CN212025439U

CN212025439U - Net tensioning device

Info

Publication number: CN212025439U
Application number: CN202020303872.6U
Authority: CN
Inventors: 金华君
Original assignee: Fujian Huajiacai Co Ltd
Current assignee: Fujian Huajiacai Co Ltd
Priority date: 2020-03-12
Filing date: 2020-03-12
Publication date: 2020-11-27
Anticipated expiration: 2030-03-12

Abstract

The utility model discloses a net tensioning device, including a net board, grab and press from both sides the slide rail and grab and press from both sides the mechanism, grab and press from both sides the slide rail and set up the left and right sides that a net board was stretched relatively, grab and press from both sides the mechanism activity and set up in grabbing pressing from both sides the slide rail, grab and press from both sides the mechanism and be used for stretching the net, still include height adjustment unit, sensor and measurement plane, grab and press from both sides the mechanism and pass through height adjustment unit and grab and press from both sides sliding linkage, height adjustment unit is used for adjusting the height of grabbing and pressing from both sides the mechanism, the sensor sets up on grabbing and pressing from both sides the mechanism, the measurement plane sets up the left and right sides that a. The height between the gripping mechanism and the measuring plane is detected in real time through the sensor, and the height adjusting unit is used for adjusting when the flatness of the gripping mechanism changes. The clamping mechanism can be prevented from being influenced in the moving or using process, the left and right height difference is generated, and the wrinkle problem of the mask plate in the screen opening process can be reduced.

Description

Net tensioning device

Technical Field

The utility model relates to an evaporation equipment field especially relates to a stretch net device.

Background

In the existing Organic Light Emitting Diode (OLED) manufacturing process, a high-precision metal mask plate needs to be adopted to shield an area which does not need evaporation plating, so that the precision of pixel point coating is ensured. Because in the coating by vaporization cavity, need use high meticulous metal mask board and base plate laminating coating by vaporization, the flatness of metal mask board will directly influence coating film region and base plate integrality. In order to ensure the flatness of the metal mask plate, the deviation of a material grabbing and clamping mechanism in the manufacturing process is mainly reduced except for controlling the quality of the material.

At present, most of net stretching machine tables use external equipment or measuring instruments to debug flatness of the clamping mechanism, and once debugging is completed, the flatness of the clamping jaw mechanism cannot be detected or adjusted in real time in the net stretching process. As shown in fig. 1, when the left and right gripper mechanisms are located at the Loading end, the sensor is used to measure the left and right height difference to be 0.01mm, and as shown in fig. 2, when the gripper mechanisms move to the upper side of the frame for tensioning, the sensor is used again to measure the left and right flatness, and the deviation is found to be increased to 0.03mm, so that the gripper mechanisms are influenced by the slide rail and the force application during moving or using, and the left and right height difference is generated.

SUMMERY OF THE UTILITY MODEL

Therefore, a net tensioning device is needed to be provided, and the problem that the flatness of the grabbing and clamping mechanism cannot be adjusted in real time is solved.

In order to achieve the purpose, the inventor provides a net tensioning device, which comprises a net tensioning machine table, a grabbing and clamping slide rail and a grabbing and clamping mechanism, wherein the grabbing and clamping slide rail is oppositely arranged on the left side and the right side of the net tensioning machine table, the grabbing and clamping mechanism is movably arranged in the grabbing and clamping slide rail, the grabbing and clamping mechanism is used for tensioning nets, the net tensioning device further comprises a height adjusting unit, a sensor and a measuring plane, the grabbing and clamping mechanism is connected with the grabbing and clamping slide rail through the height adjusting unit, the height adjusting unit is used for adjusting the height of the grabbing and clamping mechanism, the sensor is arranged on the grabbing and clamping mechanism, the measuring plane is oppositely arranged on the left side and the right side of the net tensioning machine table and is parallel to the horizontal.

Further, the same side of the gripping mechanism is connected by a connecting rod.

Furthermore, the connecting rods are 2, and 2 connecting rods are respectively connected with the same side of the grabbing and clamping mechanism.

Furthermore, the device further comprises a correction plane, the correction plane is arranged in the middle of the net stretching machine and is positioned under the connecting rod, the sensor is movably arranged on the grabbing and clamping mechanism and the connecting rod, and the sensor is used for moving from the grabbing and clamping mechanism to the position over the correction plane through the connecting rod and acquiring the distance between the sensor and the correction plane.

Further, the sensor is a laser sensor.

Further, the sensor is a plurality of, and a plurality of the sensor sets up the both sides at every grabbing mechanism.

Further, still include the coating by vaporization cavity, the board setting of opening the net is in the coating by vaporization cavity.

