CN211979417U

CN211979417U - LDI light source generating device

Info

Publication number: CN211979417U
Application number: CN202020509834.6U
Authority: CN
Inventors: 陈志特; 王�华; 吴中海; 冯明瑞
Original assignee: Cst Automation Technology Co ltd
Current assignee: Guangdong Keshi Optical Technology Co.,Ltd.
Priority date: 2020-04-09
Filing date: 2020-04-09
Publication date: 2020-11-20
Anticipated expiration: 2030-04-09

Abstract

The utility model discloses an LDI light source generating device, which comprises a light-emitting source, an ellipsoid condenser and optical fibers, wherein the center of the light-emitting source is positioned on a first focus of the ellipsoid condenser; the inner surface of the ellipsoidal condenser is of a multi-level reflector structure; and the incident port of the optical fiber is arranged on the second focus of the ellipsoidal condenser. The utility model provides a LDI light source generating device, ellipsoid condensing lens can gather the light that the light emitting source sent in first focus department to the second focus on, produce the light beam and concentrate, the divergence angle is little, luminous power density is high, contain composite wavelength and high-energy light source, satisfy the requirement to the light source in the LDI exposure process, and the cost of manufacture is low, simple structure, stability is strong.

Description

LDI light source generating device

Technical Field

The utility model relates to a LDI photoetching machine technical field specifically is an LDI light source generating device.

Background

LDI (laser direct imaging) is used in an exposure process in a pcb process, and an image is directly imaged on a pcb by using a laser scanning method, so that the image is finer, but LDI has a higher requirement on a light source. The light source commonly used in the present exposure process is generally a semiconductor laser or an LED light source, but the semiconductor laser has high price, low energy consumption and single wavelength; the LED light source has low optical power density and large divergence angle, so that the two light sources have defects when applied to an LDI exposure procedure.

SUMMERY OF THE UTILITY MODEL

An object of the utility model is to provide a LDI light source generating device can obtain and contain compound wave band and high-energy light source, satisfies the requirement to the light source in the LDI exposure process.

In order to achieve the above object, the utility model provides a following technical scheme:

an LDI light source generating device comprises a light source, an ellipsoidal condenser and an optical fiber, wherein the center of the light source is positioned on a first focus of the ellipsoidal condenser; the inner surface of the ellipsoidal condenser is of a multi-level reflector structure; and the incident port of the optical fiber is arranged on the second focus of the ellipsoidal condenser.

In one embodiment, the ellipsoidal condenser lens is provided with two opposite through holes, and the light emitting sources are inserted into the two through holes to realize the fixed connection with the ellipsoidal condenser lens.

In one embodiment, the light source is a high-pressure short-arc mercury lamp, and two ends of the light source penetrate through the two through holes.

In one embodiment, the optical fiber further comprises a light integrator disposed between the entrance port of the optical fiber and the ellipsoidal collector, the light integrator having a center located on the major axis of the ellipsoidal collector.

In one embodiment, the light integrator is an infrared filter.

In one embodiment, the light integrator further comprises a cooling part, and the light integrator penetrates through the cooling part.

In one embodiment, the cooling unit is a container containing cooling water.

In one embodiment, the inner surface of the ellipsoidal condenser is composed of a plurality of annular reflectors located on the same axis.

The utility model provides a LDI light source generating device, ellipsoid condensing lens can gather the light that the light emitting source sent in first focus department to the second focus on, produce the light beam and concentrate, the divergence angle is little, luminous power density is high, contain composite wavelength and high-energy light source, satisfy the requirement to the light source in the LDI exposure process, and the cost of manufacture is low, simple structure, stability is strong.

Drawings

FIG. 1 is a schematic perspective view of an LDI light source generator according to an embodiment;

FIG. 2 is a schematic side view of an LDI light source generating device according to an embodiment;

FIG. 3 is a cross-sectional view taken along line A-A of FIG. 2;

FIG. 4 is a cross-sectional view taken along line B-B of FIG. 3;

FIG. 5 is a light path diagram of an LDI light source generating device in one embodiment;

FIG. 6 is a schematic diagram of an LDI light source generating device in an embodiment;

1. a light emitting source; 2. an ellipsoidal condenser; 3. an optical fiber; 4. a light integrator; 5. a cooling member; 6. a light source center point; 7. an optical fiber incident port; 8. an optical fiber exit port; 9. emitting a light beam; 10. reflecting the light beam; 11. emitting a light beam; 12. a light source group; 13. and (4) photoetching head groups of the LDI machine.

Detailed Description

The technical solutions in the embodiments of the present invention will be described clearly and completely with reference to the accompanying drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only some embodiments of the present invention, not all embodiments. Based on the embodiments in the present invention, all other embodiments obtained by a person skilled in the art without creative work belong to the protection scope of the present invention.

Fig. 1 is a schematic perspective view of an LDI light source generating device in an embodiment, the LDI light source generating device includes a light source 1, an ellipsoidal condenser 2 and an optical fiber 3, wherein the center of the light source 1 is located at a first focus of the ellipsoidal condenser 2; the inner surface of the ellipsoidal condenser 2 is of a multi-level reflector structure; and the incident port of the optical fiber 3 is arranged on the second focus of the ellipsoidal condenser lens 2.

