CN211989986U

CN211989986U - Silicon wafer alkali liquor cleaning machine

Info

Publication number: CN211989986U
Application number: CN202020534460.3U
Authority: CN
Inventors: 李伟; 戴磊; 王波波; 吴斌华; 夏康; 蓝希旺
Original assignee: Zhonggan New Energy Co ltd
Current assignee: Zhonggan New Energy Co ltd
Priority date: 2020-04-13
Filing date: 2020-04-13
Publication date: 2020-11-24
Anticipated expiration: 2030-04-13

Abstract

The utility model discloses a silicon chip alkali lye cleaning machine, the power distribution box comprises a box body, the both sides of box are provided with a plurality of liquid distribution pipes, and is a plurality of both sides the bottom fixedly connected with total liquid pipe of liquid distribution pipe, the bottom fixedly connected with drive case of box, the inside of drive case is provided with the circulating pump, the top both sides of circulating pump are provided with a plurality of pipettes, both sides a plurality of spray pipes of fixedly connected with of center department of total liquid pipe, it is a plurality of the top of spray pipe is passed the box and is upwards extended, and is a plurality of the extension of spray pipe is provided with the shower nozzle, the inside bottom both sides of box are provided with the cushion, the top of cushion is provided with the silicon chip basket, the front side of circulating pump is provided with the drain pipe, drain. The utility model discloses a set up the circulating pump, through the flow velocity of the internal alkali lye of circulating pump acceleration box, wash the silicon chip through the alkali lye itself that flows fast, air circumstance can avoid abluent influence.

Description

Silicon wafer alkali liquor cleaning machine

Technical Field

The utility model relates to a silicon chip alkali lye cleaning machine field especially relates to a silicon chip alkali lye cleaning machine.

Background

Most of existing alkali cleaning machines clean silicon wafers in a mode of stirring alkali liquor by wind power or impellers, and the silicon wafers are possibly polluted by air entering the impellers and the fan in the cleaning process, so that the requirement on environment is high.

SUMMERY OF THE UTILITY MODEL

The utility model aims at solving the defects existing in the prior art and providing a silicon wafer alkali liquor cleaning machine.

In order to achieve the above purpose, the utility model adopts the following technical scheme: the utility model provides a silicon chip alkali lye cleaning machine, includes the box, the both sides of box are provided with a plurality of liquid pipes that divide, and are a plurality of both sides divide the total liquid pipe of the bottom fixedly connected with of liquid pipe, the bottom fixedly connected with drive case of box, the inside of drive case is provided with the circulating pump, the top both sides of circulating pump are provided with a plurality of pipettes, both sides the center department fixedly connected with a plurality of spray pipes of total liquid pipe, and is a plurality of the box is passed and upwards extends on the top of spray pipe, and is a plurality of the extension department of spray pipe is provided with the shower nozzle, the inside bottom both sides of box are provided with the cushion, the top of cushion is provided with the silicon chip basket, the front side of circulating pump is provided with the drain.

As a further description of the above technical solution:

the box body is provided with through holes at the corresponding connection parts with the plurality of liquid separating pipes.

As a further description of the above technical solution:

the top ends of the pipette on the two sides are connected with the box body, and through holes are formed in the corresponding connection positions of the box body and the pipette.

As a further description of the above technical solution:

the inside of the box body is provided with alkali liquor, and the alkali liquor submerges the opening parts of the box body and the liquid distributing pipe.

As a further description of the above technical solution:

the inside of circulating pump is provided with gear pump and filter screen.

As a further description of the above technical solution:

the total liquid pipe enters the interior of the driving box from two sides of the driving box, and openings are formed in the two sides of the driving box at positions corresponding to the total liquid pipe.

The utility model discloses following beneficial effect has:

1. the utility model discloses a set up the circulating pump, through the flow velocity of the internal alkali lye of circulating pump acceleration box, wash the silicon chip through the alkali lye itself that flows fast, air circumstance can avoid abluent influence.

2. The utility model discloses a set up spray pipe and pipette, one inhale and exhale between carrying out abundant disturbance to alkali lye, the alkali lye that the branch liquid pipe of both sides got into makes the interior alkali lye of box fluctuate fast simultaneously, washs the silicon chip.

Drawings

FIG. 1 is a front view of a silicon wafer alkali cleaning machine provided by the present invention;

FIG. 2 is a top view of the silicon wafer alkali cleaning machine of the present invention;

FIG. 3 is a schematic view of a liquid separating tube of the silicon wafer alkali cleaning machine according to the present invention.

Illustration of the drawings:

1. a box body; 2. a liquid separating pipe; 3. cushion blocks; 4. a pipette; 5. a main liquid pipe; 6. a circulation pump; 7. a water spray pipe; 8. a liquid outlet pipe; 9. a silicon wafer basket; 10. a drive box.

Detailed Description

The technical solutions in the embodiments of the present invention will be described clearly and completely with reference to the accompanying drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only some embodiments of the present invention, not all embodiments. Based on the embodiments in the present invention, all other embodiments obtained by a person skilled in the art without creative work belong to the protection scope of the present invention.

In the description of the present invention, it should be noted that the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", and the like indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings, and are only for convenience of description and simplification of description, but do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and thus, should not be construed as limiting the present invention; the terms "first," "second," and "third" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance, and furthermore, unless otherwise explicitly stated or limited, the terms "mounted," "connected," and "connected" are to be construed broadly and may be, for example, fixedly connected, detachably connected, or integrally connected; can be mechanically or electrically connected; they may be connected directly or indirectly through intervening media, or they may be interconnected between two elements. The specific meaning of the above terms in the present invention can be understood in specific cases to those skilled in the art.

