CN211915427U - Lead screw subassembly of dummy bar mechanism - Google Patents

Abstract

The utility model discloses a lead screw subassembly of dummy bar mechanism belongs to the metal manufacture equipment field, has solved the lead screw and has hung the problem that position department damaged easily, the utility model discloses a lead screw subassembly of dummy bar mechanism, including the lead screw, the lead screw upper end is equipped with annular recess along circumference, the installation fixture block is rotated to the recess periphery, be located on the lead screw the recess below is equipped with the edge the annular bellying that lead screw circumference set up, the bellying tip is equipped with the bottom plate, the bottom plate with be equipped with rotation coupling assembling between the fixture block, the installation end cover rotates outward to the fixture block, the end cover with fixed mounting bearing seat between the bottom plate, the bearing frame with rotation coupling assembling normal running fit.

Description

Lead screw subassembly of dummy bar mechanism

[ technical field ] A method for producing a semiconductor device

The utility model relates to a metal manufacture equipment field especially relates to the lead screw subassembly of dummy ingot mechanism.

[ background of the invention ]

In the dummy bar mechanism disclosed by the prior art, the lead screw is hung in a suspension manner by means of threads, so that the lead screw needs to bear larger weight, the threads are easy to wear along with the lengthening of the service time, the faults are frequent, the production is seriously influenced, and the maintenance cost is continuously increased.

[ Utility model ] content

The utility model aims to solve the technical problem that overcome prior art not enough and propose the lead screw subassembly of dummy ingot mechanism, solved the lead screw and hung the problem of easy damage of position department.

In order to solve the technical problem, the utility model adopts the following technical scheme:

the screw rod assembly of the dummy bar mechanism comprises a screw rod, wherein an annular groove is formed in the upper end of the screw rod along the circumferential direction, a clamping block is rotatably installed on the periphery of the groove, an annular protruding portion is arranged on the screw rod and located below the groove and circumferentially arranged along the screw rod, a bottom plate is arranged at the end portion of the protruding portion, a rotating connection assembly is arranged between the bottom plate and the clamping block, an end cover is rotatably installed outside the clamping block, a bearing seat is fixedly installed between the end cover and the bottom plate, and the bearing seat is rotatably matched with the rotating connection assembly.

The fixture block is arranged in the groove, the fixture block can be limited in the groove by the screw rods at the upper part and the lower part of the groove, and when the fixture block is used, the screw rods can suspend the fixture block in the air by means of the groove, so that the problem that threads are easily abraded in a manner of suspending the fixture block in the air by means of threads in the prior art is solved; when the lead screw rotates, the rotary connecting assembly can avoid the contact between the bearing seat and the lead screw, and when the lead screw rotates, the bearing seat can be kept still, so that the friction between the lead screw and a fixture block in the rotating process is avoided, and the abrasion is avoided.

Further, rotate coupling assembling including setting up the liner of lead screw circumference, be equipped with first through-hole and second through-hole in the bearing frame, first through-hole diameter is greater than second through-hole diameter, first through-hole cladding is in outside the fixture block, the liner with first through-hole bottom terminal surface offsets in order to restrict bearing frame axial displacement. The axial displacement of the bearing seat can be limited under the combined action of the bottom plate and the gasket, and the bearing seat is prevented from being separated from the screw rod when the screw rod is suspended.

Furthermore, a first bearing is arranged between the gasket and the fixture block. The liner offsets with the bearing frame and restricts the displacement of bearing frame, consequently when the lead screw rotates, needs the liner also can not rotate along with the lead screw, after having set up first bearing, alright in order to realize the relative rotation between liner and the lead screw, and under the limiting displacement of bearing frame, first bearing and fixture block, can not produce wearing and tearing with the liner friction when the lead screw rotates.

