CN211980558U

CN211980558U - Upper electrode device

Info

Publication number: CN211980558U
Application number: CN202021059883.0U
Authority: CN
Inventors: 邹耀辉; 林坤道; 林祺勋
Original assignee: Zhouye Investment Co ltd
Current assignee: Zhouye Investment Co ltd
Priority date: 2020-04-22
Filing date: 2020-06-10
Publication date: 2020-11-20
Anticipated expiration: 2030-06-10
Also published as: TWM598515U

Abstract

An upper electrode device comprises an electrode plate, a plurality of ceramic tubes and a protective layer, wherein the electrode plate is provided with a plurality of through holes which are communicated up and down, the ceramic tubes are respectively arranged in the through holes, and the protective layer covers the bottom side of the electrode plate. Each ceramic tube comprises a top ring surface and a bottom ring surface which are opposite up and down, and an inner tube surface and an outer tube surface which are connected between the top ring surface and the bottom ring surface and are spaced from each other. Each bottom ring surface comprises a first ring surface portion which is annular and extends inwards from the corresponding outer pipe surface in the radial direction, and a second ring surface portion which is annular and extends inwards from the first ring surface portion in the radial direction and upwards to be connected with the corresponding inner pipe surface. The second annular surface part of each ceramic tube connected with the inner tube surface has the characteristic of difficult damage, and the problem of peeling and polluting the manufacturing process cannot be damaged.

Description

Upper electrode device

Technical Field

The present invention relates to an electrode assembly for a dry etching apparatus, and more particularly to an upper electrode assembly for plasma etching.

Background

Referring to fig. 1 to 3, a conventional top electrode device is adapted for dry etching and is adapted to be mounted on a reaction chamber 11 and is adapted to be disposed above a bottom electrode 12.

The upper electrode assembly includes an electrode plate 13, a plurality of ceramic tubes 14 plugged in the electrode plate 13, and a protective layer 15 covering the bottom side of the electrode plate 13.

The electrode plate 13 includes a top surface 131 and a bottom surface 132 opposite to each other, and a plurality of through holes 133 extending from the top surface 131 to the bottom surface 132. Each through hole 133 is used for inserting and plugging a respective ceramic tube 14 therein.

Each ceramic tube 14 is tightly inserted into the electrode plate 13 and includes a top ring surface 141 and a bottom ring surface 142 opposite to each other, and an inner tube surface 143 and an outer tube surface 144 connected to the electrode plate 13 and extending between the top ring surface 141 and the bottom ring surface 142 in a cylindrical shape with an inner space and an outer space therebetween.

After the conventional upper electrode device is used for a long time, the connection portion between the inner tube surface 143 and the corresponding bottom ring surface 142 of each ceramic tube 14 is often damaged by erosion, and a fine peeling and a contamination process are generated as shown in fig. 3, which needs to be further improved.

Disclosure of Invention

The utility model aims to provide a: an upper electrode assembly is provided that overcomes at least one of the shortcomings of the prior art.

The utility model discloses go up the electrode assembly, contain and be formed with a plurality of electrode plate, a plurality of setting respectively that link up through the through hole about a plurality of ceramic pipe in the through hole, and cover the protective layer of electrode plate bottom side, each ceramic pipe include opposite top anchor ring and end anchor ring from top to bottom, and connect in the top anchor ring reaches between the anchor ring and interior outer spaced interior tube face and outer tube face, each ceramic pipe end anchor ring including be the annular and by outer tube face radial inside extension first ring face portion to and be annular and by first ring face portion radially inwards and extend up and connect interior tube face's second ring face portion.

Go up electrode assembly, each second annular face portion by corresponding first annular face portion radially inwards and slope up and extend to connect and correspond interior pipe surface.

Go up electrode assembly, each second ring face portion with correspond interior pipe surface cooperatees and defines out the first obtuse angle of 110 ~ 160 degrees, and with corresponding first ring face portion cooperatees and defines out the second obtuse angle of 110 ~ 160 degrees.

Go up electrode assembly, each second annular face portion by corresponding first annular face portion radially inwards and crooked extension up connect and correspond interior pipe surface.

Go up electrode assembly, each second annular face portion by corresponding first annular face portion radially toward interior and the curved extension of arc up connect to correspond interior pipe surface.

Go up electrode assembly, the radius of curvature of each second toroidal portion is 0.3 ~ 3 mm.

The utility model has the advantages that: the bottom ring surface of each ceramic tube comprises the second ring surface part, which can change the flowing mode of plasma and corrosive gas, so that each second ring surface part is not easy to be eroded by the plasma or the corrosive gas, and the advantages that the connecting part of each bottom ring surface and the corresponding inner tube surface is not easy to damage and does not pollute the manufacturing process are generated.

Drawings

Other features and advantages of the present invention will become apparent from the following detailed description of the preferred embodiments with reference to the accompanying drawings, in which:

fig. 1 is a perspective view illustrating a conventional upper electrode assembly;

FIG. 2 is a cross-sectional view illustrating a conventional upper electrode assembly;

FIG. 3 is a fragmentary sectional view showing an enlarged view of the prior art upper electrode assembly;

fig. 4 is a cross-sectional view illustrating a first embodiment of the upper electrode assembly of the present invention;

FIG. 5 is a fragmentary perspective view illustrating the first embodiment;

FIG. 6 is a fragmentary cross-sectional view illustrating the first embodiment;

FIG. 7 is a fragmentary cross-sectional view illustrating the first embodiment; and

fig. 8 is a fragmentary cross-sectional view illustrating a second embodiment of the upper electrode assembly of the present invention.

Detailed Description

In the following description, similar or identical elements will be denoted by the same reference numerals.

