CN212152429U - Thermal-expansion-resistant flexible connecting wire for magnetic deflection electron beam evaporation source - Google Patents
Thermal-expansion-resistant flexible connecting wire for magnetic deflection electron beam evaporation source Download PDFInfo
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- CN212152429U CN212152429U CN202020334403.0U CN202020334403U CN212152429U CN 212152429 U CN212152429 U CN 212152429U CN 202020334403 U CN202020334403 U CN 202020334403U CN 212152429 U CN212152429 U CN 212152429U
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Abstract
The utility model provides a flexible connecting lead for a thermal expansion resistant magnetic deflection electron beam evaporation source, which comprises a metal tube terminal (1), a plurality of flexible leads (2) and a torsional spring terminal (3); the metal pipe terminal (1) is in compression joint with one end of the flexible leads (2); and the torsional spring terminal (3) is in compression joint with the other ends of the flexible leads (2). The utility model has the advantages that: on the premise of low cost, the electron gun and the key parts thereof can be prevented from displacing when the magnetic deflection electron beam evaporation source operates, high-voltage arc discharge is avoided, the reliability of the product is improved, the service life of the equipment is prolonged, and the use cost is reduced.
Description
Technical Field
The utility model relates to a magnetic deflection electron beam evaporation source's key parts field, in particular to thermal expansion resistant's flexible coupling wire for magnetic deflection electron beam evaporation source.
Background
The magnetic deflection electron beam source is an evaporation source which is installed in a vacuum cavity and uses deflection electron beams to heat materials to realize evaporation. The method is widely used for preparing high-purity thin film materials, and is applied to scientific research or production of integrated circuits or functional devices and the like. Features that the filament is not seen by beam current and its service life is long.
When the magnetic deflection electron beam evaporation source works, the temperature of the target material can reach more than 3000 ℃, and the electron emitter is also at a high temperature of more than 2000 ℃, so that the electron emitter and the lead wire connected with the electron emitter are caused to generate thermal expansion. In order to accelerate the electrons to 107The speed of m/s order of magnitude is deflected to a preset path in the magnetic field, and the electron emitter and the lead wire connected with the electron emitter are required to bear negative high voltage. However, the thermal expansion of the wire caused by high temperature during operation can cause the displacement of the electron emitter, thereby causing high-voltage arc discharge and having high failure rate.
In order to solve the problem of failure rate increase caused by thermal expansion, except for a method for fixing a reinforced electron emitter, starting from a lead connected with the reinforced electron emitter, an OT type cold-pressed terminal is used for connecting a hard lead and a filament base conventionally, although the method has a simple structure, the lead has certain hardness, so that the installation is inconvenient, and the contact resistance is large; the other method is to machine threads at the end of the hard wire and to make threaded hole connection on the filament base to reduce the assembly space, and the method is generally applied to compact magnetic deflection electron beam evaporation sources and the like arranged on CF35 or CF63 flanges, however, because the electron emitter is in high temperature during operation, the threaded connection has the possibility of loosening, and the single hard wire has the problem of metal fatigue. In addition, all hard wire connections suffer from stress problems caused by thermal expansion, and to address this problem, the prior art typically twists the hard wire out of a loop to counteract the thermal expansion. However, the current flowing through the heating filament in the lead wire can generate a strong interference magnetic field, which has the problem of influencing the electron beam track, and the metal fatigue at the bent part of the loop structure is serious, and the local temperature is high. Meanwhile, the filament base of the electron emitter is lengthened, so that the temperature of heat conducted to the lead wires is lowered, however, the electron emitter needs to be high temperature resistant and is generally made of expensive refractory metal (commonly used as Mo metal), and the lengthening of the filament base causes increased material consumption and increased cost.
Therefore, there is a need in the market for a device that can avoid the displacement of the electron gun and its key components during the operation of the magnetic deflection electron beam evaporation source and avoid the high voltage arc discharge on the premise of low cost, thereby improving the reliability of the product, prolonging the service life of the device and reducing the use cost.
SUMMERY OF THE UTILITY MODEL
In order to solve the above technical problem, the utility model discloses a thermal expansion resistant magnetic deflection electron beam evaporation source uses flexible connection wire, the technical scheme of the utility model is implemented like this:
a thermal expansion resistant flexible connecting wire for a magnetic deflection electron beam evaporation source is characterized in that: the flexible cable comprises a metal tube terminal (1), a plurality of flexible leads (2) and a torsion spring terminal (3); the metal pipe terminal (1) is in compression joint with one end of the flexible leads (2); and the torsional spring terminal (3) is in compression joint with the other ends of the flexible leads (2).
Preferably, the plurality of flexible wires (2) are helically wound.
Preferably, the metal pipe terminal (1) is provided with a hole.
Preferably, the material of the flexible wires (2) is selected from one of Au, Ag, Be and Cu.
