CN211789972U - Discharge excited gas laser device - Google Patents
Discharge excited gas laser device Download PDFInfo
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- CN211789972U CN211789972U CN202020259817.1U CN202020259817U CN211789972U CN 211789972 U CN211789972 U CN 211789972U CN 202020259817 U CN202020259817 U CN 202020259817U CN 211789972 U CN211789972 U CN 211789972U
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Abstract
An embodiment of the utility model provides a discharge excitation gas laser device. By providing the 2 nd seal member on the atmosphere side of the 1 st seal member and introducing the inert gas or the nitrogen gas into the space between the 1 st seal member and the 2 nd seal member, the gas in the space can be purified by the introduced inert gas or the nitrogen gas, and the components such as moisture and oxygen in the atmosphere are prevented from entering the chamber through the 1 st seal member, so that the performance of the discharge excitation gas laser device can be ensured, and the increase in the exchange frequency of the laser gas and the increase in the running cost can be avoided.
Description
Technical Field
The utility model relates to a laser field especially relates to a discharge excitation gas laser device.
Background
In the related art, a discharge excitation gas laser apparatus has a chamber for containing a laser gas. Fig. 1 is a schematic view of a conventional discharge excited gas laser apparatus. As shown in fig. 1, the discharge excitation gas laser apparatus 10 includes a chamber 11, an insulating member 12, a 1 st electrode 13, a 2 nd electrode 14, a fan 15, and a heat exchanger 16, the chamber 11 has an opening, the insulating member 12 closes the opening, the laser gas is enclosed in the chamber 1, and the laser gas is excited by discharging the 1 st electrode 13 and the 2 nd electrode 14 facing each other in the chamber 11. In addition, the chamber is sealed using an O-ring 17. In the chamber 11, a fan 15 circulates the laser gas, and a heat exchanger 16 cools the laser gas.
It should be noted that the above background description is only for the sake of clarity and complete description of the technical solutions of the present invention, and is set forth for facilitating understanding of those skilled in the art. These solutions are not considered to be known to the person skilled in the art merely because they have been set forth in the background section of the present invention.
SUMMERY OF THE UTILITY MODEL
The inventors of the present invention have found that, in the conventional discharge excitation gas laser device, although the chamber is sealed by the O-ring 17, components such as moisture and oxygen in the atmosphere may still penetrate through the O-ring 17 and enter the chamber 11, resulting in a decrease in the performance of the laser device such as a decrease in laser output, and further resulting in an increase in the exchange frequency of laser gas, thereby increasing the running cost.
The embodiment of the utility model provides a discharge excitation gas laser device can prevent that compositions such as moisture and oxygen in the atmosphere from getting into the laser cavity to can guarantee discharge excitation gas laser device's performance, avoid the gaseous exchange frequency of laser to rise and the increase of running cost.
According to a first aspect of the embodiments of the present invention, there is provided a discharge excitation gas laser apparatus having: a chamber having an opening; an insulating member provided with an electrode, and blocking the opening; a 1 st sealing member provided between the chamber and the insulating member, for sealing the inside of the chamber; a 2 nd seal member disposed on an atmosphere side of the 1 st seal member; and a gas inlet through which an inert gas or a nitrogen gas is introduced into a space between the 1 st sealing member and the 2 nd sealing member.
According to a second aspect of the embodiments of the present invention, wherein the 2 nd sealing member covers a gap between the cavity exposed from the outer surface of the cavity and the insulating member.
According to a third aspect of the embodiments of the present invention, wherein the discharge excitation gas laser apparatus further has: a fixing member fixing the insulating member and the 2 nd sealing member to the chamber.
According to a fourth aspect of the embodiment of the present invention, wherein the gas introducing port penetrates the fixing member and the 2 nd sealing member.
According to a fifth aspect of embodiments of the present invention, wherein the 2 nd sealing member is composed of at least 2 mutually separated portions.
According to a sixth aspect of the embodiments of the present invention, wherein the discharge excitation gas laser device further has: a gas outlet port through which gas in the space between the 1 st sealing member and the 2 nd sealing member is led out.
According to a seventh aspect of the embodiments of the present invention, wherein the 1 st sealing member is an O-ring.
According to an eighth aspect of embodiments of the present invention, wherein the 2 nd sealing member is a flexible sealing member.
According to a ninth aspect of embodiments of the present invention, wherein the discharge excited gas laser device is an excimer laser device.
