CN212167999U - Special shower nozzle device of phosphorus boron paper membrane shaping - Google Patents

Special shower nozzle device of phosphorus boron paper membrane shaping Download PDF

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Publication number
CN212167999U
CN212167999U CN202020682982.8U CN202020682982U CN212167999U CN 212167999 U CN212167999 U CN 212167999U CN 202020682982 U CN202020682982 U CN 202020682982U CN 212167999 U CN212167999 U CN 212167999U
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China
Prior art keywords
emulsion
workbin
phosphorus
nozzle device
connecting pipe
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Active
Application number
CN202020682982.8U
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Chinese (zh)
Inventor
汪良恩
王锡康
姜兰虎
乔建明
王桂芝
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Shandong Xinyuan Microelectronics Co ltd
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Shandong Xinyuan Microelectronics Co ltd
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Priority to CN202020682982.8U priority Critical patent/CN212167999U/en
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Abstract

The utility model discloses a special nozzle device for forming a phosphorus-boron paper film, which mainly relates to the technical field of forming equipment for producing the phosphorus-boron paper film, and comprises a bracket, wherein a rotating motor is arranged in the middle of the upper part of the bracket, feed boxes are arranged at two ends of the bracket, the bottom of the rotating motor is connected with a spiral conveying shaft, the upper end of the spiral conveying shaft is connected with the top end of a feed box through a seal bearing, the bottom end of the spiral conveying shaft is deep into a nozzle at the bottom of the feed box, the bottom of the feed box is connected with the feed box through a connecting pipe, an emulsion conveying pump is arranged at the end of the connecting pipe close to the feed box, an emulsion flow pipe is arranged at the end of the connecting pipe close to the feed box, a snowflake defoaming needle in the emulsion flow pipe at the feed box end is contacted with micro bubbles in emulsion, the needle point on the snowflake structure of the defoaming needle is, the discharging is more uniform, the product percent of pass is integrally improved, and the production efficiency is improved.

Description

Special shower nozzle device of phosphorus boron paper membrane shaping
Technical Field
The utility model mainly relates to the technical field of phosphorus boron paper film production and forming equipment, in particular to a special spray head device for forming phosphorus boron paper films.
Background
Semiconductor materials are the main materials of microelectronic and optoelectronic devices, especially the integration of components on large-scale integrated circuit chips is higher and higher, the size of the components is smaller and smaller, and semiconductor films are the basic materials for forming such devices. The semiconductor film is mainly a film-shaped diffusion source containing phosphorus and boron, but the production of the film-shaped diffusion source is difficult, the mixed materials are all emulsion, the emulsion needs to be sprayed on a flat roller through a spray head, in order to ensure the product percent of pass of the phosphorus-boron paper film, the spray head needs to fully and continuously spray the emulsion, but in the actual production process, the spray head is directly provided with a liquid outlet nozzle, on one hand, the thickness of the phosphorus-boron paper film is enabled to be uneven, on the other hand, the production efficiency is seriously influenced because bubbles do not exist in the stirring in the charging basket completely.
SUMMERY OF THE UTILITY MODEL
In view of the defects in the prior art, the present invention provides a special nozzle device for forming a phosphorus-boron paper film.
In order to solve the technical problem, the utility model discloses a following technical scheme: the utility model provides a special shower nozzle device of phosphorus boron paper membrane shaping which characterized in that: including the support be equipped with in the middle of the support upper portion and rotate motor, both ends and be equipped with the workbin, rotate the motor bottom and connect the auger delivery axle, auger delivery epaxial end is connected through sealed bearing and is spouted workbin top, auger delivery axle bottom and go deep nozzle department of spouting workbin bottom, the workbin bottom is connected through the connecting pipe and is spouted the workbin the connecting pipe be close to the workbin end and be equipped with the emulsion delivery pump the connecting pipe be close to spout workbin end and be equipped with the emulsion flow tube.
As a further improvement of the utility model, the material spraying box is in an inverted 'article' shape.
As a further improvement of the utility model, the inner pipe wall of the emulsion flow pipe is provided with the defoaming needles distributed with equal-distance powder, and the defoaming needles are contacted with micro bubbles in the emulsion.
As a further improvement of the utility model, the end part of the defoaming needle is in a snowflake shape, and the needle point on the snowflake structure of the defoaming needle is fully contacted with the air bubble, so that the air bubble is punctured.
Compared with the prior art, the utility model discloses the beneficial effect who has does: the utility model discloses in, the snow form defoaming needle in the emulsion flow tube through spraying case end contacts with the microbubble in the emulsion, and the structural needle point of defoaming needle snow fully contacts with the bubble for the bubble is punctured, rotates the continuous extrusion of motor control auger delivery axle with the emulsion and reaches nozzle department, makes the ejection of compact more even, has wholly improved the product percent of pass, has improved production efficiency.
Drawings
The invention will be further described with reference to the accompanying drawings:
FIG. 1 is a schematic structural view of a special nozzle device for forming a phosphorus-boron paper film of the present invention;
FIG. 2 is a schematic structural view of the emulsion flow tube of the present invention;
in the figure: the device comprises a support 1, a rotating motor 2, a feed box 3, an emulsion delivery pump 4, a connecting pipe 5, an emulsion flow pipe 6, a spray box 7, a spiral delivery shaft 8, a nozzle 9, a sealing bearing 10 and a defoaming needle 11.
Detailed Description
In order to make the technical solution and the advantageous effects of the present invention more clear, the present invention will be further described in detail with reference to the following embodiments.
Fig. 1 is the utility model relates to a special shower nozzle device of phosphorus boron paper membrane shaping's structural schematic diagram, including support 1 be equipped with in the middle of the 1 upper portion of support and rotate motor 2, both ends and be equipped with workbin 3, rotate 2 bottoms of motor and connect auger delivery axle 8, auger delivery axle 8 upper ends are connected 7 tops of spout workbin, auger delivery axle 8 bottoms through sealed bearing 10 and are deepened the nozzle 9 department of 7 bottoms of spout workbin, spout workbin 7 is connected through connecting pipe 5 in 3 bottoms of workbin 5 the workbin 3 ends that are close to of connecting pipe 5 are equipped with emulsion delivery pump 4 connecting pipe 5 is close to spout workbin 7 ends and is equipped with emulsion flow tube 6, spout workbin 7 one-tenth "article" font.
Fig. 2 is the utility model discloses emulsion flow tube's structural schematic the inside pipe wall of emulsion flow tube 6 is equipped with the defoaming needle 11 that the equidistance powder distributes, and defoaming needle 11 contacts with the microbubble in the emulsion, 11 tip one-tenth snowflake of defoaming needle, 11 structural needle points of snowflake of defoaming needle fully contact with the bubble for the bubble is punctured.
The utility model discloses in, the emulsion in the agitator tank flows into the workbin 3 that 1 both ends of support were equipped with under the control of solenoid valve, and sufficient emulsion is saved in the transition, and emulsion delivery pump 4 through workbin 3 bottoms carries the emulsion through connecting pipe 5 in spouting workbin 7, and the microbubble in 11 and the emulsion that disappears in the emulsion flow tube 6 through spouting workbin 7 ends contacts, 11 tip one-tenth snowflake of the defoaming needle, and the needle point on 11 snowflake column structures of the defoaming needle fully contacts with the bubble for the bubble is punctured, spouts the emulsion in the workbin 7 and rotates motor 2 effect down, and auger delivery axle 8 extrudes nozzle 9 department with the emulsion constantly, makes the ejection of compact more even.
In the description of the present invention, it is to be noted that, unless otherwise explicitly specified or limited, the terms "mounted," "connected," and "connected" are to be construed broadly, and may be, for example, fixedly connected, detachably connected, or integrally connected; can be mechanically or electrically connected; they may be connected directly or indirectly through intervening media, or they may be interconnected between two elements. The specific meaning of the above terms in the present invention can be understood in specific cases to those skilled in the art. It should be understood that the detailed description and specific examples, while indicating the invention, are given by way of illustration only, not by way of limitation, since other embodiments will become apparent to those skilled in the art upon consideration of the following detailed description of the invention without any creative effort.

