CN211966998U - Silicon carbide crystal grinding device - Google Patents

Silicon carbide crystal grinding device Download PDF

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Publication number
CN211966998U
CN211966998U CN202020721200.7U CN202020721200U CN211966998U CN 211966998 U CN211966998 U CN 211966998U CN 202020721200 U CN202020721200 U CN 202020721200U CN 211966998 U CN211966998 U CN 211966998U
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China
Prior art keywords
rod
silicon carbide
carbide crystal
polishing
base
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CN202020721200.7U
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Chinese (zh)
Inventor
么靓
刘亚坤
张平
邹宇
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Beijing Tankeblue Semiconductor Co ltd
Jiangsu Tiankeheda Semiconductor Co ltd
Original Assignee
Beijing Tankeblue Semiconductor Co ltd
Jiangsu Tiankeheda Semiconductor Co ltd
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Application filed by Beijing Tankeblue Semiconductor Co ltd, Jiangsu Tiankeheda Semiconductor Co ltd filed Critical Beijing Tankeblue Semiconductor Co ltd
Priority to CN202020721200.7U priority Critical patent/CN211966998U/en
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Publication of CN211966998U publication Critical patent/CN211966998U/en
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  • Constituent Portions Of Griding Lathes, Driving, Sensing And Control (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)

Abstract

The utility model discloses a carborundum crystal grinding device, including base, bracing piece, horizon bar, dead lever, wheel and clamping device of polishing, wheel pivoted setting is on the base polishing, and the bracing piece is fixed on the base, and the setting that the horizon bar removed is on the bracing piece, and the dead lever setting is on the horizon bar, and clamping device sets up on the dead lever, and the carborundum crystal orientation that the last centre gripping of clamping device is polished the wheel, and the horizon bar drives the carborundum crystal orientation or keeps away from the wheel of polishing when moving on the bracing piece and removes. During the use, clamping device grasps the silicon carbide crystal, and the horizon bar drives the silicon carbide crystal and moves towards the wheel of polishing when moving on the bracing piece, and the position of polishing is adjusted to the accuracy with the silicon carbide crystal, improves precision and the yield of polishing. Through the cooperation that adopts horizon bar and bracing piece, form the arm operation, replace manual operation, improve work efficiency and production yield, improve the security to can realize that the polylith crystal is polished simultaneously, reduce the production energy consumption, improve work efficiency.