Preferably, the metal pipe terminal (1) is made of the same material as the flexible leads (2); the torsion spring terminal (3) is made of the same material as the flexible leads (2).
Preferably, the diameter of the flexible wires (2) is 0.5mm, and the number of the flexible wires (2) is 19.
Preferably, the diameter of the flexible wires (2) is 0.2mm, and the number of the flexible wires (2) is 49.
Preferably, the plurality of flexible wires (2) are externally provided with insulating ceramics.
An evaporation source, includes electron gun (6), magnet and crucible, its characterized in that: the electron gun (6) is powered by using the thermal expansion resistant magnetic deflection electron beam evaporation source through flexible connecting wires.
By implementing the technical scheme of the utility model, the technical problem that the prior art can not solve the technical problem that the product reliability is poor due to high-voltage arc discharge caused by the heating displacement of the electron gun of the magnetic deflection electron beam evaporation source and key parts thereof on the premise of low cost; implement the technical scheme of the utility model, can realize the displacement of electron gun and key part when alright avoid the function of magnetic deflection electron beam evaporation source under low cost's prerequisite, avoid high-voltage arc discharge, and then improve product reliability, improve equipment's life-span, reduce use cost's technological effect.
Drawings
In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings required for the description of the embodiments or the prior art will be briefly described below, and it should be apparent that the drawings in the following description are only examples of the soft connection lead for the magnetic deflection electron beam evaporation source with thermal expansion resistance of the present invention, and for those skilled in the art, other drawings can be obtained according to the drawings without creative efforts.
FIG. 1 is a schematic diagram showing a method of using a flexible connecting wire for a thermal expansion-resistant magnetically deflected electron beam evaporation source;
FIG. 2 is a schematic structural diagram of a flexible connecting wire for a thermal expansion-resistant magnetically deflected electron beam evaporation source.
In the above drawings, the reference numerals denote:
a metal tube terminal (1);
a flexible wire (2);
a torsion spring terminal (3);
a mounting flange (4);
an electrical feedthrough (5);
an electron gun (6).
Detailed Description
The technical solutions in the embodiments of the present invention will be described clearly and completely with reference to the accompanying drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only some embodiments of the present invention, not all embodiments. Based on the embodiments in the present invention, all other embodiments obtained by a person skilled in the art without creative work belong to the protection scope of the present invention.
In a specific embodiment, as shown in fig. 1 and 2, a flexible connecting wire for a thermal expansion-resistant magnetically deflected electron beam evaporation source is characterized in that: the flexible metal wire winding device comprises a metal tube terminal (1), a plurality of flexible wires (2) and a torsion spring terminal (3), wherein the wire diameter of each thin metal wire can be a certain proportion of the whole wire diameter, and only the whole wire formed by final winding can be ensured to be flexible; the metal pipe terminal (1) is in compression joint with one end of the flexible leads (2); the torsion spring terminal (3) is in compression joint with the other ends of the flexible leads (2); the flexible wires (2) are spirally wound, so that the storage is convenient, and the mechanical reliability is better; the metal tube terminal (1) is provided with a hole for being fixed on an electron gun (6); the flexible wires (2) are made of one selected from Au, Ag, Be and Cu, and can also Be other good conductors with good conductive effects, such as simple substances or alloys; the metal pipe terminal (1) is made of the same material as the flexible leads (2); the torsion spring terminal (3) is made of the same material as the flexible leads (2) so as to realize complete surface contact and achieve the purposes of reducing contact resistance and energy loss; the external parts of the flexible wires (2) are provided with insulating ceramics, and the insulating ceramics are used for realizing a better insulating effect and improving the mechanical reliability of the product.
In a specific embodiment, as shown in fig. 1, an evaporation source comprising an electron gun (6), a magnet and a crucible, characterized in that: the electron gun (6) is powered by using the thermal expansion resistant magnetic deflection electron beam evaporation source through flexible connecting wires.
In this particular embodiment, the end of the flexible lead having the metal tube terminal (1) is connected to the electron gun (6), and is secured to the electron gun (6) through a hole provided in the metal tube terminal (1), and the end having the torsion spring terminal (3) is connected to an external electrical feedthrough (5) to transmit external power to the electron gun (6) for use by the electron gun (6).
For the commonly used W metal filament, the temperature is above 2000 ℃ when considerable amount of electrons are emitted, and the conduction of such high temperature to the lead wire causes the temperature of the lead wire to rise significantly, which in turn causes severe thermal expansion. Taking Cu wire as an example, the linear thermal expansion coefficient (16.5x 10) of Cu is used-6 K-1) For a Cu wire with the length of 200mm, the linear expansion length at 800 ℃ can reach 2.6mm, and a precise electron emitter (the dimensional precision is better than 0.05mm) bears the thermal expansion, so that high-voltage arc discharge frequently occurs, and further equipment is damaged. And the connection of a single hard wire and a terminal can not ensure the surface contact without gaps, so that the contact resistance is large, and the operation stability of the evaporation source under high temperature and high voltage is influenced. And use the preparation of many strands of metal wire spiral winding, the whole wire that makes can be crooked wantonly, and electron emitter displacement that thermal expansion arouses under the high temperature can be offset to flexible structure, has reduced high-voltage arc discharge's danger, consequently can guarantee accurate electron emitter steady operation, and the one end of this wire uses the torsional spring crimping, and the other end and tubular metal resonator crimping have realized complete face contact, has reduced contact resistance, and energy loss reduces, simultaneously because do not need to twist out the convolution structure and offset the thermal expansion, has eliminated the interference magnetic field that convolution wire structure produced.