Claims (4)

1. The utility model provides a special shower nozzle device of phosphorus boron paper membrane shaping which characterized in that: including support (1) be equipped with in the middle of support (1) upper portion and rotate motor (2), both ends and be equipped with workbin (3), rotate motor (2) bottom and connect auger delivery axle (8), auger delivery axle (8) upper end is connected through sealed bearing (10) and is spouted workbin (7) top, auger delivery axle (8) bottom and gos deep nozzle (9) department of spouting workbin (7) bottom, workbin (3) bottom is connected through connecting pipe (5) and is spouted workbin (7) end being close to of connecting pipe (5) is equipped with emulsion delivery pump (4) the end of being close to of connecting pipe (5) is equipped with emulsion flow tube (6) spout workbin (7).
2. The special nozzle device for forming the phosphorus-boron paper film according to claim 1, wherein: the spraying box (7) is in an inverted 'product' shape.
3. The special nozzle device for forming the phosphorus-boron paper film according to claim 1, wherein: the inner pipe wall of the emulsion flow pipe (6) is provided with defoaming needles (11) distributed with equal distance powder, and the defoaming needles (11) are contacted with micro-bubbles in the emulsion.
4. The special nozzle device for forming the phosphorus-boron paper film according to claim 3, wherein: the end part of the defoaming needle (11) is in a snowflake shape, and the needle point on the snowflake structure of the defoaming needle (11) is fully contacted with the air bubbles, so that the air bubbles are punctured.
CN202020682982.8U 2020-04-29 2020-04-29 Special shower nozzle device of phosphorus boron paper membrane shaping Active CN212167999U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN202020682982.8U CN212167999U (en) 2020-04-29 2020-04-29 Special shower nozzle device of phosphorus boron paper membrane shaping

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN202020682982.8U CN212167999U (en) 2020-04-29 2020-04-29 Special shower nozzle device of phosphorus boron paper membrane shaping

Publications (1)

Publication Number Publication Date
CN212167999U true CN212167999U (en) 2020-12-18

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CN202020682982.8U Active CN212167999U (en) 2020-04-29 2020-04-29 Special shower nozzle device of phosphorus boron paper membrane shaping

Country Status (1)

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CN (1) CN212167999U (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN114055750A (en) * 2021-11-08 2022-02-18 江西省正百科技有限公司 Can eliminate column organic glass raw materials extrusion device of bubble

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN114055750A (en) * 2021-11-08 2022-02-18 江西省正百科技有限公司 Can eliminate column organic glass raw materials extrusion device of bubble

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