CN211762667U - High-speed rotary joint for cooling main shaft of silicon wafer line cutting machine - Google Patents
High-speed rotary joint for cooling main shaft of silicon wafer line cutting machine Download PDFInfo
- Publication number
- CN211762667U CN211762667U CN202020235149.9U CN202020235149U CN211762667U CN 211762667 U CN211762667 U CN 211762667U CN 202020235149 U CN202020235149 U CN 202020235149U CN 211762667 U CN211762667 U CN 211762667U
- Authority
- CN
- China
- Prior art keywords
- shell
- main shaft
- rotary joint
- hollow shaft
- casing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Images
Landscapes
- Joints Allowing Movement (AREA)
Abstract
The utility model discloses a be used for silicon chip line cutter main shaft refrigerated high-speed rotary joint, including the hollow shaft, the inside activity of hollow shaft is provided with the main shaft, the hollow shaft one end outside is provided with first casing, the one end outside that first casing was kept away from to the hollow shaft is provided with the second casing. The utility model discloses a with the main shaft cover inside the hollow shaft, install first casing and second casing on the hollow shaft again respectively, water inlet and delivery port also install respectively on first casing and second casing, when using, the pivot about being connected between accessible hollow shaft and the main shaft, rethread hollow shaft and first casing, dislocation rotation about the connection of second casing realizes, it does not change to have accomplished the shell promptly, axle pivoted effect, make this rotary joint have angle adjustable's effect, thereby make this rotary joint can satisfy more user demands of silicon chip line cutter main shaft, thereby make this rotary joint have better adaptability.
Description
Technical Field
The utility model belongs to the case field is produced to the rabbit, especially relates to a be used for silicon chip line cutter main shaft refrigerated high-speed rotary joint.
Background
The rotary joint is formed by: water, working speed: 3300rpm, working temperature: 70 ℃, working pressure: 7 MPa, filtration diameter: the 60um rotary joint supports a design structure that a plurality of channels simultaneously transmit water, adopts flange type connection, and is effectively integrated into customer equipment, and the types of the rotary joints comprise a hydraulic rotary joint, a high-pressure rotary joint, a multi-channel rotary joint, a high-speed rotary joint, a high-temperature rotary joint, a single-channel rotary joint, a special rotary joint for a special rotary joint LED, a special rotary joint for an excavator and a special rotary joint for a machine tool.
SUMMERY OF THE UTILITY MODEL
The utility model provides a be used for silicon chip line cutter main shaft refrigerated high-speed rotary joint aims at solving the problem that proposes in the above-mentioned background art.
The utility model is realized in such a way, a high-speed rotary joint for cooling the main shaft of a silicon wafer line cutting machine comprises a hollow shaft, the main shaft is movably arranged in the hollow shaft, a first shell is arranged at the outer side of one end of the hollow shaft, a second shell is arranged at the outer side of one end of the hollow shaft far away from the first shell, a water inlet is arranged at the top of the first shell, a water outlet is arranged at the top of the second shell, water-proof rings are arranged between the inner sides of the first shell and the second shell, mechanical sealing mechanisms are arranged at the two ends of the water-proof rings in the first shell and the second shell, L-shaped sealing rings are arranged at the bottom ends of the water inlet and the water outlet outside the mechanical sealing mechanisms, deep groove ball bearings are arranged at one ends of the inner parts of the first shell and the second shell outside the hollow shaft, retaining rings are arranged at the, an O-shaped ring is arranged between one end of the first shell and the second shell, inner hexagon screws are mounted on the outer side surfaces of the outer end of the second shell and the outer end of the main shaft, and silencers are arranged on the outer side surfaces of the first shell and the second shell.
Preferably, mechanical seal mechanism includes sealing washer, spring, briquetting, hold and connect ring and separation and reunion piece, the inside one end of first casing, second casing all is provided with the sealing washer in the hollow shaft outside, sealing washer one end all is provided with the spring, the spring keep away from the one end of sealing washer all fixed be provided with the briquetting one side that the spring was kept away from to the briquetting all fixedly be provided with hold and connect the ring, hold and connect the ring and keep away from one side that the briquetting was all fixed and be provided with the separation and reunion piece.