Description

Silicon carbide crystal grinding device
Technical Field
The utility model relates to a crystal polishing technical field especially relates to a carborundum crystal grinding device.
Background
After the existing silicon carbide crystal grows, the existing silicon carbide crystal is manually held to be polished on a polishing platform, each person can only hold one crystal at a time, the production efficiency is low, and the labor cost is high; and the hand is easily injured by improper operation when the crystal is manually held and operated on the grinding wheel rotating at high speed.
Therefore, how to provide a silicon carbide crystal polishing device to improve work efficiency, polishing precision and safety is a technical problem that needs to be solved by those skilled in the art.
SUMMERY OF THE UTILITY MODEL
In view of this, the utility model aims at providing a carborundum crystal grinding device to improve work efficiency, improve the precision of polishing and improve the security.
In order to achieve the above object, the utility model provides a following technical scheme:
a silicon carbide crystal polishing device, which comprises a base, a supporting rod, a horizontal rod, a fixed rod, a polishing wheel and a clamping device, wherein,
the grinding wheel is rotationally arranged on the base,
the supporting rod is fixed on the base, the horizontal rod is movably arranged on the supporting rod, the fixed rod is arranged on the horizontal rod, the clamping device is arranged on the fixed rod,
the silicon carbide crystal clamped on the clamping device faces the grinding wheel,
and when the horizontal rod moves on the supporting rod, the silicon carbide crystal is driven to move towards or away from the grinding wheel.
Preferably, the base is provided with a groove, and the grinding wheel is arranged in the groove.
Preferably, the grinding wheel is connected to the base through a rotating shaft.
Preferably, the clamping device comprises a mounting rod, an elastic telescopic rod and a clamping plate, wherein,
one end of the mounting rod is connected with the fixed rod, the other end of the mounting rod is connected with the middle part of the elastic telescopic rod, the two ends of the elastic telescopic rod are respectively provided with the clamping plate,
the elastic telescopic rod provides clamping force to clamp the silicon carbide crystal through the clamping plate.
Preferably, the elastic telescopic rod comprises a first rod body, a first elastic device, a second rod body, a second elastic device and a third rod body which are connected in sequence,
the other end of the mounting rod is connected with the second rod body.
Preferably, the first elastic means and the second elastic means have the same structure,
the first elastic device comprises a spring and a sleeve sleeved on the spring, and two ends of the sleeve slide along the first rod body and the second rod body respectively.
Preferably, the elastic telescopic rods are arranged in a plurality of ways and form included angles around the same circle center.
Preferably, the mounting rod is fixed by a screw located on the side surface after being inserted into the fixing rod.
Preferably, the support rod is a vertical rod.
Preferably, the fixing rods and the clamping devices are arranged at intervals along the length direction of the horizontal rod.
The silicon carbide crystal polishing device provided by the utility model comprises a base, a support rod, a horizontal rod, a fixed rod, a polishing wheel and a clamping device,
wherein the content of the first and second substances,
the grinding wheel is rotationally arranged on the base,
the supporting rod is fixed on the base, the horizontal rod is movably arranged on the supporting rod, the fixed rod is arranged on the horizontal rod, the clamping device is arranged on the fixed rod,
the silicon carbide crystal clamped on the clamping device faces the grinding wheel,
and when the horizontal rod moves on the supporting rod, the silicon carbide crystal is driven to move towards or away from the grinding wheel.
During the use, grasp carborundum crystal through clamping device, then the horizon bar drives carborundum crystal and moves towards the wheel of polishing when moving on the bracing piece, and the position of polishing is adjusted to the accuracy with carborundum crystal, improves precision and the yield of polishing.
Through the cooperation that adopts horizon bar and bracing piece, form the arm operation, replace manual operation, improve work efficiency and production yield, improve the security to can realize that the polylith crystal is polished simultaneously, reduce the production energy consumption, improve work efficiency.
Drawings
In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings needed to be used in the description of the embodiments or the prior art will be briefly described below, and it is obvious that the drawings in the following description are some embodiments of the present invention, and for those skilled in the art, other drawings can be obtained according to these drawings without creative efforts.
FIG. 1 is a schematic structural diagram of a silicon carbide crystal polishing apparatus provided in an embodiment of the present invention;
FIG. 2 is a schematic structural diagram of a base of a silicon carbide crystal polishing device provided in an embodiment of the present invention;
fig. 3 is a schematic structural view of a clamping device provided on a horizontal rod according to an embodiment of the present invention;
fig. 4 is a schematic structural view of an elastic telescopic rod according to an embodiment of the present invention;
fig. 5 is a schematic structural view of a clamping device according to an embodiment of the present invention;
fig. 6 is a schematic structural view of a plurality of elastic telescopic rods arranged on the clamping device provided by the embodiment of the present invention;
