CN212205588U

CN212205588U - Sealed baking oven for baking and curing chip welding

Info

Publication number: CN212205588U
Application number: CN202022692321.6U
Authority: CN
Inventors: 赵永先; 张延忠; 邓燕
Original assignee: Beijing Torch Weiye Technology Co ltd
Current assignee: Beijing Torch Weiye Technology Co ltd
Priority date: 2020-11-20
Filing date: 2020-11-20
Publication date: 2020-12-22
Anticipated expiration: 2030-11-20

Abstract

The application discloses a sealed baking oven for chip welding baking and curing, which comprises a frame; one or more furnace bodies; the furnace body is arranged on the frame; the furnace body is provided with an opening, and a gas interface for inflating or exhausting is arranged on the furnace body; the lifting components can be movably arranged on the two sides of the frame or the furnace body; the door body is movably connected with the lifting part; the locking mechanism is respectively connected with the door body and the lifting component and has an extension state and a retraction state; in the retraction state, the door body is tightly pressed on the furnace body to seal the opening; and under the extension state, the door body is separated from the furnace body. The double-layer structure provided by the application has the advantages that the occupied area is reduced, and the space utilization rate is high; the doors of the two furnace bodies are opened in opposite directions, the opening is not interfered with each other, and a robot can be used for loading and unloading materials; a plurality of circular arcs can be distributed; the door structure translation contains hold-down mechanism, is fit for being used for the sealed oven that toasts of chip welding toasts and solidification and uses.

Description

Sealed baking oven for baking and curing chip welding

Technical Field

The utility model relates to a semiconductor industry is used for the sealed equipment technical field of chip bonding, toasts and solidification, especially relates to a sealed oven that toasts that is used for chip bonding, toasts and solidification.

Background

The existing sealed baking oven for chip welding baking and curing mostly adopts a structure of an upward-lifting door, a vertical hinged door and the like, so that the occupied space for opening the door when the chip enters a warehouse is large. And the single cavity exists mostly, the door is opened and closed manually, the function is single, it is difficult to meet the requirement of processing products of various processes simultaneously, two devices are needed to be purchased as two products are processed simultaneously, the cost is higher, and the space utilization rate is not high. At present, a single cavity is mostly used, a plurality of devices are used simultaneously, the occupied area of the devices is large, and the space utilization rate is not high.

The door is arranged at the top of the vacuum cavity and is hinged with the box body, and the door can be lifted upwards manually or automatically. The door is lifted upwards, so that the size of the upper opening of the equipment is occupied, and the product input efficiency is influenced.

The vertical hinged door structure is characterized in that the door is arranged on any side of the periphery of the cavity, the door is hinged with the cavity in the vertical direction, and the door can be horizontally pulled open. The vertical hinged door structure is mostly opened manually. The vertical hinged door occupies the space of the input opening, the radius of the door is large when the door is opened, the clearance is large for automatic feeding and discharging equipment, and the automatic feeding and discharging time is prolonged.

The vertical lifting door structure is mainly used for on-line transmission equipment. The door structure is arranged on the side vertical surface of the cavity, the door can be automatically and vertically opened, and the gate valve structure is mostly used.

The hinge parts of the vertical hinged door and the upward-lifting door are pressed tightly, the far-end door is tilted, and a pressing device is additionally arranged; the vertical lift gate structure is used for automatic transmission equipment. The problems of deviation and the like exist in heavy-load and high-precision product investment.

And above-mentioned door structure is mostly manual switch door, is difficult in producing the line butt joint and realizes the automated production of chip.

Disclosure of Invention

The utility model provides a sealed oven that toasts that is used for chip bonding to toast and solidification satisfies the product of the multiple technology of simultaneous processing to area is less, and space utilization is high.

The above and other objects are achieved by the features of the independent claims. Further implementations are presented in the dependent claims, the description and the drawings.

The application provides a sealed oven that toasts and solidifies for chip bonding, includes:

a frame;

one or more furnace bodies; the furnace body is arranged on the frame; the furnace body is provided with an opening, and a gas interface for inflation or air extraction is also arranged on the furnace body;

the lifting components can be movably arranged on the two sides of the frame or the furnace body;

the door body is movably connected with the lifting part;

the locking mechanism is respectively connected with the door body and the lifting component and has an extension state and a retraction state; in the retraction state, the door body is tightly pressed on the furnace body to seal the opening; and under the extension state, the door body is separated from the furnace body.

