embodiments will be briefly described below, and it is obvious that the drawings in the following description are only some embodiments of the present invention, and for those skilled in the art, other drawings can be obtained according to these drawings without creative efforts.

Fig. 1 is a schematic structural diagram of a multi-dimensional nano-displacement device provided by the present invention;

fig. 2 is a schematic structural diagram of a second driving device in the multi-dimensional nano-displacement device provided by the present invention;

in the figure: 1-a fixed frame, 2-a movable frame, 3-a movable table, 31-a second gasket, 311-a second positioning pin, 4-a first driving device, 5-a second driving device, 51-a second PZT rod, 511-a second top, 512-a second guide block, 52-a second sleeve, 521-a second front annular bulge, 522-a second middle annular bulge, 523-a second rear annular bulge, 53-a second end cover, 531-a second PZT rod adjusting screw, 6-a flexible hinge, 7-a second elastic element, 71-a second tension spring adjusting screw and 72-a second tension spring adjusting screw.

Detailed Description

The technical solutions in the embodiments of the present invention will be described clearly and completely with reference to the accompanying drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only some embodiments of the present invention, not all embodiments. Based on the embodiments in the present invention, all other embodiments obtained by a person skilled in the art without creative work belong to the protection scope of the present invention.

The utility model aims at providing a multidimension nanometer displacement device to the motion accuracy and the stationarity of solving the large size nanometer displacement platform are difficult to the technical problem who guarantees.

In order to make the above objects, features and advantages of the present invention more comprehensible, the present invention is described in detail with reference to the accompanying drawings and the detailed description.

As shown in fig. 1, the present invention provides a multidimensional nanometer displacement device, which comprises a fixed frame 1, a movable frame 2, a movable platform 3, a first driving device 4 and a second driving device 5, wherein the movable frame 2 is sleeved on the periphery of the movable platform 3 and flexibly connected with the movable platform 3, so as to ensure that the movable frame 2 and the movable platform 3 can move relatively, a gap is formed between the inner wall of the movable frame 2 and the outer wall of the movable platform 3, so as to provide a space for the movement of the movable platform 3, the fixed frame 1 is sleeved on the periphery of the movable frame 2 and flexibly connected with the movable frame 2, so as to ensure that the movable frame 2 can move relatively to the fixed frame 1, and a gap is formed between the inner wall of the fixed frame 1 and the outer wall of the movable frame 2, so as to provide a space for the reciprocating movement of the movable frame 2, and the two-dimensional movement is integrated to the same movement plane by the application of a series connection mode, the moving part can bear objects with larger mass, the middle part of the mobile station 3 is used for placing samples to be tested, in the practical application process, technicians in the field can change the mobile station 3 adaptively according to the actual sample conditions, for example, whether a through hole is arranged in the middle part of the mobile station 3, and the specific size of the through hole when the through hole is arranged, so that the samples with different shapes and sizes can be placed, and the samples with different application occasions can be adapted, at least two first driving devices 4 are fixedly arranged on one side frame of the fixed frame 1, the first driving devices 4 can drive the mobile frame 2 and the mobile station 3 to move in a reciprocating way, the two first driving devices 4 can be respectively controlled to drive so as to finish different driving quantities, thereby realizing the micro-radian rotation of the mobile frame 2 and the mobile station 3, at least one second driving device 5 is fixedly arranged on one side frame of the mobile frame 2, and the second driving device 5 can drive the moving platform 3 to reciprocate, the driving direction of the first driving device 4 is vertical to the driving direction of the second driving device 5, when the first driving device 4 generates deflection during driving, the deflection error in the driving direction of the second driving device 5 can be corrected in real time by setting different driving amounts of the two first driving devices 4.

Specifically, the fixed frame 1, the moving frame 2 and the moving platform 3 are all rectangular frames, the outside side length of the fixed frame 1 is 30-50cm, and the size is larger than that of a common small-sized nanometer displacement platform, so that a large-sized and heavy-loaded sample can be conveniently carried, the center of gravity is low and the dynamic characteristic is good on the same plane, the gap between the fixed frame 1 and the moving frame 2 is 0.8-1.2mm, preferably 1mm, and the gap between the moving frame 2 and the moving platform 3 is 0.8-1.2mm, preferably 1mm, so that the moving frame 2 and the moving platform 3 can move back and forth, and the millimeter-scale displacement stroke of the nanometer displacement platform can be realized.