FIG. 7 is a schematic structural view of the silicon carbide crystal held by the holding device according to the embodiment of the present invention;
fig. 8 is a schematic structural view of the clamping device according to the embodiment of the present invention in a clamping state;
fig. 9 is a schematic view of a connection structure of a first rod, a first elastic device and a second rod according to an embodiment of the present invention.
In the above FIGS. 1-9:
base 1, bracing piece 2, horizontal pole 3, dead lever 4, clamping device 5, grinding wheel 6, rotation axis 7, protection limit 8, elasticity telescopic link 9, splint 10, the first body of rod 11, the second body of rod 12, the third body of rod 13, first resilient means 14, second resilient means 15, installation pole 16, screw 17, carborundum crystal 18, sleeve pipe 19, spring 20.
Detailed Description
In order to make the objects, technical solutions and advantages of the embodiments of the present invention clearer, the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present invention, and it is obvious that the described embodiments are some, but not all, embodiments of the present invention. Based on the embodiments in the present invention, all other embodiments obtained by a person skilled in the art without creative work belong to the protection scope of the present invention.
Please refer to fig. 1-9:
FIG. 1 is a schematic structural diagram of a silicon carbide crystal polishing apparatus provided in an embodiment of the present invention;
FIG. 2 is a schematic structural diagram of a base of a silicon carbide crystal polishing device provided in an embodiment of the present invention;
fig. 3 is a schematic structural view of a clamping device provided on a horizontal rod according to an embodiment of the present invention;
fig. 4 is a schematic structural view of an elastic telescopic rod according to an embodiment of the present invention;
fig. 5 is a schematic structural view of a clamping device according to an embodiment of the present invention;
fig. 6 is a schematic structural view of a plurality of elastic telescopic rods arranged on the clamping device provided by the embodiment of the present invention;
FIG. 7 is a schematic structural view of the silicon carbide crystal held by the holding device according to the embodiment of the present invention;
fig. 8 is a schematic structural view of the clamping device according to the embodiment of the present invention in a clamping state;
fig. 9 is a schematic view of a connection structure of a first rod, a first elastic device and a second rod according to an embodiment of the present invention.
The silicon carbide crystal polishing device provided by the embodiment of the utility model comprises a base 1, a support rod 2, a horizontal rod 3, a fixed rod 4, a polishing wheel 6 and a clamping device 5, wherein,
the grinding wheel 6 is rotatably arranged on the base 1,
the supporting rod 2 is fixed on the base 1, the horizontal rod 3 is movably arranged on the supporting rod 2, the fixed rod 4 is arranged on the horizontal rod 3, the clamping device 5 is arranged on the fixed rod 4,
the silicon carbide crystal 18 held by the holding device 5 is directed toward the grinding wheel 6,
the horizontal rods 3 move on the support rods 2 to move the silicon carbide crystal 18 toward or away from the grinding wheel 6.
During the use, grasp carborundum crystal 18 through clamping device 5, then horizontal rod 3 drives carborundum crystal 18 and moves towards the wheel 6 of polishing when moving on bracing piece 2, accurately adjusts carborundum crystal 18 to the position of polishing, improves precision and the yield of polishing.
Through the cooperation that adopts horizon bar 3 and bracing piece 2, form the arm operation, replace manual operation, improve work efficiency and production yield, improve the security to can realize that the polylith crystal is polished simultaneously, reduce the production energy consumption, improve work efficiency.
The embodiment of the utility model provides a carborundum crystal grinding device replaces manual operation, improves work efficiency and production yield to the device can realize that the polylith crystal is polished simultaneously, reduces the production energy consumption, improves work efficiency. The silicon carbide crystal 18 is fixed on the mechanical arm, the polishing operation of the silicon carbide crystal is realized by adjusting the position of the mechanical arm, and the method can accurately adjust the silicon carbide crystal to the polishing position and improve the polishing precision and yield.
In order to further optimize the scheme, a groove is formed in the base 1, and the grinding wheel 6 is arranged in the groove.
Specifically for set up a recess at the upper surface of base 1, after grinding wheel 6 placed into the recess, the notch of recess set up annular protective edge 8, and protective edge 8 covers grinding wheel 6's edge, avoids impurity to drop to the gap between grinding wheel 6 and the recess wall, influences grinding wheel 6 work.
In order to further optimize the above solution, the grinding wheel 6 is connected with the base 1 through a rotation shaft 7, and a driving device for driving the grinding wheel 6 to rotate, such as a motor and the like, can be placed in the base 1, thereby reducing the volume thereof.
In order to further optimize the solution described above, the gripping device 5 comprises a mounting rod 16, an elastic telescopic rod 9 and a clamping plate 10, wherein,
one end of the mounting rod 16 is connected with the fixed rod 4, the other end thereof is connected with the middle part of the elastic telescopic rod 9, both ends of the elastic telescopic rod 9 are respectively provided with a clamping plate 10,
the elastic telescopic rod 9 gives clamping force to clamp the silicon carbide crystal 18 through the clamping plate 10.