In the above scheme, the door body of the furnace body is opened and closed in a lifting mode through the lifting part, so that the floor area can be reduced, and the space utilization rate is high. The extension and the contraction of the door body of the furnace body through the locking mechanism compress and seal the opening of the furnace body, the sealing effect is good, and the damage to the opening and a sealing ring arranged on the opening can not be caused when the door body is opened and closed. When two furnace bodies are arranged on the same frame, the occupied area can be reduced, and the space utilization rate is high.

In one possible embodiment, the locking mechanism comprises a first mounting seat, a second mounting seat and a telescopic part;

the first mounting seat is connected with the lifting component, the second mounting seat is connected with the door body, and two ends of the telescopic component are hinged to the first mounting seat and the second mounting seat respectively.

In the above scheme, the locking mechanism connects the door body and the lifting part through the mounting seat, so that the connection is stable, the structure is simple, and the tightness is convenient.

In one possible embodiment, a first connector and a second connector are included;

one end of the first connecting piece is rotatably connected with the lifting part, and the other end of the first connecting piece is rotatably connected with the door body;

one end of the second connecting piece is rotatably connected with the lifting part, and the other end of the second connecting piece is rotatably connected with the door body.

In the above scheme for it is rotatable between door and the lift portion, impel and to realize compressing tightly of the door body and loosen through the telescopic link, simple structure and durable.

In a possible embodiment, the door body comprises a main plate body and two lug parts arranged on two sides of the main plate body;

the second mount pad sets up on the lug portion, the mainboard body is used for sealing the opening.

In the scheme, the lugs are connected and installed with other structures, so that the overall structure of the door body is ensured, the firmness of the door body is improved, and the installation and connection are more convenient.

In one possible embodiment, a groove is arranged on the furnace body around the opening; and a sealing ring is arranged on the groove.

In the scheme, the sealing performance of the door body is improved.

In a possible embodiment, the furnace further comprises a lifting device, and the lifting part is arranged on the furnace body;

the lifting device is in transmission connection with the lifting component to drive the lifting component and the door body to move up and down.

In the scheme, the door body is opened and closed through lifting.

In a possible embodiment, the lifting device comprises a driving motor and a lead screw in transmission connection with the driving motor;

the lifting component is provided with a nut seat, and the screw rod is in threaded connection with the nut seat.

In the scheme, the screw motor structure is adopted for lifting, so that the structure is simple and convenient to maintain. In one possible embodiment, a first installation body and a second installation body are respectively arranged on two sides of the furnace body;

the driving motor is arranged on the first installation body, a first rotating wheel is arranged in the first installation body, a second rotating wheel is arranged in the second installation body, and the first rotation and the second rotation are in transmission connection through a transmission component;

an output shaft of the motor is connected with the first rotating wheel;

the lead screw comprises a first lead screw and a second lead screw;

the first lead screw is connected with the first rotating wheel or the output shaft of the motor; the second lead screw is connected with the second rotating wheel.

In the above scheme, the two screw rods lift the door body, so that the lifting is more stable, and the door body cannot be inclined.

In a possible embodiment, a supporting seat is arranged on the furnace body, and the tail end of the lead screw extends to the supporting seat.

In the above scheme, set up the supporting seat and be connected with the furnace body, stabilize the lead screw, make the structure more firm.

In one possible embodiment, the furnace comprises a first furnace body and a second furnace body which are arranged up and down;

the lifting device of the first furnace body can drive the door body of the first furnace body to move towards one side departing from the second furnace body so as to open the opening of the first furnace body; the lifting device of the second furnace body can drive the door body of the second furnace body to move towards one side departing from the first furnace body so as to open the opening of the second furnace body.

In the above scheme, the upper door is opened in an upward translation mode, the lower door is opened in a downward translation mode, the two doors are opened without mutual interference, and loading and unloading can be achieved through a robot.

