CN211811974U - Device and system for detecting abnormity of belt conveying mechanism - Google Patents
Device and system for detecting abnormity of belt conveying mechanism Download PDFInfo
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- CN211811974U CN211811974U CN202020055330.1U CN202020055330U CN211811974U CN 211811974 U CN211811974 U CN 211811974U CN 202020055330 U CN202020055330 U CN 202020055330U CN 211811974 U CN211811974 U CN 211811974U
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Abstract
The utility model discloses a device and system for detecting belt transport mechanism's anomaly, the device include motor speed sensor, current sensor, accounting device. The motor rotation speed sensor is mounted on the motor and detects a rotation speed of the motor. The current sensor is used for detecting the working current of the motor. The calculation means receives a detection signal representing the rotation speed of the motor from the motor rotation speed sensor and a detection signal representing the operating current of the motor from the current sensor, and determines whether there is an abnormality of the belt transmission mechanism according to a change in a ratio of the rotation speed of the motor to the operating current. The utility model also provides a normal pressure vapor deposition system of function with detect belt transport mechanism is unusual. The device and the system can monitor whether the conveying speed of the belt is normal or not in real time, and reduce the risk of product abnormity.
Description
Technical Field
The utility model relates to a belt transport mechanism's anomaly detection field especially relates to a system that is used for detecting belt transport mechanism's unusual device and has this kind of device.
Background
In the production of semiconductor wafers, APCVD (atmospheric vapor deposition) equipment uses belts to transport the wafers. The speed of the belt directly determines the thickness of the film deposited on the wafer. If the actual belt speed deviates from the speed displayed by the machine, the thickness of the film deposited on the wafer is directly affected, and a large amount of products can be scrapped seriously.
At present, no effective detection mechanism exists for the abnormality, detection can be carried out only by means of machine detection or on-line inspection of products, but the detection time is often later, and a large amount of unqualified products can be generated in the process from abnormality occurrence to abnormality determination.
Therefore, a system capable of monitoring the abnormality of the belt conveying mechanism in real time is urgently needed at present to reduce the risk of product abnormality and the workload of workers.
SUMMERY OF THE UTILITY MODEL
In view of the above, the present invention provides a system for detecting an abnormality of a belt conveying mechanism and having the same. The device can monitor whether the belt conveying speed is normal in real time, and reduces the risk of product abnormity.
According to an aspect of the utility model, a device for detecting belt transport mechanism's anomaly is provided, the device includes:
a motor rotation speed sensor mounted on the motor and detecting a rotation speed of the motor;
a current sensor for detecting an operating current of the motor,
and a calculation device that receives a detection signal representing a rotation speed of the motor from the motor rotation speed sensor and a detection signal representing an operating current of the motor from the current sensor, and determines whether there is an abnormality of the belt transmission mechanism according to a change in a ratio of the rotation speed of the motor to the operating current.
According to an embodiment of the invention, the motor speed sensor is arranged outside the motor.
According to an embodiment of the present invention, the motor speed sensor is an encoder.
According to an embodiment of the present invention, the encoder is an incremental encoder or an absolute encoder.
According to the utility model discloses an embodiment, current sensor is open type current transformer.
According to the utility model discloses an on the other hand provides a normal pressure vapor deposition system with function of detecting belt transport mechanism is unusual, and this system includes:
a motor;
the transmission mechanism is connected with an output shaft of the motor;
an apparatus for detecting an abnormality of a belt conveying mechanism, the apparatus comprising:
a motor rotation speed sensor mounted on the motor and detecting a rotation speed of the motor;
a current sensor for detecting an operating current of the motor,
and a calculation device that receives a detection signal representing the rotation speed of the motor from the motor rotation speed sensor and a detection signal representing the operating current of the motor from the current sensor, and determines whether there is an abnormality of the belt transmission mechanism according to a change in a ratio of the rotation speed of the motor to the operating current.
According to an embodiment of the present invention, the system further comprises a fault detection and classification device for receiving the detection signal representing the rotation speed of the motor and the detection signal representing the operating current of the motor collected by the calculation device, and determining the abnormal condition of the belt transmission mechanism according to the change of the ratio of the rotation speed of the motor to the operating current, and providing an indication about the abnormality.
According to an embodiment of the invention, the transmission mechanism comprises a roller wheel, the roller wheel is connected to the output shaft of the motor and is driven to rotate by the output shaft of the motor.
According to an embodiment of the invention, the system further comprises a belt arranged around the periphery of the roller.
According to an embodiment of the invention, the system further comprises a tensioning wheel arranged on the outer surface of the belt.
Due to the structure, the utility model discloses a system for be used for detecting unusual device of belt transport mechanism and have this kind of device can obtain following multiple beneficial effect:
(1) the automatic detection of the abnormal conveying speed of the belt conveying mechanism is realized, and the work load of workers is reduced;
(2) the abnormal real-time monitoring of the conveying speed of the belt conveying mechanism can be realized, the problems can be found in time, and the abnormal risk of products is reduced.