Furthermore, the rotation coupling assembling still including set up the liner with be equipped with second bearing, third bearing and support between the bottom plate the support piece of second bearing, third bearing, the second bearing inner circle with the lead screw offsets, the outer lane with second through-hole inner wall and liner offset, the third bearing inner circle with the lead screw offsets, the outer lane with second through-hole inner wall offsets. When the screw rod rotates, the inner rings of the second bearing and the third bearing can synchronously rotate with the screw rod, the outer rings of the second bearing and the third bearing are abutted against the rotating bearing and are kept static, the gasket is not contacted with the inner ring of the second bearing, the rotation of the inner ring of the second bearing is facilitated, and meanwhile, the outer ring of the second bearing is abutted against the gasket to support the gasket.

Furthermore, the support piece comprises a first bushing attached to the screw rod and a second bushing attached to the inner wall of the second through hole, two ends of the first bushing respectively abut against inner rings of the second bearing and the third bearing, and two ends of the second bushing respectively abut against outer rings of the second bearing and the third bearing. The first bushing and the second bushing can support the second bearing, the gasket and the first bearing, and meanwhile, the second bushing is also abutted against the bearing seat to support the bearing seat.

Furthermore, the end cover and the bottom plate are connected with the bearing seat through screws, the clamping block is divided into a first connecting block and a second connecting block, and the first connecting block is connected with the second connecting block through screws. When the split, can unscrew the screw, take off end cover and bearing frame, unscrew the screw on the fixture block again, take off first connecting block and second connecting block, alright in order to take off first bearing, liner, second bearing, first bush, second bush, third bearing and bottom plate, the split is convenient.

These features and advantages of the present invention will be disclosed in more detail in the following detailed description and the accompanying drawings.

[ description of the drawings ]

The invention will be further explained with reference to the drawings:

fig. 1 is a cross-sectional view of a screw assembly in an embodiment of the present invention;

fig. 2 is a schematic structural view of a screw rod in an embodiment of the present invention;

fig. 3 is a schematic structural view of the rotating connection assembly, the end cap, the fixture block and the bottom plate in the embodiment of the present invention;

fig. 4 is a schematic structural view of a bearing seat in an embodiment of the present invention;

fig. 5 is a schematic structural view of a fixture block in an embodiment of the present invention.

Reference numerals:

the screw 100, the groove 110 and the bulge 120;

the fixture block 200, the first connecting block 201 and the second connecting block 202;

a base plate 210;

a rotation connection assembly 220, a pad 221, a first bearing 222, a second bearing 223, a third bearing 224, a first bushing 225, a second bushing 226;

an end cap 230;

a bearing seat 240, a first through hole 241, and a second through hole 242.

[ detailed description ] embodiments

The technical solutions of the embodiments of the present invention are explained and explained below with reference to the drawings of the embodiments of the present invention, but the embodiments described below are only preferred embodiments of the present invention, and not all embodiments. Based on the embodiments in the embodiment, other embodiments obtained by those skilled in the art without any creative work belong to the protection scope of the present invention.

In the description of the present invention, it is to be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "clockwise", "counterclockwise" and the like indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings, and are only for convenience of description and to simplify the description, but do not indicate or imply that the device or element referred to must have a particular orientation, be constructed and operated in a particular orientation, and therefore should not be construed as limiting the present invention.

Furthermore, the terms "first", "second" and "first" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of that feature. In the description of the present invention, unless otherwise specified, "a plurality" means two or more unless explicitly defined otherwise.

In the present invention, unless otherwise expressly specified or limited, the terms "mounted," "connected," and "fixed" are to be construed broadly and may, for example, be fixedly connected, detachably connected, or integrally connected; can be mechanically or electrically connected; they may be connected directly or indirectly through intervening media, or they may be interconnected between two elements. The specific meaning of the above terms in the present invention can be understood according to specific situations by those skilled in the art.

In the present disclosure, unless expressly stated or limited otherwise, the first feature "on" or "under" the second feature may comprise direct contact between the first and second features, or may comprise contact between the first and second features not directly. Also, the first feature being "on," "above" and "over" the second feature includes the first feature being directly on and obliquely above the second feature, or merely indicating that the first feature is at a higher level than the second feature. A first feature being "under," "below," and "beneath" a second feature includes the first feature being directly under and obliquely below the second feature, or simply meaning that the first feature is at a lesser elevation than the second feature.

