CN211886296U - Mixing arrangement of preparation of definite value ternary mixed standard gas - Google Patents

Mixing arrangement of preparation of definite value ternary mixed standard gas Download PDF

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Publication number
CN211886296U
CN211886296U CN202020118970.2U CN202020118970U CN211886296U CN 211886296 U CN211886296 U CN 211886296U CN 202020118970 U CN202020118970 U CN 202020118970U CN 211886296 U CN211886296 U CN 211886296U
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gas
branch pipe
mixing
component
turbofan
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CN202020118970.2U
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Inventor
刘广虎
贾永永
王星月
黄静宜
刘智荣
王鹤
温明明
程思海
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Beijing Disaster Prevention Science And Technology Co ltd
College Of Disaster Prevention Technology
Guangzhou Marine Geological Survey
Institute of Disaster Prevention
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Beijing Disaster Prevention Science And Technology Co ltd
College Of Disaster Prevention Technology
Guangzhou Marine Geological Survey
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Abstract

The embodiment of the utility model discloses mixing arrangement of preparation of definite value ternary mixed standard gas, including the turbofan that is used for mixing multiunit component gas and carrier gas and thoughtlessly gas the mechanism, the turbofan thoughtlessly gas the mechanism including the upper chamber that is used for connecting the first branch pipe of carrying the multiunit component gas to and be used for connecting the second branch pipe of carrying the carrier gas, and the lower floor cavity with carrier gas and component gas mixture, upper chamber and lower floor cavity inside are provided with the turbofan; the second branch pipe is connected with a vacuum system through a pipeline, a third branch pipe used for decompressing gas in the upper layer cavity is further connected in the upper layer cavity, and a main branch pipeline used for outputting mixed gas of component gas and carrier gas is arranged on the lower layer cavity of the second branch pipe, so that the component gas flow and the carrier gas flow are completely mixed in the mixing container, and the mixed gas can be continuously and dynamically output in a mode of feeding back the component gas.

Description

Mixing arrangement of preparation of definite value ternary mixed standard gas
Technical Field
The embodiment of the utility model provides a mixing arrangement of preparation of definite value ternary mixed gas standard solution, concretely relates to definite value ternary mixed standard gas is related to.
Background
The standard mixed gas is prepared by taking a high-purity gas as a diluent gas and adding one or more other high-purity gases, and mainly comprises a weighing method, a partial pressure method, a volume method, a permeation method, a saturation method, an electrolysis method, an index dilution method and the like. The preparation of the standard solution mostly adopts methods such as a volumetric method, a neutralization method, a redox method, a complex titration method, a method for manufacturing a system for preparing the quantitative trace water-soluble gas standard solution and the like. Wherein, standard gas preparation methods such as a weighing method, a partial pressure method, a volume method, a permeation method, a saturation method, an electrolysis method, an index dilution method and the like are only suitable for preparing constant value mixed standard gas; the preparation methods of standard solutions such as a volumetric method, a neutralization method, a redox method, a complex titration method and the like are only suitable for preparing the standard solution taking non-gas as a main target; the method for manufacturing the constant value trace water-soluble gas standard solution can manufacture the standard solution taking water-soluble gas as a main target according to a headspace balance gas chromatography testing principle, but can be realized by depending on a plurality of systems such as a pressure-resistant stock solution barrel, a constant gas standard solution preparation device, a gas chromatography unit and the like.
In the traditional configuration method, the component gas and the carrier gas are directly mixed, because the component gas flow and the carrier gas flow have certain flow rates, a gas flow channel can be formed in the mixed gas pipe, the component gas flow and the carrier gas flow cannot be completely mixed in the mixing container, and in the traditional configuration method, the mixed gas cannot be continuously and dynamically output due to the fact that the pressure in the pipe is in the changing process in a direct mixing mode.
