CN212077204U - Single crystal furnace feeder fixing device - Google Patents

Single crystal furnace feeder fixing device Download PDF

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Publication number
CN212077204U
CN212077204U CN202020424042.9U CN202020424042U CN212077204U CN 212077204 U CN212077204 U CN 212077204U CN 202020424042 U CN202020424042 U CN 202020424042U CN 212077204 U CN212077204 U CN 212077204U
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China
Prior art keywords
single crystal
charging means
ring
hole
feeder
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CN202020424042.9U
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Chinese (zh)
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闫龙
魏兴彤
李美平
王忠宝
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Ningxia Zhongxin Wafer Semiconductor Technology Co Ltd
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Ningxia Zhongxin Wafer Semiconductor Technology Co Ltd
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Abstract

The utility model provides a single crystal growing furnace charging means fixing device, relates to charging means auxiliary component technical field, fixes the charging means on single crystal growing furnace, can adjust the discharge end of charging means and the distance of the inside thermal field of single crystal growing furnace, including swing joint's fixed part and regulating part. This device becomes fixed part and regulation part two parts with original flange is fixed, the fixed part is fixed on the single crystal growing furnace, the regulation part is fixed on the charging means, adjusting screw and screw hole, set nut, the cooperation of regulation hole, make the distance that can adjust lock ring and fixed part through rotatory adjusting screw, thereby adjust the degree of depth that the charging means stretched into single crystal growing furnace inside, the discharge end of thermal field control charging means and the distance of thermal field according to the difference, prevent that the discharge end of charging means from being too near or too far away from the thermal field, splash up high temperature liquid when avoiding the charging means to touch high temperature liquid or unloading, reduce the probability that the unnecessary consequence takes place.

