CN212003523U - Micro Piezo Pump Module - Google Patents

Abstract

A micro piezoelectric pump module includes a piezoelectric pump, a microprocessor, a driving component, a current detector and a feedback circuit; the driving component, the current detector and the feedback circuit are electrically connected between the microprocessor and the piezoelectric pump. The microprocessor drives the piezoelectric pump to operate through the driving component, and the feedback circuit and the current detector confirm the operating status of the piezoelectric pump, thereby adjusting the actuation frequency, working voltage and power consumption of the piezoelectric pump.

Description

Micro Piezo Pump Module

【Technical field】

This case is about a miniature piezoelectric pump module, especially a miniature piezoelectric pump module that can adjust the working voltage and quickly confirm its operating frequency.

【Background technique】

With the rapid development of science and technology, the application of fluid delivery devices has become more and more diversified, such as industrial applications, biomedical applications, medical care, electronic cooling, etc., and even the recent popular wearable devices can be seen. It can be seen that the traditional pump has gradually tended to miniaturize the device, but it is difficult to reduce the size of the traditional pump to the millimeter level, so the current micro fluid delivery device can only use the piezoelectric pump structure as the micro fluid transmission device.

The piezoelectric pump applies voltage to the piezoelectric element, the piezoelectric element is deformed due to the piezoelectric effect, and its internal pressure changes to drive the pump for fluid transmission. Therefore, the working voltage on the piezoelectric element affects the efficiency of the piezoelectric pump. However, due to the influence of loss, heat source, etc., the working voltage currently supplied to the piezoelectric element will cause the working voltage to fluctuate and be insufficient, resulting in the problem that the current piezoelectric pump has unstable performance or reduced performance.

Moreover, when the piezoelectric pump is in continuous operation, since the piezoelectric element is rapidly deformed at a very high frequency, a large amount of heat energy is generated, which will affect the operating frequency of the piezoelectric element, thereby affecting the efficiency of the piezoelectric pump. When the operating frequency of the electric pump is distorted, it is necessary to reconfirm the operating frequency of the piezoelectric pump. Therefore, when the operating frequency of the piezoelectric pump is distorted, how to confirm the operating frequency in a short time is also a problem that the piezoelectric pump must solve at present.

【Content of utility model】

The main purpose of this case is to provide a micro piezoelectric pump structure, which obtains the working voltage of the piezoelectric element through a feedback circuit and transmits it back to the microprocessor, so that the microprocessor can control the working voltage on the piezoelectric element. .

In order to achieve the above purpose, a broader implementation aspect of this case is to provide a miniature piezoelectric pump module, including: a piezoelectric pump, the piezoelectric pump has a first electrode, a second electrode and a piezoelectric element; a a microprocessor, which outputs a control signal and a modulation signal; a driving component, which is electrically connected between the microprocessor and the piezoelectric pump, the driving component includes: a voltage transformer, which receives the modulation signal to output A working voltage is applied to the piezoelectric pump; an inverter element receives the control signal, and adjusts the first electrode and the second electrode of the piezoelectric pump to receive the working voltage or ground by the control signal. When the electrode receives the working voltage, the second electrode is grounded; when the first electrode is grounded, the second electrode receives the working voltage; the voltage difference between the first electrode and the second electrode makes the piezoelectric pump The piezoelectric element is deformed due to the piezoelectric effect for conveying fluid; and a current detector is electrically connected between the transforming element and the inverter element to detect the current value when the piezoelectric pump is actuated; and A feedback circuit is electrically connected between the piezoelectric pump and the microprocessor, and a feedback voltage is generated by the working voltage of the piezoelectric pump; wherein, the microprocessor outputs the a control signal, the inverter makes the piezoelectric pump actuate in the first frequency range according to the control signal, the current detector transmits its current value to the microprocessor, and the microprocessor selects the piezoelectric pump The frequency corresponding to the maximum current value in the first frequency interval is used as a first center frequency, and the microprocessor takes the first center frequency as a reference, and selects a frequency interval before and after as a second frequency interval to adjust the a control signal, the inverter makes the piezoelectric pump actuate in the second frequency range according to the control signal, and the current detector transmits its current value to the microprocessor, and the microprocessor selects the piezoelectric pump The frequency corresponding to the maximum current value of the pump in the second frequency range is used as a second center frequency, and the microprocessor takes the second center frequency as a reference, and takes one frequency range before and after as a third frequency range adjustment the control signal, the inverter makes the piezoelectric pump actuate in the third frequency range according to the control signal, and the current detector transmits its current value to the microprocessor, and the microprocessor selects the voltage The frequency corresponding to the maximum current value of the electric pump in the third frequency interval is used as an operating frequency, and the microprocessor transmits the control signal with the operating frequency to the inverter, and the inverter drives the voltage The electric pump operates at the operating frequency, and after the piezoelectric pump is activated, the inverter element outputs a control signal having the third frequency interval to the inverter element at every operating time interval to drive the piezoelectric pump to The third frequency interval operates, and the frequency corresponding to the maximum current value in the third frequency interval is taken as the operating frequency, so that the piezoelectric pump operates at the operating frequency; in addition, the microprocessor may The working voltage of the piezoelectric pump output by the transformer is adjusted according to the feedback voltage, and the power consumption of the piezoelectric pump can also be adjusted by adjusting the working voltage.