In a preferred embodiment, the diameter of the flexible wires (2) is 0.5mm, and the number of the flexible wires (2) is 19.
In the preferred embodiment, the surface area of the lead made of the multi-strand metal wire is increased, so that the skin effect caused by alternating heating current can be weakened, the energy loss is reduced, and meanwhile, the heat dissipation is increased to reduce the temperature rise of the lead; taking a wire with a diameter of 2mm as an example, if the wire is formed by winding 19 wires with a diameter of 0.46mm in a multi-strand manner, the surface area of the wire can be increased by 4 times, so that the heat dissipation is obvious, and the temperature rise of the wire can be reduced.
In a preferred embodiment, the diameter of the flexible wires (2) is 0.2mm, and the number of the flexible wires (2) is 49.
In this preferred embodiment, the diffusion of the trace gas contained in the bulk phase is much shorter, and in the case of a 2mm diameter wire, if 49 multi-strand wires are wound, the diameter of the single thin wire is only 0.2mm, since the diffusion time is positively correlated to the square of the radius, and if the wire diameter is reduced by 10 times, the diffusion time can be reduced by 100 times, so that the degassing effect is significant and a higher vacuum can be achieved.
It should be understood that the above description is only exemplary of the present invention, and is not intended to limit the present invention, and that any modifications, equivalents, improvements, etc. made within the spirit and principle of the present invention should be included within the scope of the present invention.
Claims (9)
1. A thermal expansion resistant flexible connecting wire for a magnetic deflection electron beam evaporation source is characterized in that: the flexible cable comprises a metal tube terminal (1), a plurality of flexible leads (2) and a torsion spring terminal (3);
the metal pipe terminal (1) is in compression joint with one end of the flexible leads (2); and the torsional spring terminal (3) is in compression joint with the other ends of the flexible leads (2).
2. The flexible connecting wire for an anti-thermal expansion magnetically deflected electron beam evaporation source according to claim 1, wherein: the plurality of flexible wires (2) are spirally wound.
3. The flexible connecting wire for an anti-thermal expansion magnetically deflected electron beam evaporation source according to claim 1, wherein: the metal pipe terminal (1) is provided with a hole.
4. The flexible connecting wire for an anti-thermal expansion magnetically deflected electron beam evaporation source according to claim 1, wherein: the flexible wires (2) are made of one material selected from Au, Ag, Be and Cu.
5. The flexible connecting wire for an anti-thermal expansion magnetically deflected electron beam evaporation source according to claim 1, wherein: the metal pipe terminal (1) is made of the same material as the flexible leads (2);
the torsion spring terminal (3) is made of the same material as the flexible leads (2).
6. The flexible connecting wire for an anti-thermal expansion magnetically deflected electron beam evaporation source according to claim 1, wherein: the diameter of the flexible wires (2) is 0.5mm, and the number of the flexible wires (2) is 19.
7. The flexible connecting wire for an anti-thermal expansion magnetically deflected electron beam evaporation source according to claim 1, wherein: the diameter of the flexible wires (2) is 0.2mm, and the number of the flexible wires (2) is 49.
8. The flexible connecting wire for an anti-thermal expansion magnetically deflected electron beam evaporation source according to claim 1, wherein: and insulating ceramics are arranged outside the flexible leads (2).
9. An evaporation source, includes electron gun (6), magnet and crucible, its characterized in that: use of a thermal expansion resistant magnetically deflected electron beam evaporation source according to any of claims 1-8 for supplying said electron gun (6) with flexible connecting leads.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202020334403.0U CN212152429U (en) | 2020-03-17 | 2020-03-17 | Thermal-expansion-resistant flexible connecting wire for magnetic deflection electron beam evaporation source |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202020334403.0U CN212152429U (en) | 2020-03-17 | 2020-03-17 | Thermal-expansion-resistant flexible connecting wire for magnetic deflection electron beam evaporation source |
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| Publication Number | Publication Date |
|---|---|
| CN212152429U true CN212152429U (en) | 2020-12-15 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN202020334403.0U Active CN212152429U (en) | 2020-03-17 | 2020-03-17 | Thermal-expansion-resistant flexible connecting wire for magnetic deflection electron beam evaporation source |
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| CN (1) | CN212152429U (en) |
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2020
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