Referring to fig. 1 to 4, the utility model provides a lead screw subassembly of dummy bar mechanism, including lead screw 100, 100 upper ends of lead screw are equipped with annular recess 110 along circumference, installation fixture block 200 is rotated to recess 110 periphery, lie in on the lead screw 100 recess 110 below is equipped with the edge the annular bellying 120 that 100 circumference of lead screw set up, bellying 120 tip is equipped with bottom plate 210, bottom plate 210 with be equipped with between the fixture block 200 and rotate coupling assembling 220, rotate installation end cover 230 outside the fixture block 200, end cover 230 with fixed mounting bearing frame 240 between the bottom plate 210, bearing frame 240 with rotate coupling assembling 220 normal running fit.

The fixture block 200 is arranged in the groove 110, the screw 100 at the upper part and the lower part of the groove 110 can limit the fixture block 200 in the groove 110, and when the fixture block is used, the screw 100 can be used for limiting and hanging the fixture block 200 by virtue of the groove 110, so that the problem that threads are easily worn in a thread hanging mode in the prior art is solved; when the screw 100 rotates, the rotating connection assembly 220 can prevent the bearing seat 240 from contacting the screw 100, and when the screw 100 rotates, the bearing seat 240 can be kept still, so that friction between the screw 100 and the fixture block 200 in the rotating process is avoided, and abrasion is avoided.

Wherein coupling assembling includes: a pad 221, a first bearing 222, a second bearing 223, a third bearing 224, a first bushing 225, and a second bushing 226.

A first through hole 241 and a second through hole 242 are arranged in the bearing seat 240, the diameter of the first through hole 241 is larger than that of the second through hole 242, the first through hole 241 is covered outside the fixture block 200, the second through hole 242 is covered outside the second bearing 223, the third bearing 224, the first bushing 225 and the second bushing 226, and the gasket 221 is arranged in the circumferential direction of the screw rod 100 and abuts against the end face of the bottom of the first through hole 241.

The first bearing 222 is arranged between the gasket 221 and the fixture block 200, the gasket 221 is limited by the first bearing 222, the fixture block 200 and the bearing seat 240 in axial displacement, meanwhile, the gasket 221 also limits the upward displacement of the bearing seat 240, the bottom plate 210 limits the downward displacement of the bearing seat 240, the axial displacement of the bearing seat 240 can be limited under the combined action of the bottom plate 210 and the gasket 221, and the bearing seat 240 is prevented from being separated from the screw rod 100 when the screw rod 100 is suspended; after the first bearing 222 is arranged, relative rotation between the pad 221 and the lead screw 100 can be realized, when the lead screw 100 rotates, the pad 221 cannot rotate along with the lead screw 100, and under the limiting action of the bearing seat 240, the first bearing 222 and the fixture block 200, the lead screw 100 cannot rub against the pad 221 to generate abrasion when rotating.

Second bearing 223, third bearing 224 set up the gasket 221 with between the bottom plate 210, the second bearing 223 inner circle with lead screw 100 offsets, the outer lane with second through-hole 242 inner wall and gasket 221 offset, third bearing 224 inner circle with lead screw 100 offsets, the outer lane with second through-hole 242 inner wall offsets, and when lead screw 100 rotated, the inner circle of second bearing 223, third bearing 224 can rotate with lead screw 100 is synchronous, and the outer lane and the rolling bearing of second bearing 223, third bearing 224 offset and keep static, and gasket 221 not contact with the inner circle of second bearing 223, made things convenient for the rotation of the inner circle of second bearing 223, and the outer lane and the gasket 221 of second bearing 223 offset simultaneously, support gasket 221.

The first bushing 225 and the second bushing 226 are disposed between the second bearing 223 and the third bearing 224, the first bushing 225 is attached to the lead screw 100, the second bushing 226 is attached to the inner wall of the second through hole 242, two ends of the first bushing 225 respectively abut against inner rings of the second bearing 223 and the third bearing 224, two ends of the second bushing 226 respectively abut against outer rings of the second bearing 223 and the third bearing 224, the first bushing 225 and the second bushing 226 can support the second bearing 223, the gasket 221 and the first bearing 222, and the second bushing 226 also abuts against the bearing seat 240 to support the bearing seat 240.

