CN211805596U

CN211805596U - Sand blasting machine capable of recycling sand water

Info

Publication number: CN211805596U
Application number: CN202020209552.4U
Authority: CN
Inventors: 陆雄; 王文彬; 魏航; 陶金; 周文
Original assignee: Chongqing Xinjie Technology Co ltd
Current assignee: Chongqing Xinjie Technology Co ltd
Priority date: 2020-02-21
Filing date: 2020-02-21
Publication date: 2020-10-30
Anticipated expiration: 2030-02-21

Abstract

The utility model relates to a sand blasting equipment technical field provides a but sand water cyclic utilization's sand blasting machine, which comprises a bracket, conveying mechanism, sand pump and sandblast mechanism, open at the top of support has the holding tank, inside has the backward flow room, the recovery mechanism includes the collector tube, the funnel, the fixed axle, hollow helical blade and filter, the collector tube sets up in the holding tank, the flare opening of funnel is located sandblast mechanism below, the fixed axle sets up in the collector tube, hollow helical blade's inner wall and fixed axle laminating, outer wall and collector tube laminating, hollow helical blade's upper surface is opened there are a plurality of through-holes, the filter slope sets up in the backward flow room, and separate the backward flow room for first backward flow room and second backward flow room, the upper end of first backward flow room and hollow helical blade's bottom intercommunication, second backward flow room and collector tube bottom intercommunication. The utility model provides a pair of but sand blasting machine of sand water cyclic utilization makes the qualified sand material of size can cyclic utilization in the sand water, has reduced manufacturing cost.

Description

Sand blasting machine capable of recycling sand water

Technical Field

The utility model relates to a sand blasting equipment technical field, concretely relates to but sand water cyclic utilization's sand blasting machine.

Background

In the use process of the semiconductor substrate, the surface of the semiconductor substrate must be cleaned regularly to maintain the good performance of the semiconductor substrate and ensure the normal use of the semiconductor substrate.

The cleaning of the surface of the semiconductor substrate generally employs a sand blasting operation. In the repeated sand blasting operation, part of the sand material in the sand water is lost due to the impact action with the surface of the semiconductor substrate. The sand water in the prior sand blasting machine can be completely discarded and updated after being used for a period of time, and the discarded sand water still contains more qualified sand materials, so that the qualified sand materials are wasted, and the production cost is increased.

SUMMERY OF THE UTILITY MODEL

To the defect among the prior art, the utility model aims at providing a but sand blasting machine of grit water cyclic utilization makes the qualified sand material of size can cyclic utilization in the grit water to reduction in production cost.

In order to achieve the above purpose, the present invention is implemented by the following technical solutions: the utility model provides a but sand water cyclic utilization's sand blasting machine, includes support, conveying mechanism, sand pump and sandblast mechanism, conveying mechanism is used for transporting the semiconductor substrate extremely the below of sandblast mechanism, open at the top of support has holding tank, inside to have the backward flow room, still including setting up recovery mechanism in the holding tank, recovery mechanism includes recovery tube, funnel, fixed axle, hollow helical blade and filter, the recovery tube sets up along longitudinal fixation in the holding tank, the bottom of recovery tube has the inclined plane, the flare opening of funnel is located below and the bottom of sandblast mechanism and conveying mechanism with the top intercommunication of recovery tube, the fixed axle is in along longitudinal fixation the recovery tube, hollow helical blade follows the extending direction of fixed axle is installed on the fixed axle, hollow helical blade's inner wall with the fixed axle laminating, the fixed axle is fixed, the back pressure of the fixed axle is higher than the back pressure of, The outer wall is attached to the recovery pipe, a plurality of through holes communicated with the interior of the hollow spiral blade are formed in the upper surface of the hollow spiral blade, the size of each through hole is smaller than that of qualified sand materials, the filter plate is obliquely arranged in the backflow chamber and divides the backflow chamber into a first backflow chamber and a second backflow chamber located below the first backflow chamber, the upper end of the first backflow chamber is communicated with the bottom of the hollow spiral blade, the lower end of the first backflow chamber is provided with a discharge hole, and the second backflow chamber is communicated with the lowest position of the bottom of the recovery pipe and is also communicated with the inlet of the sand pump.

Further, still including setting up rabbling mechanism in the second return flow chamber, rabbling mechanism includes stirring rake and first motor, the stirring rake is along vertically setting up in the second return flow chamber, and both ends with the support rotates to be connected, first motor is used for the drive the stirring rake is rotatory.