The height adjusting device further comprises a driving unit, the driving unit is electrically connected with the sensor and the height adjusting unit of the gripping and clamping mechanism, and the driving unit is used for acquiring sensor data and controlling the height adjusting unit according to the sensor data.

Different from the prior art, the height between the gripping mechanism and the measuring plane is detected in real time through the sensor in the technical scheme, and the height adjusting unit is used for adjusting when the flatness of the gripping mechanism changes. The clamping mechanism can be prevented from being influenced in the moving or using process, the left and right height difference is generated, and the wrinkle problem of the mask plate in the screen opening process can be reduced.

Drawings

Fig. 1 is a schematic structural diagram of a stretching assisting device according to the present embodiment;

FIG. 2 is a schematic structural diagram illustrating a calibration of the first sensor according to the present embodiment;

fig. 3 is a schematic structural diagram of the second sensor for calibration according to the present embodiment.

Description of reference numerals:

1. a gripping mechanism;

11. a gripping and clamping slide rail;

12. a connecting rod;

2. a net-stretching machine;

3. a sensor;

31. a first sensor;

32. a second sensor;

33. a third sensor;

34. a fourth sensor;

4. measuring a plane;

5. and (4) evaporating a cavity.

Detailed Description

To explain technical contents, structural features, and objects and effects of the technical solutions in detail, the following detailed description is given with reference to the accompanying drawings in conjunction with the embodiments.

Referring to fig. 1 to 3, the present embodiment provides a net stretching device, which includes a net stretching machine 2, a gripping and clamping slide rail 11 and a gripping and clamping mechanism 1. The grabbing clamp sliding rail 11 is oppositely provided with the left side and the right side of the net stretching machine table 2, the grabbing clamp mechanism 1 is movably arranged in the grabbing clamp sliding rail 11, and the grabbing clamp mechanism 1 is used for stretching nets. The gripping mechanism 1 is a device for gripping materials, and can be a mechanical claw structure in the prior art. The height adjusting device further comprises a height adjusting unit, a sensor 3 and a measuring plane 4, the grabbing and clamping mechanism 1 is connected with the grabbing and clamping slide rail 11 through the height adjusting unit, and the height adjusting unit is used for adjusting the height of the grabbing and clamping mechanism 1. The sensor 3 is arranged on the gripping mechanism 1, and the sensor 3 is used for acquiring the distance between the sensor and a measuring plane. The measuring plane 4 is oppositely disposed on the left and right sides of the stretching machine 2 and parallel to the horizontal plane. Typically, the error between the measuring plane 4 and the horizontal plane is allowed to be ± 1um (micrometer). This application is provided with the sensor in order to solve the clamping jaw mechanism and can't adjust the problem of self height at the in-process of opening the net, on clamping jaw mechanism. The sensor sends out signals to the measuring plane or the correcting plane and receives the signals reflected by the measuring plane or the correcting plane. The height between the gripping mechanism and the measuring plane is detected in real time through the sensor, and the height adjusting unit is used for adjusting when the flatness of the gripping mechanism changes. The clamping mechanism can be prevented from being influenced in the moving or using process, the left and right height difference is generated, and the wrinkle problem of the mask plate in the screen opening process can be reduced.

In the present embodiment, referring to fig. 1, in order to more conveniently detect the flatness of the

gripping mechanism

1, 1 sensor 3 may be respectively disposed on two sides of each gripping mechanism 1. The sensors named here as the first sensor 31, the second sensor 32 on the first gripper mechanism, and the third sensor 33, the fourth sensor 34 on the second gripper mechanism, respectively.

The plane formed between the two sensors is the plane of the gripping mechanism, the two sensors respectively send signals to the measuring plane and receive the signals, and if the two sensors detect that the height between the gripping mechanism and the measuring plane is different, the flatness of the gripping mechanism is indicated to be in a problem. Such a structure can monitor the flatness of the gripping mechanism 1 more accurately. The two values can be further compared to check if they are within the tolerance. Of course, a plurality of sensors 3 can be respectively arranged on two sides of each gripper mechanism 1, so that errors can be reduced, and accuracy is improved.

Referring to fig. 1 to 3, in the present embodiment, it is to be noted that, during the movement of the gripper mechanism, the height of the four positions and the measuring plane is monitored by 4 sensors in real time, and the relative height values are fed back to the software simulation operation. The drive unit sends commands to control the height adjusting units of the two grabbing and clamping mechanisms to drive the grabbing and clamping mechanisms to lift, so that the flatness of the grabbing and clamping mechanisms is not affected by the sliding rails, and the left and right flatness errors are controlled within +/-10 um.