【Description of drawings】

FIG. 1 is a block diagram of the miniature piezoelectric pump module of the present invention.

FIG. 2 is a schematic circuit diagram of the miniature piezoelectric pump module of the present invention.

FIG. 3A is an equivalent circuit diagram of its feedback circuit in the first control step.

FIG. 3B is an equivalent circuit diagram of its feedback circuit under the second control step.

【Detailed ways】

Embodiments embodying the features and advantages of the present case will be described in detail in the description of the latter paragraph. It should be understood that this case can have various changes in different aspects, all of which do not depart from the scope of this case, and the descriptions and diagrams therein are essentially used for illustration rather than limiting this case.

Please refer to FIG. 1 , the miniature piezoelectric pump module 100 includes: a microprocessor 1 , a driving component 2 , a piezoelectric pump 3 and a feedback circuit 4 . The microprocessor 1 outputs a control signal and a modulation signal to the driving element 2, and the driving element 2 is electrically connected to the piezoelectric pump 3, and provides a working voltage for the piezoelectric pump 3 to operate through the control signal and the modulation signal, and feedback The circuit 4 provides feedback of an actuation working voltage of the piezoelectric pump 3 to the microprocessor 1, and the microprocessor 1 then makes the driving component 2 adjust the working voltage of the piezoelectric pump 3 through the control signal and the modulation signal, so that the piezoelectric pump 3 The actuating voltage is adjusted accordingly, wherein the actuating voltage is the voltage when the piezoelectric pump 3 is actually actuated.

Please refer to FIG. 1 and FIG. 2 , the microprocessor 1 has a control unit 11 , a conversion unit 12 and a communication unit 13 . The driving assembly 2 has a transformer 21 , an inverter 22 and a current detector 23 . The piezoelectric pump 3 has a first electrode 31 , a second electrode 32 and a piezoelectric element 33 . The communication unit 13 is electrically connected to the transformer 21 to output a modulation signal to the transformer 21 . The transformer 21 modulates the voltage into a working voltage according to the modulating signal, and then transmits the working voltage to the inverter 22 . The control unit 11 is electrically connected to the inverter element 22 , and is used to control whether the first electrode 31 and the second electrode 32 of the piezoelectric pump 3 receive a working voltage or ground through the inverter element 22 , thereby adjusting the piezoelectric pump 3 operating frequency.

The current detector 23 is electrically connected between the transformer element 21 and the inverter element 22, and detects the current value of the piezoelectric pump 3 when it is actuated to the microprocessor 1. In this case, the current detector 23 will return the voltage The current value when the electric pump 3 operates at each frequency is for the microprocessor 1 to judge.