The technical scheme that this application provided has following beneficial effect:

1. the double-layer structure reduces the occupied area and has high space utilization rate;

2. the two furnace bodies are in a double-layer structure, and the doors of the two furnace bodies are opened in a translation manner in opposite directions without mutual interference;

3. the two doors are not interfered with each other when opened, and can be loaded and unloaded by a robot;

4. a plurality of circular arcs can be distributed, a plurality of feeding and discharging mechanisms are used, and the efficiency is higher;

5. the door structure translation contains hold-down mechanism, is fit for being used for the sealed oven that toasts of chip welding toasts and solidification and uses.

Drawings

FIG. 1 is a schematic structural view of a sealed bake oven for die bonding bake and cure as provided herein;

FIG. 2 is a schematic structural diagram of a furnace body of the sealed baking oven for die bonding baking and curing provided in the present application;

FIG. 3 is a schematic structural view of a door body of a sealed baking oven for baking and curing of die bonding provided herein;

FIG. 4 is a schematic structural diagram of a latching mechanism of the sealed bake oven for die bonding bake and cure as provided herein;

FIG. 5 is a schematic structural diagram of a lifting device of the sealed baking oven for die bonding baking and curing provided in the present application;

FIG. 6 is a schematic diagram of the overall structure of a set of sealed bake ovens for die bonding bake and cure provided herein;

FIG. 7 is a latching mechanism compression diagram of the latching mechanism of the sealed bake oven for die bonding bake and cure as provided herein;

FIG. 8 is a latch mechanism disengaged state view of the latch mechanism of the sealed bake oven for die bonding bake and cure as provided herein;

fig. 9 is a state locking mechanism separation and door opening diagram of the locking mechanism of the sealed baking oven for chip bonding baking and curing provided by the present application.

Reference numerals:

the furnace body comprises a frame 1, a slide rail 11, an installation back plate 12, a furnace body 2, a sealing ring 21, a door body 3, a first connecting piece 31, a second connecting piece 32, a lug 33, an observation window 34, a slide block 35, a lifting component 4, a locking mechanism 5, a first installation seat 51, a second installation seat 52, a telescopic component 53, a lifting device 6, a lead screw 61, a driving motor 62, a first installation body 63, a second installation body 64, a transmission component 65, a nut seat 66 and a supporting seat 67.

In order to more clearly illustrate the technical solutions of the embodiments of the present application, the drawings used in the description of the embodiments of the present application will be briefly introduced below; the accompanying drawings, which are included to provide a further understanding of the application and are incorporated in and constitute a part of this application, illustrate embodiment(s) of the application and together with the description serve to explain the application and not to limit the application.

Detailed Description

The technical solutions in the embodiments of the present application will be clearly and completely described below with reference to the drawings in the embodiments of the present application, and it is obvious that the described embodiments are some, but not all, embodiments of the present application. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present application.

The terminology used in the embodiments of the present application is for the purpose of describing particular embodiments only and is not intended to be limiting of the application. As used in the examples of this application and the appended claims, the singular forms "a", "an", and "the" are intended to include the plural forms as well, unless the context clearly indicates otherwise.

It should be understood that the term "and/or" as used herein is merely one type of association that describes an associated object, meaning that three relationships may exist, e.g., a and/or B may mean: a exists alone, A and B exist simultaneously, and B exists alone. In addition, the character "/" herein generally indicates that the former and latter related objects are in an "or" relationship.

It should be noted that the terms "upper", "lower", "left", "right", and the like used in the embodiments of the present application are described in terms of the angles shown in the drawings, and should not be construed as limiting the embodiments of the present application. In addition, in this context, it will also be understood that when an element is referred to as being "on" or "under" another element, it can be directly on "or" under "the other element or be indirectly on" or "under" the other element via an intermediate element.

The embodiment of the application provides a sealed oven that toasts and solidifies for chip bonding, can solve above-mentioned technical problem.