Can be fine through this clamping device 5 centre gripping carborundum crystal 18 to convenient to use, carborundum crystal 18 is put into to the space that elastic expansion rod 9 formed after the extension, then elastic expansion rod 9 contracts just can pass through splint 10 and clip carborundum crystal 18.
In order to further optimize the above solution, the elastic telescopic rod 9 comprises a first rod 11, a first elastic device 14, a second rod 12, a second elastic device 15 and a third rod 13 connected in sequence,
the other end of the mounting rod 16 is connected to the second rod body 12.
The embodiment of the utility model provides an among the carborundum crystal grinding device, set elastic telescopic rod 9 to syllogic structure, set up an elastic device between adjacent two sections, elastic device can be spring 20. Simple result and convenient use.
In order to further optimize the above solution, the first elastic means and the second elastic means are of the same construction,
the first elastic device comprises a spring 20 and a sleeve 19 sleeved on the spring 20, and two ends of the sleeve 19 respectively slide along the first rod body 11 and the second rod body 12.
The two rods are clamped by the sleeve 19, and when the elastic telescopic rod 9 contracts, the two rods slide in the sleeve 19 under the action of the spring 20.
In order to further optimize the above scheme, the plurality of elastic telescopic rods 9 are arranged around the same circle center at an included angle, as shown in fig. 6.
A carborundum crystal 18 is cliied simultaneously through a plurality of elastic telescopic rod 9, and the centre gripping is more stable and firm, and wherein, a plurality of elastic telescopic rod 9 are the contained angle setting around same centre of a circle, also arrange on the different diameters of same circle promptly for the effort is more balanced, and the focus of carborundum crystal 18 also can be located the center of centre gripping, and the centre gripping is more stable.
In order to further optimize the above solution, the mounting rod 16 is fixed by a screw 17 located at the side after being inserted into the fixing rod 4.
The mounting rod 16 can thus be removed for replacement by loosening the screw 17.
In order to further optimize the above solution, the support rod 2 is a vertical rod. Of course, the support rod 2 may also be a rod with an inclination, optimally, the vertical rod 2 is selected, which is more beneficial to the connection between the structures and the fixation of the horizontal rod 3, and the horizontal rod 3 directly forms an included angle of 90 degrees with the vertical rod.
In order to further optimize the above solution, the fixing rods 4 and the clamping devices 5 are both multiple and arranged at intervals along the length direction of the horizontal rod 3.
The simultaneous movement and polishing of a plurality of silicon carbide crystals 18 are realized, the production energy consumption is reduced, and the working efficiency is improved.
The embodiment of the utility model provides a carborundum crystal grinding device, when concrete implementation:
wherein the content of the first and second substances,
a groove is formed in the base 1 of the silicon carbide crystal polishing device, a polishing wheel 6 is installed in the groove, and the polishing wheel 6 is connected with the base 1 of the silicon carbide crystal polishing device through a rotating shaft 7. Meanwhile, a bearing can be arranged on the base 1 and matched with the rotating shaft 7 for use.
The upper part of silicon carbide crystal grinding device is provided with a horizontal rod 3, and the horizontal rod 3 is vertical to a vertical rod used as a support rod 2 and can move up and down along the vertical rod.
The free end of the horizontal bar 3 is provided with a fixing bar 4 for fixing a clamping device 5, and the lower part of the fixing bar 4 is used for installing the clamping device 5. The horizontal bar 3 can be simultaneously fitted with a plurality of gripping devices 5.
The clamping device 5 comprises a clamping device baffle plate, namely a clamping plate 10, a spring device, an elastic telescopic rod 9 and a mounting rod 16, wherein the mounting rod 16 is fixed with the lower part of the fixing rod 4 through a lateral screw 17, and the mounting rod 16 can be detached from the fixing rod 4.
The elastic telescopic rod 9 is matched with the baffle plate 10 for clamping the silicon carbide crystal 18.
The elastic telescopic rod 9 is provided with a spring device which can give certain pressure to the clamped silicon carbide crystal 18, and the pressure ensures that the silicon carbide crystal 18 does not fall off in a clamping state.
This clamping device 5 adopts spring assembly to give clamping pressure to carborundum crystal 18, and the device sets up simply, and applicable carborundum crystal 18 in different sizes carries out the operation of polishing.
And the clamping device 5 can be detached from the fixing rod 4, so that the silicon carbide crystal 18 is convenient to replace, and the working efficiency is improved.
The spring device is provided with a sleeve 19 outside the elastic telescopic rod 9, the sleeve 19 can slide along the rod body, a spring 20 is arranged in the sleeve 19, and two ends of the spring 20 are connected with the rod body.
The previous description of the disclosed embodiments is provided to enable any person skilled in the art to make or use the present invention. Various modifications to these embodiments will be readily apparent to those skilled in the art, and the generic principles defined herein may be applied to other embodiments without departing from the spirit or scope of the invention. Thus, the present invention is not intended to be limited to the embodiments shown herein but is to be accorded the widest scope consistent with the principles and novel features disclosed herein.