Drawings
Fig. 1 is a schematic view of an apparatus for detecting an abnormality of a belt conveying mechanism according to an embodiment of the present invention;
FIG. 2 is a schematic view of an atmospheric vapor deposition system having a function of detecting an abnormality of a belt conveying mechanism according to an embodiment;
fig. 3 is a schematic view of an atmospheric vapor deposition system having a function of detecting an abnormality of a belt conveying mechanism according to another embodiment.
In the figure:
100 motor speed sensor, 200 current sensor, 300 computing device, M motor, R roller, PR tensioning wheel and B belt.
Detailed Description
In order to make the objects, technical solutions and advantages of the present invention more apparent, the present invention will be further described in detail with reference to the following embodiments. It should be understood that the specific embodiments described herein are for purposes of illustration only and are not intended to limit the invention.
According to the needs, the specification of the utility model discloses the concrete embodiment of the utility model; however, it is to be understood that the disclosed embodiments are merely exemplary of the invention that may be embodied in various and alternative forms. The figures are not necessarily to scale; some features may be exaggerated or minimized to show details of particular components. The same or similar reference numerals may indicate the same parameters and components or similar modifications and substitutions thereto. In the following description, various operating parameters and components are described in various embodiments as contemplated. These specific parameters and components are used in this specification as examples only and are not meant to be limiting. Therefore, specific structural and functional details disclosed herein are not to be interpreted as limiting, but merely as a representative basis for teaching one skilled in the art to variously employ the present invention.
In the description of the present invention, it is to be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise" and the like indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings, and are only for convenience of description and to simplify the description, but do not indicate or imply that the device or element referred to must have a particular orientation, be constructed and operated in a particular orientation, and therefore should not be construed as limiting the present invention.
Under normal conditions, when the belt conveying speed of the APCVD machine table is constant, the working current (power) of the motor corresponding to the same conveying speed is also constant, and the working current (power) of the motor corresponding to different belt conveying speeds is also different. When a belt slip or jam occurs, the operating current of the motor is also changed accordingly. To this situation, the present invention provides a device for detecting an abnormality of a belt conveying mechanism.
Referring to fig. 1, there is shown an apparatus for detecting an abnormality of a belt conveying mechanism according to an embodiment of the present invention. The device is mounted on a motor M. The device for detecting an abnormality of the belt conveying mechanism may generally include a motor rotation speed sensor 100, a current sensor 200, and a computing device 300.
The motor speed sensor 100 may be, for example, an encoder, which may be an incremental encoder or an absolute encoder. However, the present invention is not limited thereto, and any suitable motor speed sensor may be used as the motor speed sensor 100 described herein, as long as the motor speed sensor can measure the rotation speed of the motor. As shown, the motor speed sensor 100 may be mounted outside the motor M housing.
The current sensor 200 is generally used to measure the current in the motor operating circuit. The current sensor 200 may employ an open-type current transformer, so that the current of the working circuit may be measured without modifying the original working circuit of the machine. However, the present invention is not limited thereto, and any suitable current sensor may be used as the current sensor 200 described herein, as long as the current sensor can measure the operating current of the motor. For example, the current measurement may also be implemented using a current measuring device in series with the operating circuit of the motor.
The computing device 300 is communicably connected to the motor speed sensor 100 and the current sensor 200. The calculation means 300 receives the detection signal representing the rotation speed of the motor M collected by the motor rotation speed sensor 100 and the detection signal representing the operating current of the motor M collected by the current sensor 200, and determines whether there is an abnormality of the belt transmission mechanism according to a change in the ratio of the rotation speed of the motor M to the operating current. When the change in the ratio exceeds a predetermined threshold, it indicates that there is an abnormality in the belt conveying mechanism. For example, in one embodiment of the present invention, the predetermined threshold is about 10%. However, the predetermined threshold may be changed according to a change in the type of the motor, the external load condition, and the like.
Referring to fig. 2, the figure shows an atmospheric vapor deposition system having a function of detecting abnormality of a belt conveying mechanism according to an embodiment of the present invention. The system may generally include the device for detecting an abnormality of the belt conveying mechanism, the motor M, and the transmission mechanism as described above. The transmission mechanism may include a roller R connected to and driven to rotate by an output shaft of the motor M. The belt B is disposed around the outer circumference of the roller. The belt B can be used for placing the wafer to be transferred.
Fig. 3 shows an atmospheric pressure vapor deposition system having a function of detecting an abnormality of a belt conveyor according to another embodiment of the present invention. The system is generally the same as the system shown in fig. 2, with the main difference that it further includes a tension pulley PR disposed on the outer surface of the belt B and in contact therewith for applying tension to the belt B to enable the belt B to be brought into close contact with the roller R and to rotate synchronously.
