CN212068293U

CN212068293U - RPS gas dissociation device

Info

Publication number: CN212068293U
Application number: CN202020679290.8U
Authority: CN
Inventors: 刘锐; 徐远波; 尹巧星
Original assignee: Jiangsu Shenzhou Semi Technology Co ltd
Current assignee: Jiangsu Shenzhou Semi Technology Co ltd
Priority date: 2020-04-28
Filing date: 2020-04-28
Publication date: 2020-12-04
Anticipated expiration: 2030-04-28

Abstract

The utility model relates to a gaseous dissociation device technical field of RPS, specifically be a gaseous dissociation device of RPS, including anodic oxidation case and fixing device, air inlet and gas outlet have been seted up respectively to anodic oxidation case both sides, the air inlet all is equipped with fixing device with the gas outlet outside, fixing device is close to air inlet one side and is equipped with the air inlet ring, the air inlet ring outside is equipped with solid fixed ring, gu the fixed ring inboard is equipped with the splint that a plurality of is the arc structure, the splint outer wall rotates through the bearing and is connected with the bracing piece, gu the fixed ring outer wall is close to the position of bracing piece and has seted up the through-hole, the bracing piece inlays to be located inside the through-hole, pass through inside threaded connection in the through-hole, extrude fixed pipe.

Description

RPS gas dissociation device

Technical Field

The utility model relates to a gaseous dissociation device technical field of RPS specifically is a gaseous dissociation device of RPS.

Background

The RPS mainly comprises a control circuit, an anodic oxidation cavity (the surface of aluminum is subjected to oxidation treatment), a BOOST power supply, an auxiliary power supply and the like, wherein the core component of the system is ionized in the anodic oxidation cavity and is in a vacuum closed environment, so that the requirements on the pressure resistance and the sealing property of the anodic oxidation cavity are high.

However, in view of the fact that the feed port and the discharge port of the conventional anodic oxidation box are prone to generate gas leakage, an RPS gas dissociation device is proposed.

SUMMERY OF THE UTILITY MODEL

An object of the utility model is to provide a gaseous dissociation device of RPS to the problem of the easy condition that produces gas leakage of feed inlet and the discharge gate of the current anodic oxidation case that provides among the above-mentioned background art is solved.

In order to achieve the above object, the utility model provides a following technical scheme:

the utility model provides a gaseous dissociation device of RPS, includes anodic oxidation case and fixing device, air inlet and gas outlet have been seted up respectively to anodic oxidation case both sides, the air inlet with the gas outlet outside all is equipped with fixing device, fixing device is close to air inlet one side is equipped with the ring of admitting air, the ring outside of admitting air is equipped with solid fixed ring, gu the fixed ring inboard is equipped with the splint that a plurality of is the arc structure, the splint outer wall rotates through the bearing and is connected with the bracing piece, gu the fixed ring outer wall is close to the through-hole has been seted up to the position of bracing piece, the bracing piece inlays to be located inside the through-hole, the bracing.

Preferably, the bottom surface of the anodic oxidation box is provided with rubber columns near the periphery, and springs are arranged inside the rubber columns.

Preferably, pull rings in an annular structure are arranged at positions, close to two sides, of the top of the anodic oxidation box.

Preferably, the interior of the anodic oxidation box is of a hollow structure, and a fixing box is arranged in the anodic oxidation box close to the center.

Preferably, the inside of the air inlet ring is of a hollow structure, openings are formed in two ends of the air inlet ring, and the size of each opening is the same as that of the air inlet.

Preferably, the number of the clamping plates is two, and the inner wall of each clamping plate is provided with a rubber plate.

Compared with the prior art, the beneficial effects of the utility model are that:

1. in the RPS gas dissociation device, the guide pipe is extruded and fixed through the clamping plate, so that air leakage between the guide pipe and the air inlet ring is avoided, and the tightness of the device is improved.

Drawings

FIG. 1 is a schematic view of an anodic oxidation box of the present invention;

FIG. 2 is a schematic view of the overall assembly structure of the present invention;

FIG. 3 is a sectional view of the anodic oxidation box of the present invention.

In the figure: 1. an anodic oxidation box; 11. an air inlet; 12. an air outlet; 13. a fixed box; 14. a pull ring; 2. a fixing device; 21. an air inlet ring; 211. an opening; 22. a fixing ring; 221. a through hole; 23. a splint; 231. a support bar; 3. a rubber column; 31. a spring.

Detailed Description

The technical solutions in the embodiments of the present invention will be described clearly and completely with reference to the accompanying drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only some embodiments of the present invention, not all embodiments. Based on the embodiments in the present invention, all other embodiments obtained by a person skilled in the art without creative work belong to the protection scope of the present invention.

In the description of the present invention, it should be understood that the terms "center", "center line", "longitudinal", "lateral", "length", "width", "thickness", "depth", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", etc. indicate the orientation or positional relationship based on the orientation or positional relationship shown in the drawings, and are only for convenience of description and simplicity of description, and are not intended to indicate or imply that the referenced device or element must have a particular orientation, be constructed and operated in a particular orientation, and therefore should not be taken as limiting the invention, in the description of the present invention, "a plurality" means two or more unless specifically defined otherwise.

