CN211928087U - Laser chip aging treatment equipment and chip clamp thereof - Google Patents
Laser chip aging treatment equipment and chip clamp thereof Download PDFInfo
- Publication number
- CN211928087U CN211928087U CN201921979533.3U CN201921979533U CN211928087U CN 211928087 U CN211928087 U CN 211928087U CN 201921979533 U CN201921979533 U CN 201921979533U CN 211928087 U CN211928087 U CN 211928087U
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- chip
- groove
- slot
- plate
- board
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- 230000032683 aging Effects 0.000 title claims abstract description 10
- 239000002184 metal Substances 0.000 claims abstract description 6
- 230000005489 elastic deformation Effects 0.000 claims description 10
- 210000002421 cell wall Anatomy 0.000 abstract description 17
- 238000012360 testing method Methods 0.000 abstract description 11
- 230000006978 adaptation Effects 0.000 abstract description 3
- 230000001815 facial effect Effects 0.000 abstract description 2
- 230000000670 limiting effect Effects 0.000 description 4
- 230000008878 coupling Effects 0.000 description 3
- 238000010168 coupling process Methods 0.000 description 3
- 238000005859 coupling reaction Methods 0.000 description 3
- 238000010586 diagram Methods 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 3
- 239000000463 material Substances 0.000 description 2
- 230000000694 effects Effects 0.000 description 1
- 238000012423 maintenance Methods 0.000 description 1
- 229910052755 nonmetal Inorganic materials 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
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Abstract
The utility model discloses a laser chip aging treatment equipment and chip anchor clamps thereof, the latter is including stacking hot directly board, metal layer board, locating plate and the roof of connection in proper order, offer the chip groove on the locating plate, and the chip inslot is provided with mobilizable mode and dials the board, and when the chip was placed in the inside in chip groove, it made the surface of chip support to lean on the cell wall in chip groove to dial the board. Offer the chip groove with chip shape looks adaptation on the above-mentioned locating plate, the size in chip groove is greater than the size of chip, dial the board and can remove in the inside in chip groove, when carrying out the chip location, the inside in chip groove is placed to the chip, dial the outside facial features of board and chip and lean on, and promote the chip and remove, make the chip lean on with the cell wall counterbalance in chip groove, this moment, dial the side of board towards the chip and the cell wall of chip groove and chip contact carries on spacingly to the chip, the realization is spacing in X axle direction and Y axle direction to the chip, make the chip location accurate, the test accuracy of chip obtains guaranteeing.
Description
Technical Field
The utility model relates to a laser instrument technical field especially relates to a laser chip ageing treatment equipment and chip anchor clamps thereof.
Background
Burn-in testing of lasers is an important step in laser manufacturing where the chip of the laser needs to be secured using a burn-in jig.
In the prior art, a clamp for fixing a chip comprises a heat pillow plate, a metal layer plate, a positioning plate and a top plate, wherein the positioning plate is used for positioning the chip, a chip groove is formed in the positioning plate, an arched elastic sheet is arranged at a position corresponding to the positioning plate, when the chip is positioned, the chip is placed in the chip groove, and the chip is pushed to move and compress in three directions through the deformation of the arched elastic sheet on an X axis, a Y axis and a Z axis, so that the chip can effectively enter or leave the chip groove, the size of the chip groove needs to be far larger than that of the chip, the equipment space utilization is not facilitated, the chip is easy to move in the X axis direction and the Y axis direction, the positioning of the chip is inaccurate, and the test data are inaccurate; meanwhile, the pressing block on the top plate and the top plate are produced integrally, and the pressing block is easy to wear after long-time use due to frequent friction with related parts, so that the cost of overall replacement is high.
SUMMERY OF THE UTILITY MODEL
The object of the present invention is to solve at least one of the above problems, and the object is achieved by the following technical solutions.
The utility model provides a chip clamp for in laser chip aging treatment equipment, including heat directly board, metal layer board, locating plate and the roof that stacks the connection in proper order, set up the chip groove on the locating plate, movably the installing of chip inslot dials the board, and the chip is placed during the inside in chip groove dial the effect of board down the surface of chip supports and leans on the cell wall in chip groove.
