CN211839289U

CN211839289U - Target wiping arrangement

Info

Publication number: CN211839289U
Application number: CN201922459647.1U
Authority: CN
Inventors: 念雯雯; 孟红波; 高建杰; 张雪风
Original assignee: Luoyang Fenglianke Binding Technology Co ltd
Current assignee: Fenglianke Optoelectronics Luoyang Co ltd
Priority date: 2019-12-31
Filing date: 2019-12-31
Publication date: 2020-11-03
Anticipated expiration: 2029-12-31

Abstract

The utility model discloses a target wiping arrangement, including the bottle that holds of top open-ended, it can dismantle the connection bottle lid to hold the bottle top, it sets up the bearing to hold the bottle bottom, it sets up the handle on the bottle to hold, set up the motor on hand, set up the belt between the output shaft of motor and the bearing, the bearing below sets up the sponge, the perpendicular round axle that pegs graft in the sponge, the round axle top sets up baffle one, baffle one is located and holds the bottle, it sets up a plurality of and baffle one corresponding through-hole to hold on the bottle bottom, the round is epaxial still to set up baffle two, baffle two and hold and set up compression spring between the bottle bottom surface, set up the recess that can hold compression spring and baffle two on the sponge, set up universal ball on the round axle bottom surface, clean fastly, use manpower sparingly greatly.

Description

Target wiping arrangement

Technical Field

The utility model relates to a semiconductor manufacturing technology field, concretely relates to target wiping arrangement.

Background

The target assembly generally comprises a target substrate conforming to sputtering performance and a backing plate bonded to the target substrate and having a certain strength. In various coating methods adopted at present, sputtering coating has better effect than other coating methods due to different film forming principles. For example, sputter coating results in a more uniform film, greater strength and superior performance. Compared with other coating methods, the cleanliness requirements of the raw materials (target and back plate) for sputter coating are also very high. Therefore, in order to ensure that the target material and the back plate have enough cleanliness, the bonded target material sputtering surface and the back plate back surface need to be fully and completely wiped.

Disclosure of Invention

In view of this, the present invention provides a target wiping device, which is fast in wiping speed and greatly saves manpower.

In order to achieve the purpose, the invention adopts the following technical scheme:

the utility model provides a target wiping arrangement, includes the bottle that holds of top open-ended, it can dismantle the connection bottle lid to hold the bottle top, it sets up the bearing to hold the bottle bottom, set up the handle on holding the bottle, set up the motor on hand, set up the belt between the output shaft of motor and the bearing, the bearing below sets up the sponge, the circular shaft of pegging graft perpendicularly in the sponge, the circular shaft top sets up baffle one, baffle one is located and holds the bottle, it sets up a plurality of through-holes corresponding with baffle one on the bottle bottom to hold, the circular shaft still sets up baffle two, baffle two and hold and set up compression spring between the bottle bottom surface perpendicularly, set up the recess that can hold compression spring and baffle two on the sponge, set up universal ball on the circular shaft bottom surface.

Furthermore, the top end of the sponge is provided with a first circular ring, a second circular ring matched with the first circular ring is arranged below the bearing outer ring, and the first circular ring is in threaded connection with the second circular ring.

Further, set up sealed the pad in the bottle lid, set up the blow vent on the bottle lid, set up the rubber buffer in the blow vent, set up between blow vent and the rubber buffer and be connected the rope.

Furthermore, the outer sleeve of the compression spring is connected with a first round pipe and a second round pipe, the second round pipe is inserted into the first round pipe, the top end of the first round pipe is fixed on the bottom of the bottle containing bottle, and the bottom end of the second round pipe is fixed on the upper surface of the second baffle plate.

Furthermore, a first blocking ring and a second blocking ring are arranged on the outer peripheral surface of the outer ring of the bearing, and the belt is located between the first blocking ring and the second blocking ring.