Claims (10)

1. A silicon carbide crystal polishing device is characterized by comprising a base, a supporting rod, a horizontal rod, a fixing rod, a polishing wheel and a clamping device, wherein,
the grinding wheel is rotationally arranged on the base,
the supporting rod is fixed on the base, the horizontal rod is movably arranged on the supporting rod, the fixed rod is arranged on the horizontal rod, the clamping device is arranged on the fixed rod,
the silicon carbide crystal clamped on the clamping device faces the grinding wheel, and the horizontal rod drives the silicon carbide crystal to move towards or away from the grinding wheel when moving on the supporting rod.
2. The silicon carbide crystal grinding device of claim 1, wherein the base defines a recess and the grinding wheel is disposed in the recess.
3. The silicon carbide crystal grinding apparatus of claim 1, wherein the grinding wheel is coupled to the base by a rotating shaft.
4. The silicon carbide crystal grinding apparatus of claim 1 wherein the clamping means comprises a mounting bar, an elastic telescoping bar and a clamping plate, wherein,
one end of the mounting rod is connected with the fixed rod, the other end of the mounting rod is connected with the middle part of the elastic telescopic rod, the two ends of the elastic telescopic rod are respectively provided with the clamping plate,
the elastic telescopic rod provides clamping force to clamp the silicon carbide crystal through the clamping plate.
5. The silicon carbide crystal polishing device of claim 4, wherein the flexible rod comprises a first rod, a first flexible device, a second rod, a second flexible device and a third rod connected in series,
the other end of the mounting rod is connected with the second rod body.
6. The silicon carbide crystal grinding apparatus of claim 5 wherein the first spring means and the second spring means are identical in construction,
the first elastic device comprises a spring and a sleeve sleeved on the spring, and two ends of the sleeve slide along the first rod body and the second rod body respectively.
7. The silicon carbide crystal grinding device of claim 4, wherein the plurality of elastic expansion rods are arranged around the same center at an included angle.
8. The silicon carbide crystal grinding device as defined in claim 4 wherein the mounting bar is attached to the attachment bar by screws on the sides of the attachment bar.
9. The silicon carbide crystal grinding apparatus of claim 1 wherein the support rods are vertical rods.
10. The silicon carbide crystal grinding device of claim 1, wherein the retaining rods and the clamping device are spaced apart along the length of the horizontal bar.
CN202020721200.7U 2020-05-06 2020-05-06 Silicon carbide crystal grinding device Active CN211966998U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN202020721200.7U CN211966998U (en) 2020-05-06 2020-05-06 Silicon carbide crystal grinding device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN202020721200.7U CN211966998U (en) 2020-05-06 2020-05-06 Silicon carbide crystal grinding device

Publications (1)

Publication Number Publication Date
CN211966998U true CN211966998U (en) 2020-11-20

Family

ID=73371291

Family Applications (1)

Application Number Title Priority Date Filing Date
CN202020721200.7U Active CN211966998U (en) 2020-05-06 2020-05-06 Silicon carbide crystal grinding device

Country Status (1)

Country Link
CN (1) CN211966998U (en)

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Legal Events

Date Code Title Description
GR01 Patent grant
GR01 Patent grant
EE01 Entry into force of recordation of patent licensing contract
EE01 Entry into force of recordation of patent licensing contract

Assignee: Shenzhen Reinvested Tianke Semiconductor Co.,Ltd.

Assignor: TANKEBLUE SEMICONDUCTOR Co.,Ltd.|Jiangsu tiankeheda Semiconductor Co.,Ltd.

Contract record no.: X2023990000674

Denomination of utility model: A silicon carbide crystal polishing device

Granted publication date: 20201120

License type: Common License

Record date: 20230725