The fixed frame 1 and the moving frame 2 and the moving platform 3 are respectively connected through flexible hinges 6 in a superposed branched chain form and are formed by linear cutting processing, and flexible guide mechanisms are designed by adopting the flexible hinges 6 structure of the superposed branched chains in the inner-layer structure and the outer-layer structure, so that the better displacement characteristic is ensured, the concentrated stress is reduced, and the structural reliability is improved; and flexible hinge 6 sets up four bights at moving frame 2 and four bights of mobile station 3 respectively, adopt symmetrical structure, flexible hinge 6 produces equivalent corner and does not have tensile deformation during operation, the internal stress of balanced structure, reduce the deformation error, the deformation that simultaneously balanced inertia force and temperature variation arouse, eliminate principle error, reduce the influence of machining error to the precision, the concentrated stress that can be lower produces great displacement stroke, adjacent flexible hinge 6 connecting rod volume is less, retrench the structure when having guaranteed the guidance quality, be favorable to cooperating the use with other mechanical mechanism when the design.

The first driving device 4 is used for driving the X-axis movement, the X-axis movement is a double-axis driving, the second driving device 5 is used for driving the Y-axis movement, the Y-axis movement is a single-axis driving, under the condition of requirement, the correction of Y-axis deflection movement error caused by the Y-axis single-axis driving of the multidimensional nanometer displacement device can be realized by controlling different driving amounts of the two first driving devices 4, and the micro-radian rotation of the moving part of the multidimensional nanometer displacement device can be realized, namely the rotation of the multidimensional nanometer displacement device around the Z axis can be realized, the first driving device 4 and the second driving device 5 are PZT drivers, the PZT drivers are PZT drivers which stack the piezoelectric ceramic pieces together, separate each piezoelectric ceramic piece by using metal electrodes, and sinter the metal electrodes and the piezoelectric ceramic pieces together into an integrated structure as the effective part of the piezoelectric ceramic rod, the multi-dimensional nanometer displacement device can directly convert electric energy into linear motion, has extremely high theoretical resolution, can realize nanometer-scale micro displacement, meets the use requirement of the multi-dimensional nanometer displacement device, has the same structure as the first driving device and the second driving device, is the structure in the figure 2, and has the difference that the connection positions of the first driving device and the second driving device are different from the connection positions of the fixed frame 1, the movable frame 2 and the movable platform 3.

The first driving device 4 comprises a first PZT rod, a first sleeve and a first end cover, the first sleeve is sleeved on the periphery of the first PZT rod, the first PZT rod is very precise and needs to be protected in the assembling and using processes, the surface of the first PZT rod cannot be scratched by a sharp object, and the first PZT rod which is well installed and debugged is ensured not to be subjected to shearing force and torque, so the first sleeve is arranged for protecting the first PZT rod and realizing installation, both ends of the first sleeve are open, one end of the first sleeve is detachably connected with the fixed frame 1, the other end of the first sleeve is detachably connected with the first end cover, the first end cover is arranged close to the tail end of the first PZT rod, a first adjusting component is arranged on the first end cover and is connected with the tail end of the first PZT rod and is used for adjusting the initial pre-tightening of the first PZT rod, the first PZT rod generally cannot provide negative voltage, so the first PZT rod can be normally used only by proper pre-tightening after being initially installed, the head end of the first PZT rod can push the moving frame 2 to move, so that the moving frame 2 and the moving platform 3 can be displaced in the X-axis direction; still include first elastic element, first elastic element's one end can be dismantled and fix in first telescopic lateral wall middle part, and the other end passes fixed frame 1's lateral wall and can dismantle and fix on moving frame 2, and first elastic element is parallel with first PZT stick, and first elastic element's flexible volume is adjustable, and first elastic element can provide adjustable pretension for first PZT stick.

First sleeve outer wall is equipped with respectively with the coaxial first preceding annular arch of first sleeve, first well annular arch and first back annular arch, and first preceding annular arch sets up respectively at first telescopic both ends with first back annular arch, first well annular arch is located between first preceding annular arch and the first back annular arch, first preceding annular arch is close to first PZT excellent tip and sets up, first preceding annular arch can be dismantled with fixed frame 1 and be connected, realize that first telescopic installation is fixed, and first elastic element passes first preceding annular arch, and the one end of first elastic element can be dismantled with first well annular arch and be connected, first back annular arch can be dismantled with first end cover and be connected, accomplish the installation of first end cover fixed.