The utility model has the advantages that:

1. open the bottle lid to adding alcohol in holding the bottle, starter motor, motor drive bearing rotates, the bearing drives the sponge and rotates, hold the handle and place the sponge on the target, because baffle two with hold the restriction at the bottom of the bottle, hold the bottle and push down compression spring, compression spring shortens, baffle one keeps away from the through-hole, the alcohol that holds in the bottle is left from the through-hole, flow to the sponge, the sponge is rotatory to be cleaned the target totally, the setting of universal ball can the person of facilitating the use hold the handle, freely remove the sponge on the target, accomplish the cleaning to the target, after cleaning, hold the handle and remove the sponge, compression spring restores original length, baffle one covers on the through-hole again, alcohol can not flow again, whole cleaning process need not frequently dip in alcohol, only need hold the handle remove the sponge can, it is fast to clean, high efficiency, the manpower is saved.

2. The sponge top sets up the ring, set up in the bearing outer ring with ring assorted ring two, ring threaded connection is in ring two, and when the sponge needs to be changed, can twist out the recess with the ring, changes new sponge again, simple structure, the practicality is strong.

3. Set up sealed the pad in the bottle lid, set up the blow vent on the bottle lid, set up the rubber buffer in the blow vent, set up between blow vent and the rubber buffer and be connected the rope, when holding in the bottle alcohol and not using temporarily, can close the bottle lid, reuse rubber buffer plugs the blow vent, and the alcohol of avoiding holding in the bottle volatilizees, during the use, only needs to extract the rubber buffer from the vent in, because the effect of connecting the rope, the rubber buffer is difficult for losing, has further increased the utility model discloses a practicality.

4. The outer sleeve of the compression spring is connected with the first round pipe and the second round pipe, the second round pipe is inserted into the first round pipe, the top end of the first round pipe is fixed to the bottom of the bottle containing body, the bottom end of the second round pipe is fixed to the upper surface of the second baffle plate, the compression spring is limited in the first round pipe and the second round pipe, the first round pipe and the second round pipe cannot be bent into an arc shape in the compression process, and the compression spring is not prone to.

5. The bearing outer ring is characterized in that a first retaining ring and a second retaining ring are arranged on the outer peripheral surface of the bearing outer ring, the belt is located between the first retaining ring and the second retaining ring, the belt is not prone to being separated from the bearing in the operation process, and the stability of the device in operation is guaranteed.

Drawings

Fig. 1 is a schematic structural diagram of a first embodiment of the present invention;

fig. 2 is a schematic view of a first embodiment of the present invention;

FIG. 3 is a schematic view of the structure of FIG. 2 at another angle;

FIG. 4 is a schematic view showing a connection structure of the receiving bottle and the sponge;

FIG. 5 is a schematic view of a circular shaft and its connecting assembly;

fig. 6 is a schematic structural diagram of a second embodiment of the present invention;

fig. 7 is a schematic structural diagram of a third embodiment of the present invention;

FIG. 8 is a schematic view of the structure of FIG. 7 at another angle;

fig. 9 is a schematic structural diagram of a fourth embodiment of the present invention;

wherein, 1-containing bottle, 2-bottle cap, 3-bearing, 4-handle, 5-motor, 6-belt, 7-switch, 8-sponge, 9-round shaft, 10-baffle I, 11-through hole, 12-baffle II, 13-compression spring, 14-groove, 15-universal ball, 16-round ring I, 17-round ring II, 18-sealing pad, 19-vent, 20-rubber plug, 21-connecting rope, 22-round tube I, 23-round tube II, 24-baffle ring I, 25-baffle ring II, 26-bearing frame, 27-fixing cylinder, 28-protective cover, 29-sealing plate, 30-battery groove, 31-battery groove cover.

Detailed Description

The technical solution in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments. It is to be understood that the embodiments described are only some embodiments of the invention, and not all embodiments. Based on the embodiments in the present invention, all other embodiments obtained by a person skilled in the art without creative work belong to the protection scope of the present invention.