Please continue to refer to FIG. 2 , the feedback circuit 4 is electrically connected between the piezoelectric pump 3 and the microprocessor 1 , and the feedback circuit 4 includes a first resistor R1 , a second resistor R2 , a third resistor R3 and A capacitor C. The first resistor R1 has a first contact 41a and a second contact 41b. The second resistor R2 has a third contact 42a and a fourth contact 42b. The third resistor R3 has a fifth contact 43a and a sixth contact 43b. The capacitor C has a seventh contact 44a and an eighth contact 44b. The first contact point 41a of the first resistor R1 is electrically connected to the first electrode 31 of the piezoelectric pump 3, the third contact point 42a of the second resistor R2 is electrically connected to the second electrode 32 of the piezoelectric pump 3, and the third contact point 42a of the third resistor R3 is electrically connected to the second electrode 32 of the piezoelectric pump 3. The sixth contact 43b is electrically connected to the eighth contact 44b of the capacitor C and grounded, and the fifth contact 43a of the third resistor R3 is electrically connected to the seventh contact 44a of the capacitor C, so that the third resistor R3 is connected to the first resistor in parallel with the capacitor C. The second contact 41b of R1, the fourth contact 42b of the second resistor R2 and the microprocessor 1 divide the working voltage between the first electrode 31 and the second electrode 32 of the piezoelectric pump 3 to generate feedback The voltage is fed back to the conversion unit 12 of the microprocessor 1 . The resistance values of the first resistor R1 and the second resistor R2 are the same, but not limited thereto. In addition, the function of capacitor C is to filter to prevent noise from interfering with the feedback voltage.

As mentioned above, the transformer 21 further includes a voltage output terminal 211 , a transformer feedback terminal 212 and a transformer feedback circuit 213 . The voltage output terminal 211 is electrically connected to the inverter element 22 via the current detector 23 . The transformer feedback circuit 213 is electrically connected between the microprocessor 1 and the transformer feedback terminal 212, wherein the transformer feedback circuit 213 includes a fourth resistor R4 and a fifth resistor R5, and the fourth resistor R4 has a first resistor R4. A terminal 213a and a second terminal 213b, the fifth resistor R5 has a third terminal 213c and a fourth terminal 213d. The first terminal 213a of the fourth resistor R4 is electrically connected to the voltage output terminal 211 . The third terminal 213c of the fifth resistor R5 is electrically connected to the second terminal 213b of the fourth resistor R4 and the transformer feedback terminal 212, and the fourth terminal 213d of the fifth resistor R5 is grounded. The fifth resistor R5 is a variable resistor. In this embodiment, the fifth resistor R5 is a digital variable resistor and has a communication interface 213e. The communication interface 213e is electrically connected to the communication unit 13 of the microprocessor 1. The communication unit 13 can transmit the modulation signal to the digital variable resistor (the fifth resistor R5 ) to adjust its resistance value. After the working voltage output by the voltage output terminal 211 of the transformer 21 is divided by the fourth resistor R4 and the fifth resistor R5 of the transformer feedback circuit 213 , the divided working voltage is returned to the transformer feedback terminal 212 . It is transmitted to the transformer 21, for the transformer 21 to refer to whether the output working voltage conforms to the ideal working voltage. Close to the ideal working voltage, and finally adjust the working voltage to be consistent with the ideal working voltage. The working voltage is the actual voltage output from the voltage output terminal 211 of the transformer 21 , and the ideal working voltage is the modulation signal transmitted by the microprocessor 1 .

Please continue to refer to FIG. 2, the inverter 22 includes: a buffer gate 221, an inverter 222, a first P-type MOSFET 223, a second P-type MOSFET 224, A first N-type MOSFET 225 and a second N-type MOSFET 226 . The buffer gate 221 has a buffer input terminal 221a and a buffer output terminal 221b. The inverter 222 has an inverting input terminal 222a and an inverting output terminal 222b. The first P-type MOSFET 223, the second P-type MOSFET 224, the first N-type MOSFET 225 and the second N-type MOSFET 226 all have A gate G, a drain D and a source S. The buffer input terminal 221a of the buffer gate 221 and the inverting input terminal 222a of the inverter 222 are electrically connected to the control unit 11 of the microprocessor 1 for receiving a control signal, and the control signal may be but not limited to a pulse Wave width modulation signal (PWM). The buffer output terminal 221 b of the buffer gate 221 is electrically connected to the gate G of the first P-type MOSFET 223 and the gate G of the first N-type MOSFET 225 . The inverting output terminal 222 b of the inverter 222 is electrically connected to the gate G of the second P-type MOSFET 224 and the gate G of the second N-type MOSFET 226 . The source S of the first P-type MOSFET 223 and the source S of the second P-type MOSFET 224 are electrically connected to the voltage output terminal 211 of the transformer 21 via the current detector 23 for receiving The working voltage output by the transformer 21 . The drain D of the first P-type MOSFET 223 is electrically connected to the drain D of the first N-type MOSFET 225 and the second electrode 32 of the piezoelectric pump 3 . The drain D of the second P-type MOSFET 224 is electrically connected to the drain D of the second N-type MOSFET 226 and the first electrode 31 of the piezoelectric pump 3 . The source S of the first N-type MOSFET 225 is electrically connected to the source S of the second N-type MOSFET 226 and grounded.

