CN211970610U - Miniature storage system for semiconductor product containing box - Google Patents
Miniature storage system for semiconductor product containing box Download PDFInfo
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- CN211970610U CN211970610U CN202020356070.1U CN202020356070U CN211970610U CN 211970610 U CN211970610 U CN 211970610U CN 202020356070 U CN202020356070 U CN 202020356070U CN 211970610 U CN211970610 U CN 211970610U
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- upper arm
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- 239000004065 semiconductor Substances 0.000 title claims abstract description 26
- 210000000245 forearm Anatomy 0.000 claims abstract description 51
- 210000000707 wrist Anatomy 0.000 claims abstract description 40
- 238000006243 chemical reaction Methods 0.000 claims description 8
- 238000013459 approach Methods 0.000 claims description 6
- 238000013461 design Methods 0.000 claims description 5
- 235000012431 wafers Nutrition 0.000 description 15
- 238000010586 diagram Methods 0.000 description 5
- 230000003247 decreasing effect Effects 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 238000012546 transfer Methods 0.000 description 1
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Abstract
The utility model discloses a miniature warehouse system of semiconductor product holding box, include: the periphery of the rectangular frame body is provided with a plurality of open type box frames in a laminated mode, and the open type box frames are provided with corresponding coordinates and can store and take the semiconductor product accommodating boxes in multiple directions; the lifting device is arranged on the rectangular frame body, and a lifting platform is arranged towards the inside of the rectangular frame body; a planar three-axis robot, which is arranged inside the rectangular frame body, a base is arranged on the lifting platform, the base is provided with an upper arm and an upper arm rotating motor, the upper arm is provided with a forearm and a forearm rotating motor, and the forearm is provided with a wrist tooth fork and a wrist tooth fork rotating motor; and the control unit is arranged on the rectangular frame body and used for controlling the lifting device and the planar three-axis robot to carry out warehousing or warehousing on the semiconductor product containing box. The utility model discloses a miniature warehouse system of semiconductor product holding box has the elastic programming storage space and the quick good characteristic of access.
Description
Technical Field
The utility model relates to a warehouse system especially discloses a miniature warehouse system of semiconductor product holding box.
Background
Semiconductor products (such as wafers or chips) belong to processing types with diversity and multiple processes, because the wafers or chips are small in size and easy to damage, the wafers or chips can be placed in a wafer containing box or a chip carrier tray containing box for protection so as to be convenient for conveying and storing, the wafers or chips in the manufacturing process can be stored and taken in batches quickly, but the traditional storage system adopts a large-scale design mode, so that the problems of limited storage space planning and long time for storing and taking are caused, and the storage position and the delivery position of the traditional storage system are designed at fixed positions, and the problem of lack of elasticity of the storage position is also caused.
SUMMERY OF THE UTILITY MODEL
In order to overcome the defects and shortcomings in the prior art, the utility model aims to provide a miniature storage system for a semiconductor product accommodating box, which has the advantages of flexibly planning storage space and fast access; and has the advantage of flexibly planning the access position.
In order to achieve the above object, the utility model discloses a miniature warehouse system of semiconductor product holding box, including: the periphery of the rectangular frame body is provided with a plurality of open type box frames in a laminated mode, and the open type box frames are provided with corresponding coordinates and can store and take the semiconductor product accommodating boxes in multiple directions; the lifting device is arranged on the rectangular frame body, and a lifting platform is arranged towards the inside of the rectangular frame body; the planar three-axis robot is arranged inside the rectangular frame body, a base is arranged on the lifting platform, the base is provided with an upper arm and an upper arm rotating motor, the upper arm is provided with a forearm and a forearm rotating motor, and the forearm is provided with a wrist tooth fork and a wrist tooth fork rotating motor; and the control unit is arranged on the rectangular frame body and used for controlling the lifting device and the planar three-axis robot to carry out warehousing or warehousing on the semiconductor product containing box.
In addition, the semiconductor product accommodating box is a wafer accommodating box or a chip tray accommodating box: the wrist tooth fork is further provided with a position sensor, the position sensor is electrically connected to the control unit, and whether the actual coordinate of the wrist tooth fork is matched with the instruction coordinate is detected: the lifting device is a single-shaft robot.