SUMMERY OF THE UTILITY MODEL
Therefore, the embodiment of the utility model provides a mixing arrangement of definite value ternary mixing standard gas preparation, solved in traditional configuration method, all directly mix through component gas and carrier gas, because component gas flow and carrier gas air current all have certain velocity of flow, can form the air current way in mixing the trachea, component gas flow and carrier gas air current all can't complete mixing in getting into mixing container, and the mode through direct mixing at traditional configuration method is in the in-process that changes because the pressure in the pipeline, can't last dynamic output gas mixture's problem.
In order to achieve the above object, the embodiments of the present invention provide the following technical solutions:
a mixing device for manufacturing constant value ternary mixed standard gas comprises a turbofan gas mixing mechanism for mixing multi-component gas and carrier gas, wherein the turbofan gas mixing mechanism comprises an upper layer cavity and a lower layer cavity, the upper layer cavity is used for being connected with a first branch pipe for conveying the multi-component gas, the second branch pipe is used for being connected with a second branch pipe for conveying the carrier gas, the lower layer cavity is used for mixing the carrier gas and the component gas, and turbofan fans are arranged in the upper layer cavity and the lower layer cavity; the second branch pipe is connected with a vacuum system through a pipeline, a third branch pipe used for decompressing the gas in the upper layer cavity is further connected in the upper layer cavity, and a main branch pipeline used for outputting mixed gas of component gas and carrier gas is arranged on the lower layer cavity right opposite to the second branch pipe.
As an optimized scheme of the utility model, the junction of third bleeder and first bleeder and upper chamber is located the both ends on certain diameter of upper chamber.
As an optimized scheme of the utility model, be provided with the check valve on the third bleeder, be provided with the interior pressure sensor who is used for monitoring interior atmospheric pressure on the upper cavity.
As a preferred scheme of the utility model, the diameter of turbofan is slightly less than the diameter of upper chamber.
As an optimized proposal of the utility model, the first branch pipe and the main branch pipeline are both provided with a straight-through valve.
The utility model discloses an embodiment has following advantage:
the utility model provides an in traditional configuration method, just be provided with the total minute pipeline that is used for exporting the mist of component gas and carrier gas on the lower floor cavity of second branch pipe for component gas flow and carrier gas air current are getting into the complete mixture of mixing vessel, and can last dynamic output mist through the mode of feedback component gas.
Drawings
In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings used in the description of the embodiments or the prior art will be briefly described below. It should be apparent that the drawings in the following description are merely exemplary, and that other embodiments can be derived from the drawings provided by those of ordinary skill in the art without inventive effort.
The structure, ratio, size and the like shown in the present specification are only used for matching with the content disclosed in the specification, so as to be known and read by people familiar with the technology, and are not used for limiting the limit conditions which can be implemented by the present invention, so that the present invention has no technical essential significance, and any structure modification, ratio relationship change or size adjustment should still fall within the scope which can be covered by the technical content disclosed by the present invention without affecting the efficacy and the achievable purpose of the present invention.
FIG. 1 is a block diagram of a manufacturing system according to an embodiment of the present invention;
FIG. 2 is a schematic structural view of a turbofan gas mixing mechanism according to an embodiment of the present invention;
FIG. 3 is a schematic diagram of a mixing chamber structure according to an embodiment of the present invention;
FIG. 4 is a schematic view of the connection structure of the fixed-ratio conveying unit and the gas mixing unit according to the embodiment of the present invention;
fig. 5 is a schematic view of a third branch pipe structure according to an embodiment of the present invention;
fig. 6 is a schematic diagram of a first floor structure according to an embodiment of the present invention;
fig. 7 is a schematic view of a quick connector structure according to an embodiment of the present invention.