In the present embodiment, in order to monitor the flatness of both gripper mechanisms simultaneously, a connecting rod 12 is provided between both gripper mechanisms 1, so that both gripper mechanisms are connected by the connecting rod 12. Generally, the same sides of the two gripper mechanisms 1 are connected through 1 connecting rod 12, and the two mechanisms can advance or retreat together. Of course, the connecting rods are 2, and 2 connecting rods are respectively connected with the same side of the grabbing and clamping mechanism. Or the connecting rods may also be 3, 4 or even more.

In the present embodiment, the calibration plane serves as a reference plane for checking the accuracy of the height between the sensor 3 and the measurement plane. The error between the correction plane and the horizontal plane is allowed to be ± 1um (micrometer). The correction plane is arranged in the middle of the net stretching machine table 2, and the sensor is movably arranged on the grabbing and clamping mechanism 1 and the connecting rod 11. When the gripping mechanism 1 moves to the net-tensioning machine table 2, the sensor is used for moving from the gripping mechanism to a position right above the correction plane through the connecting rod and acquiring the distance between the sensor and the correction plane. It is possible to have a plurality of calibration planes, which are respectively arranged right above/below the measuring plane, so that the sensors are not movably arranged on the gripping and clamping mechanism 1 and the connecting rod 11.

Wherein, the sensor 3 is movably arranged on the gripping mechanism 1 and the connecting rod 12 in a pulley and sliding rail mode. A slide rail is arranged on the surfaces of the gripping mechanism 1 and the connecting rod 12, and the gripping mechanism 1 and the connecting rod 12 are connected. The sensor 3 is placed in a fixed box, a pulley is arranged at the bottom or on the side wall of the fixed box, then the sensor 3 placed in the fixed box is placed in a sliding rail through the pulley, and the pulley can slide in the sliding rail in a reciprocating mode. The movement of the sensor can be guided by arranging the cloth direction of the slide rail, for example, the sensor 3 positioned on the gripping mechanism 1 is moved to the connecting rod 12, so that the sensor 3 is positioned above the correction plane, and then the sensor is moved back to the gripping mechanism 1 after the correction.

Or the sensors are movably arranged on the grabbing and clamping mechanism and the connecting rod, grooves are formed in the surfaces of the grabbing and clamping mechanism and the connecting rod, one end of an elastic component (a spring, elastic rubber and the like) is arranged on the side wall, close to the grabbing and clamping mechanism or the connecting rod, of each groove, the other end of the elastic component is connected with the elastic component, the left and right moving blocks are sleeved in limiting strips on the side walls of the grooves, and the sensors are fixed on the limiting blocks. Through the flexible volume of control elastomeric element, can drive the movable block and remove in the spacing of recess lateral wall, and then realize that the sensor removes between grabbing clamp mechanism and connecting rod. It is sufficient that a plurality of sensors are provided with a plurality of such structures of grooves, elastic members, and the like. Or the sensors are movably arranged on the gripping mechanism and the connecting rod, and the surfaces of the gripping mechanism and the connecting rod are provided with conveyor belt structures, and the sensors are fixed on the conveyor belts and used for driving the sensors to move.

Referring to fig. 1, in the present embodiment, in order to realize that the gripper mechanism 1 can move to grip the material, a gripper rail 11 for moving the gripper mechanism is particularly provided. The movable arrangement of the gripping and clamping mechanism 1 in the gripping and clamping slide rail 11 can be that the bottom of the height adjusting unit is connected with a fixed plate through a connecting shaft, and the side wall of the fixed plate is provided with a pulley. The fixing plate of the height adjusting unit is inserted into the gripper rail 11 and supported by the inner wall of the gripper rail 11. Then the height adjusting unit slides on the side wall of the grabbing clamp slide rail 11 through a pulley to drive the grabbing clamp mechanism 1 to move.

In this embodiment, the height adjusting unit may be a hydraulic cylinder type telescopic rod structure, or a motor-driven telescopic rod structure, etc., and the gripping mechanism 1 may be controlled to ascend or descend only by electrically connecting a power device (such as a hydraulic cylinder or a motor). The height adjustment unit controls the connecting shafts of the two grabbing and clamping mechanisms to lift, so that the flatness of the grabbing and clamping mechanisms is not affected by the sliding rails, and the flatness error between the two grabbing and clamping mechanisms is controlled within +/-10 um (micrometer).

In the embodiment, the height adjusting device further comprises a driving unit which is electrically connected with the sensor and the height adjusting unit of the grabbing and clamping mechanism. The driving unit is used for acquiring sensor data and controlling the height adjusting unit according to the sensor data, so that the flatness of the grabbing and clamping mechanism is not affected by the sliding rail. The driving unit can also drive the sensor to move above the correction plane, and the driving unit can also control the gripper mechanism to move in the gripper sliding rail.