The utility model discloses an one of the beneficial effect lies in: by providing the 2 nd seal member on the atmosphere side of the 1 st seal member and introducing the inert gas or the nitrogen gas into the space between the 1 st seal member and the 2 nd seal member, the gas in the space can be purified by the introduced inert gas or the nitrogen gas, and the components such as moisture and oxygen in the atmosphere are prevented from entering the chamber through the 1 st seal member, so that the performance of the discharge excitation gas laser device can be ensured, and the increase in the exchange frequency of the laser gas and the increase in the running cost can be avoided.
Specific embodiments of the present invention are disclosed in detail with reference to the following description and the accompanying drawings, which specify the manner in which the principles of the invention may be employed. It should be understood that the embodiments of the present invention are not so limited in scope. The embodiments of the invention include many variations, modifications and equivalents within the spirit and scope of the appended claims.
Features that are described and/or illustrated with respect to one embodiment may be used in the same way or in a similar way in one or more other embodiments, in combination with or instead of the features of the other embodiments.
It should be emphasized that the term "comprises/comprising" when used herein, is taken to specify the presence of stated features, integers, steps or components but does not preclude the presence or addition of one or more other features, integers, steps or components.
Drawings
The accompanying drawings, which are included to provide a further understanding of the embodiments of the invention and are incorporated in and constitute a part of this specification, illustrate embodiments of the invention and together with the description serve to explain the principles of the invention. It is obvious that the drawings in the following description are only some embodiments of the invention, and that for a person skilled in the art, other drawings can be derived from them without inventive faculty. In the drawings:
FIG. 1 is a schematic view of a conventional discharge excited gas laser apparatus;
fig. 2 is a schematic diagram of a discharge excited gas laser apparatus according to an embodiment of the present invention;
fig. 3 is an enlarged view of a part of the structure of the discharge excitation gas laser apparatus shown in fig. 2;
fig. 4 is a plan view of a discharge excited gas laser apparatus according to an embodiment of the present invention.
Detailed Description
The foregoing and other features of the invention will become apparent from the following description taken in conjunction with the accompanying drawings. In the description and drawings, particular embodiments of the invention have been disclosed in detail as being indicative of some of the embodiments in which the principles of the invention may be employed, it being understood that the invention is not limited to the embodiments described, but, on the contrary, is intended to cover all modifications, variations and equivalents falling within the scope of the appended claims.
In the embodiments of the present invention, the terms "first", "second", and the like are used for distinguishing different elements from each other in a descriptive sense, but do not denote any spatial arrangement, temporal order, or the like of the elements, and the elements should not be limited by these terms. The term "and/or" includes any and all combinations of one or more of the associated listed terms. The terms "comprising," "including," "having," and the like, refer to the presence of stated features, elements, components, and do not preclude the presence or addition of one or more other features, elements, components, and elements. "plurality" or "a plurality" means at least two or at least two.
An embodiment of the utility model provides a discharge excitation gas laser device.
Fig. 2 is a schematic diagram of a discharge excited gas laser apparatus according to an embodiment of the present invention; fig. 3 is an enlarged view of a part of the structure of the discharge excitation gas laser apparatus shown in fig. 2; fig. 4 is a plan view of a discharge excited gas laser apparatus according to an embodiment of the present invention.
As shown in fig. 2, 3, and 4, the discharge excitation gas laser apparatus 100 includes:
a chamber 110 having an opening 111;
an insulating member 120 in which the electrode 121 is disposed, and the insulating member 120 blocks the opening 111;
a 1 st sealing member 130 disposed between the chamber 110 and the insulating member 120, for sealing the inside of the chamber 110;
a 2 nd seal member 140 disposed on the atmosphere side of the 1 st seal member 130; and
the gas inlet 150 introduces an inert gas or nitrogen gas 200 into the space 160 between the 1 st seal member 130 and the 2 nd seal member 140 through the gas inlet 150.
In this way, the gas in the space 160 can be purged by the inert gas or nitrogen gas 200 introduced, and components such as moisture and oxygen in the atmosphere are prevented from entering the chamber 110 through the first sealing member 130, so that the performance of the discharge excited gas laser apparatus 100 can be ensured, and an increase in the exchange frequency of the laser gas and an increase in the running cost can be avoided.
In addition, even if a small amount of inert gas or nitrogen gas 200 penetrates through the 1 st sealing member 130 into the chamber 110, the inert gas or nitrogen gas 200 does not contain components such as moisture and oxygen, and therefore, the performance of the discharge excitation gas laser apparatus 100 is not degraded.