Description

Single crystal furnace feeder fixing device
Technical Field
The utility model relates to a charging means auxiliary component technical field, concretely relates to single crystal growing furnace charging means fixing device.
Background
The feeder is a device for adding secondary materials into a thermal field of the single crystal furnace, and the feeder and the single crystal furnace need to be relatively fixed in the feeding process, so that an auxiliary fixing device is needed for fixing the feeder on the single crystal furnace.
The existing fixing device is a flange, after a feeder stretches into a single crystal furnace, the flange fixes the feed end of the feeder on the single crystal furnace, but the flange is fixed, and the defect is that: the flange can not be moved, the size of the feeder is fixed and cannot stretch out and draw back, the discharge end of the feeder can be too close to or too far away from the thermal field to the thermal fields with different heights of the single crystal furnace, and then the high-temperature liquid is splashed when the feeder touches the high-temperature liquid or is discharged, so that unnecessary consequences are caused.
Disclosure of Invention
In view of the above, there is a need for a fixing device for a material feeder of a single crystal furnace, which can adjust the distance between the material feeder and a thermal field
A fixing device for a feeder of a single crystal furnace is used for fixing the feeder on the single crystal furnace, can adjust the distance between the discharge end of the feeder and a thermal field in the single crystal furnace, and comprises a fixing part and an adjusting part which are movably connected, wherein the fixing part is connected with the single crystal furnace but is not contacted with the feeder; the fixing part is provided with an adjusting hole; the regulating part comprises a positioning nut, a support ring and a regulating screw rod, the positioning nut is fixed on the fixed part and is coaxial and concentric with the regulating hole, the support ring is connected with the feeder, a threaded hole is formed in the support ring, the threaded hole is coaxial and concentric with the regulating hole, the positioning nut and the threaded hole are matched with the regulating screw rod, the regulating screw rod sequentially penetrates through the threaded hole, the positioning nut and the regulating hole from top to bottom, the support ring is driven to move upwards or downwards through the rotating regulating screw rod, and then the feeder is driven to move upwards or downwards.
Preferably, the fixed part includes the retainer plate, and the regulation hole is seted up on the retainer plate, and the retainer plate is located the lower part of lock ring and both coaxial concentric, and the internal diameter of retainer plate is greater than the external diameter of charging means to make charging means both contactless after inserting the retainer plate, and then touch the retainer plate when preventing that the charging means from reciprocating, the retainer plate can be dismantled with single crystal growing furnace and be connected.
Preferably, the feed end of charging means is provided with the overlap joint suddenly the ring, and the overlap joint suddenly the ring cover establish fix on the charging means, and the external diameter of overlap joint suddenly the ring is greater than the internal diameter of lock ring, and the discharge end of charging means passes lock ring, retainer plate from top to bottom in proper order to through the overlap joint suddenly the ring overlap joint on the lock ring.
Preferably, the regulating part still includes a reinforcing thread section of thick bamboo, and a reinforcing thread section of thick bamboo is located the lower part of lock ring, and the one end of a reinforcing thread section of thick bamboo is fixed on the lock ring, and coaxial with the screw hole, and the inner wall of a reinforcing thread section of thick bamboo is provided with the internal thread, and this internal thread and adjusting screw's external screw thread looks adaptation, adjusting screw pass screw hole, a reinforcing thread section of thick bamboo, set nut, regulation hole from top to bottom in proper order to consolidate connection lock ring and adjusting screw through a reinforcing thread section of thick bamboo.
Preferably, the edge of the fixing ring is further provided with a connecting hole so as to connect the fixing ring and the single crystal furnace through the connecting hole.
Preferably, the fixing part further comprises a hand-held part, and the hand-held part is fixed on the outer ring of the fixing ring so as to be convenient for manually moving the fixing part.
The utility model adopts the above technical scheme, its beneficial effect lies in: become fixed part and regulation part two parts with original flange is fixed, the fixed part is fixed on the single crystal growing furnace, the regulation part is fixed on the charging means, adjusting screw and screw hole, set nut, the cooperation of regulation hole, make the distance that can adjust lock ring and fixed part through rotatory adjusting screw, thereby adjust the degree of depth that the charging means stretched into single crystal growing furnace inside, the discharge end of charging means and the distance of thermal field are controlled according to the thermal field of difference, prevent that the discharge end of charging means from being too near or too far away from the thermal field, splash high temperature liquid when avoiding the charging means to touch high temperature liquid or unloading, reduce the probability that the unnecessary consequence takes place.
Drawings
FIG. 1 is a schematic structural diagram of a fixing device of a feeder of a single crystal furnace.
FIG. 2 is a schematic view of another angle of the fixing device of the single crystal furnace feeder.
Fig. 3 is a schematic structural view of the adjustment portion.
Fig. 4 is a schematic structural view of the fixing portion.
FIG. 5 is a schematic view of a structure of a single crystal furnace feeder fixing device matched with a feeder.
Fig. 6 is a partially enlarged view of a in fig. 5.
FIG. 7 is a cross-sectional view of an angle at which the single crystal furnace feeder fixture, feeder, and single crystal furnace are mated.