Like this, set up the chip groove with chip shape looks adaptation on the locating plate, the size in chip groove is greater than the size of chip, dial the board and can remove in the inside in chip groove, when carrying out the chip location, the inside in chip groove is placed to the chip, dial the outside facial features of board and chip and lean on, and promote the chip and remove in X axle and Y axle direction, can make the chip and the cell wall counterbalance in chip groove lean on, this moment, dial the board and carry out spacingly with the cell wall of chip contact towards the side of chip and chip groove, thereby the realization is spacing at X axle direction and Y axle direction to the chip, and then make the chip location accurate, the test accuracy of chip obtains guaranteeing.
Furthermore, the positioning plate is further provided with a holding tank, the holding tank is communicated with the chip groove, one end of the shifting plate is arranged in the holding tank, and the other end of the shifting plate is arranged in the chip groove.
Further, the shifting plate is an elastic piece, and when a chip is placed in the chip groove, the elastic deformation of the elastic piece pushes the chip to abut against the groove wall of the chip groove.
Further, a preset interval is formed between the outer surface of the elastic piece and the groove wall of the accommodating groove.
Furthermore, the communication position of the accommodating groove and the chip groove is located at the edge of one side of the chip groove, and the elastic part extending into the chip groove and the groove wall far away from the elastic part form a limiting space for positioning the chip.
Further, the chip groove is located at the edge of the positioning plate, the holding tank extends to the inside of the positioning plate, the holding tank includes a U-shaped portion and an extending portion, the extending portion is communicated with the bottom of the U-shaped portion, the opening direction of the U-shaped portion faces the chip groove, one end of the U-shaped portion is communicated with the chip groove, and the groove wall of the other end of the U-shaped portion is fixedly connected with one end of the elastic piece.
Further, the shape of the elastic member conforms to the shape of the receiving groove.
Further, the thickness of the elastic piece is smaller than or equal to the thickness of the positioning plate.
Furthermore, a pressing block is arranged on the side face, facing the positioning plate, of the top plate, the pressing block is detachably mounted on the top plate, and when the top plate is connected with the positioning plate, the pressing block abuts against the upper surface of the chip.
The utility model also provides a laser chip ageing treatment equipment, including the chip anchor clamps, the chip anchor clamps be as above the chip anchor clamps.
Drawings
Various other advantages and benefits will become apparent to those of ordinary skill in the art upon reading the following detailed description of the preferred embodiments. The drawings are only for purposes of illustrating the preferred embodiments and are not to be construed as limiting the invention. Also, like reference numerals are used to refer to like parts throughout the drawings. In the drawings:
fig. 1 is a schematic structural diagram of a specific embodiment of a positioning plate provided by the present invention;
fig. 2 is a schematic structural diagram of a specific embodiment of the top plate provided by the present invention.
Reference numerals
100-positioning plate 200-top plate
1-receiving groove 11-extension 12-U-shaped portion;
2-chip groove
3-elastic member
4-briquetting
Detailed Description
Exemplary embodiments of the present disclosure will be described in more detail below with reference to the accompanying drawings. While exemplary embodiments of the present disclosure are shown in the drawings, it should be understood that the present disclosure may be embodied in various forms and should not be limited to the embodiments set forth herein. Rather, these embodiments are provided so that this disclosure will be thorough and complete, and will fully convey the scope of the disclosure to those skilled in the art.
Referring to fig. 1 and fig. 2, fig. 1 is a schematic structural view of a positioning plate according to the present invention; fig. 2 is a schematic structural diagram of the top plate provided by the present invention.