Further, the bottom of the stirring paddle is provided with a scraper.

Further, conveying mechanism includes chain, bracing piece and second motor, two chain parallel arrangement is in the top of support, and all with the support rotates to be connected, many the bracing piece interval sets up two between the chain, and both ends all with chain fixed connection, the second motor is used for driving two the chain synchronous rotation.

Furthermore, the middle part of the supporting rod is sleeved with a flexible sleeve, the two ends of the supporting rod are provided with thread sections, and the thread sections are sleeved with locking nuts.

The utility model has the advantages that: the utility model provides a pair of but sand water cyclic utilization's sand blasting machine, the sand water after the sandblast operation passes through the funnel and gets into hollow helical blade, because the size of the through-hole on the hollow helical blade is less than the size of qualified sand material, therefore the qualified sand material of size can enter into the second return flow indoor along with helical blade in the sand water. Water in the sand water and fine sand materials with unqualified sizes can enter the hollow helical blade from the through hole and finally enter the first backflow chamber. Tiny sand in the first backflow chamber is discharged through the discharge hole, and moisture enters the second backflow chamber under the action of the filter plate to be mixed with the sand qualified in size. And the sand pump pumps the sand water in the second return chamber to the sand blasting mechanism for sand blasting, so that the recycling of the qualified sand water is realized.

Drawings

Fig. 1 is a schematic structural view of the present invention;

FIG. 2 is a schematic view of the internal structure of the present invention;

FIG. 3 is an enlarged view of portion A of FIG. 2;

FIG. 4 is a schematic structural view of a recovery mechanism;

FIG. 5 is a schematic structural view of a fixed tube;

FIG. 6 is a schematic structural view of a stirring mechanism;

fig. 7 is a schematic structural view of the support rod.

Reference numerals: 10-bracket, 11-holding tank, 12-first reflux chamber, 121-discharge port, 13-second reflux chamber, 20-conveying mechanism, 21-chain, 22-supporting rod, 23-second motor, 24-flexible sleeve, 25-thread section, 26-locking nut, 30-sand pump, 40-sand blasting mechanism, 50-shell, 60-recovery mechanism, 61-recovery pipe, 611-inclined surface, 62-funnel, 63-fixed shaft, 64-hollow helical blade, 65-filter plate, 641-through hole, 70-stirring mechanism, 71-stirring paddle, 72-first motor and 73-scraper.

Detailed Description

In order to make the technical means, creation features, achievement purposes and functions of the present invention easy to understand, the present invention is further described below with reference to the following embodiments.

In this application, unless expressly stated or limited otherwise, the terms "connected" and "fixed" are to be construed broadly, e.g., as meaning either a fixed connection or a removable connection, or an integral part; can be mechanically or electrically connected; either directly or indirectly through intervening media, either internally or in any other relationship. The specific meaning of the above terms in the present invention can be understood according to specific situations by those skilled in the art.

In the description of the present application, it is to be understood that the terms "longitudinal," "lateral," "horizontal," "top," "bottom," "upper," "lower," "inner" and "outer" and the like are used in the orientation or positional relationship shown in the drawings, which are used for convenience in describing the present invention and for simplicity in description, and are not intended to indicate or imply that the referenced device or element must have a particular orientation, be constructed and operated in a particular orientation, and thus, are not to be construed as limiting the present invention.

Furthermore, the terms "first", "second", etc. are used for descriptive purposes only and are not to be construed as indicating or implying relative importance or implicitly indicating the number of technical features indicated. In the description of the present invention, "a plurality" means two or more unless specifically limited otherwise.

As shown in fig. 1-7, the utility model provides a sand blasting machine with sand water capable of being recycled, which comprises a bracket 10, a conveying mechanism 20, a sand pump 30 and a sand blasting mechanism 40. The conveying mechanism 20 is used for conveying the semiconductor substrate to the lower part of the sand blasting mechanism 40, and then the sand blasting mechanism 40 carries out sand blasting operation on the lower semiconductor substrate. In a long-term sand blasting operation, the sand in the sand water often collides with the surface of the semiconductor substrate, so that part of the sand is lost and becomes fine sand with an unqualified size. The top of the bracket 10 is provided with a receiving groove 11, and a backflow chamber is arranged inside the receiving groove. The blasting mechanism 40 has a housing 50 on the periphery.