In the figure:
1-a first branch pipe; 2-a second branch pipe; 3-a vacuum system; 4-a pressure sensor; 5-a mass flow controller; 6-total branch pipeline; 7-turbofan gas mixing mechanism; 8-aeration coil pipe; 9-a spiral pipe; 10-a quick coupling; 11-a feedback loop; 12-an internal pressure sensor; 13-a third branch pipe; 14-proportional valve; 15-a one-way valve; 16-a mixing bin body; 17-a set of multi-well plates; 18-a movable valve; 19-a water outlet; 20-a gas outlet; 21-a pressure relief valve; 22-magnetic heating stirring mechanism; 23-a stirrer; 24-heat preservation water jacket;
101-a bidirectional pipe body; 102-a threaded segment; 103-threaded sleeve; 104-reducing layer sleeve; 105-an equal diameter tube; 106-projection; 107-annular groove; 108-embedded ring grooves; 109-annular latch tongue; 110-inner seal ring;
171-a first laminate; 172-second ply; 173-a through hole; 174-a flow guide core;
701-an upper chamber; 702-a lower chamber; 703-turbofan.
Detailed Description
The present invention is described in terms of specific embodiments, and other advantages and benefits of the present invention will become apparent to those skilled in the art from the following disclosure. Based on the embodiments in the present invention, all other embodiments obtained by a person skilled in the art without creative work belong to the protection scope of the present invention.
As shown in fig. 1, the utility model provides a system for producing constant value multi-component mixed standard gas, which comprises,
the fixed proportion gas conveying unit is used for providing component gas and carrier gas in preset proportion;
the gas mixing unit is used for mixing the component gas and the carrier gas supplied by the fixed-proportion gas conveying unit to obtain intermediate gas;
and the mixer is used for calibrating the volume and the gas pressure of the intermediate gas in a constant-temperature sealed environment to obtain a target gas and dynamically outputting the target gas under the preset gas pressure.
The utility model discloses a method for dynamically preparing mass conservation flow ratio, which is a method for obtaining dynamic standard gas by fully and uniformly mixing according to a certain proportion by controlling the mass flow of each component gas and carrier gas. The mass conservation law is used for calculating the flow ratio, the high-precision mass flow controller 5 is arranged on the delivery pipeline of the component gas and the carrier gas in the fixed-proportion delivery unit, the mass flow of the component gas and the carrier gas in the fixed-proportion delivery unit is determined by the mass flow controller 5, the fully-mixed state is achieved in a multiple-mixing mode of the gas mixing unit and the mixer, and the standard gas is dynamically output under the fixed pressure value of the mixer.
The object that the scaling gas conveying unit passes through 5 measurement control of mass flow controller is mass flow, so the utility model discloses do not receive the influence of conditions such as temperature and pressure in component gas and carrier gas transportation process to do not produce any waste gas or waste liquid harmful to the environment after mixing, make and prepare standard gas efficiency fast, the precision is high and sustainable dynamic output, and safety, stability, green, environmental protection, device are simple and easy, low cost, easy and simple to handle.
As shown in fig. 1, the present invention further provides a conveying device for the above-mentioned carrier gas and combined gas, namely, a proportional gas conveying unit, specifically comprising a plurality of first branch pipes 1 for conveying the component gas and a second branch pipe 2 for conveying the carrier gas, and a vacuum system 3 for realizing the near vacuum state of the first branch pipe 1, the second branch pipe 2, the gas mixing unit and the mixer.
The pipelines of the first branch pipe 1 and the second branch pipe 2 and the vacuum system 3 are respectively provided with a pressure sensor 4 and a mass flow controller 5, the pressure, the flow and the mass of the gas in the conveying pipeline are detected in real time, the flow and the mass in the conveying pipeline are adjusted in real time through the mass flow controller 5,
the utility model discloses still set up direct valve at the both ends that first branch pipe 1 and second branch pipe 2 are located mass flow controller 5, its effect is for close the transport state among the conveying pipeline to and through closing direct valve, start vacuum system 3, be convenient for accomplish the nearly vacuum state in the conveying pipeline.
The component gas supply means of the first branch pipe 1 may be a gas supply cylinder and the carrier gas supply means of the second branch pipe 2 may be a gas carrier cylinder.