Referring to fig. 4 to 6, the first embodiment of the upper electrode assembly of the present invention is adapted to be erected on a reaction chamber 21 and adapted to be disposed above a lower electrode 22.

Referring to fig. 5 to 7, the first embodiment includes an electrode plate 3, a plurality of ceramic tubes 4 tightly inserted into the electrode plate 3, and a protective layer 5 covering the bottom side of the electrode plate 3.

The electrode plate 3 includes a top surface 31 and a bottom surface 32 extending horizontally and vertically and horizontally, and a plurality of inner circumferential surfaces 33 extending vertically and connected between the top surface 31 and the bottom surface 32.

Each inner circumferential surface 33 is cylindrical and defines a cylindrical through hole 331 extending from the top surface 31 to the bottom surface 32 and penetrating up and down. Each through hole 331 is shaped with a narrow top and a wide bottom, and each wide hole portion accommodates a respective ceramic tube 4.

The ceramic tubes 4 are respectively disposed in the through holes 331, and each ceramic tube 4 includes a top ring surface 41 and a bottom ring surface 42 opposite to each other, an inner tube surface 43 connected between the top ring surface 41 and the bottom ring surface 42 and spaced inward and outward, and an outer tube surface 44 facing a corresponding inner circumferential surface 33.

The bottom ring surface 42 of each ceramic tube 4 includes a first ring surface 421 extending horizontally and radially inward from the outer tube surface 44, and a second ring surface 422 extending inward from the first ring surface 421 toward the top ring surface 41 and connecting to the inner tube surface 43. More specifically, each second annular surface portion 422 connects the corresponding inner pipe surface 43 in a manner of extending radially inward and obliquely upward.

Each second annular surface portion 422 and the corresponding inner tube surface 43 cooperate to define a first obtuse angle a1 of 135 degrees, and cooperate to define a second obtuse angle a2 of 135 degrees with the corresponding first annular surface portion 421.

In other embodiments of the present invention, each of the first obtuse angles A1 can be 110-160 degrees, and each of the second obtuse angles A2 can be 110-160 degrees.

In the first embodiment, the bottom ring surface 42 of each ceramic tube 4 is connected to the inner tube surface 43 by the second ring surface portion 422, and the second ring surface portion 422 extends upward along the radial direction. By means of the innovative and special extension design of each second annular portion 422, the flow mode of the plasma or the corrosive gas can be influenced and changed, so that each second annular portion 422 is not easily corroded by the plasma or the corrosive gas, the service life of the first embodiment is prolonged, and the problem of process pollution caused by damage and peeling is avoided.

Referring to fig. 8, the second embodiment of the upper electrode assembly of the present invention is similar to the first embodiment except that the second annular surface portion 422 of each ceramic tube 4 extends radially inward and upward from the first annular surface portion 421 to connect to the inner tube surface 43, and is in the state shown in fig. 8.

In the second embodiment, the radius of curvature of each second annular surface portion 422 is 2mm, but in other embodiments of the present invention, the radius of curvature of each second annular surface portion 422 can also be 0.3-3 mm.

Since the cross section of each second annular portion 422 is a streamline shape with a curved arc in the second embodiment, the second embodiment can also generate the effect of changing the flowing manner of plasma or corrosive gas, so that the second embodiment also has the advantages of being not easy to peel off and not polluting the manufacturing process.

To sum up, the utility model discloses go up electrode assembly's efficiency and lie in: the bottom ring surface 42 of each ceramic tube 4 includes the second ring surface portion 422, which can change the flowing manner of the plasma and the corrosive gas, so that each second ring surface portion 422 is not easily eroded by the plasma or the corrosive gas, and the advantage of not easily damaging the connection portion between each bottom ring surface 42 and the corresponding inner tube surface 43 and not polluting the manufacturing process is generated.

The above description is only an embodiment of the present invention, and the scope of the claims of the present invention should not be limited thereto, and the equivalent modifications made according to the claims and the description of the present invention should be covered by the scope of the claims of the present invention.

Claims

1. An upper electrode device comprises an electrode plate, a plurality of ceramic tubes and a protective layer, wherein the electrode plate is provided with a plurality of through holes which are communicated up and down, the ceramic tubes are respectively arranged in the through holes, the protective layer covers the bottom side of the electrode plate, each ceramic tube comprises a top ring surface and a bottom ring surface which are opposite up and down, and an inner tube surface and an outer tube surface which are connected between the top ring surface and the bottom ring surface and are internally and externally spaced, and the upper electrode device is characterized in that: the bottom ring surface of each ceramic tube comprises a first ring surface portion which is annular and extends inwards from the outer tube surface in the radial direction, and a second ring surface portion which is annular and extends inwards from the first ring surface portion in the radial direction and upwards to be connected with the inner tube surface.

2. The upper electrode assembly of claim 1, wherein: each second annular surface part extends from the corresponding first annular surface part radially inwards and upwards in an inclined mode to be connected with the corresponding inner pipe surface.

3. The upper electrode assembly of claim 2, wherein: each second annular surface portion is matched with the corresponding inner tube surface to define a first obtuse angle of 110-160 degrees, and is matched with the corresponding first annular surface portion to define a second obtuse angle of 110-160 degrees.

4. The upper electrode assembly of claim 1, wherein: each second annular surface part is bent inwards in the radial direction and upwards from the corresponding first annular surface part and extends to be connected with the corresponding inner pipe surface.

5. The upper electrode assembly of claim 1, wherein: each second annular surface part extends from the corresponding first annular surface part to the inside in the radial direction and upwards in an arc bending way to be connected with the corresponding inner pipe surface.

6. The upper electrode assembly of claim 5, wherein: the curvature radius of each second annular surface part is 0.3-3 mm.