Furthermore, the forearm is of equal length to the upper arm: the planar three-axis robot designs the angle of the forearm which can not rotate relative to the upper arm in a slight range of the forearm which approaches the fully unfolded gesture relative to the upper arm, so that the forearm and the upper arm can perform gesture conversion in a critical space, and designs the angle of the wrist fork which can not rotate relative to the forearm in a slight range of the wrist fork which approaches the fully unfolded gesture relative to the forearm, so that the wrist fork and the forearm can perform gesture conversion in a critical space: the micro-amplitude interval that the forearm can not rotate relative to the upper arm is an interval from 175 degrees to 185 degrees when the forearm is unfolded anticlockwise relative to the upper arm; the slightly-wide range in which the wrist fork cannot rotate relative to the forearm is a range from 175 degrees to 185 degrees in anticlockwise unfolding of the wrist fork relative to the forearm.
Drawings
Fig. 1 is a schematic perspective view of a first embodiment of the present invention;
fig. 2 is a plan view of a first embodiment of the present invention;
fig. 3 is a schematic perspective view of a lifting device and a three-axis robot according to a first embodiment of the present invention;
fig. 4 is a structural diagram of posture conversion of a three-axis robot according to a first embodiment of the present invention;
fig. 5 is a structural diagram of a rotational angle of a three-axis robot according to a first embodiment of the present invention (wherein, a is a structural diagram of a rotational angle of a forearm and an upper arm, and B is a structural diagram of a rotational angle of a wrist front fork and a forearm);
FIG. 6 is a structural diagram of a second embodiment of the present invention, wherein a wrist fork is used to fork and lift a chip tray accommodating box;
FIG. 7 is a view showing another angle of view of the chip tray container lifted by the wrist fork according to the second embodiment of the present invention;
fig. 8 is a first top view of a second embodiment of the present invention;
fig. 9 is a second plan view of the second embodiment of the present invention.
The reference numerals include:
10b rectangular frame 11b open type box frame 20b chip tray accommodating box
11a, 11b open cassette 20a wafer cassette 20b chip tray cassette
30a, 30b lifting device 31a, 31b lifting table
40a, 40b plane three- axis robot 41a, 41b base
42a, 42b upper arm 43a, 43b forearm 44a, 44b wrist teeth fork
Detailed Description
In order to facilitate understanding of those skilled in the art, the present invention will be further described with reference to the following examples and accompanying drawings, which are not intended to limit the present invention.
A first embodiment.
Referring to fig. 1-3, the micro warehousing system for semiconductor product storage boxes of the present invention comprises:
a rectangular frame 10a, a plurality of open-type box frames 11a are stacked around the periphery, and each open-type box frame 11a has corresponding coordinates and can access the wafer accommodating box 20a in multiple directions.
And the lifting device 30a is arranged on the rectangular frame body 10a, a lifting platform 31a is arranged towards the inside of the rectangular frame body 10a, and the lifting device 30a can be a single-shaft robot.
A planar three-axis robot 40a installed inside the rectangular frame 10a, a base 41a installed on the lifting platform 31a, the base 41a having an upper arm 42a and an upper arm rotation motor (not shown), the upper arm 42a having a forearm 43a and a forearm rotation motor (not shown), the forearm 43a having a wrist fork 44a and a wrist fork rotation motor (not shown). And
and a control unit 50a installed on the rectangular frame 10a for controlling the lifting device 30a and the planar three-axis robot 40a to carry out warehousing or warehousing of the wafer accommodating box 20 a.
The wrist yoke 44a is provided with a position sensor (not shown), which is electrically connected to the control unit and detects whether the actual coordinates of the wrist yoke 44a are matched with the command coordinates.
Referring to fig. 4 and 5, the forearm 43a of the planar three-axis robot 40a may be as long as the upper arm 42a, i.e., the length of the forearm 43a is equal to the length of the upper arm 42 a.
In addition, in order to make the planar three-axis robot 40a perform posture conversion in the tight space, the rotation-proof angle of the forearm 43a relative to the upper arm 42a is designed to be within a slight range in which the forearm 43a approaches the fully unfolded posture relative to the upper arm 42a, and the slight range may be a range from 175 degrees to 185 degrees in which the forearm 43a is unfolded counterclockwise relative to the upper arm 42a, so that the forearm 43a and the upper arm 42a perform posture conversion in the tight space. And the angle at which the wrist tine 44a cannot rotate relative to the forearm 43a is designed to be within a slight width interval at which the wrist tine 44a approaches the fully unfolded posture relative to the forearm 43a, wherein the slight width interval can be an interval from 175 degrees to 185 degrees of counterclockwise unfolding of the wrist tine 44a relative to the forearm 43a, so that the wrist tine 44a and the forearm 43a can perform posture conversion in a local space.