Preferably, the inner sides of the socket head cap screws are provided with matching gaskets.
Preferably, the water-proof ring is made of graphite.
Preferably, the O-shaped ring is made of rubber.
Compared with the prior art, the beneficial effects of the utility model are that:
the utility model discloses a with the main shaft cover inside the hollow shaft, install first casing and second casing on the hollow shaft again respectively, water inlet and delivery port also install respectively on first casing and second casing, when using, the pivot about being connected between accessible hollow shaft and the main shaft, rethread hollow shaft and first casing, dislocation rotation about the connection of second casing realizes, it does not change to have accomplished the shell promptly, axle pivoted effect, make this rotary joint have angle adjustable's effect, thereby make this rotary joint can satisfy more user demands of silicon chip line cutter main shaft, thereby make this rotary joint have better adaptability.
Drawings
FIG. 1 is a cross-sectional view of a front view of a high-speed rotary joint for cooling a main shaft of a silicon wafer line cutting machine according to the present invention;
FIG. 2 is a schematic side view of a high-speed rotary joint for cooling a main shaft of a silicon wafer line cutting machine according to the present invention;
fig. 3 is a perspective view of the high-speed rotary joint structure for cooling the main shaft of the silicon wafer line cutting machine of the present invention.
In the figure: 1. a hollow shaft; 2. a main shaft; 3. a first housing; 4. a second housing; 5. a water inlet; 6. a water outlet; 7. a water-proof ring; 8. a mechanical seal mechanism; 9. an L-shaped seal ring; 10. a deep groove ball bearing; 11. a retainer ring; 12. an O-shaped ring; 13. a socket head cap screw; 14. a seal ring; 15. a spring; 16. briquetting; 17. a bearing ring; 18. a clutch block; 19. a gasket is arranged; 20. a silencer.
Detailed Description
In order to make the objects, technical solutions and advantages of the present invention more clearly understood, the present invention is further described in detail below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are merely illustrative of the invention and are not intended to limit the invention.
In the description of the present invention, it is to be understood that the terms "length", "width", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", and the like indicate orientations or positional relationships based on those shown in the drawings, and are merely for convenience of description and simplicity of description, and do not indicate or imply that the device or element being referred to must have a particular orientation, be constructed and operated in a particular orientation, and thus, should not be construed as limiting the present invention. In addition, in the description of the present invention, "a plurality" means two or more unless specifically limited otherwise.
Referring to fig. 1-3, a high-speed rotary joint for cooling a main shaft of a silicon wafer line cutting machine comprises a hollow shaft 1, a main shaft 2 is movably arranged inside the hollow shaft 1, a first shell 3 is arranged on the outer side of one end of the hollow shaft 1, a second shell 4 is arranged on the outer side of one end of the hollow shaft 1 away from the first shell 3, a water inlet 5 is arranged on the top of the first shell 3, a water outlet 6 is arranged on the top of the second shell 4, a water isolation ring 7 is arranged between the inner sides of the first shell 3 and the second shell 4, mechanical sealing mechanisms 8 are arranged at two ends of the water isolation ring 7 inside the first shell 3 and the second shell 4, L-shaped sealing rings 9 are arranged at the bottom ends of the water inlet 5 and the water outlet 6 outside the mechanical sealing mechanisms 8, and deep groove ball bearings 10 are arranged at one ends inside the first shell 3 and the second shell 4 on, inside retaining ring 11 that all is provided with in deep groove ball bearing 10 outside of first casing 3, second casing 4, be provided with O type circle 12 between 3 one end of first casing and the second casing 4, hexagon socket head cap screw 13 is all installed on the outside surface of second casing 4, the outside of 2 outside one ends of main shaft, first casing 3, the outside surface of second casing 4 all are provided with muffler 20.