Example one

As shown in fig. 1-5, the first embodiment of the present invention is a target wiping device, which comprises a bottle 1, wherein the bottle 1 is a top-open cylindrical shell structure, and the bottle 1 has a bottle cap 2 connected to the bottle opening by a screw thread, the bottle cap 2 and the bottle 1 have a gap between the bottle opening for allowing the outside air to enter the bottle 1, the bottle 1 has a bearing 3, and the inner ring of the bearing 3 is fixed on the outer peripheral surface of the bottom of the bottle 1 by a glue. Handle 4 is arranged at the lower part of accommodating bottle 1, as shown in fig. 2 and fig. 3, handle 4 is composed of a bearing frame 26, a fixed cylinder 27 welded at the upper part of the left side of bearing frame 26, a protective cover 28 welded at the lower part of bearing frame 26 and a closing plate 29 welded at the lower part of the right side of protective cover 28, the inner circumferential surface of fixed cylinder 27 is fixed at the lower part of accommodating bottle 1 through viscose, motor 5 is mounted on bearing frame 26 through bolts, motor 5 is a direct current motor, belt 6 is mounted between the output shaft of motor 5 and the outer ring of bearing 3, a groove is machined on the output shaft of motor 5 through a lathe, and belt 6 is. A battery jar 30 is fixed in a cavity formed among the bearing frame 26, the protective cover 28 and the closing plate 29 through glue, the bottom end of the battery jar 30 is fixed above the closing plate 29, a battery jar cover 31 is installed on the battery jar 30, and a hole matched with the battery jar cover 31 is cut out on the bearing frame 26 through a cutting machine, so that the battery jar cover 31 is convenient to take down and install. The protective cover 28 is provided with a switch 7 for controlling the starting and stopping of the motor 5. Hold and set up the hole that can supply round axle 9 to pass on the bottle 1 bottom of bottle, as shown in fig. 4 and fig. 5, round axle 9 patchhole, round axle 9 top is through the fixed circular baffle one 10 of viscose, evenly beat a plurality of through-holes 11 on the bottle 1 bottom of holding bottle under the baffle one 10, baffle one 10 with hold 1 bottle bottom contact time, can all cover through-hole 11, hold 1 bottle bottom below of bottle and set up baffle two 12, baffle two 12 is circular baffle, baffle two 12 centers are through the puncher beat out with round axle 9 assorted hole, baffle two 12 cup joints and fixes through the viscose behind the round axle 9, baffle two 12 upper surfaces with hold between the bottle 1 bottom through four compression springs 13 of viscose vertical fixation. Hold 1 below of bottle and set up sponge 8, a fixed ring 16 of viscose is passed through on the 8 top of sponge, the external screw thread is processed out through the threading die on the 16 outer peripheral faces of ring, 3 outer ring below of bearing pass through two 17 of the fixed ring of viscose, process out through the lathe on two 17 inside walls of ring and external screw thread assorted internal thread, process out and baffle two 12 through the cutting knife on the

sponge

8, 13 assorted recess 14 of compression spring, still beat out and circle 9 assorted jacks through the puncher, during the installation, can cup joint sponge 8 outside circle 9 and shift up earlier, twist ring 16 again in two 17. The bottom end of the round shaft 9 is provided with a universal ball 15, and the type of the universal ball 15 is CY-15T.

During the use, unscrew bottle lid 2, pour into alcohol and hold in the bottle 1, place sponge 8 on the target upper surface, open switch 7, motor 5 starts, and motor 5's output shaft passes through belt 6 and drives sponge 8 rotatory, holds handle 4 and removes this device and clean the target, removes sponge 8 after cleaning, and when sponge 8 need be changed, can unscrew ring two 17 with ring one 16, changes new sponge 8 again.