As shown in fig. 1, fig. 2 and fig. 4, the present invention further provides a preliminary mixing device for mixing the carrier gas and the component gas, i.e. a gas mixing unit, specifically comprising a main branch pipe 6 connecting the vacuum system 3 and the mixer and a turbofan 703 gas mixing mechanism 7 arranged on the main branch pipe 6, wherein the turbofan 703 gas mixing mechanism 7 is connected with the proportional gas delivery unit and receives the component gas and the carrier gas, and the end of the main branch pipe 6 extending into the mixer is provided with a ventilation coil 8 for spraying the mixed gas of the component gas and the carrier gas;
the mixed gas flow delivered by the fixed-proportion gas delivery unit is changed by the turbofan 703 gas mixing mechanism 7, and the flow rate of the mixed gas delivered to the mixer from the main branch pipeline 6 is controlled by the turbofan 703 gas mixing mechanism 7.
The main branch pipe positioned in the mixed gas is provided with a spiral pipe 9, and the main branch pipe positioned between the spiral pipe 9 and the turbofan 703 gas mixing mechanism 7 is connected through a quick joint 10.
The turbofan 703 gas mixing mechanism 7 comprises an upper chamber 701 for connecting the first branch pipe 1 and a lower chamber 702 for connecting the second branch pipe 2 and for mixing the carrier gas and the component gas, wherein the upper chamber 701 and the lower chamber 702 are internally provided with a turbofan 703 coaxially rotating, and the interiors of the upper chamber 701 and the lower chamber 702 are in a communicated state;
further, the turbofan 703 in the upper chamber 701 and the lower chamber 702 may rotate coaxially or may rotate by two rotating shafts, respectively.
The vacuum system 3 is connected by piping to the connection of the second branch pipe 2 to the lower chamber 702.
During operation, the component gas flows into the turbofan 703 gas mixing mechanism 7 through the first branch pipe 1, is mixed with the carrier gas entering the lower chamber 702 through the second branch pipe 2 after being primarily mixed in the upper chamber 701, and finally is sent to the spiral pipe 9 through the main branch pipe, and finally is sprayed out through the ventilating coil pipe 8.
In the process, a gas volume change process exists due to the mixing of the component gas and the carrier gas, and the change process is influenced by the temperature and the volume of the mixed gas entering the space in the mixer, so that the mixing ratio of the component gas and the carrier gas is influenced.
As shown in fig. 5, when the pressure inside the upper chamber 701 exceeds a pre-calculated threshold value, the feedback loop 11 starts to operate, feeding the component gas back to the first branch pipes 1, and actively adjusting the amount of gas of the component gas of the feedback loop 11 entering each first branch pipe 1 through the proportional valve 14.
The utility model discloses an upper chamber 701 and lower floor's cavity 702 keep apart the gaseous mixture of a plurality of component and the mixture of carrier gas, the component gas after the mixture feeds back to every first branch pipe 1 through the mixture with the proportion, and do not influence the total amount of mist, and then guarantee that the gaseous total amount in this system is unchangeable, use the law of conservation of mass as the leading principle foundation, through the gaseous mass flow of carrier gas and component in the control of mass flow controller 5 and the measuring pipeline, make its abundant mixing through a series of mixing arrangement in mixing the storehouse, finally obtain dynamic output's target value ternary mixing standard gas.
Further, the utility model discloses in increase the flow path of component gas and carrier gas in the blender through spiral pipe 9, and then guarantee that the temperature before the mist by 8 blowout of ventilation coil pipe keeps unanimous with the blender, and then reduces the influence of the difference in temperature.
The utility model provides a feedback loop 11 includes the third lateral duct 13 along the access of 1 interior airflow flow direction of first lateral duct, is provided with the proportional valve on the third lateral duct 13, and third lateral duct 13 is just to the position that first lateral duct 1 is connected with upper chamber 701 hookup location, and the junction of third lateral duct 13 and upper chamber 701 is provided with check valve 15.