The head end of the first PZT rod is in threaded connection with one end of a first top head, the other end of the first top head is hemispherical, and is contacted with the moving frame 2, the moving frame 2 is provided with a first gasket at the position corresponding to the first plug, because the first PZT rod can not be directly matched with other mechanical devices for use, the first ejector head is arranged to be directly contacted with the first gasket, the multidimensional nanometer displacement device receives the driving force generated by the first PZT rod through the first gasket, and the hemispherical position of the first top head and the stressed position of the first gasket are both polished, the water-free butter is smeared for lubricating the semi-sphere shape in use, so that the influence of friction force on the displacement performance can be reduced, a first positioning pin is arranged on one side, away from the first ejector head, of the first gasket, a first positioning hole is formed in the position, corresponding to the first positioning pin, of the movable frame 2, and the first positioning pin is connected with the first positioning hole, so that the positioning and the installation of the first gasket are realized;

the first elastic element is a tension spring, the two sides of the first gasket, which are perpendicular to the first PZT rod, are respectively provided with a first tension spring adjusting screw, one end of the first tension spring adjusting screw is in threaded connection with the side wall of the movable frame 2, the other end of the first tension spring adjusting screw is detachably connected with one end of the first elastic element, preferably, the end surface of the first tension spring adjusting screw, which is close to the first elastic element, is provided with a pull ring, the tension spring is provided with a hook, the first elastic element can be detachably connected with the first tension spring adjusting screw by hooking the pull ring through the hook, so that the position of one end of the first elastic element is fixed, the other end of the first elastic element is detachably connected with a first tension spring adjusting screw rod, the first middle annular bulge is provided with two first adjusting through holes, the two first adjusting through holes are symmetrically arranged along the central axis of the first sleeve, one end of the first tension spring adjusting screw, the first tension spring adjusting screw rod reciprocates in the first adjusting through hole to drive one end of the first elastic element, which is connected with the first tension spring adjusting screw rod, to move, and the first elastic element is screwed up through the nut after moving in place, so that the elongation of the first elastic element is adjusted, different pre-tightening forces of the first PZT rod are realized, and when the pre-tightening force is provided for the first PZT rod, in order to ensure that the symmetry and the displacement performance of the multi-dimensional nanometer displacement device structure are not influenced, a double-tension spring symmetry mode is adopted, when the first tension spring adjusting screw rod is moved to adjust the pre-tightening force in use, the tension springs are required to be synchronized as much as possible, and the symmetry of the pre-tightening forces is ensured;

the first end cover is detachably connected with the first rear annular bulge, the first adjusting assembly comprises a first PZT rod adjusting screw and a first guide block, one end of the first guide block is in threaded connection with the tail of the first PZT rod, preferably, one end of the first guide block is provided with an external thread, the tail of the first PZT rod is provided with an internal thread, one end of the first guide block extends into the tail of the first PZT rod and is in threaded connection with the tail of the first PZT rod, the other end of the first guide block is provided with a first groove, the first groove is a conical concave surface, the first groove is conical, the opening of the first groove faces the first end cover, the middle of the first end cover is provided with a first adjusting threaded hole, one end of the first PZT rod adjusting screw is hemispherical and penetrates through the first adjusting threaded hole and contacts the wall of the first groove, the other end of the first groove extends in a direction away from the first PZT rod and is fastened by a nut, when the initial pre-tightening force adjustment is performed on the first PZT rod, promote first guide block and first PZT excellent reciprocating motion to through the nut fastening, guarantee the stability of connecting, simultaneously, first PZT stick adjusting screw is used with the cooperation of first recess, guarantees that first PZT adjusting screw operating position is in first PZT excellent intermediate position, reduces the damage that shearing force and moment of torsion led to the fact first PZT stick.