The utility model discloses in mechanical seal mechanism 8 includes sealing washer 14, spring 15, briquetting 16, accepts ring 17 and clutch block 18, the inside one end of first casing 3, second casing 4 all is provided with sealing washer 14 in the 1 outside of hollow shaft, sealing washer 14 one end all is provided with spring 15, spring 15 keeps away from the equal fixed briquetting 16 that is provided with of one end of sealing washer 14 one side that spring 15 was kept away from to briquetting 16 is the fixed ring 17 that accepts that is provided with all, accept ring 17 and keep away from one side of briquetting 16 and all fix clutch block 18 that is provided with, can accomplish the sealed between first casing 3, second casing 4 and the hollow shaft 1 through the mechanical seal mechanism 8 that above subassembly structure constitutes.
The utility model discloses in socket head cap screw 13 inboard all is provided with joins in marriage packing ring 19, joins in marriage packing ring 19 and is used for avoiding second casing 4, 2 surfaces of main shaft to receive the wearing and tearing when socket head cap screw 13 rotates.
The utility model discloses in the material of water proof ring 7 is graphite, and the water proof ring 7 of graphite material has better wear-resisting effect.
The utility model discloses in O type circle 12's material is rubber, and O type circle 12 that the material is rubber has better wear-resisting effect equally.
The utility model discloses a theory of operation is: the hollow shaft 1 is arranged inside the first shell 3 and the second shell 4, two ends of the hollow shaft 1 need to extend to the outside of the first shell 3 and the second shell 4, the mechanical sealing mechanism 8 is arranged between the first shell 3 and the second shell 4, the sealing between the first shell 3 and the second shell 4 is completed through each component in the mechanical sealing mechanism 8, one side of the mechanical sealing mechanism 8 is connected with the L-shaped sealing ring 9, the waterproof ring 7 has the effect of separating the water inlet 5 from the water outlet 6, the effect provided by the main structure in the rotary joint is used for ensuring the normal connection effect of the rotary joint, when the rotary joint is used, the left and right rotating shafts can be connected through the hollow shaft 1 and the main shaft 2, and the up-and-down staggered rotation can be realized through the connection of the hollow shaft 1 and the first shell 3 and the second shell 4, the effect that the shell does not rotate and the shaft rotates is achieved, so that the rotary joint has the effect of adjustable angle, the rotary joint can meet more use requirements of the main shaft 2 of the silicon wafer line cutting machine, and the rotary joint has good adaptability.
The above description is only exemplary of the present invention and should not be construed as limiting the present invention, and any modifications, equivalents and improvements made within the spirit and principles of the present invention are intended to be included within the scope of the present invention.
Claims (5)
1. The utility model provides a be used for silicon chip line cutter main shaft refrigerated high-speed rotary joint, includes hollow shaft (1), its characterized in that: the hollow shaft (1) is movably provided with a main shaft (2), a first shell (3) is arranged on the outer side of one end of the hollow shaft (1), a second shell (4) is arranged on the outer side of one end, far away from the first shell (3), of the hollow shaft (1), a water inlet (5) is arranged at the top of the first shell (3), a water outlet (6) is arranged at the top of the second shell (4), water isolating rings (7) are arranged between the inner sides of the first shell (3) and the second shell (4), mechanical sealing mechanisms (8) are arranged at the two ends of the water isolating rings (7) in the first shell (3) and the second shell (4), L-shaped sealing rings (9) are arranged at the outer sides of the mechanical sealing mechanisms (8) at the bottoms of the water inlet (5) and the water outlet (6), and deep groove ball bearings (10) are arranged at the outer sides of the hollow shaft (1) at one ends of the inner parts, the deep groove ball bearing is characterized in that retaining rings (11) are arranged on the outer sides of deep groove ball bearings (10) inside the first shell (3) and the second shell (4), O-shaped rings (12) are arranged between one end of the first shell (3) and the second shell (4), hexagon socket head cap screws (13) are arranged on the outer side surfaces of the outer ends of the second shell (4) and the main shaft (2), and silencers (20) are arranged on the outer side surfaces of the first shell (3) and the second shell (4).