The sand blasting machine further comprises a recovery mechanism 60 installed in the accommodating groove 11, and the recovery mechanism 60 is used for recycling the sand materials with qualified sizes after sand blasting operation. Specifically, the recovery mechanism 60 includes a recovery pipe 61, a funnel 62, a fixed shaft 63, a hollow spiral blade 64, and a filter plate 65. The recovery pipe 61 is fixedly arranged in the accommodating groove 11 along the longitudinal direction, and the bottom of the recovery pipe 61 is provided with an inclined surface 611.

The opening of the funnel 62 is located below the blasting mechanism 40 and the conveying mechanism 20, and the bottom communicates with the top of the recovery pipe 61. The fixed shaft 63 is fixedly disposed in the recovery pipe 61 in a longitudinal direction. The hollow helical blade 64 is fixedly attached to the fixed shaft 63 along the extending direction of the fixed shaft 63, and the inner wall of the hollow helical blade 64 is attached to the fixed shaft 63 and the outer wall is attached to the recovery pipe 61. The upper surface of the hollow helical blade 64 is provided with a plurality of through holes 641 communicated with the inside of the hollow helical blade, and the size of the through holes 641 is smaller than that of qualified sand materials. The sand water after the sand blasting operation enters the recovery pipe 61 from the hopper 62, wherein the fine sand and water in the sand water enter the hollow helical blade 64 from the through hole 641, and the sand material with qualified size slides down to the bottom of the recovery pipe 61.

The filter plate 65 is obliquely disposed in the reflow chamber and divides the reflow chamber into the first reflow chamber 12 and the second reflow chamber 13 located below the first reflow chamber 12. The first return chamber 12 has an upper end communicating with the bottom of the hollow spiral blade 64 and a lower end having a discharge port 121. The fine sand and moisture entering the hollow helical blade 64 enter the first return chamber 12, wherein the fine sand is discharged from the discharge port 121 and the moisture enters the second return chamber 13 under the action of the filter plate 65. The second recirculation chamber 13 communicates with the lowest part of the bottom of the recovery pipe 61, and since the bottom of the recovery pipe 61 has the inclined surface 611, the sand material of an acceptable size slides down into the second recirculation chamber 13 and is mixed with the water. The second return chamber 13 is also communicated with an inlet of the sand pump 30, and the sand pump 30 pumps qualified sand and moisture into the sand blasting mechanism 40 for sand blasting operation again, so that recycling of the qualified sand in the sand water is realized. After the sander has been in operation for a period of time, the worker can throw in new sand water in the second reflow chamber 13.

In one embodiment, an agitation mechanism 70 is also included, disposed within the second reflow chamber 13. The stirring mechanism 70 comprises a stirring paddle 71 and a first motor 72, the stirring paddle 71 is longitudinally arranged in the second backflow chamber 13, two ends of the stirring paddle are rotatably connected with the support 10, and the first motor 72 drives the stirring paddle 71 to rotate through a bevel gear structure. When the first motor 72 is turned on, the stirring paddle 71 can stir the second reflow chamber 13, so that the qualified sand and moisture can be uniformly mixed, and the sand blasting yield of the semiconductor substrate during the sand blasting operation can be improved.

In one embodiment, the bottom of the paddle 71 has a scraper 73. The scraper 73 is attached to the bottom of the second reflow chamber 13 to prevent qualified sand from being deposited on the bottom of the second reflow chamber 13, so that the stirring effect of the stirring mechanism 70 is better, and the sand blasting yield of the semiconductor substrate during sand blasting operation can be further improved

In one embodiment, the conveying mechanism 20 includes a chain 21, a support bar 22, and a second motor 23. The two chains 21 are arranged at the top of the bracket 10 in parallel and are both rotatably connected with the bracket 10 through bearings. A plurality of supporting rods 22 arranged at intervals are arranged between the two chains 21, and both ends of each supporting rod 22 are fixedly connected with the chains 21. The second motor 23 drives the two chains 21 to rotate synchronously by driving the rotating shaft. In use, a worker places a semiconductor substrate on the support bar 22, and the support bar 22 moves along with the chain 21 under the driving of the second motor 23, thereby driving the movement of the semiconductor substrate.