As shown in fig. 2, the second driving device 5 includes a second PZT rod 51, a second sleeve 52 and a second end cap 53, the second sleeve 52 is sleeved on the periphery of the second PZT rod 51, since the second PZT rod 51 is very precise, and needs to be protected in the assembling and using processes, the surface of the second PZT rod 51 cannot be scratched by a sharp object, and it should be ensured that the second PZT rod 51 installed and debugged is not subjected to shearing force and torque, the second sleeve 52 is arranged to protect the second PZT rod 51 and achieve the installation, and both ends of the second sleeve 52 are both open, one end of the second sleeve 52 is detachably connected with the movable table 3, the other end of the second sleeve 52 sequentially passes through the movable frame 2 and the fixed frame 1 and is detachably connected with the second end cap 53, and the second end cap 53 is arranged near the tail end of the second PZT rod 51, a second adjusting component is arranged on the second end cap 53, the second adjusting component is connected with the tail end of the second PZT rod 51 and is used for adjusting the initial pretension of the second PZT rod 51, because the second PZT rod 51 generally cannot provide a negative voltage, the second PZT rod 51 needs to be properly pre-tightened after being initially installed to be normally used, and the head end of the second PZT rod 51 can push the mobile station 3 to move, so that the mobile station 3 can be displaced in the Y-axis direction; the second elastic element 7 is further included, one end of the second elastic element 7 is detachably fixed in the middle of the outer side wall of the second sleeve 52, the other end of the second elastic element 7 penetrates through the side wall of the mobile station 3 and is detachably fixed on the mobile station 3, the second elastic element 7 is parallel to the second PZT rod 51, the stretching amount of the second elastic element 7 is adjustable, and the second elastic element 7 can provide adjustable pre-tightening for the second PZT rod 51.

The outer wall of the second sleeve 52 is provided with a second front annular protrusion 521, a second middle annular protrusion 522 and a second rear annular protrusion 523, which are respectively coaxial with the second sleeve 52, the second front annular protrusion 521 and the second rear annular protrusion 523 are respectively arranged at two ends of the second sleeve 52, the second middle annular protrusion 522 is arranged between the second front annular protrusion 521 and the second rear annular protrusion 523, the second front annular protrusion 521 is arranged near the head end of the second PZT rod 51, the second front annular protrusion 521 is detachably connected with the mobile station 3, so that the installation and fixation of the second sleeve 52 are realized, the second elastic element 7 passes through the second front annular protrusion 521, one end of the second elastic element 7 is detachably connected with the second middle annular protrusion, and the second rear annular protrusion 523 is detachably connected with the second end cover 53, so that the installation and fixation of the second end cover 53 are completed.

The head end of the second PZT rod 51 is connected with one end of a second top 511 by screw threads, the other end of the second top 511 is in a hemispherical shape and is contacted with the mobile station 3, the mobile station 3 is provided with a second gasket 31 at the position corresponding to the second top 511, because the second PZT rod 51 can not be directly matched with other mechanical devices for use, the second top 511 is arranged to be directly contacted with the second gasket 31, the multidimensional nanometer displacement device receives the driving force generated by the second PZT rod 51 through the second gasket 31, the hemispherical position of the second top 511 and the stressed position of the second gasket 31 are both polished and are coated with anhydrous butter for lubricating the hemispherical shape in use, the influence of the friction force on the displacement performance can be reduced, one side of the second gasket 31 far away from the second top 511 is provided with a second positioning pin 311, the mobile station 3 is provided with a second positioning hole corresponding to the second positioning pin 311, and the second positioning pin 311 is connected with the second positioning hole, positioning and mounting of the second gasket 31 are realized;

the second elastic element 7 is a tension spring, the second gasket 31 is provided with a second tension spring adjusting screw 71 at two sides perpendicular to the second PZT rod 51, one end of the second tension spring adjusting screw 71 is in threaded connection with the side wall of the mobile station 3, and the other end is detachably connected with one end of the second elastic element 7, preferably, the second tension spring adjusting screw 71 is provided with a pull ring at an end surface close to the second elastic element 7, the tension spring is provided with a hook which can hook the pull ring to detachably connect the second elastic element 7 with the second tension spring adjusting screw 71, so as to fix the position of one end of the second elastic element 7, the other end of the second elastic element 7 is detachably connected with a second tension spring adjusting screw 72, the second annular protrusion 522 is provided with two second adjusting through holes, the two second adjusting through holes are symmetrically arranged along the central axis of the second sleeve 52, one end of the second tension spring adjusting screw 72 far away from the second elastic element 7 passes through the second adjusting through holes, the second tension spring adjusting screw 72 reciprocates in the second adjusting through hole to drive one end of the second elastic element 7 connected with the second tension spring adjusting screw 72 to move, and the second elastic element 7 is screwed through the nut after moving in place so as to adjust the elongation of the second elastic element 7 and realize different pretightening forces of the second PZT rod 51, and when the pretightening force is provided for the second PZT rod 51, in order to ensure that the symmetry and the displacement performance of the multidimensional nanometer displacement device structure are not affected, a double tension spring symmetry mode is adopted, so that the tension springs are synchronized as much as possible when the second tension spring adjusting screw 72 is moved to adjust the pretightening force in use, and the symmetry of the pretightening force is ensured;