Example one

Referring to fig. 1-9, the present embodiment provides a sealed bake oven for die bonding bake and cure, comprising: the furnace comprises a frame 1, one or more furnace bodies 2, a lifting part 4, a door body 3 and a locking mechanism 5, wherein the furnace bodies 2 are arranged on the frame 1; the furnace body 2 is provided with an opening, and the furnace body 2 is also provided with a gas interface for inflation or air extraction; the lifting part 4 can be movably arranged on two sides of the frame 1 or the furnace body 2, and the door body 3 is movably connected with the lifting part 4; the locking mechanism 5 is respectively connected with the door body 3 and the lifting component 4, and the locking mechanism 5 has an extension state and a retraction state; in the retraction state, the door body 3 is tightly pressed on the furnace body 2 to seal the opening; in the extended state, the door 3 is separated from the furnace body 2. The door body of the furnace body is opened and closed in a lifting mode through the lifting part, so that the floor area can be reduced, and the space utilization rate is high. The extension and the contraction of the door body of the furnace body through the locking mechanism compress and seal the opening of the furnace body, the sealing effect is good, and the damage to the opening and a sealing ring arranged on the opening can not be caused when the door body is opened and closed. When two furnace bodies are arranged on the same frame, the occupied area can be reduced, and the space utilization rate is high. Furthermore, an observation window 34 is formed on the door body 3, and pressure-resistant glass is arranged on the observation window 34.

In a possible embodiment, said locking mechanism 5 comprises a first mounting seat 51, a second mounting seat 52 and a telescopic member 53; the first installation seat 51 is connected to the lifting component 4, the second installation seat 52 is connected to the door body 3, and two ends of the telescopic component 53 are respectively hinged to the first installation seat 51 and the second installation seat 52. The locking mechanism 5 connects the door body 3 and the lifting component 4 through the mounting seat, and has the advantages of stable connection, simple structure and convenient tightness. Further, locking mechanism 5 can be including two locking mechanism 5 of symmetry setting for locking is more stable, can not produce the both sides elasticity not different. The telescopic member 53 may be a telescopic cylinder or an electric telescopic rod.

In a possible embodiment, a first connector 31 and a second connector 32 are included; one end of the first connecting piece 31 is rotatably connected with the lifting part 4, and the other end is rotatably connected with the door body 3; one end of the second connecting piece 32 is rotatably connected with the lifting component 4, and the other end is rotatably connected with the door body 3. Make between door and the lift portion rotatable, impel and to realize compressing tightly and loosening of the door body 3 through the telescopic link, simple structure and durable. Further, can be symmetrical including two first connecting pieces 31 and two second connecting pieces 32, set up two first connecting pieces 31 and two second connecting pieces 32, make to compress tightly more stable, door body 3 can not be crooked.

In a possible embodiment, the door body 3 comprises a main plate body and two lugs 33 arranged on two sides of the main plate body; the second mounting seat 52 is provided on the boss 33 portion, and the main plate body is used for sealing the opening. The lugs 33 are connected and installed with other structures, so that the integral structure of the door body 3 is ensured, the firmness of the door body 3 is improved, and the installation and connection are more convenient.

In a possible embodiment, to increase the tightness of the door 3. A groove is arranged on the furnace body 2 around the opening; a sealing ring 21 is arranged on the groove.

In a possible embodiment, the furnace further comprises a lifting device 6, wherein the lifting part 4 is arranged on the furnace body 2;

the lifting device 6 is in transmission connection with the lifting component 4 to drive the lifting component 4 and the door body 3 to move up and down. The opening and closing of the door body 3 are realized by lifting the door body 3.

In a possible embodiment, the lifting device 6 comprises a driving motor 62 and a lead screw 61 in transmission connection with the driving motor 62; the lifting component 4 is provided with a nut seat 66, and the screw rod 61 is connected with the nut seat 66 through screw threads. The screw 61 motor structure is adopted for lifting, and the structure is simple and easy to maintain.

In a possible embodiment, a sliding rail 11 is arranged on the frame 1 along the movement track of the lifting mechanism, and a sliding block 35 adapted to the sliding rail 11 is arranged on the lifting mechanism. The slide rail 11 is mounted on the frame 1 through a mounting back plate 12.