In the figure: the single crystal furnace comprises a single crystal furnace feeder fixing device 10, a feeder 20, a lap joint protruding ring 21, a single crystal furnace 30, an upper furnace cylinder 31, a furnace body 32, a fixing part 101, a fixing ring 1011, an adjusting hole 10111, a connecting hole 10112, a vent hole 10113, a hand-held piece 1012, an adjusting part 102, a positioning nut 1021, a support ring 1022, an adjusting screw 1023 and a reinforced threaded cylinder 1024.
Detailed Description
In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the drawings required to be used in the embodiments will be briefly described below, and it is obvious that the drawings in the following description are some embodiments of the present invention, and it is obvious for those skilled in the art that other drawings can be obtained according to these drawings without creative efforts.
Referring to fig. 1 to 7, an embodiment of the present invention provides a fixing device 10 for a material feeder of a single crystal furnace, which fixes a material feeder 20 on a single crystal furnace 30, and can adjust a distance between a discharging end of the material feeder 20 and an internal thermal field of the single crystal furnace 30, and comprises a fixing portion 101 and an adjusting portion 102, which are movably connected, wherein the fixing portion 101 is connected with the single crystal furnace 30 but not in contact with the material feeder 20; the fixing part 101 is provided with an adjusting hole 10111; regulating part 102 includes set nut 1021, the lock ring 1022, adjusting screw 1023, set nut 1021 is fixed on fixed part 101 and with the coaxial concentric with regulation hole 10111, lock ring 1022 is connected with charging means 20, set up threaded hole on the lock ring 1022, the threaded hole is coaxial concentric with regulation hole 10111, set nut 1021, the threaded hole all with adjusting screw 1023 looks adaptation, adjusting screw 1023 passes the threaded hole from top to bottom in proper order, set nut 1021, regulation hole 10111, in order to drive through rotatory adjusting screw 1023 and support ring 1022 upwards or move down, and then drive charging means 20 upwards or move down.
Further, the fixing portion 101 comprises a fixing ring 1011, the adjusting hole 10111 is formed in the fixing ring 1011, the fixing ring 1011 is located at the lower portion of the support ring 1022, the fixing ring 1011 and the support ring are coaxial and concentric, the inner diameter of the fixing ring 1011 is larger than the outer diameter of the feeder 20, so that the feeder 20 is inserted into the fixing ring 1011 and then does not contact with the fixing ring 1011, the feeder 20 is prevented from contacting with the fixing ring 1011 when moving up and down, and the fixing ring 1011 is detachably connected with the single crystal furnace 30.
Further, the feed end of the feeder 20 is provided with an overlapping bulge loop 21, the overlapping bulge loop 21 is sleeved and fixed on the feeder, the outer diameter of the overlapping bulge loop 21 is larger than the inner diameter of the support ring 1022, and the discharge end of the feeder sequentially penetrates through the support ring 1022 and the fixing ring 1011 from top to bottom and is overlapped on the support ring 1022 through the overlapping bulge loop 21.
Further, the adjusting portion 102 further includes a reinforcing thread cylinder 1024, the reinforcing thread cylinder 1024 is located on the lower portion of the support ring 1022, one end of the reinforcing thread cylinder 1024 is fixed on the support ring 1022 and is coaxial and concentric with the threaded hole, the inner wall of the reinforcing thread cylinder 1024 is provided with an internal thread, the internal thread is matched with the external thread of the adjusting screw 1023, the adjusting screw 1023 sequentially penetrates through the threaded hole, the reinforcing thread cylinder 1024, the positioning nut 1021 and the adjusting hole 10111 from top to bottom, so that the support ring 1022 and the adjusting screw 1023 are connected in a reinforcing mode through the reinforcing thread cylinder 1024.
Further, the edge of the fixing ring 1011 is further opened with a connecting hole 10112 to connect the fixing ring 1011 and the single crystal furnace 30 through the connecting hole 10112.
Further, the fixing portion 101 further includes a hand-held member 1012, and the hand-held member 1012 is fixed to the outer ring of the fixing ring 1011 to facilitate manual movement of the fixing portion 101.
Furthermore, the fixing ring 1011 is further provided with a vent 10113, so that after the fixing ring 1011 is connected with the single crystal furnace 30, argon enters the inside of the single crystal furnace 30 through the vent 10113 to form gas circulation.
Further, the adjusting hole 10111 may be a smooth circular hole, or may be a threaded hole, and if the adjusting hole 10111 is a smooth circular hole, the aperture of the adjusting hole 10111 is larger than the diameter of the adjusting screw 1023; if the adjusting hole 10111 is a threaded hole, the internal thread of the adjusting hole 10111 is matched with the external thread of the adjusting screw 1023.
Furthermore, the number of the adjusting holes 10111, the positioning nuts 1021, the adjusting screws 1023 and the number of the threaded holes are all the same, and are respectively 4; the number of the connection holes 10112 is 3,
further, the fixing ring 1011 is a flange.
This device is when specifically using, according to the height in thermal field and the length of charging means 20, rotatory adjusting screw 1023, adjust suitable height with lock ring 1022, the discharge end with the charging means from top to bottom passes lock ring 1022 in proper order, retainer plate 1011, and overlap joint bulge loop 21 and the lock ring 1022 overlap joint of charging means, unscrew the last stove section of thick bamboo 31 of single crystal growing furnace 30 from the left side, fix the retainer plate 1011 again on the last stove section of thick bamboo 31 of single crystal growing furnace 30, it is connected with the furnace body 32 of single crystal growing furnace 30 to drive the charging means by last stove section of thick bamboo 31, make the discharge end of charging means get into inside the feeding of furnace body 32 of single crystal growing furnace 30.
While the invention has been described with reference to a preferred embodiment, it will be understood by those skilled in the art that various changes in form and details may be made therein without departing from the spirit and scope of the invention.