the second end cap 53 is detachably connected with the second rear annular protrusion 523, the second adjusting assembly includes a second PZT rod adjusting screw 531 and a second guide block 512, one end of the second guide block 512 is in threaded connection with the tail of the second PZT rod 51, preferably, one end of the second guide block 512 is provided with an external thread, the tail of the second PZT rod 51 is provided with an internal thread, one end of the second guide block 512 extends into the tail of the second PZT rod 51 and is in threaded connection, the other end of the second guide block 512 is provided with a second groove, the second groove is a conical concave surface, the second groove is conical and has an opening facing the second end cap 53, the middle of the second end cap 53 is provided with a second adjusting threaded hole, one end of the second PZT rod adjusting screw 531 is hemispherical and passes through the second adjusting threaded hole and contacts the wall of the second groove, the other end extends in a direction away from the second PZT rod 51 and is fastened by a nut, when the initial pre-tightening force of the second PZT rod 51 is adjusted, the accessible is rotatory second PZT stick 51, promotes second guide block 512 and second PZT stick 51 reciprocating motion to through the nut fastening, guarantee the stability of connecting, simultaneously, second PZT stick adjusting screw 531 uses with the cooperation of second recess, guarantees that second PZT adjusting screw operating position is in second PZT stick 51 intermediate position, reduces the damage that shearing force and moment of torsion led to the fact to second PZT stick 51.

The principle and the implementation mode of the present invention are explained by applying specific examples in the present specification, and the above descriptions of the examples are only used to help understanding the method and the core idea of the present invention; meanwhile, for the general technical personnel in the field, according to the idea of the present invention, there are changes in the concrete implementation and the application scope. In summary, the content of the present specification should not be construed as a limitation of the present invention.

Claims

1. A multi-dimensional nano-displacement device, characterized by: the device comprises a fixed frame, a movable table, a first driving device and a second driving device, wherein the movable frame is sleeved on the periphery of the movable table and flexibly connected with the movable table, a gap is reserved between the inner wall of the movable frame and the outer wall of the movable table, the fixed frame is sleeved on the periphery of the movable frame and flexibly connected with the movable frame, a gap is reserved between the inner wall of the fixed frame and the outer wall of the movable frame, the middle part of the movable table is used for placing a sample to be tested, at least two first driving devices are fixedly arranged on one side frame of the fixed frame, the first driving devices can drive the movable frame and the movable table to move in a reciprocating manner, at least one second driving device is fixedly arranged on one side frame of the movable frame, and the second driving devices can drive the movable table to move in a reciprocating manner, the driving direction of the first driving device is perpendicular to the driving direction of the second driving device.

2. The multi-dimensional nano-displacement device of claim 1, wherein: the fixed frame, the moving frame and the moving platform are all rectangular frames, the length of the outer side of the fixed frame is 30-50cm, the gap between the fixed frame and the moving frame is 0.8-1.2mm, and the gap between the moving frame and the moving platform is 0.8-1.2 mm.

3. The multi-dimensional nano-displacement device of claim 2, wherein: the fixed frame and the movable platform are respectively connected through flexible hinges in a superposed branched chain mode, and the flexible hinges are respectively arranged at four corners of the movable frame and four corners of the movable platform.

4. The multi-dimensional nano-displacement device of claim 1, wherein: the first driving device is used for driving the X-axis to move, the second driving device is used for driving the Y-axis to move, and the first driving device and the second driving device are both PZT drivers.