In a possible embodiment, a first installation body 63 and a second installation body 64 are respectively arranged on two sides of the furnace body 2; the driving motor 62 is mounted on the first mounting body 63, a first rotating wheel is arranged in the first mounting body 63, a second rotating wheel is arranged in the second mounting body 64, and the first rotation and the second rotation are in transmission connection through a transmission component 65; an output shaft of the motor is connected with the first rotating wheel; the lead screw 61 comprises a first lead screw 61 and a second lead screw 61; the first lead screw 61 is connected with the first rotating wheel or the output shaft of the motor; the second lead screw 61 is connected with the second rotating wheel. Two lead screws 61 go up and down to door body 3, make to go up and down more stable, door body 3 can not crooked. The transmission part 65 is a transmission synchronous chain or a transmission synchronous belt, and connects two synchronous wheels in the installation body, so that the synchronous wheels drive the two lead screws 61 to synchronously rotate, thereby driving the two sides of the door body 3 to synchronously move in the same direction. Preferably, the screw 61 is a ball screw 61.

In a possible embodiment, a support seat 67 is provided on the furnace body 2, and the end of the screw 61 extends to the support seat 67. Set up supporting seat 67 and be connected with furnace body 2, stabilize screw 61, make the structure more firm.

In a possible embodiment, the furnace body 2 can be arranged horizontally, vertically or at an angle, and preferably comprises a first furnace body 2 and a second furnace body 2 arranged vertically. The door 3 can be opened and closed horizontally, opened and closed up and down or opened and closed at a certain angle with the furnace body 2, preferably, the lifting device 6 of the first furnace body 2 can drive the door 3 of the first furnace body 2 to move back to one side away from the second furnace body 2 so as to open the opening of the first furnace body 2; the lifting device 6 of the second furnace body 2 can drive the door body 3 of the second furnace body 2 to move towards one side away from the first furnace body 2 so as to open the opening of the second furnace body 2. The upper door is opened by upward translation, the lower door is opened by downward translation, the two doors are opened without mutual interference, and the robot can be used for loading and unloading.

When the device is opened, the cylinder (containing a position switch for judging the compression and separation of the door) is in a push-out state, and at the moment, the door is separated from the cavity (the high position and the low position of the door are both provided with the position switches for detecting the position of the door), as shown in the figures 7-9: the vertical lifting system works, and the front door is lifted or lowered to realize door opening operation; taking the above cavity as an example, the open state is shown in fig. 9; if the door is closed, the vertical lifting system is started, and the air cylinder retracts from the state shown in the figure 9 to the state shown in the figure 8, so that the pre-pressing state is realized, and the sealing effect is achieved.

While the present embodiments have been described with reference to the accompanying drawings, it is to be understood that the invention is not limited to the precise embodiments described above, which are meant to be illustrative and not restrictive, and that various changes may be made therein by those skilled in the art without departing from the spirit and scope of the invention as defined by the appended claims.

Claims

1. A sealed bake oven for die bonding bake and cure, comprising:

a frame;

the door body is movably connected with the lifting part;

2. The sealed bake oven for die bonding bake and cure according to claim 1, wherein said latching mechanism comprises a first mount, a second mount and a telescoping member;

3. The sealed bake oven for die bonding bake and cure according to claim 2, comprising a first link and a second link;

4. The sealing oven for chip bonding baking and curing according to claim 3, wherein the door body comprises a main plate body and two lug parts arranged on two sides of the main plate body;

5. The sealed baking oven for baking and curing of die bonding as claimed in claim 4, wherein a groove is provided on the oven body around the opening; and a sealing ring is arranged on the groove.

6. The sealed baking oven for die bonding baking and curing of claim 5 further comprising a lifting device, wherein said lifting member is disposed on said oven body;

7. The sealed baking oven for die bonding baking and curing of claim 6 wherein said lifting device comprises a driving motor and a lead screw in driving connection with said driving motor;

8. The sealed baking oven for chip bonding baking and curing as claimed in claim 7, wherein the oven body is provided with a first mounting body and a second mounting body at two sides thereof;

an output shaft of the motor is connected with the first rotating wheel;

the lead screw comprises a first lead screw and a second lead screw;

9. The sealed baking oven for die bonding baking and curing of claim 8, wherein the oven body is provided with a support base, and the end of the lead screw extends to the support base.

10. The sealing baking oven for chip bonding baking and curing as claimed in claim 9, comprising a first oven body and a second oven body disposed above each other;