Example two
Referring to fig. 6-8, the micro warehousing system for semiconductor product storage boxes of the present invention comprises:
a rectangular frame 10b, a plurality of open-type box frames 11b are stacked around the periphery, and each open-type box frame 11b has corresponding coordinates and can store and take the chip tray accommodating box 20b in multiple directions.
And the lifting device 30b is arranged on the rectangular frame body 10b and faces the inside of the rectangular frame body 10b, and the lifting device 30b can be a single-shaft robot.
And the planar three-axis robot 40b is arranged inside the rectangular frame body 10b, and a base 41b is arranged on the lifting platform 31 b. The base 41b is provided with an upper arm 42b and an upper arm rotation motor (not shown), the upper arm 42b is provided with a forearm 43b and a forearm rotation motor (not shown), and the forearm 43b is provided with a wrist yoke 44b and a wrist yoke rotation motor (not shown). And
and the control unit 50b is arranged on the rectangular frame body 10b and controls the lifting device 30b and the planar three-axis robot 40b to carry out warehousing or warehousing on the chip tray accommodating box 20 b.
The main differences between the second embodiment and the first embodiment are: since the chip tray 20b is long and the wafer tray 20a is substantially square, the positions and the number of the open type shelves 11b and 11a must be designed according to the shape of the storage, the shape of the wrist forks 44b and 44a must be designed according to the shape of the storage, and the structural characteristics of the other components are the same as or different from each other.
In this embodiment, the wrist fork 44b is matched with the shape of the chip tray accommodating box 20b, and four L-shaped frame angles 441 are arranged corresponding to four end angles at the bottom of the chip tray accommodating box 20b, so that when the wrist fork 44b supports the chip tray accommodating box 20b from bottom to top, the four ends are stably positioned, thereby ensuring smooth transfer and accurate positioning.
The operator can input the delivery information or the coordinates of the open cassette racks 11a, 11b to be delivered from the operation units 50a, 50b, control the lifting devices 30a, 30b and the planar three-axis robots 40a, 40b to operate, fork the designated wafer accommodating cassette 20a or the designated chip tray accommodating cassette 20b and move the designated open cassette racks 11a, 11b for placement, and then take out the wafer accommodating cassette 20a or the chip tray accommodating cassette 20b by the operator or the corresponding material taking equipment.
On the contrary, the wafer accommodating box 20a or the chip tray accommodating box 20b to be warehoused may be placed in any one of the open type box racks 11a, 11b, and the operator may input warehousing information or coordinates of the open type box racks 11a, 11b to be warehoused by the control units 50a, 50b to control the lifting devices 30a, 30b and the planar three-axis robots 40a, 40b to operate, fork the wafer accommodating box 20a or the chip tray accommodating box 20b to be warehoused, and move to the designated open type box racks 11a, 11b to be placed.
Referring to fig. 9, the number of the chip tray storage boxes 20b can be flexibly increased or decreased according to the space of the installation site in the first and second embodiments of the present invention, and if the space is large enough, a plurality of open-type box frames 11b are stacked around the rectangular frame 10 b. If the space is narrow, the rectangular frame 10b is only stacked with a plurality of open-type box frames 11b on three sides.
Furthermore, the utility model discloses a first embodiment and second embodiment still can further several sets set up, and the shared extracting equipment of arranging again lets original miniature warehouse system enlarge its storage scale, and the planning in storage space has very big elastic space, and each miniature warehouse system can independently function, can access wafer holding box 20a fast or chip year dish holding box 20 b. Therefore, the utility model discloses but have the elastic programming storage space and deposit and withdraw quick good characteristic.
In addition, the structural characteristics of the open type box frames 11a and 11b can designate any one of the open type box frames 11a and 11b to be a box frame for entering or leaving a warehouse according to the limitation of space, so the utility model also has the advantage of being capable of flexibly planning the access position.
The rest of this embodiment is the same as the first embodiment, and the features that are not explained in this embodiment are explained by the first embodiment, which is not described herein again.
The above description is only for the preferred embodiment of the present invention, and for those skilled in the art, there are various modifications within the scope and range of applications according to the spirit of the present invention, and the content of the description should not be construed as a limitation to the present invention.