According to the actual proportioning requirement of the target gas, the one-way valve 15 can be changed into a two-way valve, and the gas inlet proportion of the component gas is increased by means of two-way gas inlet to the upper chamber 701.
An internal pressure sensor 12 for detecting the gas pressure in the upper chamber 701 is provided in the upper chamber 701, and an electric signal of the internal pressure of the upper chamber 701 acquired by the internal pressure sensor 12 is used as an operation signal of the check valve 15 and the proportional valve 14 provided in the third branch pipe 13.
When the pressure inside the upper chamber 701 exceeds a pre-calculated threshold value, the check valve 15 is opened, so that the gas in the upper chamber 701 enters the third branch pipe 13 and is fed back to the first branch pipes 1, and the amount of the gas returning into each first branch pipe 1 from the third branch pipe 13 is actively adjusted by the proportional valve 14.
As shown in fig. 3, the present invention further provides a mixer for mixing the above component gas and carrier gas by the gas mixing mechanism for the second time and outputting the target gas dynamically, which comprises a mixing chamber 16, a porous plate group 17 disposed inside the mixing chamber 16 for separating the inner space of the mixing chamber 16 and allowing the mixed gas sprayed from the ventilating coil 8 to flow, and a movable valve 18 disposed in the mixing chamber 16 above the porous plate group 17 and moving up and down along with the change of the pressure inside the mixing chamber 16;
the mixing chamber 16 is provided with a water outlet 19, a gas outlet 20 for dynamically outputting the target gas, and a pressure relief valve 21 for relieving the pressure in the cavity formed by the movable valve 18 and the mixing chamber 16.
As shown in fig. 6, the perforated plate set 17 includes a first plate 171 close to the ventilating coil 8 and a second plate 172 located above the first plate 171, each of the first plate 171 and the second plate 172 has a circular truncated cone-shaped through hole 173, and a flow guide core 174 having a cross-shaped cross section is disposed inside the through hole 173.
The first layer plate 171 and the second layer plate 172 are arranged, so that when gas is mixed, the original moving direction of the gas can be changed while the gas is prevented from moving, the gas is further uniformly mixed, and gas rotational flow is formed through the flow guide core 174.
The pressure value of release can be predetermine to the pressure relief valve at traditional mixed storehouse top, the pressure relief valve will automatic gassing release when mixing storehouse internal pressure and surpassing this default, so can be with the pressure control in the mixed storehouse in the certain limit, prevent that the device is inside because of the too big emergence of pressure bursts, guarantee preparation process's safety, and when carrying out the release through the pressure relief valve, because gaseous transport still continues to carry out by gas proportion conveying mechanism, certain standard mist will be discharged to the pressure relief valve, just also caused the waste of mist.
The utility model discloses an inside movable valve 18 that is provided with along with the change of the inside atmospheric pressure of the mixed storehouse body 16 mixing the storehouse body 16, just movable valve 18 is installed on the internal wall of the mixed storehouse that is located second plywood 172 upper portion, through movable valve 18 and the isolated pressure buffer space in the mixed storehouse body 16 of first plywood 171 and second plywood 172 that the mixed standard gas preparation that forms of the mixed storehouse body, further the in-process of being mixed standard gas preparation not influenced by conditions such as temperature and pressure, it is efficient to prepare, and through the change of the position in the movable valve 18, realize adjusting the pressure of the mixed storehouse body 16 inside, the quality total amount that has guaranteed to mix the storehouse body 16 is invariable.
The top in the activity storehouse body is provided with the relief valve 21 that is used for balancing the pressure in the space that the movable valve 18 and the mixed storehouse body 16 formed, furtherly, the utility model discloses can also be connected to the space that the movable valve 18 and the mixed storehouse body 16 formed through the third bleeder 13 with the gas mixture of component gas and carrier gas, at the internal two atmospheric pressure sources of formation in the mixed storehouse, the space that the movable valve 18 and the mixed storehouse body 16 formed is as atmospheric pressure regulation source, and the space that the movable valve 18 and the mixed storehouse body 16 formed also can carry out the atmospheric pressure regulation and the maintenance of internal pressure through only component gas or carrier gas.