The discharge-excited gas laser apparatus 100 may be various types of discharge-excited gas laser apparatuses, for example, the discharge-excited gas laser apparatus 100 is an excimer laser apparatus.
The chamber 110 is filled with a laser gas, which may be various laser gases, for example, Kr, F2Or a laser gas containing argon Ar and fluorine F2The laser gas of (1).
In one embodiment of the present invention, the electrode 121 disposed on the insulating member 120 may be referred to as a 1 st electrode, and as shown in fig. 2 and 3, the electrode 121 may be fixed on the insulating member 120 by a bar member 122.
As shown in fig. 2, the discharge excitation gas laser apparatus 100 may further include a 2 nd electrode 123 disposed in the chamber 110, and disposed opposite to the 1 st electrode 121.
In the chamber 110, a discharge is performed between the opposing 1 st electrode 121 and 2 nd electrode 123, thereby exciting the laser gas.
In an implementation manner of the embodiment of the present invention, as shown in fig. 2, the discharge excitation gas laser apparatus 100 may further include:
and a fan 170 disposed in the chamber 110 to circulate the laser gas to form a circulation flow path passing between the 1 st electrode 121 and the 2 nd electrode 123. That is, the fan 170 feeds the laser gas passing between the 1 st electrode 121 and the 2 nd electrode 123 again between the two electrodes along the circulating flow path.
In an implementation manner of the embodiment of the present invention, as shown in fig. 2, the discharge excitation gas laser apparatus 100 may further include:
and a heat exchanger 180 disposed on a circulation flow path of the laser gas within the chamber 110. The temperature of the laser gas is increased by the discharge between the 1 st electrode 121 and the 2 nd electrode 123 or the viscous friction of the gas fluid, and the heat exchanger 180 cools the laser gas after the temperature increase.
The following describes the structure of the 1 st seal member 130, the 2 nd seal member 140, and the gas introduction port 150 according to the embodiment of the present invention.
In one embodiment of the present invention, the 1 st sealing member 130 is an O-ring, which is wound into a circle and disposed between the chamber 110 and the insulating member 120 to seal the inside of the chamber 110.
The 2 nd sealing member 140 is disposed on the atmosphere side of the 1 st sealing member 130, that is, the 2 nd sealing member 140 is disposed on the side of the 1 st sealing member 130 close to the atmosphere, and for example, as shown in fig. 2, the side of the 1 st sealing member 130 close to the atmosphere is the side of the gap 161 between the chamber 110 and the insulating member 120 exposed from the outer surface 112 of the chamber 110.
In one implementation of the embodiment of the present invention, the 2 nd sealing member 140 is a flexible sealing member, for example, the 2 nd sealing member 140 is a rubber sealing member or a resin sealing member.
In addition, the 2 nd sealing member 140 may be composed of at least 2 parts separated from each other.
In this way, by shortening the size of the flexible seal member, the processing accuracy of the flexible seal member can be improved, and the seal can be performed more reliably.
For example, as shown in fig. 4, the 2 nd sealing member 140 is divided into 4 parts and is disposed so as to substantially surround the insulating member 120.
In one implementation of the embodiment of the present invention, as shown in fig. 2, the 2 nd sealing member 140 covers a gap 161 between the chamber 110 and the insulating member 120 exposed from the outer surface 112 of the chamber 110.
As shown in fig. 2, a space 160 is formed between the 1 st sealing member 130, the 2 nd sealing member 140, the chamber 110, and the insulating member 120, and an inert gas or nitrogen gas 200 is introduced into the space 160 through the gas inlet 150, thereby purifying the air in the space 160 and preventing components such as moisture and oxygen in the atmosphere from entering the chamber 110 through the 1 st sealing member 130.
In one implementation of the embodiments of the present invention, the inert gas may be various inert gases.
In one embodiment of the present invention, as shown in fig. 2, 3 and 4, the discharge excitation gas laser apparatus 100 further includes:
and a fixing member 190 fixing the insulating member 120 and the 2 nd sealing member 140 to the chamber 110.
In one embodiment of the present invention, the fixing member 190 may be provided with 1 or more, for example, the number and size of the fixing member 190 may be determined according to the structure of the insulating member 120.