Wherein the light emitting source 1 may be a mercury lamp for generating a non-directional, composite wavelength, high energy beam; the inner surface of the ellipsoidal condenser lens 2 is used for condensing the light beam generated by the light source 1 to the incident port of the optical fiber 3; the optical fiber 3 is used for guiding the light beam from the incident port to a required working position. Preferably, the inner surface of the ellipsoidal condenser 2 may be composed of a plurality of annular reflectors located at the same axis, as shown in fig. 3, incident lights with different angle ranges are reflected by the reflectors with different reflection angles in a targeted manner, so as to effectively improve the light utilization rate.

In the LDI light source generating device in this embodiment, the ellipsoidal condenser 2 can condense the light emitted from the light source 1 at the first focus onto the second focus and guide the condensed light out through the optical fiber 3, so as to generate a light source with concentrated light beams, small divergence angle, high optical power density, composite wavelength and high energy, which meets the requirements of LDI exposure process on the light source, and has low manufacturing cost, simple structure and strong stability.

In one embodiment, referring to fig. 1 to 4, the ellipsoidal condenser 2 has two opposite through holes formed therein, and the light source 1 is inserted into the two through holes to be fixedly connected to the ellipsoidal condenser 2. In this embodiment, the light source 1 is a high-pressure short arc mercury lamp, and two ends of the light source 1 penetrate through the two through holes. The high-pressure short-arc mercury lamp is used as a light emitting source, the manufacturing cost can be effectively reduced, the high-pressure short-arc mercury lamp is in a strip shape, components such as a support or a supporting rod do not need to be additionally arranged, the light emitting source 1 and the ellipsoidal condenser lens 2 can be fixedly connected, and the mounting structure is simplified.

In one embodiment, referring to fig. 1-5, the LDI light source generating device further includes a light integrator 4, the light integrator 4 is disposed between the optical fiber incident port 7 and the ellipsoidal condenser 2, and the center of the light integrator 4 is located on the long axis of the ellipsoidal condenser 2 for filtering out the infrared rays in the light beam. In this embodiment, the light integrator 4 is an infrared filter.

The LDI light source generating device further comprises a cooling part 5, the light integrator 4 penetrates through the cooling part 5, and high temperature generated by the light integrator 4 absorbing infrared rays is absorbed by the cooling part 5.

As shown in fig. 5, the emitted light beam 9 generated from the central point 6 of the light source is reflected by the ellipsoidal condenser 2 to form a reflected light beam 10, and the reflected light beam 10 enters the fiber entrance port 7 after being filtered by the light integrator 4 and is guided out from the fiber exit port 8, wherein the high temperature generated by the light integrator 4 absorbing the infrared light can be absorbed by the cooling component 5.

Fig. 6 is a schematic structural diagram of an LDI light source generating device in an embodiment during application, where a plurality of LDI light source generating devices may be arranged to form a light source group 12, and an exit port of an optical fiber 3 is connected to an LDI lithography head group 13, and the light source group 12 generates a group number of exit beams 11, which are transmitted to the LDI lithography head group 13 by the optical fiber 3, so as to expose a PCB.

The foregoing examples, while indicating preferred embodiments of the invention, are given by way of illustration and description, it is to be understood that the invention is not limited to the disclosed forms herein but is not intended to be exhaustive or to exclude other examples and may be used in various other combinations, modifications, and environments and is capable of changes within the scope of the inventive concept as expressed herein, commensurate with the above teachings or the skill or knowledge of the relevant art, and not to limit the scope of the invention. It should be noted that, for those skilled in the art, various changes and modifications can be made without departing from the spirit and scope of the present invention, and these changes and modifications can be made by those skilled in the art without departing from the spirit and scope of the present invention, which is to be construed as being limited only by the appended claims. Therefore, the protection scope of the present invention should be subject to the appended claims.

Claims

1. An LDI light source generating device is characterized by comprising a light source, an ellipsoidal condenser and an optical fiber, wherein the center of the light source is positioned on a first focus of the ellipsoidal condenser; the inner surface of the ellipsoidal condenser is of a multi-level reflector structure; the incident port of the optical fiber is arranged on the second focus of the ellipsoidal condenser;

two opposite through holes are formed in the ellipsoidal condenser lens, and the light emitting sources are inserted into the two through holes to be fixedly connected with the ellipsoidal condenser lens.

2. The LDI light source generating device of claim 1, wherein said light source is a high-pressure short arc mercury lamp, and both ends of said light source are passed through both of said through holes.

3. An LDI light source generating device as defined in claim 1, further comprising a light integrator disposed between the entrance port of said optical fiber and said ellipsoidal concentrator, the center of said light integrator being located on the long axis of said ellipsoidal concentrator.

4. An LDI light source generating device as defined in claim 3, wherein said light integrator is an infrared filter.

5. The LDI light source generation device of claim 3, further comprising a cooling member, said light integrator extending through said cooling member.

6. An LDI light source generator as defined in claim 5, wherein said cooling means is a container containing cooling water.

7. An LDI light source generator as defined in claim 1, wherein said ellipsoidal collector mirror has an inner surface comprising a plurality of annular reflectors disposed on a common axis.