According to an embodiment of the present invention, the atmospheric pressure vapor deposition system having a function of detecting an abnormality of the belt conveying mechanism may further include a failure detection classifying device for receiving a detection signal representing a rotation speed of the motor M and a detection signal representing an operating current of the motor M from the computing device 300, and determining an abnormal condition of the belt conveying mechanism according to a change in a ratio of the rotation speed of the motor M to the operating current, and providing an indication about the abnormality.
When using the utility model discloses a system transmission wafer, place the wafer on belt B, whether the belt transport mechanism exists unusually is determined to computing device 300 or fault detection sorter based on the detected signal of the rotational speed of representative motor M that motor speed sensor 100 gathered and the detected signal's of the operating current of representative motor M ratio change that current sensor 200 gathered. When an anomaly occurs, an alarm may be provided to personnel to stop the stock or halt detection. The abnormality that occurs may be belt B slipping, stuck, or an abnormality of the motor circuit. The system can automatically detect whether the belt conveying mechanism is abnormal or not in real time, and reduces the risk of product scrapping.
It is to be understood that the features listed above for the different embodiments may be combined with each other, where technically feasible, to form further embodiments within the scope of the invention. Furthermore, the specific examples and embodiments described herein are non-limiting, and various modifications of the structure, dimensions, materials, etc., set forth above may be made without departing from the scope of the invention.
In this application, the use of the conjunction of the contrary intention is intended to include the conjunction. The use of definite or indefinite articles is not intended to indicate cardinality. In particular, references to "the" object or "an" and "an" object are intended to mean one of many such objects possible. Furthermore, the conjunction "or" may be used to convey simultaneous features, rather than mutually exclusive schemes. In other words, the conjunction "or" should be understood to include "and/or". The term "comprising" is inclusive and has the same scope as "comprising".
The above-described embodiments, particularly any "preferred" embodiments, are possible examples of implementations, and are presented merely for a clear understanding of the principles of the invention. Many variations and modifications may be made to the above-described embodiments without departing substantially from the spirit and principles of the technology described herein. All such modifications are intended to be included within the scope of this disclosure.
Claims (10)
1. An apparatus for detecting an abnormality of a belt conveying mechanism, comprising:
a motor rotation speed sensor mounted on a motor and detecting a rotation speed of the motor;
a current sensor for detecting an operating current of the motor,
a calculation device that receives a detection signal representing a rotation speed of the motor from the motor rotation speed sensor and a detection signal representing an operating current of the motor from the current sensor, and determines whether there is an abnormality of the belt transmission mechanism according to a change in a ratio of the rotation speed of the motor to the operating current.
2. The apparatus for detecting an abnormality of a belt conveying mechanism according to claim 1, wherein said motor rotation speed sensor is provided outside said motor.
3. The apparatus for detecting an abnormality of a belt conveying mechanism according to claim 1, wherein said motor rotation speed sensor is an encoder.
4. The apparatus for detecting an abnormality of a belt conveying mechanism according to claim 3, wherein the encoder is an incremental encoder or an absolute encoder.
5. The apparatus for detecting an abnormality of a belt conveying mechanism according to claim 2, wherein said current sensor is an open type current transformer.
6. A system for detecting anomalies in a belt transport mechanism, comprising:
a motor;
the transmission mechanism is connected with an output shaft of the motor;
an apparatus for detecting an abnormality of a belt conveying mechanism, the apparatus comprising:
a motor rotation speed sensor mounted on a motor and detecting a rotation speed of the motor;
a current sensor for detecting an operating current of the motor,
a calculation device that receives a detection signal representing a rotation speed of the motor from the motor rotation speed sensor and a detection signal representing an operating current of the motor from the current sensor, and determines whether there is an abnormality of the belt transmission mechanism according to a change in a ratio of the rotation speed of the motor to the operating current.
7. The system of claim 6 further comprising fault detection and classification means for receiving the detection signal representative of the rotational speed of the motor and the detection signal representative of the operating current of the motor collected by the computing means, and determining an abnormal condition of the belt transmission mechanism based on a change in the ratio of the rotational speed of the motor to the operating current, and providing an indication of the abnormality.
8. The system of claim 6, wherein the transmission mechanism includes a roller wheel coupled to and driven for rotation by an output shaft of the motor.
9. The system of claim 8, further comprising a belt disposed around an outer periphery of the roller.
10. The system of claim 6, further comprising a tensioner disposed on an outer surface of the belt.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
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| CN202020055330.1U CN211811974U (en) | 2020-01-10 | 2020-01-10 | Device and system for detecting abnormity of belt conveying mechanism |
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| CN202020055330.1U CN211811974U (en) | 2020-01-10 | 2020-01-10 | Device and system for detecting abnormity of belt conveying mechanism |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN116736870A (en) * | 2023-08-14 | 2023-09-12 | 江苏东成工具科技有限公司 | Intelligent tool control method, intelligent tool system and computer readable medium |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN116736870A (en) * | 2023-08-14 | 2023-09-12 | 江苏东成工具科技有限公司 | Intelligent tool control method, intelligent tool system and computer readable medium |
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