When the screw 100 rotates, the fixture block 200, the first bearing 222 inner ring, the second bearing 223 inner ring, the third bearing 224 inner ring and the first bushing 225 can be driven to rotate, and the first bearing 222 outer ring, the second bearing 223 outer ring, the third bearing 224 outer ring, the bearing seat 240, the second bushing 226, the end cover 230 and the bottom plate 210 cannot rotate along with the screw 100.

Referring to fig. 1 to 5, the end cap 230 and the base plate 210 are connected to the bearing seat 240 by screws, the fixture block 200 is divided into a first connection block 201 and a second connection block 202, the first connection block 201 and the second connection block 202 are connected by screws, when the fixture block is disassembled, the screws can be unscrewed, the end cap 230 and the bearing seat 240 are removed, the screws on the fixture block 200 are unscrewed, and the first connection block 201 and the second connection block 202 are removed, so that the first bearing 222, the gasket 221, the second bearing 223, the first bushing 225, the second bushing 226, the third bearing 224 and the base plate 210 can be sequentially removed, and the disassembly is convenient.

The above description is only for the specific embodiments of the present invention, but the protection scope of the present invention is not limited thereto, and those skilled in the art should understand that the present invention includes but is not limited to the contents described in the drawings and the above specific embodiments. Any modification which does not depart from the functional and structural principles of the present invention is intended to be included within the scope of the claims.

Claims (6)

1. The lead screw subassembly of dummy ingot mechanism, including the lead screw, its characterized in that: the lead screw is characterized in that an annular groove is formed in the upper end of the lead screw along the circumferential direction, a clamping block is rotatably installed on the periphery of the groove, an annular protruding portion arranged along the circumferential direction of the lead screw is arranged below the groove on the lead screw, a bottom plate is arranged at the end portion of the protruding portion, a rotating connection assembly is arranged between the bottom plate and the clamping block, an end cover is rotatably installed outside the clamping block, a bearing seat is fixedly installed between the end cover and the bottom plate, and the bearing seat is rotatably matched with the rotating connection assembly.

2. The lead screw assembly of a dummy bar mechanism according to claim 1, wherein: the rotating connection assembly comprises a liner arranged in the circumferential direction of the screw rod, a first through hole and a second through hole are formed in the bearing seat, the diameter of the first through hole is larger than that of the second through hole, the fixture block is coated with the first through hole, and the liner abuts against the bottom end face of the first through hole to limit axial displacement of the bearing seat.

3. The lead screw assembly of a dummy bar mechanism according to claim 2, wherein: and a first bearing is arranged between the gasket and the clamping block.

4. The lead screw assembly of a dummy bar mechanism according to claim 3, wherein: the rotation connecting assembly further comprises a second bearing, a third bearing and a support piece, wherein the second bearing, the third bearing and the support piece are arranged between the gaskets and the bottom plate, the second bearing is supported by the support piece, an inner ring of the second bearing is abutted to the screw rod, an outer ring of the second bearing is abutted to the inner wall of the second through hole and the gaskets, an inner ring of the third bearing is abutted to the screw rod, and an outer ring of the third bearing is abutted to the inner wall of the second through hole.

5. The lead screw assembly of a dummy bar mechanism according to claim 4, wherein: the support piece comprises a first bushing attached to the screw rod and a second bushing attached to the inner wall of the second through hole, two ends of the first bushing respectively abut against inner rings of the second bearing and the third bearing, and two ends of the second bushing respectively abut against outer rings of the second bearing and the third bearing.

6. The lead screw assembly of a dummy bar mechanism according to any one of claims 1 to 5, wherein: the end cover and the bottom plate are connected with the bearing seat through screws, the clamping block is divided into a first connecting block and a second connecting block, and the first connecting block is connected with the second connecting block through screws.

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