When the space air pressure formed by the movable valve 18 and the mixing bin body 16 is adjusted through single component gas or carrier gas, the accuracy of the quantity value of the mass flow controller 5 can be improved through a single control error while avoiding gas waste.
The magnetic heating and stirring mechanism 22 is integrated at the bottom in the mixing bin 16, and the stirrer 23 of the magnetic heating and stirring mechanism 22 is arranged at the bottom in the mixing bin 16.
The ventilating coil 8 is positioned at the upper part of the stirrer 23 and sprays the mixed gas upwards from the bottom of the mixing chamber body 16, and the gas outlet 20 is positioned on the side wall of the mixing chamber body 16 between the second layer plate 172 and the movable valve 18.
Be provided with heat preservation water jacket 24 in the mixing storehouse body 16 inner wall, and the medium in the heat preservation water jacket 24 heats through magnetic force heating rabbling mechanism 22, and the stirring of the interior stirring of the mixed storehouse body 16 of magnetic force heating agitator drive 23 motion plays the stirring effect to gas to provide a homothermal mixed environment for mixing the storehouse body 16 in through heat preservation water jacket 24.
The stirrer 23 may be any type of stirrer blade known in the art.
As shown in fig. 7, the present invention further provides a quick coupling 10 for connecting component gas and carrier gas conveying and mixing pipelines, which specifically comprises a bidirectional pipe body 101 and two threaded sleeves 103 screwed on the bidirectional pipe body 101 through a threaded section 102; wherein the threaded sleeve 103 is movably sleeved on the bidirectional pipe body 101, a hose for connecting a container tank in the process of manufacturing the constant value ternary mixed standard gas is sleeved at two ends of the bidirectional pipe body 101, the threaded sleeve 103 is rotated, so that the hose is sleeved between the threaded sleeve 103 and the bidirectional pipe body 101, the hose is pressed through the threaded sleeve 103, and the hose is unlocked by reversely rotating the threaded sleeve 103.
The joint department of traditional quick-operation joint 10 all is the direct anti-skidding arch 106 that sets up the layer cover, the direct suit of hose is on anti-skidding arch 106, carry out the high-speed joint of pipeline, and this kind of side of connection is unable to be suitable for under the especially higher condition of gaseous or liquid precision requirement in the laboratory, when intraductal atmospheric pressure or hydraulic pressure are the change, the junction of hose and quick-operation joint 10 produces inflation or shrink easily, and then make gaseous leakage or inhale the outside air, and then influence the result of experiment.
The utility model discloses in be provided with reducing layer sleeve pipe 104 at two-way body 101's both ends, reducing layer sleeve pipe 104's end is provided with constant diameter pipe 105, and constant diameter pipe 105's effect is the surface of increase and hose inner wall parallel contact, when hose and constant diameter pipe 105 cup joint, no matter how the atmospheric pressure in the hose changes, also can not make the hose inflation lose heart in the junction.
The constant diameter pipe 105 is provided with an annular groove 107 matched with a bulge 106 arranged inside the threaded sleeve 103, the joint of the reducing layer sleeve 104 and the bidirectional pipe body 101 is provided with a self-sealing structure, the self-sealing structure comprises an embedded ring groove 108 arranged on the bidirectional pipe body 101 and an annular pin tongue 109 arranged inside the threaded sleeve 103, and an inner sealing ring 110 is arranged in the embedded ring groove 108.