In a specific embodiment, the utility model provides a chip anchor clamps among laser chip aging treatment equipment, including heat directly board, metal plate, locating plate 100 and the roof 200 that stacks the connection in proper order, set up chip groove 2 on the locating plate 100, be provided with mobilizable mode in the chip groove 2 and dial the board, when the chip was placed in chip groove 2's inside, dial the board and make the surface of chip support and lean on the cell wall in chip groove 2. Specifically, set up the chip groove 2 with chip shape looks adaptation on above-mentioned locating plate 100, the size of chip groove 2 is greater than the size of chip, dial the board and can remove in the inside of chip groove 2, when carrying out the chip location, the inside of chip groove 2 is placed to the chip, dial the board and lean on with the surface counterbalance of chip, and promote the chip and remove, make the chip lean on with the cell wall counterbalance of chip groove 2, at this moment, dial the side of board towards the chip and chip groove 2 and chip contact's cell wall carry on spacingly to the chip, thereby the realization is spacing at X axle direction and Y axle direction to the chip, and then make the chip location accurate, the test accuracy of chip obtains guaranteeing.
It needs to be understood that when the chip is taken out, the shifting plate moves towards the direction far away from the chip, at the moment, the chip groove 2 and the shifting plate relieve the limiting effect on the chip, the chip can be smoothly taken out from the chip groove 2, and the convenience of operation is improved.
It should be noted that, a plurality of chip slots 2 may be formed in the positioning plate 100, and each chip slot 2 is disposed on the positioning plate 100 according to a specific structure, so that a plurality of chips can be positioned and tested at a time through the structure, thereby improving the testing efficiency and reducing the testing cost.
It is further understood that, holding tank 1 has still been seted up on locating plate 100, and holding tank 1 link up with chip groove 2, dials the one end setting of board in holding tank 1, dials the other end setting of board in chip groove 2. Above-mentioned holding tank 1 is used for holding and dials the board, dials the movable end setting of board in chip groove 2, can effectively reduce chip groove 2's size through this structure, avoids the inaccurate condition of chip location that chip groove 2 oversize leads to take place.
Further, dial the board and be elastic component 3, the one end of elastic component 3 and the cell wall rigid coupling of holding tank 1, the other end of elastic component 3 extends to the inside in chip groove 2, and when the chip was placed in the inside in chip groove 2, the elastic deformation of elastic component 3 made the chip support and leaned on the cell wall in chip groove 2. Elastic component 3 one end and the cell wall rigid coupling of holding tank 1, the other end extends to the inside in chip groove 2, elastic component 3 that extends to the inside in chip groove 2 is the movable end of elastic component 3, elastic component 3 is in under the state that does not take place elastic deformation, the spatial dimension that forms between the cell wall of elastic component 3 and chip groove 2 slightly is less than the size of chip, when the chip needs the location, need external force drive elastic component 3 to take place elastic deformation, use in the spatial dimension increase of positioning the chip, when the chip is placed the inside in chip groove 2, external force is relieved, the elastic deformation of elastic component 3 resumes, elastic component 3 promotes the chip and spacing the chip in the space that elastic component 3 and chip groove 2 formed, the elastic deformation of elastic component 3 does not resume completely this moment, elastic component 3 supports and leans on the surface of chip. This kind of simple structure, low in manufacturing cost can effectively realize the location to the chip in X axle direction and Y axle direction through the cooperation of elastic component 3 and chip groove 2 to guarantee the accuracy of chip location, and then improve the measuring accuracy of chip.
Further, the outer surface of the elastic member 3 is spaced apart from the groove wall of the accommodating groove 1. Part body of elastic component 3 extends to in chip groove 2, the surplus body of elastic component 3 is located holding tank 1, because the surface of elastic component 3 sets up with the cell wall interval of holding tank 1, when fixing a position the chip, elastic component 3 takes place elastic deformation, elastic component 3 body that this moment is located chip groove 2 inside takes place deformation with elastic component 3 body that is located holding tank 1 inside simultaneously, through this kind of structure, can reduce the deformation volume that is located chip groove 2 inside elastic component 3 body, avoid using elastic component 3 to become invalid for a long time, thereby prolong elastic component 3's life, reduce the cost of changing.