Example 1

The utility model provides a gaseous dissociation device of RPS, in order to solve the problem of the easy condition that produces gas leakage of feed inlet and discharge gate of current anodic oxidation case, as a preferred embodiment, as shown in fig. 1-3, including anodic oxidation case 1 and fixing device 2, air inlet 11 and gas outlet 12 have been seted up respectively to anodic oxidation case 1 both sides, air inlet 11 all is equipped with fixing device 2 with the 12 outside of gas outlet, fixing device 2 is close to air inlet 11 one side and is equipped with air inlet ring 21, the air inlet ring 21 outside is equipped with solid fixed ring 22, gu fixed ring 22 inboard is equipped with a plurality of splint 23 that are the arc structure, splint 23 outer wall rotates through the bearing and is connected with bracing piece 231, gu fixed ring 22 outer wall is close to the position of bracing piece 231 and has seted up through-hole 221, bracing piece 231 inlays and locates inside through-hole.

In this example, 1 bottom surface of anodic oxidation case is close to the position all around and is equipped with

rubber column

3, and 3 inside springs 31 that are equipped with of rubber column, when gas lets in 1 inside of anodic oxidation case, and 1 vibrations of anodic oxidation case take place, and downward extrusion or upwards pulling

springs

31, 31 atress compression or extension of spring to produce elasticity and block 1 downward or upward movement of anodic oxidation case, thereby avoid anodic oxidation case 1 to take place the displacement between vibrations effect down and the ground.

Furthermore, pull rings 14 in an annular structure are arranged at positions, close to two sides, on the top of the anodic oxidation box 1, and the anodic oxidation box 1 is lifted by pulling the pull rings 14, so that the anodic oxidation box 1 is convenient to move.

Specifically, the interior of the anodic oxidation box 1 is of a hollow structure, and the fixing box 13 is arranged at the position, close to the center, of the interior of the anodic oxidation box 1, so that a circulating air channel is formed in the interior of the anodic oxidation box 1, and subsequent operation is facilitated.

Besides, the inside hollow structure that is of air inlet ring 21, opening 211 has been seted up at air inlet ring 21 both ends, and opening 211 is the same with the gas inlet 11 size, and it is inside to be convenient for gas to get into air inlet ring 21 through opening 211, passes gas inlet 11 again and gets into the anodic oxidation case 1 inside.

Further, splint 23's quantity is two, and splint 23 inner wall is equipped with rubber slab 232, inside solid fixed ring 22 of catheterization to cup joint in air inlet ring 21 outside, rotatory bracing piece 231 makes bracing piece 231 to solid fixed ring 22 inside removal again, and splint 23 moves solid fixed ring 22 inside along with bracing piece 231, extrudes fixed pipe, avoids taking place gas leakage between pipe and the air inlet ring 21, has improved the device's seal.

The utility model discloses when using, at first, inside the solid fixed ring 22 of catheterization, and cup joint in the ring 21 outside of admitting air, rotatory bracing piece 231 makes bracing piece 231 to the inside removal of solid fixed ring 22 again, splint 23 is along with bracing piece 231 to the inside removal of solid fixed ring 22, extrude fixed pipe, then, through the pipe to the inside gas that lets in of anodic oxidation case 1, anodic oxidation case 1 takes place vibrations, extrude downwards or upwards stimulate rubber column 3, the inside spring 31 atress compression or the extension of rubber column 3, and produce elasticity and block anodic oxidation case 1 downward or upward movement, it shakes to reduce anodic oxidation case 1 emergence, finally, other equipment is arranged into from gas outlet 12 to gas.

The foregoing shows and describes the general principles, essential features, and advantages of the invention. It should be understood by those skilled in the art that the present invention is not limited by the above embodiments, and the description in the above embodiments and the description is only preferred examples of the present invention, and is not intended to limit the present invention, and that the present invention can have various changes and modifications without departing from the spirit and scope of the present invention, and these changes and modifications all fall into the scope of the claimed invention. The scope of the invention is defined by the appended claims and equivalents thereof.

Claims

1. The utility model provides a RPS gas dissociation device, includes anodic oxidation case (1) and fixing device (2), its characterized in that: air inlet (11) and gas outlet (12) have been seted up respectively to anodic oxidation case (1) both sides, air inlet (11) with gas outlet (12) outside all is equipped with fixing device (2), fixing device (2) are close to air inlet (11) one side is equipped with air inlet ring (21), air inlet ring (21) outside is equipped with solid fixed ring (22), gu fixed ring (22) inboard is equipped with splint (23) that a plurality of is the arc structure, splint (23) outer wall is connected with bracing piece (231) through the bearing rotation, gu fixed ring (22) outer wall is close to through-hole (221) have been seted up to the position of bracing piece (231), bracing piece (231) inlay and locate inside through-hole (221), bracing piece (231) through threaded connection in inside through-hole (221).

2. The RPS gas dissociation device of claim 1, wherein: the bottom surface of the anodic oxidation box (1) is provided with rubber columns (3) near the periphery, and springs (31) are arranged inside the rubber columns (3).

3. The RPS gas dissociation device of claim 1, wherein: and pull rings (14) in an annular structure are arranged at the positions, close to the two sides, of the top of the anodic oxidation box (1).

4. The RPS gas dissociation device of claim 1, wherein: the interior of the anodic oxidation box (1) is of a hollow structure, and a fixing box (13) is arranged in the anodic oxidation box (1) close to the center.

5. The RPS gas dissociation device of claim 1, wherein: the air inlet ring (21) is internally of a hollow structure, openings (211) are formed in two ends of the air inlet ring (21), and the size of each opening (211) is the same as that of the air inlet (11).

6. The RPS gas dissociation device of claim 1, wherein: the quantity of splint (23) is two, splint (23) inner wall is equipped with rubber slab (232).