Continuing from the above, the first P-type MOSFET 223, the second P-type MOSFET 224, the first N-type MOSFET 225, and the second N-type MOSFET 225 are described above. The field effect transistor 226 forms an H-bridge structure, which is used to convert the working voltage (DC) output by the transformer 21 into AC to the piezoelectric pump 3. Therefore, the first P-type MOSFET 223 and the second P-type The MOSFET 224 needs to receive the opposite signal, the first N-type MOSFET 225 and the second N-type MOSFET 226 are the same, so the control signal transmitted by the microprocessor 1 is used. Before being transmitted to the second P-type MOSFET 224, the control signal of the second P-type MOSFET 224 and the first P-type MOSFET 223 are reversed through the inverter 222. However, the first P-type MOSFET 223 must be connected to the control signal together with the second P-type MOSFET 224, so a buffer is provided in front of the first P-type MOSFET 223 The gate 221 enables the first P-type MOSFET 223 and the second P-type MOSFET 224 to receive opposite signals synchronously, the first N-type MOSFET 225 and the second N-MOSFET The same is true for the MOSFET 226; in the first control step, the first P-type MOSFET 223 and the second N-type MOSFET 226 are turned on, and the second P-type MOSFET is turned on. When the MOSFET 224 and the first N-type MOSFET 225 are turned off, the operating voltage will be transmitted to the second electrode 32 of the piezoelectric pump 3 through the first P-type MOSFET 223 , the first electrode 31 of the piezoelectric pump 3 is grounded because the second N-type MOSFET 226 is turned on. In the second control step, the first P-type MOSFET 223, the second N-type MOSFET 226 are turned off, the second P-type MOSFET 224, the first N-type gold When the MOSFET 225 is turned on, the operating voltage will be transmitted to the first electrode 31 of the piezoelectric pump 3 through the second P-type MOSFET 224, and the second electrode 32 of the piezoelectric pump 3 The first N-type MOSFET 225 is turned on and grounded. By repeating the above first control step and second control step, the piezoelectric element 33 of the piezoelectric pump 3 can be deformed by the piezoelectric effect due to the working voltage or grounding received by the first electrode 31 and the second electrode 32 , the pressure of the chamber (not shown) inside the piezoelectric pump 3 is changed to continuously transmit the fluid.

The feedback circuit 4 continuously receives the working voltage or grounding of the first electrode 31 and the second electrode 32 of the piezoelectric pump 3 . In the above-mentioned first control step, the second electrode 32 is the working voltage, and the first electrode 31 is grounded. At this time, the equivalent circuit of the feedback circuit 4 is shown in FIG. 3A , the first resistor R1 will be connected to the third resistor R3 Parallel connection, the feedback voltage at this time is (R1//R3)÷[(R1//R3)+R2]×working voltage. In addition, in the second control step, the first electrode 31 is the working voltage, and the second electrode 32 is grounded. At this time, the equivalent circuit of the feedback circuit 4 is shown in FIG. 3B , and the second resistor R2 is connected in parallel with the third resistor R3 , the feedback voltage at this time is (R2//R3)÷[(R2//R3)+R1]×working voltage. The feedback circuit 4 transmits the feedback voltage to the microprocessor 1, and the microprocessor 1 receives the feedback voltage to determine the current actuation voltage of the piezoelectric pump 3 and compares it with the working voltage. At the same time, the conversion unit 12 converts the feedback voltage into a digital signal, and the modulated signal converted into a digital signal is transmitted from the communication unit 13 to the communication interface 213e to adjust the fifth resistor R5 (digital variable resistor). Finally, after the working voltage output by the voltage output terminal 211 of the transformer 21 is divided by the fourth resistor R4 and the fifth resistor R5 of the transformer feedback circuit 213 , the divided working voltage is sent to the transformer feedback terminal 212 . It is sent back to the transformer 21 for the transformer 21 to refer to whether the output working voltage conforms to the ideal working voltage. Approach the ideal working voltage, and finally adjust the working voltage to be consistent with the ideal working voltage. Through the above steps, the working voltage accepted by the piezoelectric pump 3 can be maintained at the ideal working voltage, so that the piezoelectric pump 3 can continue to operate at a relatively high level. Operates at optimum performance.