Furthermore, the communicating position of the accommodating groove 1 and the chip groove 2 is located at the edge of one side of the chip groove 2, and the elastic part 3 extending into the chip groove 2 and the groove wall far away from the elastic part 3 form a limiting space for positioning the chip. Set up holding tank 1 and chip groove 2's intercommunication position in one side of chip groove 2, can effectively reduce the size of seting up of chip groove 2, thereby improve the positioning accuracy of chip, simultaneously, the cell wall that link up the position was kept away from with chip groove 2 to elastic component 3 that is located chip groove 2 inside forms spacing space, this spacing space is used for the location to the chip, in addition, the cell wall interval that link up the position is close to with chip groove 2 to elastic component 3 that is located chip groove 2 inside sets up, this interval distance takes place elastic deformation with elastic component 3 and can satisfy putting into and taking out of chip can.
Furthermore, the elastic piece 3 is a spring plate which has wide material supply, and the manufacturing cost can be effectively reduced.
It should be noted that the elastic sheet can be made of metal or nonmetal, and the selection of specific material can be selected according to specific test requirements, which is not repeated herein.
It is specifically understood that the chip slot 2 is located at the edge of the positioning plate 100, the accommodating groove 1 extends towards the inside of the positioning plate 100, the accommodating groove 1 includes a U-shaped portion 12 and an extending portion 11, the extending portion 11 communicates with the bottom of the U-shaped portion 12, the opening direction of the U-shaped portion 12 faces the chip slot 2, one end of the U-shaped portion 12 communicates with the chip slot 2, and the groove wall of the other end of the U-shaped portion 12 is fixedly connected with one end of the elastic member 3. One end of elastic component 3 and the cell wall rigid coupling of the other end of U type portion 12 towards chip groove 2, the other end of elastic component 3 extends to the inside in chip groove 2, the shape of elastic component 3 is unanimous with holding tank 1's shape, however, the size of elastic component 3 is less than holding tank 1's size, the body that elastic component 3 is located U type portion 12 inside also is U type structure, this kind of structure can effectively increase the resilience force when elastic deformation takes place of elastic component 3, thereby improve the intensity that elastic component 3 leaned on the chip, and then improve the positioning accuracy of chip, make the precision of test obtain improving. Meanwhile, the elastic member 3 located at the extension 11 can be used for connection with other components, thereby further satisfying the requirements of chip testing.
Specifically, the thickness of the elastic member 3 is less than or equal to the thickness of the positioning plate 100. Through the structure, the elastic piece 3 can be completely positioned in the accommodating groove 1 and the chip groove 2, and the influence of other external parts on the elastic piece 3 is avoided, so that the positioning precision is ensured.
Specifically, the side of the top plate 200 facing the positioning plate 100 is detachably provided with a pressing block 4, and the pressing block 4 abuts against the upper surface of the chip when the top plate 200 is coupled with the positioning plate 100. After the positioning plate 100 finishes positioning the chip, the top plate 200 is connected with the positioning plate 100, and the pressing block 4 abuts against the upper surface of the chip, so that the chip is limited in the Z-axis direction, and the positioning accuracy of the chip is further ensured. When briquetting 4 wearing and tearing need be changed, with briquetting 4 and roof 200 separation, be connected new briquetting 4 and roof 200 again, the roof 200 of this kind of structure can effectively reduce the maintenance cost of roof 200 to reduce the cost of test.
It should be noted that the connection mode between the pressing block 4 and the top plate 200 may be clamping connection, threaded connection, etc., and this application is not described herein again.
Except above-mentioned chip anchor clamps, the utility model discloses still provide a laser chip ageing treatment equipment including this chip anchor clamps, this laser chip ageing treatment equipment's each partial structure of other please refer to prior art, do not describe herein repeatedly.
It will be understood that, although the terms first, second, third, etc. may be used herein to describe various elements, components, regions, layers and/or sections, these elements, components, regions, layers and/or sections should not be limited by these terms. These terms may be only used to distinguish one element, component, region, layer or section from another element, component, region, layer or section. Terms such as "first," "second," and other numerical terms when used herein do not imply a sequence or order unless clearly indicated by the context.
