CN212132062U

CN212132062U - Annular LED light source for silicon wafer detection

Info

Publication number: CN212132062U
Application number: CN202020973504.2U
Authority: CN
Inventors: 沈火金; 王千贵; 徐磊
Original assignee: Oriental Technology Shanghai Co ltd
Current assignee: Oriental Technology Shanghai Co ltd
Priority date: 2020-05-28
Filing date: 2020-05-28
Publication date: 2020-12-11
Anticipated expiration: 2030-05-28

Abstract

The utility model relates to a silicon wafer detects uses annular LED light source adopts monochromatic yellow light LED, and monochromatic yellow light LED lamp can solve the exposure degeneration problem that ordinary light source caused to the silicon wafer in detecting, can form obvious grey contrast between mark point and the background in the image that is for the mark point can be fixed a position by the simple discernment of computer.

Description

Annular LED light source for silicon wafer detection

Technical Field

The utility model relates to a silicon wafer check out test set, concretely relates to silicon wafer detects uses annular LED light source.

Background

In the prior art, a method for identifying and positioning mark points on a silicon wafer comprises the following steps: the image of the silicon wafer is shot by the light source and the industrial camera matched with the industrial lens, the irradiation of the light source can present different gray contrast between the mark point and the background area, and therefore the mark point in the image can be identified and positioned by a computer. However, the existing light source causes exposure denaturation to the silicon wafer, and the gray contrast between the mark point and the background is not obvious, so that the mark point and the background are difficult to identify and position by a computer.

SUMMERY OF THE UTILITY MODEL

The utility model discloses a main aim at when guaranteeing that the light source can form obvious contrast between mark and background, avoid the exposure degeneration that the light source caused the silicon wafer.

In order to achieve at least the above object, the present invention provides an annular LED light source for silicon wafer inspection, which employs a monochromatic yellow LED. The monochromatic yellow LED can remarkably reduce exposure denaturation of the silicon wafer in the detection of the silicon wafer, and can generate obvious contrast between mark points and background on the silicon wafer.

Preferably, the annular LED light source for silicon wafer detection is composed of a plurality of monochromatic yellow LEDs arranged along the inner side of the annular inclined plane to form a monochromatic yellow LED annular array.

Preferably, the inclination of the annular inclined plane along which the monochromatic yellow light LED lies is 60 °.

Preferably, the optical axis of each monochromatic yellow LED is arranged normal to the annular inclined plane.

Preferably, the annular array of monochromatic yellow LEDs has a plurality of rows and a plurality of columns.

Preferably, the annular LED light source for silicon wafer detection comprises a PCB for driving a monochromatic yellow LED lamp array, and the PCB is arranged in the shape of the annular inclined plane.

Preferably, the annular LED light source for silicon wafer detection comprises a base body, and the PCB is fixed in the base body.

Preferably, the base body is provided with an upper fixing end for fixing the end edge of the outer ring of the PCB and a lower fixing end for fixing the end edge of the inner ring of the PCB.

Preferably, the base body is provided with a groove part along the outer periphery of the PCB, and a cavity is formed between the groove part and the outer periphery of the PCB.

Preferably, the bottom of the base body is provided with a hole which is communicated with the center of the monochromatic yellow LED annular array.

The utility model discloses a silicon wafer light source that detects adopts monochromatic yellow light LED, monochromatic yellow light LED can solve the exposure degeneration problem that ordinary light source caused to the silicon wafer in detecting, in the image that is, can form obvious grey contrast between mark point and the background for the mark point can be fixed a position by the simple discernment of computer. In some preferred embodiments of the present invention, the LED lamps in the light source can help the silicon wafer to present more vivid gray contrast and clear image under the industrial camera through a certain angle and arrangement, so that the computer can identify and locate mark points more easily. Besides, the annular LED light source for silicon wafer detection of the utility model can also be used for detecting the flaws and defects of the silicon wafer.

Drawings

FIG. 1 is a schematic view of a ring-shaped LED light source for silicon wafer inspection.

Fig. 2 is a schematic diagram of the internal structure of the annular LED light source of fig. 1.

FIG. 3 is a schematic view of an arrangement of single color yellow LED lamps.

Detailed Description

The present invention will be further described with reference to the following examples and drawings.

The annular LED light source for silicon wafer detection in the embodiment adopts a monochromatic yellow LED. The main visible light component emitted in the monochromatic yellow LED is yellow light, the other visible light components are very few, the monochromatic yellow light can effectively reduce the exposure degeneration of the silicon wafer, and the less the other visible light components, the less the exposure degeneration. On the other hand, the irradiation of the monochromatic yellow LED can make the mark point on the silicon wafer show clear gray contrast under the lens of an industrial camera, thereby being beneficial to finding the mark point on the silicon wafer.