Please continue to refer to FIG. 1 and FIG. 2. First, the microprocessor 1 outputs a control signal having a first frequency range (eg, 5KHz to 20KHz), and the inverter 22 makes the piezoelectric pump 3 operate at each frequency in the first frequency range. Act in sequence. The current value when the piezoelectric pump 3 operates at all frequencies in the first frequency range is transmitted to the microprocessor 1 by the current detector 23, and the microprocessor 1 selects the maximum current value and the corresponding piezoelectric pump 3. The operating frequency is taken as a first center frequency (such as 20KHz), and then the first center frequency is used as the center reference, and a frequency segment (such as 6KHz) is taken before and after it, and a frequency segment is taken before and after the first center frequency. The frequency range is used as a second frequency range (eg 14KHz to 26KHz). The microprocessor 1 outputs a control signal having a second frequency interval. The inverter 22 controls the piezoelectric pump 3 to operate in sequence at each frequency in the second frequency interval, and then the current detector 23 transmits the piezoelectric pump 3 that operates at each frequency in the second frequency interval. The current value when the piezoelectric pump 3 operates at all frequencies in the second frequency range is transmitted to the microprocessor 1 by the current detector 23, and the microprocessor 1 selects the maximum current value and the corresponding piezoelectric pump 3. The operating frequency is taken as a second center frequency (such as 24KHz), and then the second center frequency is used as the center reference, and a frequency segment (such as 4KHz) is taken before and after it, and a frequency segment is taken before and after the second center frequency. The frequency range of , as a third frequency interval (eg 20KHz to 28KHz). The microprocessor 1 outputs a control signal having a third frequency interval, the inverter 22 controls the piezoelectric pump 3 to operate in sequence at each frequency in the third frequency interval, and the piezoelectric pump 3 operates at all frequencies in the third frequency interval. The current value during the actuation is transmitted to the microprocessor 1 by the current detector 23, and the microprocessor 1 selects the actuation frequency of the piezoelectric pump 3 corresponding to the maximum current value as a third center frequency (eg 27KHz) , and finally use the third center frequency as the operating frequency of the piezoelectric pump 3 to drive the piezoelectric pump 3 to act; in addition, the piezoelectric pump 3 will generate heat energy due to the rapid deformation of the piezoelectric element 33 when the piezoelectric pump 3 is continuously actuated, resulting in the operation of the piezoelectric pump 3. Therefore, after the piezoelectric pump 3 is actuated, the microprocessor 1 will output a control signal in the third frequency range (20KHz to 28KHz) at every interval of operation time. , the inverter 22 controls the piezoelectric pump 3 to act in sequence at each frequency in the third frequency interval, and the current value when the piezoelectric pump 3 is actuated at all frequencies in the third frequency interval is transmitted by the current detector 23 to Microprocessor 1, the microprocessor 1 selects the frequency corresponding to the maximum current value as the operating frequency of the piezoelectric pump 3; the aforementioned data such as the frequency interval and the center frequency are only examples for the convenience of understanding, not This is the limit.

As mentioned above, the range of the first frequency interval is greater than the scope of the second frequency interval, and the scope of the second frequency interval is greater than the scope of the third frequency interval.

In addition, in this case, the current of the piezoelectric pump 3 during operation can be obtained through the current detector 23, and the operating voltage of the piezoelectric pump 3 can be obtained from the feedback circuit 4, and the operation of the piezoelectric pump 3 can be adjusted by the microprocessor 1. voltage, so that when the power consumption of the piezoelectric pump 3 is too large, the power consumption of the piezoelectric pump 3 can be adjusted by reducing the working voltage, and a preset power value can also be set. When the power consumption of the piezoelectric pump 3 is greater than ( or equal to) the preset power value, reduce the working voltage output to the piezoelectric pump 3 to avoid the problem of power consumption of the piezoelectric pump 3 .