In the present embodiment, the sensor 3 is intended to realize the distance between the measuring sensor 3 and the measuring plane and the distance between the sensor 3 and the calibration plane. The sensor 3 transmits the height value to the driving unit, the driving unit simulates operation, and controls the height adjusting unit to drive the gripping mechanism to lift or not. The sensor may be a laser sensor, or may be a sensor having the same distance measurement function, such as an ultrasonic sensor or an infrared sensor.

Referring to fig. 1, in the present embodiment, a web-stretching machine 2 is a device for an evaporation process, the web-stretching machine 2 further includes an evaporation chamber 5, and the web-stretching machine 2, the gripping mechanism 1 and the gripping slide rail 11 are disposed in the evaporation chamber 5. The gripper slide rails 11 are generally connected to two sides of the evaporation cavity 5, so that the gripper mechanism 1 can move from the loading end to the loading end of the evaporation cavity 5.

Referring to fig. 2 and 3, the sensors of the two gripping mechanisms can monitor the heights of the four positions of the two gripping mechanisms in real time during the movement of the expanded net. The driving unit moves a first sensor 31 on the first gripper mechanism to be right above the correction plane through the connecting rod 12, the first sensor 31 measures the height between the first sensor and the correction plane, if the deviation of the left and right flatness of the gripper mechanism is detected to be overlarge, the driving unit controls the height adjusting unit to enable the position of the first gripper mechanism to be lifted or lowered to the proper height. Thereby making the flatness normal.

After the height is adjusted, the first sensor 31 is moved back to the corresponding gripper mechanism. Then the second sensor 32 on the first gripper mechanism is moved to the position right above the calibration plane through the connecting rod 12, if the flatness is too large, the height adjusting unit controls the gripper mechanism to ascend or descend to the proper height, and then the second sensor 32 is moved back. This calibration step is followed in turn by a third sensor 33 and a fourth sensor 34 on the second gripper mechanism. The height adjusting units of the two gripping mechanisms control the gripping mechanisms to ascend or descend, so that the heights of four directions are adjusted, and then correction can be completed. The clamping mechanism can be prevented from being influenced in the moving or using process, the left and right height difference is generated, and the wrinkle problem of the mask plate in the screen opening process can be reduced.

It should be noted that, although the above embodiments have been described herein, the scope of the present invention is not limited thereby. Therefore, based on the innovative concept of the present invention, the changes and modifications of the embodiments described herein, or the equivalent structure or equivalent process changes made by the contents of the specification and the drawings of the present invention, directly or indirectly apply the above technical solutions to other related technical fields, all included in the protection scope of the present invention.

Claims

1. The utility model provides a device of stretching net, includes a net board, grabs and presss from both sides slide rail and grabs and press from both sides the mechanism, grabs and presss from both sides the slide rail and set up the left and right sides of a net board relatively, grabs and press from both sides the mechanism activity and sets up in grabbing pressing from both sides the slide rail, grabs and presss from both sides the mechanism and be used for stretching net, its characterized in that still includes height adjusting unit, sensor and measuration plane, grabs and presss from both sides the mechanism and pass through height adjusting unit and grabs and press from both sides the slide rail connection, and height adjusting unit is used for adjusting the height of grabbing and pressing from both sides the mechanism, the sensor sets up on grabbing and pressing from both sides the mechanism.

2. A screening arrangement according to claim 1, wherein the same sides of the gripping means are connected by a connecting bar.

3. A screening apparatus according to claim 2, wherein there are 2 said connecting rods, 2 said connecting rods being connected to the same side of the gripping and clamping mechanism.

4. The net stretching device according to claim 2 or 3, further comprising a correction plane, wherein the correction plane is arranged in the middle of the net stretching machine platform and is located right below the connecting rod, the sensor is movably arranged on the gripping and clamping mechanism and the connecting rod, and the sensor is used for moving from the gripping and clamping mechanism to the position right above the correction plane through the connecting rod and acquiring the distance between the sensor and the correction plane.

5. A screening arrangement according to claim 1, wherein the sensor is a laser sensor.

6. A screening apparatus according to claim 5, wherein said plurality of sensors is provided on both sides of each gripper mechanism.

7. The screen device according to claim 1, further comprising an evaporation chamber, wherein the screen machine is disposed in the evaporation chamber.

8. The web apparatus according to claim 1, further comprising a driving unit electrically connecting the sensor and the height adjusting unit of the gripper mechanism, the driving unit being configured to acquire sensor data and control the height adjusting unit based on the sensor data.