5. The multi-dimensional nano-displacement device of claim 4, wherein: the first driving device comprises a first PZT rod, a first sleeve and a first end cover, the first sleeve is sleeved on the periphery of the first PZT rod, two ends of the first sleeve are both opened, one end of the first sleeve is detachably connected with the fixed frame, the other end of the first sleeve is detachably connected with the first end cover, the first end cover is arranged close to the tail end of the first PZT rod, a first adjusting component is arranged on the first end cover, the first adjusting component is connected with the tail end of the first PZT rod and used for adjusting initial pre-tightening of the first PZT rod, and the head end of the first PZT rod can push the moving frame to move; the PZT rod comprises a first sleeve, a second sleeve and a third sleeve, wherein the first sleeve is arranged on the outer side wall of the first sleeve, the second sleeve is arranged on the outer side wall of the second sleeve, the third sleeve is arranged on the outer side wall of the second sleeve, one end of the second elastic element is detachably fixed in the middle of the outer side wall of the first sleeve, the other end of the second elastic element penetrates through the side wall of.

6. The multi-dimensional nano-displacement device of claim 5, wherein: first sleeve outer wall be equipped with respectively with first sleeve coaxial first preceding annular arch, first middle annular arch and first back annular arch, just first preceding annular arch with first back annular arch sets up respectively first telescopic both ends, first middle annular arch is located first preceding annular arch with between the first back annular arch, first preceding annular arch is close to first PZT excellent tip sets up, first preceding annular arch with fixed frame can dismantle the connection, just first elastic element passes first preceding annular arch, just first elastic element's one end with first middle annular arch can dismantle the connection, first back annular arch with the connection can be dismantled to first end cover.

7. The multi-dimensional nano-displacement device of claim 6, wherein: the head end of the first PZT rod is in threaded connection with one end of a first ejector, the other end of the first ejector is hemispherical and is in contact with the movable frame, the movable frame is provided with a first gasket at a position corresponding to the first ejector, one side of the first gasket, which is far away from the first ejector, is provided with a first positioning pin, the movable frame is provided with a first positioning hole at a position corresponding to the first positioning pin, and the first positioning pin is connected with the first positioning hole;

8. The multi-dimensional nano-displacement device of claim 4, wherein: the second driving device comprises a second PZT rod, a second sleeve and a second end cover, the second sleeve is sleeved on the periphery of the second PZT rod, two ends of the second sleeve are both opened, one end of the second sleeve is detachably connected with the mobile station, the other end of the second sleeve sequentially penetrates through the mobile frame and the fixed frame and is detachably connected with the second end cover, the second end cover is arranged close to the tail end of the second PZT rod, a second adjusting component is arranged on the second end cover and is connected with the tail end of the second PZT rod and used for adjusting the initial pre-tightening of the second PZT rod, and the head end of the second PZT rod can push the mobile station to move; the PZT rod is characterized by further comprising a second elastic element, one end of the second elastic element is detachably fixed in the middle of the outer side wall of the second sleeve, the other end of the second elastic element penetrates through the side wall of the mobile platform and is detachably fixed on the mobile platform, the second elastic element is parallel to the second PZT rod, and the telescopic amount of the second elastic element is adjustable.

9. The multi-dimensional nano-displacement device of claim 8, wherein: the second sleeve outer wall be equipped with respectively with annular arch, the annular arch in the second and the annular arch behind the second before the coaxial second of second sleeve, just annular arch before the second with annular arch sets up respectively behind the second the telescopic both ends of second, annular arch locates in the second annular arch before the second with between the annular arch behind the second, annular arch is close to before the second PZT excellent tip sets up, annular arch before the second with the connection can be dismantled to the travelling platform, just second elastic element passes annular arch before the second, just second elastic element's one end with annular arch in the second can be dismantled and be connected, annular arch behind the second with the connection can be dismantled to the second end cover.

10. The multi-dimensional nano-displacement device of claim 9, wherein: the head end of the second PZT rod is in threaded connection with one end of a second top head, the other end of the second top head is hemispherical and is in contact with the mobile platform, the mobile platform is provided with a second gasket at a position corresponding to the second top head, one side of the second gasket, which is far away from the second top head, is provided with a second positioning pin, the mobile platform is provided with a second positioning hole at a position corresponding to the second positioning pin, and the second positioning pin is connected with the second positioning hole;