To sum up, this application provides a miniature piezoelectric pump module, which uses a current detector and a feedback circuit to confirm the operation of the piezoelectric pump. The current value of the piezoelectric pump is used to obtain the operating frequency of the piezoelectric pump, and the first frequency interval, the second frequency interval and the third frequency interval are obtained respectively, and when the piezoelectric pump is operated for a long time and the operating frequency is distorted, By directly using the third frequency range to obtain the best operating frequency, the time for confirming the operating frequency is greatly reduced, to avoid the problem of reducing the efficiency of the piezoelectric pump when searching for the operating frequency, and to ensure the continuous maintenance of the best transmission. The utility model can solve the problem of inconsistency and inconsistency caused by the unstable, floating, or insufficient working voltage of the piezoelectric pump in the prior art. Power, reduce power loss, have great industrial use value, and apply for it in accordance with the law.

This case can be modified by Shi Jiangsi, a person familiar with this technology, but all of them do not deviate from the protection of the scope of the patent application attached.

【Symbol Description】

100: Micro Piezo Pump Module

1: Microprocessor

11: Control unit

12: Conversion unit

13: Communication unit

2: Drive components

21: Transformer

211: Voltage output terminal

212: Transformer feedback terminal

213: Transformer feedback circuit

213a: first endpoint

213b: Second endpoint

213c: Third endpoint

213d: Fourth endpoint

213e: Communication Interface

22: Inverter parts

221: Buffer gate

221a: buffer input

221b: Buffered output

222: Inverter

222a: Inverting input terminal

222b: Inverting output terminal

223: The first P-type MOSFET

224: Second P-type MOSFET

225: The first N-type MOSFET

226: Second N-type MOSFET

23: Current detector

3: Piezo Pump

31: The first electrode

32: Second electrode

33: Piezoelectric

4: Feedback circuit

41a: first contact

41b: second contact

42a: third contact

42b: Fourth contact

43a: Fifth Contact

43b: sixth contact

44a: seventh contact

44b: Eighth Contact

C: Capacitor

D: Drain

G: Gate

R1: first resistor

R2: second resistor

R3: third resistor

R4: Fourth resistor

R5: Fifth resistor

S: source

Claims (12)