The above description is only for the preferred embodiment of the present invention, but the scope of the present invention is not limited thereto, and any changes or substitutions that can be easily conceived by those skilled in the art within the technical scope of the present invention should be covered by the present invention. Therefore, the protection scope of the present invention shall be subject to the protection scope of the claims.
Claims (10)
1. A chip clamp is used for laser chip aging treatment equipment and is characterized by comprising a hot pillow plate, a metal layer plate, a positioning plate and a top plate which are sequentially stacked and connected; the positioning plate is provided with a chip groove, a shifting plate is movably arranged in the chip groove, and when a chip is placed in the chip groove, the outer surface of the chip is abutted against the groove wall of the chip groove under the action of the shifting plate.
2. The chip clamp according to claim 1, wherein the positioning plate further comprises a receiving groove, the receiving groove is connected to the chip groove, one end of the pulling plate is disposed in the receiving groove, and the other end of the pulling plate is disposed in the chip groove.
3. The chip holder according to claim 2, wherein the pick-up plate is an elastic member, and when a chip is placed in the chip slot, the elastic deformation of the elastic member pushes the chip against the slot wall of the chip slot.
4. The chip holder as claimed in claim 3, wherein the outer surface of the elastic member is spaced apart from the groove wall of the receiving groove by a predetermined distance.
5. The chip holder as claimed in claim 4, wherein the communication position between the receiving slot and the chip slot is located at an edge of one side of the chip slot, and the elastic member extending into the chip slot and a slot wall away from the elastic member form a spacing space for positioning the chip.
6. The chip holder according to claim 5, wherein the chip slot is located at an edge of the positioning plate, the receiving slot extends toward an inside of the positioning plate, the receiving slot includes a U-shaped portion and an extending portion, the extending portion is connected to a bottom of the U-shaped portion, an opening of the U-shaped portion faces the chip slot, one end of the U-shaped portion is connected to the chip slot, and a slot wall of the other end of the U-shaped portion is fixedly connected to one end of the elastic member.
7. The chip holder according to claim 6, wherein the elastic member has a shape conforming to a shape of the receiving groove.
8. The chip holder according to claim 7, wherein the elastic member has a thickness less than or equal to a thickness of the positioning plate.
9. The chip holder according to claim 1, wherein a side of the top plate facing the positioning plate is provided with a pressing block, the pressing block is detachably mounted to the top plate, and the pressing block abuts against an upper surface of the chip when the top plate is coupled to the positioning plate.
10. A laser chip burn-in apparatus comprising a chip holder, wherein the chip holder is the chip holder according to any one of claims 1 to 9.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201921979533.3U CN211928087U (en) | 2019-11-16 | 2019-11-16 | Laser chip aging treatment equipment and chip clamp thereof |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201921979533.3U CN211928087U (en) | 2019-11-16 | 2019-11-16 | Laser chip aging treatment equipment and chip clamp thereof |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN211928087U true CN211928087U (en) | 2020-11-13 |
Family
ID=73319020
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201921979533.3U Active CN211928087U (en) | 2019-11-16 | 2019-11-16 | Laser chip aging treatment equipment and chip clamp thereof |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN211928087U (en) |
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2019
- 2019-11-16 CN CN201921979533.3U patent/CN211928087U/en active Active
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| TR01 | Transfer of patent right |
Effective date of registration: 20231219 Address after: Room 717, building 3, 111 Xiangke Road, China (Shanghai) pilot Free Trade Zone, Pudong New Area, Shanghai, 200120 Patentee after: Shanghai filai Testing Technology Co.,Ltd. Address before: Room 310-7, No. 1019 Donghai Road, Zhongguancun Science and Technology Park, Binhai New Area, Tianjin, 300381 Patentee before: TIANJIN FEILAI TECHNOLOGY Co.,Ltd. |
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| TR01 | Transfer of patent right |