Claims (6)

1. The utility model provides a single crystal growing furnace charging means fixing device fixes the charging means on single crystal growing furnace which characterized in that: the distance between the discharge end of the feeder and the thermal field in the single crystal furnace can be adjusted, the device comprises a fixed part and an adjusting part which are movably connected, and the fixed part is connected with the single crystal furnace but is not contacted with the feeder; the fixing part is provided with an adjusting hole; the regulating part comprises a positioning nut, a support ring and a regulating screw rod, the positioning nut is fixed on the fixed part and is coaxial and concentric with the regulating hole, the support ring is connected with the feeder, a threaded hole is formed in the support ring, the threaded hole is coaxial and concentric with the regulating hole, the positioning nut and the threaded hole are matched with the regulating screw rod, the regulating screw rod sequentially penetrates through the threaded hole, the positioning nut and the regulating hole from top to bottom, the support ring is driven to move upwards or downwards through the rotating regulating screw rod, and then the feeder is driven to move upwards or downwards.
2. The single crystal furnace feeder fixing device of claim 1, wherein: the fixed part includes the retainer plate, and the regulation hole is seted up on the retainer plate, and the retainer plate is located the lower part of lock ring and both coaxial concentric, and the internal diameter of retainer plate is greater than the external diameter of charging means to make charging means both contactless after inserting the retainer plate, and then touch the retainer plate when preventing that the charging means from reciprocating, the retainer plate can be dismantled with the single crystal growing furnace and be connected.
3. The single crystal furnace feeder fixing device of claim 2, wherein: the feed end of charging means is provided with the overlap joint suddenly the ring, and the overlap joint suddenly the ring cover establish fix on the charging means, and the external diameter of overlap joint suddenly the ring is greater than the internal diameter of lock ring, and the discharge end of charging means passes lock ring, retainer plate from top to bottom in proper order to through the overlap joint suddenly the ring overlap joint on the lock ring.
4. The single crystal furnace feeder fixing device of claim 3, wherein: the adjusting part is characterized by further comprising a reinforcing thread cylinder, the reinforcing thread cylinder is located on the lower portion of the supporting ring, one end of the reinforcing thread cylinder is fixed on the supporting ring and is coaxial and concentric with the threaded hole, an inner thread is arranged on the inner wall of the reinforcing thread cylinder, the inner thread is matched with an outer thread of the adjusting screw, and the adjusting screw sequentially penetrates through the threaded hole, the reinforcing thread cylinder, the positioning nut and the adjusting hole from top to bottom to reinforce and connect the supporting ring and the adjusting screw through the reinforcing thread cylinder.
5. The single crystal furnace feeder fixing device of claim 4, wherein: the edge of the fixing ring is also provided with a connecting hole so as to connect the fixing ring and the single crystal furnace through the connecting hole.
6. The single crystal furnace feeder fixing device of claim 5, wherein: the fixed part also comprises a hand-held part which is fixed on the outer ring of the fixed ring so as to be convenient for manually moving the fixed part.
CN202020424042.9U 2020-03-27 2020-03-27 Single crystal furnace feeder fixing device Active CN212077204U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN202020424042.9U CN212077204U (en) 2020-03-27 2020-03-27 Single crystal furnace feeder fixing device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN202020424042.9U CN212077204U (en) 2020-03-27 2020-03-27 Single crystal furnace feeder fixing device

Publications (1)

Publication Number Publication Date
CN212077204U true CN212077204U (en) 2020-12-04

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Family Applications (1)

Application Number Title Priority Date Filing Date
CN202020424042.9U Active CN212077204U (en) 2020-03-27 2020-03-27 Single crystal furnace feeder fixing device

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CN (1) CN212077204U (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN114381797A (en) * 2021-12-29 2022-04-22 宁夏申和新材料科技有限公司 Telescopic quartz feeding device, straight pulling single crystal furnace and method for improving pulling speed

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN114381797A (en) * 2021-12-29 2022-04-22 宁夏申和新材料科技有限公司 Telescopic quartz feeding device, straight pulling single crystal furnace and method for improving pulling speed

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