Claims (8)
1. The miniature warehouse system of semiconductor product holding box includes:
the periphery of the rectangular frame body is provided with a plurality of open type box frames in a laminated mode, and the open type box frames are provided with corresponding coordinates and can store and take the semiconductor product accommodating boxes in multiple directions;
the lifting device is arranged on the rectangular frame body, and a lifting platform is arranged towards the inside of the rectangular frame body;
the planar three-axis robot is arranged inside the rectangular frame body, a base is arranged on the lifting platform, the base is provided with an upper arm and an upper arm rotating motor, the upper arm is provided with a forearm and a forearm rotating motor, and the forearm is provided with a wrist tooth fork and a wrist tooth fork rotating motor; and
and the control unit is arranged on the rectangular frame body and used for controlling the lifting device and the planar three-axis robot to carry out warehousing or warehousing on the semiconductor product accommodating box.
2. The micro-warehousing system for semiconductor product-containing boxes of claim 1, wherein: the semiconductor product accommodating box is a wafer accommodating box or a chip carrying disc accommodating box.
3. The micro-warehousing system for semiconductor product-containing boxes of claim 1 or 2, wherein: the wrist tooth fork is provided with a position sensor, the position sensor is electrically connected to the control unit, and whether the actual coordinate of the wrist tooth fork is matched with the instruction coordinate is detected.
4. The micro-warehousing system for semiconductor product-containing boxes of claim 3, wherein: the lifting device is a single-shaft robot.
5. The micro-warehousing system for semiconductor product-containing boxes of claim 4, wherein: the forearm and the upper arm are equal in length.
6. The micro-warehousing system for semiconductor product-containing boxes of claim 5, wherein: the planar three-axis robot designs the angle of the forearm which can not rotate and rotate relative to the upper arm in a micro-amplitude interval of the forearm which approaches to the fully-unfolded posture relative to the upper arm, so that the forearm and the upper arm can carry out posture conversion in a local space, and designs the angle of the wrist fork which can not rotate and rotate relative to the forearm in a micro-amplitude interval of the wrist fork which approaches to the fully-unfolded posture relative to the forearm, so that the wrist fork and the forearm can carry out posture conversion in the local space.
7. The micro-warehousing system for semiconductor product-containing boxes of claim 6, wherein: the micro-amplitude interval that the forearm can not rotate relative to the upper arm is an interval from 175 degrees to 185 degrees when the forearm is unfolded anticlockwise relative to the upper arm; the slightly-wide range in which the wrist fork cannot rotate relative to the forearm is a range from 175 degrees to 185 degrees in anticlockwise unfolding of the wrist fork relative to the forearm.
8. The micro-warehousing system for semiconductor product-containing boxes of claim 2, wherein: the chip carrying disc containing box is in a long strip shape, and the wrist tooth fork is matched with the shape of the chip carrying disc containing box, and four L-shaped frame angles are arranged relative to four end angles at the bottom of the chip carrying disc containing box, so that when the wrist tooth fork supports the chip carrying disc containing box from bottom to top, four ends are stably positioned.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| TW108209301U TWM590579U (en) | 2019-07-17 | 2019-07-17 | Miniature warehouse system for semiconductor product storage boxes |
| TW108209301 | 2019-07-17 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN211970610U true CN211970610U (en) | 2020-11-20 |
Family
ID=70414853
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202020356070.1U Active CN211970610U (en) | 2019-07-17 | 2020-03-19 | Miniature storage system for semiconductor product containing box |
Country Status (2)
| Country | Link |
|---|---|
| CN (1) | CN211970610U (en) |
| TW (1) | TWM590579U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113804626A (en) * | 2021-10-12 | 2021-12-17 | 安徽像元光测科技有限公司 | Scientific-grade CCD high-precision splicing installation protection device and method |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TWI805266B (en) * | 2022-03-11 | 2023-06-11 | 迅得機械股份有限公司 | Carrier of substrate cassette and micro storage system |
-
2019
- 2019-07-17 TW TW108209301U patent/TWM590579U/en unknown
-
2020
- 2020-03-19 CN CN202020356070.1U patent/CN211970610U/en active Active
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113804626A (en) * | 2021-10-12 | 2021-12-17 | 安徽像元光测科技有限公司 | Scientific-grade CCD high-precision splicing installation protection device and method |
Also Published As
| Publication number | Publication date |
|---|---|
| TWM590579U (en) | 2020-02-11 |
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