The utility model discloses still through the combination in threaded sleeve 103 and reducing layer sleeve pipe 104 department, when total branch pipeline 6 cup joints with reducing layer sleeve pipe 104, form the sealed cavity that sealed space formed and has stabilizing pressure, too big or when too little at the pressure in the hose, the stability of its total branch pipeline 6's connection can all be guaranteed, the condition of losing heart can not appear.
An outer sealing ring is arranged on the bidirectional pipe body 101 positioned on the outer side of the embedded ring groove 108, the contact surface of the embedded ring groove 108 and the annular pin tongue 109 is an inclined surface, the inclination angle of the inclined surface is 10-20 degrees, and the axial length of the annular pin tongue 109 is 1-2 mm shorter than that of the embedded ring groove 108.
The threaded sleeve 103 comprises a straight pipe section and a circular truncated cone section inside, and the circular truncated cone section axially extends to the root of the annular pin tongue 109.
The diameter of each layer of the reducing layer sleeve 104 is gradually increased until the diameter is the same as that of the equal diameter pipe 105.
The bulge 106 comprises two adjacent semicircular bulge rings, a certain gap exists between the two bulge rings, the height of the bulge ring positioned on the inner side is higher than that of the bulge ring positioned on the outer side, the function of the bulge ring is that in the long-time sleeving process, a hose is clamped in the annular groove 107, the bulge ring on the outer side buckles the hose into the annular groove 107, and the deformed part of the hose is pressed and held on the surface of the equal-diameter pipe 105 by the bulge ring on the inner side, so that sealing is realized;
and be applicable to the hose that the pipe diameter has 2 ~ 3mm disparity, when cup jointing, the pipe diameter is thinner then with inboard protruding circle with the pipe wall of hose impressed annular groove 107, outside protruding circle with the hose lie in the annular groove 107 outside the part pressure hold on the equal diameter pipe 105 surface.
Although the invention has been described in detail with respect to the general description and the specific embodiments, it will be apparent to those skilled in the art that modifications and improvements can be made based on the invention. Therefore, such modifications and improvements are intended to be within the scope of the invention as claimed.

Claims (5)

1. The mixing device for manufacturing the constant value ternary mixed standard gas is characterized by comprising a turbofan gas mixing mechanism (7) for mixing multi-component gas and carrier gas, wherein the turbofan gas mixing mechanism (7) comprises an upper-layer chamber (701) used for being connected with a first branch pipe (1) for conveying the multi-component gas and a lower-layer chamber (702) used for being connected with a second branch pipe (2) for conveying the carrier gas and mixing the carrier gas and the component gas, and a turbofan (703) is arranged inside the upper-layer chamber (701) and the lower-layer chamber (702); the second branch pipe (2) is connected with a vacuum system (3) through a pipeline, a third branch pipe (13) used for decompressing gas in the upper chamber (701) is further connected into the upper chamber (701), and a main branch pipe (6) used for outputting mixed gas of component gas and carrier gas is arranged on the lower chamber (702) just opposite to the second branch pipe (2).
2. A mixing device made of a constant value ternary mixed standard gas according to claim 1, wherein the junction of the third branch pipe (13) and the first branch pipe (1) with the upper chamber (701) is located at both ends of the upper chamber (701) on a certain diameter.
3. A mixing device made of a constant value ternary mixed standard gas according to claim 1, wherein the third branch pipe (13) is provided with a one-way valve (15), and the upper chamber (701) is provided with an internal pressure sensor (12) for monitoring the internal gas pressure of the upper chamber (701).
4. A mixing device made of a constant value ternary mixed standard gas according to claim 1, wherein the diameter of the turbofan (703) is slightly smaller than the diameter of the upper chamber (701).
5. A mixing device made of a constant value ternary mixed standard gas according to claim 1, characterized in that the first branch pipe (1) and the main branch pipe (6) are provided with straight-through valves.
CN202020118970.2U 2020-01-19 2020-01-19 Mixing arrangement of preparation of definite value ternary mixed standard gas Active CN211886296U (en)

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Application Number Priority Date Filing Date Title
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