2. The high-speed rotary joint for cooling the main shaft of the silicon wafer line cutting machine as claimed in claim 1, wherein: mechanical seal mechanism (8) include sealing washer (14), spring (15), briquetting (16), accept ring (17) and separation and reunion piece (18), first casing (3), the inside one end of second casing (4) all are provided with sealing washer (14) in hollow shaft (1) outside, sealing washer (14) one end all is provided with spring (15), the one end that sealing washer (14) were kept away from in spring (15) is all fixed be provided with briquetting (16) one side that spring (15) were kept away from in briquetting (16) is all fixed be provided with and is accepted ring (17), one side that briquetting (16) were kept away from in acceptance ring (17) is all fixed be provided with separation and reunion piece (18).
3. The high-speed rotary joint for cooling the main shaft of the silicon wafer line cutting machine as claimed in claim 1, wherein: and the inner sides of the inner hexagon screws (13) are provided with matched gaskets (19).
4. The high-speed rotary joint for cooling the main shaft of the silicon wafer line cutting machine as claimed in claim 1, wherein: the water-proof ring (7) is made of graphite.
5. The high-speed rotary joint for cooling the main shaft of the silicon wafer line cutting machine as claimed in claim 1, wherein: the O-shaped ring (12) is made of rubber.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN202020235149.9U CN211762667U (en) | 2020-03-02 | 2020-03-02 | High-speed rotary joint for cooling main shaft of silicon wafer line cutting machine |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN202020235149.9U CN211762667U (en) | 2020-03-02 | 2020-03-02 | High-speed rotary joint for cooling main shaft of silicon wafer line cutting machine |
Publications (1)
Publication Number | Publication Date |
---|---|
CN211762667U true CN211762667U (en) | 2020-10-27 |
Family
ID=72902079
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN202020235149.9U Active CN211762667U (en) | 2020-03-02 | 2020-03-02 | High-speed rotary joint for cooling main shaft of silicon wafer line cutting machine |
Country Status (1)
Country | Link |
---|---|
CN (1) | CN211762667U (en) |
-
2020
- 2020-03-02 CN CN202020235149.9U patent/CN211762667U/en active Active
Similar Documents
Publication | Publication Date | Title |
---|---|---|
CN102310491B (en) | Rotary joint of solar monocrystalline silicon cutting machine and using method thereof | |
CN211762667U (en) | High-speed rotary joint for cooling main shaft of silicon wafer line cutting machine | |
CN111152377A (en) | High-speed rotary joint for cooling main shaft of silicon wafer line cutting machine | |
CN114087364A (en) | Large axial float double-end-face mechanical sealing device for rake dryer | |
CN206860479U (en) | A kind of high-speed centrifugal vapour compression machine | |
CN214035951U (en) | Hydraulic pressure drive hydraulic five-star motor | |
CN212900259U (en) | Adjustable rotary joint | |
CN213394052U (en) | High-pressure-resistant rotary joint device | |
CN212455237U (en) | Bearing seat for aviation gear pump test | |
CN205047499U (en) | Forced circulation cooling high temperature mechanical seal | |
CN210372057U (en) | Butterfly valve with double-seal structure | |
CN207728889U (en) | Helical reactors shaft mechanical seal structure | |
CN208612627U (en) | The input and output material leakproof rotary joint of Production of Ceramics wet type continuous ball mill | |
CN217492892U (en) | Base for pneumatic chuck | |
CN211053112U (en) | Multi-station rotating joint of tool clamp | |
CN204852340U (en) | Sealed increase resistance to compression type atomizer | |
CN215981333U (en) | High-temperature-resistant double-seal rotary joint | |
CN217355955U (en) | Oil inlet pipe orifice assembly structure of heat conduction oil pump | |
CN213871111U (en) | Double-end-face metal corrugated pipe mechanical seal | |
CN216518667U (en) | Double-seal structure of self priming pump | |
CN221323092U (en) | Improved pipe fitting rotary joint | |
CN218266093U (en) | Cooling water pump of motorcycle engine | |
CN209925226U (en) | IH chemical centrifugal pump | |
CN213629352U (en) | Novel high-speed rotary joint | |
CN214499434U (en) | Oil bin type mechanical seal sand pump |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
GR01 | Patent grant | ||
GR01 | Patent grant |