For example, as shown in fig. 4, the plurality of fixing members 190 fix the insulating member 120 and the 2 nd sealing member 140 to the upper surface 112 of the chamber 110 by a plurality of screws 191, respectively.
In one embodiment of the present invention, as shown in fig. 3, the gas introduction port 150 penetrates the fixing member 190 and the 2 nd seal member 140. Thus, the inert gas or nitrogen gas 200 is introduced into the space 160 through the through-holes penetrating the fixing member 190 and the 2 nd sealing member 140.
In one embodiment of the present invention, the inert gas or nitrogen gas may be introduced by using a gas introduction device (not shown), for example, a gas tube connected to a gas pump is inserted into the gas introduction port 150, so that the inert gas or nitrogen gas 200 is introduced.
In an implementation manner of the embodiment of the present invention, as shown in fig. 4, the discharge excitation gas laser apparatus 100 may further include:
the gas outlet 151 leads out the gas in the space 160 between the 1 st sealing member 130 and the 2 nd sealing member 140 through the gas outlet 151.
For example, a gas guide tube is inserted into the gas outlet 151 to guide the gas in the space 160. The gas to be discharged is basically the inert gas or nitrogen gas 200 introduced into the space 160, and in addition, the gas to be discharged may also include a small amount of residual air, which may be discharged along with the introduction of the inert gas or nitrogen gas 200.
In an implementation manner of the embodiment of the present invention, the discharge excitation gas laser apparatus 100 may further include other components, and specific structures of the other components may refer to the related art, which is not described herein again.
As is clear from the above-described embodiment, by providing the 2 nd seal member on the atmosphere side of the 1 st seal member and introducing the inert gas or the nitrogen gas into the space between the 1 st seal member and the 2 nd seal member, the gas in the space can be purified by the introduced inert gas or the nitrogen gas, and the components such as moisture and oxygen in the atmosphere are prevented from entering the chamber through the 1 st seal member, so that the performance of the discharge excited gas laser device can be ensured, and the increase in the exchange frequency of the laser gas and the increase in the running cost can be avoided.
The present invention has been described in connection with specific embodiments, but it should be clear to a person skilled in the art that these descriptions are intended to be illustrative and not limiting to the scope of the invention. Various modifications and adaptations of the present invention may occur to those skilled in the art, which are within the spirit and scope of the present invention.
Claims (9)
1. A discharge-excited gas laser device, comprising:
a chamber having an opening;
an insulating member provided with an electrode, and blocking the opening;
a 1 st sealing member provided between the chamber and the insulating member, for sealing the inside of the chamber;
a 2 nd seal member disposed on an atmosphere side of the 1 st seal member; and
and a gas inlet through which an inert gas or a nitrogen gas is introduced into a space between the 1 st sealing member and the 2 nd sealing member.
2. The discharge excited gas laser apparatus according to claim 1,
the 2 nd sealing member covers a gap between the cavity and the insulating member exposed from an outer surface of the cavity.
3. The discharge excited gas laser apparatus according to claim 2, further comprising:
a fixing member fixing the insulating member and the 2 nd sealing member to the chamber.
4. The discharge excited gas laser apparatus according to claim 3,
the gas inlet port penetrates the fixing member and the 2 nd seal member.
5. The discharge excited gas laser apparatus according to claim 1,
the 2 nd seal member is constituted by at least 2 portions separated from each other.
6. The discharge excited gas laser apparatus according to claim 1,
the discharge excited gas laser device further includes:
a gas outlet port through which gas in the space between the 1 st sealing member and the 2 nd sealing member is led out.
7. The discharge excited gas laser apparatus according to any one of claims 1 to 6,
the 1 st sealing component is an O-shaped sealing ring.
8. The discharge excited gas laser apparatus according to any one of claims 1 to 6,
the 2 nd seal member is a flexible seal member.
9. The discharge excited gas laser apparatus according to any one of claims 1 to 6,
the discharge excited gas laser device is an excimer laser device.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202020259817.1U CN211789972U (en) | 2020-03-05 | 2020-03-05 | Discharge excited gas laser device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202020259817.1U CN211789972U (en) | 2020-03-05 | 2020-03-05 | Discharge excited gas laser device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN211789972U true CN211789972U (en) | 2020-10-27 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202020259817.1U Active CN211789972U (en) | 2020-03-05 | 2020-03-05 | Discharge excited gas laser device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN211789972U (en) |
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2020
- 2020-03-05 CN CN202020259817.1U patent/CN211789972U/en active Active
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