The annular LED light source for silicon wafer detection is formed by arranging a plurality of monochromatic yellow LEDs along the inner side of an annular inclined plane to form a monochromatic yellow LED annular array. In this embodiment, the inclination angle α of the annular inclined surface along which the single-color yellow LED is arranged is 60 ° (refer to fig. 3), and some usable inclination angles include, for example, 15 °, 25 °, 30 °, 45 °, 75 °, and so on, of course. While a yellow LED annular array arranged at an inclination angle of 60 degrees can ensure that the image at the mark point on the surface of the silicon wafer is firmer, thereby being more beneficial to searching the mark point. While the annular array of monochromatic yellow LEDs may have multiple rows and columns in order to allow the intensity of light to be better adapted for detection. The monochromatic yellow light LED lamp array is driven by the PCB to be turned on or turned off, the PCB can further adopt a flexible PCB, and the flexible PCB is favorable for circumferential enclosing to form the annular inclined plane.

As shown in fig. 1, the monochromatic yellow LED ring array 100 and its PCB are disposed in a housing 200. Referring to fig. 2, the PCB is arranged in the shape of the described annular inclined plane, the inclination angle α of the annular inclined plane shaped PCB is 60 ° (refer to fig. 3), and the annular array of monochromatic yellow LEDs 100 is electrically connected to the PCB 102, in which the optical axes of the individual monochromatic yellow LEDs 101 are arranged in the normal direction of the PCB 102. In this embodiment, the base 200 is formed by connecting an upper cover 210 and a lower cover 220, and the base 200 has an upper fixing end 211 for fixing an outer rim of the PCB and a lower fixing end 221 for fixing an inner rim of the PCB. The base body is provided with an annular groove part 212 along the outer periphery of the PCB, and an annular cavity is formed between the groove part 212 and the outer periphery of the PCB 102. The cavity can be fine and the heat that produces the LED cushions to can not make the heat direct influence pedestal. The base bottom has a hole 222 that runs through to the center of the monochromatic yellow LED annular array. The hole can help the LED to dissipate heat.

When the ring-shaped LED light source is used, the ring-shaped LED light source is matched with an industrial camera and an industrial lens to be used for carrying out mark point detection on the silicon wafer, the silicon wafer can clearly display images in the industrial camera under monochromatic yellow light, exposure denaturation can be avoided, the rejection rate is reduced, the divergence of the monochromatic yellow LED lamp can be well controlled by the monochromatic yellow LED ring-shaped array with the inclination angle of 60 degrees, a more real and clearer image is formed at the mark point on the surface of the silicon wafer, and clear gray contrast is formed with the surrounding background, so that the mark point identification and detection of a computer are facilitated.

The embodiments of the present invention are only used for illustration, and do not limit the scope of the claims, and other substantially equivalent alternatives that may be conceived by those skilled in the art are within the scope of the present invention.

Claims

1. An annular LED light source for silicon wafer detection is characterized in that a single-color yellow LED is adopted, a plurality of single-color yellow LEDs are arranged along the inner side of an annular inclined surface to form a single-color yellow LED annular array, the inclination angle of the annular inclined surface along which the single-color yellow LEDs are arranged is 60 degrees, the annular inclined surface comprises a PCB used for driving the single-color yellow LED lamp array, and the PCB is arranged in the shape of the annular inclined surface.

2. The ring-shaped LED light source for silicon wafer inspection as set forth in claim 1, wherein the optical axis of each of the monochromatic yellow LEDs is arranged in the normal direction of the ring-shaped inclined plane.

3. The annular LED light source for silicon wafer inspection according to claim 1, wherein said annular array of monochromatic yellow LEDs has a plurality of rows and a plurality of columns.

4. The ring-shaped LED light source for silicon wafer inspection according to claim 1, comprising a housing in which said PCB is fixed.

5. The annular LED light source for silicon wafer inspection according to claim 4, wherein the base body has an upper fixing end for fixing the outer rim of the PCB and a lower fixing end for fixing the inner rim of the PCB.

6. The annular LED light source for silicon wafer inspection according to claim 4, wherein the base body has a groove portion along an outer peripheral side of the PCB, and a cavity is formed between the groove portion and the outer peripheral side of the PCB.

7. The ring-shaped LED light source for silicon wafer inspection according to claim 4, wherein the base body has a hole penetrating the center of the ring-shaped array of monochromatic yellow LEDs.