1. a miniature piezoelectric pump module, is characterized in that, comprises: a piezoelectric pump, the piezoelectric pump has a first electrode, a second electrode and a piezoelectric element; a microprocessor, outputting a control signal and a modulation signal; A driving component is electrically connected between the microprocessor and the piezoelectric pump, and the driving component includes: a transformer receiving the modulating signal to output a working voltage to the piezoelectric pump; and an inverter, receiving the control signal, and adjusting the first electrode and the second electrode of the piezoelectric pump to receive the working voltage or ground by the control signal, when the first electrode receives the working voltage, the first electrode and the second electrode of the piezoelectric pump receive the working voltage. Two electrodes are grounded; when the first electrode is grounded, the second electrode receives the working voltage; the piezoelectric element of the piezoelectric pump is generated by the piezoelectric effect through the voltage difference between the first electrode and the second electrode deformation to transport fluids; and a current detector, electrically connected between the transformer and the inverter, to detect the current value when the piezoelectric pump is actuated; and a feedback circuit, which is electrically connected between the piezoelectric pump and the microprocessor, and generates a feedback voltage by the working voltage of the piezoelectric pump; Wherein, the microprocessor outputs the control signal with a first frequency range, the inverter element makes the piezoelectric pump actuate in the first frequency range according to the control signal, and the current detector transmits its current value To the microprocessor, in addition, the microprocessor can adjust the working voltage of the piezoelectric pump output by the transformer according to the feedback voltage, and can also adjust the working voltage to improve the power consumption of the piezoelectric pump. 2 . The miniature piezoelectric pump module of claim 1 , wherein the microprocessor outputs the control signal in a second frequency range, and the inverter makes the piezoelectric pump in the first frequency range according to the control signal. 3 . operating in two frequency ranges, the current detector transmits its current value to the microprocessor; and The microprocessor outputs the control signal in a third frequency range, the inverter makes the piezoelectric pump operate in the third frequency range according to the control signal, and the current detector transmits its current value to the microcomputer processor. 3 . The micro piezoelectric pump module of claim 2 , wherein the first frequency interval is greater than the second frequency interval, and the second frequency interval is greater than the third frequency interval. 4 . 4. The miniature piezoelectric pump module of claim 1, wherein the feedback circuit comprises a first resistor, a second resistor, a third resistor and a capacitor, and the first resistor has a first resistor contact and a second contact, the second resistor has a third contact and a fourth contact, the third resistor has a fifth contact and a sixth contact, the capacitor has a seventh contact and an eighth contact, The first contact of the first resistor is electrically connected to the first electrode of the piezoelectric pump, the third contact of the second resistor is electrically connected to the second electrode of the piezoelectric pump, and the sixth contact of the third resistor is electrically connected to the second electrode of the piezoelectric pump. The contact is electrically connected to the eighth contact of the capacitor and grounded, the fifth contact of the third resistor is electrically connected to the seventh contact of the capacitor, and the third resistor is electrically connected to the first resistor after being connected in parallel with the capacitor The second contact, the fourth contact of the second resistor and the microprocessor make the working voltage between the first electrode and the second electrode of the piezoelectric pump divided to generate the feedback voltage feedback to the microprocessor. 5 . The micro piezoelectric pump module of claim 4 , wherein the resistance values of the first resistor and the second resistor are the same. 6 . 6 . The miniature piezoelectric pump module of claim 5 , wherein the transformer further comprises a voltage output terminal, a transformer feedback terminal and a transformer feedback circuit, and the voltage output terminal is subjected to current The detector is electrically connected to the inverter, and the transformer feedback circuit is electrically connected between the microprocessor and the transformer feedback terminal. 7 . The micro piezoelectric pump module of claim 6 , wherein the transformer feedback circuit comprises a fourth resistor and a fifth resistor, and the fourth resistor has a first terminal and a second terminal, the fifth resistor has a third terminal and a fourth terminal, the first terminal of the fourth resistor is electrically connected to the voltage output terminal, and the third terminal of the fifth resistor is electrically connected to the voltage output terminal of the fourth resistor The second terminal and the transformer feedback terminal, and the fourth terminal is grounded. 8. The micro piezoelectric pump module of claim 7, wherein the fifth resistor is a variable resistor. 9 . The micro piezoelectric pump module of claim 8 , wherein the fifth resistor is a digital variable resistor. 10 . 10. The miniature piezoelectric pump module of claim 9, wherein the microprocessor further comprises a conversion unit and a communication unit, the communication unit is connected to the digital variable resistor, and the conversion unit receives the feedback voltage, and convert the feedback voltage into the modulating signal of a digital signal, and then transmit it to the digital variable resistor through the communication unit, and modulate the output of the transformer by changing the digital variable resistor voltage, so that the working voltage approaches an ideal working voltage. 11. The miniature piezoelectric pump module of claim 9, wherein the inverter element comprises: a buffer gate, which has a buffer input end and a buffer output end; an inverter with an inverting input terminal and an inverting output terminal; A first P-type MOSFET, a second P-type MOSFET, a first N-type MOSFET and a second N-type MOSFET, the first A P-type MOSFET, the second P-type MOSFET, the first N-type MOSFET and the second N-type MOSFET each have a gate pole, a drain and a source; The buffer input terminal of the buffer gate and the inverting input terminal of the inverter are electrically connected to the microprocessor for receiving the control signal, and the buffer output terminal of the buffer gate is electrically connected to the first P-type The gate of the MOSFET and the gate of the first N-type MOSFET, the inverting output terminal of the inverter is electrically connected to the gate of the second P-type MOSFET electrode and the gate of the second N-type MOSFET, the source of the first P-type MOSFET and the source of the second P-type MOSFET are connected by a current detector The voltage output terminal of the transformer is electrically connected to receive the working voltage. The drain of the first P-type MOSFET is electrically connected to the drain of the first N-type MOSFET and the voltage. The second electrode of the electric pump, the drain of the second P-type MOSFET is electrically connected to the drain of the second N-type MOSFET and the first electrode of the piezoelectric pump, the The source of the first N-type MOSFET is electrically connected to the source of the second N-type MOSFET and grounded. 12 . The micro piezoelectric pump module of claim 11 , wherein the control signal is a pulse width modulation signal. 13 .

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