Example two

As shown in fig. 6, a second embodiment of the present invention is different from the first embodiment in that a first round tube 22 and a second round tube 23 are sleeved outside a compression spring 13, the top end of the first round tube 22 is fixed on the bottom of the bottle 1, the bottom end of the second round tube 23 is fixed on the upper surface of the second baffle 12, and the second round tube 23 is inserted into the first round tube 22.

EXAMPLE III

As shown in fig. 7 and 8, the third embodiment of the present invention, the difference between this embodiment and the first embodiment lies in that the top end inside the bottle cap 2 passes through the viscose fixed seal 18, and through the viscose vertical fixation vent 19 on the bottle cap 2, the vent 19 is penetrating from top to bottom, the top sets up the cylindric structure of protruding edge, beat out the communicating hole with the vent 19 through the puncher on the bottle cap 2, insert the rubber buffer 20 in the vent 19, connect 21 one end of rope and tie up on the 19 tops of vent, the other end is tied up on the 20 tops of rubber buffer.

Example four

Referring to fig. 9, a fourth embodiment of the present invention is shown, and the present embodiment is different from the first embodiment in that a first retaining ring 24 and a second retaining ring 25 are welded to the top end and the bottom end of the outer ring of the bearing 3, respectively, and the belt 6 is located between the first retaining ring 24 and the second retaining ring 25.

Finally, the above embodiments are only used for illustrating the technical solutions of the present invention and not for limiting, and other modifications or equivalent replacements made by the technical solutions of the present invention by those of ordinary skill in the art should be covered within the scope of the claims of the present invention as long as they do not depart from the spirit and scope of the technical solutions of the present invention.

Claims

1. The target wiping device is characterized by comprising a containing bottle (1) with an opening at the top end, wherein the top end of the containing bottle (1) is detachably connected with a bottle cap (2), a bearing (3) is arranged on the outer peripheral surface of the bottom end of the containing bottle (1), a handle (4) is arranged on the containing bottle (1), a motor (5) is arranged on the handle (4), a belt (6) is arranged between an output shaft of the motor (5) and the bearing (3), a sponge (8) is arranged below the bearing (3), a round shaft (9) is vertically inserted into the sponge (8), a first baffle (10) is arranged at the top end of the round shaft (9), the first baffle (10) is positioned in the containing bottle (1), a plurality of through holes (11) corresponding to the first baffle (10) are arranged at the bottom of the containing bottle (1), a second baffle (12) is further arranged on the round shaft (9), and a compression spring (13) is vertically arranged between the second baffle (12) and the bottom surface of the containing bottle (1), a groove (14) capable of containing a compression spring (13) and a second baffle plate (12) is formed in the sponge (8), and a universal ball (15) is arranged on the bottom surface of the round shaft (9).

2. The target wiping device according to claim 1, wherein a first ring (16) is disposed on the outer peripheral surface of the top end of the sponge (8), a second ring (17) matched with the first ring (16) is disposed below the outer ring of the bearing (3), and the first ring (16) is screwed into the second ring (17).

3. The target wiping device according to claim 1, wherein a sealing gasket (18) is arranged in the bottle cap, a vent (19) is arranged on the bottle cap (2), a rubber plug (20) is arranged in the vent (19), and a connecting rope (21) is arranged between the vent (19) and the rubber plug (20).

4. The target wiping device according to claim 1, wherein the compression spring (13) is sleeved with a first circular tube (22) and a second circular tube (23), the second circular tube (23) is inserted into the first circular tube (22), the top end of the first circular tube (22) is fixed on the bottom of the containing bottle (1), and the bottom end of the second circular tube (23) is fixed on the upper surface of the second baffle plate (12).

5. The target wiping apparatus according to claim 1, wherein a first retaining ring (24) and a second retaining ring (25) are provided on the outer circumferential surface of the outer ring of the bearing (3), and the belt (6) is located between the first retaining ring (24) and the second retaining ring (25).