Referring to fig. 1-3, the present invention provides an embodiment: a silicon wafer alkali cleaning machine comprises a box body 1, a plurality of liquid separating pipes 2 are arranged on two sides of the box body 1, sucked alkali liquor is fed into the box body 1 from the inside, a main liquid pipe 5 is fixedly connected to the bottom ends of the liquid separating pipes 2 on the two sides, inlets of the liquid separating pipes 2 are connected in a unified manner, a driving box 10 is fixedly connected to the bottom end of the box body 1, an element for driving the alkali liquor to flow is arranged inside the driving box 10, a circulating pump 6 is arranged inside the driving box 10, so that the alkali liquor can have a self-cleaning circulation process, a plurality of liquid absorbing pipes 4 are arranged on two sides of the top end of the circulating pump 6, the alkali liquor is sucked, a plurality of water spraying pipes 7 are fixedly connected to the center of the main liquid pipes 5 on the two sides, the sucked alkali liquor is sprayed out from the water spraying pipes 7, the top ends of the plurality of water spraying pipes 7 penetrate through the box body 1, bed hedgehopping guarantees that the silicon chip can wash from the bottom, and the top of cushion 3 is provided with silicon chip basket 9 for deposit the silicon chip, and the front side of circulating pump 6 is provided with drain pipe 8, is connected the export of circulating pump 6 with total liquid pipe 5, drain pipe 8 and total liquid pipe 5 fixed connection.

The box body 1 is provided with through holes at the corresponding connection parts with the plurality of liquid separating pipes 2. The top ends of a plurality of pipettes 4 on two sides are connected with the box body 1, and the box body 1 is provided with through holes at the corresponding connection positions with the pipettes 4. The inside of box 1 is provided with alkali lye, carries out abluent liquid to the silicon chip, and alkali lye submerges the opening part of box 1 and branch liquid pipe 2. The inside of circulating pump 6 is provided with gear pump and filter screen. The liquid collecting pipe 5 enters the inside of the driving box 10 from both sides of the driving box 10, and both sides of the driving box 10 are provided with openings at the corresponding positions to the liquid collecting pipe 5.

The working principle is as follows: starting the circulating pump 6, circulating pump 6 inhales the interior alkali lye of box 1 through pipette 4, alkali lye is through filtering after inhaling, from 8 discharges of drain pipe, alkali lye after the discharge is through total liquid pipe 5 of both sides, then give a plurality of minutes liquid pipe 2 through total liquid pipe 5 subdividing, make alkali lye get back to the inside of box 1, form the vortex of a circulation in the inside of box 1, wash the silicon chip through the vortex, upwards spray water in center department through spray pipe 7, and form the torrent between the water with the branch liquid pipe 2 entering of both sides, can carry out abundant washing to the silicon chip, the dirt on the silicon chip is held back by the filter screen simultaneously, avoid getting into the circulation.

Finally, it should be noted that: although the present invention has been described in detail with reference to the foregoing embodiments, it will be apparent to those skilled in the art that modifications and variations can be made in the embodiments or in part of the technical features of the embodiments without departing from the spirit and the scope of the invention.

Claims

1. The utility model provides a silicon chip alkali lye cleaning machine, includes box (1), its characterized in that: a plurality of liquid distributing pipes (2) are arranged on two sides of the box body (1), the bottom ends of the liquid distributing pipes (2) on the two sides are fixedly connected with a main liquid pipe (5), the bottom end of the box body (1) is fixedly connected with a driving box (10), a circulating pump (6) is arranged inside the driving box (10), a plurality of liquid suction pipes (4) are arranged on two sides of the top end of the circulating pump (6), a plurality of water spray pipes (7) are fixedly connected at the centers of the main liquid pipes (5) on two sides, the top ends of the plurality of water spray pipes (7) penetrate through the box body (1) and extend upwards, spray heads are arranged at the extending positions of the plurality of water spray pipes (7), cushion blocks (3) are arranged on two sides of the bottom end in the box body (1), a silicon wafer basket (9) is arranged at the top end of each cushion block (3), the front side of circulating pump (6) is provided with drain pipe (8), drain pipe (8) and total liquid pipe (5) fixed connection.

2. The silicon wafer alkali liquor cleaning machine as claimed in claim 1, wherein: the box body (1) is provided with through holes at the corresponding connection parts of the plurality of liquid distributing pipes (2).

3. The silicon wafer alkali liquor cleaning machine as claimed in claim 1, wherein: the top ends of the pipette tubes (4) on the two sides are connected with the box body (1), and through holes are formed in the corresponding connection positions of the box body (1) and the pipette tubes (4).

4. The silicon wafer alkali liquor cleaning machine as claimed in claim 1, wherein: the inside of the box body (1) is provided with alkali liquor, and the alkali liquor submerges the openings of the box body (1) and the liquid separating pipe (2).

5. The silicon wafer alkali liquor cleaning machine as claimed in claim 1, wherein: and a gear pump and a filter screen are arranged in the circulating pump (6).

6. The silicon wafer alkali liquor cleaning machine as claimed in claim 1, wherein: the main liquid pipe (5) enters the interior of the driving box (10) from two sides of the driving box (10), and openings are formed in the two sides of the driving box (10) at positions corresponding to the main liquid pipe (5).