The conveying mechanism 20 with such a structure facilitates the sand water to flow into the funnel 62 from the gap between the supporting rods 22 after colliding with the surface of the semiconductor substrate during the sand blasting operation.

In one embodiment, the support rod 22 is sleeved with a flexible sleeve 24 at the middle thereof, and the flexible sleeve 24 is preferably made of silicone. The flexible sleeve 24 can prevent the rigid contact between the semiconductor substrate and the supporting rod 22, and prevent the supporting rod 22 from damaging the semiconductor substrate. The two ends of the support rod 22 are provided with threaded sections 25, and locking nuts 26 are respectively sleeved on the threaded sections 25. The worker can rotate the lock nuts 26 at both ends of the support rod 22 according to the size of the semiconductor substrate, so that the lock nuts 26 clamp the semiconductor substrate, and the semiconductor substrate is prevented from being displaced by the impact of the blasting operation. The mounting of the lock nut 26 improves the stability of the blasting operation.

The basic principles and the main features of the invention and the advantages of the invention have been shown and described above, it will be evident to those skilled in the art that the invention is not limited to the details of the foregoing illustrative embodiments, but that the invention may be embodied in other specific forms without departing from the spirit or essential characteristics of the invention. The present embodiments are therefore to be considered in all respects as illustrative and not restrictive, the scope of the invention being indicated by the appended claims rather than by the foregoing description, and all changes which come within the meaning and range of equivalency of the claims are therefore intended to be embraced therein.

Furthermore, it should be understood that although the present description refers to embodiments, not every embodiment may contain only a single embodiment, and such description is for clarity only, and those skilled in the art should integrate the description, and the embodiments may be combined as appropriate to form other embodiments understood by those skilled in the art.

Claims

1. The utility model provides a but sand water cyclic utilization's sand blasting machine, includes support, conveying mechanism, sand pump and sandblast mechanism, conveying mechanism is used for transporting the semiconductor substrate to the below of sandblast mechanism, its characterized in that: the top of the bracket is provided with a holding tank, a reflux chamber is arranged in the holding tank, the bracket also comprises a recovery mechanism arranged in the holding tank, the recovery mechanism comprises a recovery pipe, a funnel, a fixed shaft, a hollow helical blade and a filter plate, the recovery pipe is longitudinally fixedly arranged in the holding tank, the bottom of the recovery pipe is provided with an inclined plane, a funnel opening of the funnel is positioned below the sand blasting mechanism and the conveying mechanism, the bottom of the funnel is communicated with the top of the recovery pipe, the fixed shaft is longitudinally fixedly arranged in the recovery pipe, the hollow helical blade is arranged on the fixed shaft along the extending direction of the fixed shaft, the inner wall of the hollow helical blade is jointed with the fixed shaft, the outer wall of the hollow helical blade is jointed with the recovery pipe, the upper surface of the hollow helical blade is provided with a plurality of through holes communicated with the interior of the hollow helical blade, and the size of the through holes is smaller, the filter plate is obliquely arranged in the backflow chamber and divides the backflow chamber into a first backflow chamber and a second backflow chamber located below the first backflow chamber, the upper end of the first backflow chamber is communicated with the bottom of the hollow helical blade, the lower end of the first backflow chamber is provided with a discharge hole, and the second backflow chamber is communicated with the lowest part of the bottom of the recovery pipe and is also communicated with the inlet of the sand pump.

2. The sand blasting machine capable of recycling sand water according to claim 1, characterized in that: still including setting up rabbling mechanism in the second return flow chamber, rabbling mechanism includes stirring rake and first motor, the stirring rake is along vertically setting up in the second return flow chamber, and both ends with the support rotates and connects, first motor is used for the drive the stirring rake is rotatory.

3. The sand blasting machine capable of recycling sand water according to claim 2, wherein: the bottom of the stirring paddle is provided with a scraper.

4. The sand blasting machine capable of recycling sand water according to claim 1, characterized in that: conveying mechanism includes chain, bracing piece and second motor, two chain parallel arrangement is in the top of support, and all with the support rotates to be connected, many the bracing piece interval sets up two between the chain, and both ends all with chain fixed connection, the second motor is used for driving two the chain rotates in step.

5. The sand blasting machine capable of recycling sand water according to claim 4, wherein: the middle part cover of bracing piece is equipped with flexible cover, the both ends of bracing piece have the screw thread section, all overlap on the screw thread section and be equipped with lock nut.