CN211753993U - Dynamic gas distribution equipment - Google Patents
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- CN211753993U CN211753993U CN201921428608.9U CN201921428608U CN211753993U CN 211753993 U CN211753993 U CN 211753993U CN 201921428608 U CN201921428608 U CN 201921428608U CN 211753993 U CN211753993 U CN 211753993U
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Abstract
The utility model relates to a gaseous technical field that supplies with specifically is a dynamic distribution equipment, include: the system comprises a controller, an air source system, an air distribution system and a tail gas treatment system; the tail gas treatment system comprises a first container and a vacuum generator, and the vacuum generator is connected with the controller; the air source system comprises a first pipeline, a second pipeline, a third pipeline and a pipeline on-off component, and the pipeline on-off component is connected with the controller and used for controlling the on-off of the pipeline; the gas distribution system comprises a first gas distribution module, the first gas distribution module comprises a first branch, a second branch, a third branch and a branch on-off assembly, and the branch on-off assembly is connected with the controller and used for controlling the on-off of the branch; the first branch is respectively communicated with the first pipeline and the first container; the third branch is respectively communicated with a third pipeline and the vacuum generator; the second branch is communicated with the second pipeline and then can lead out gas; the utility model discloses can handle the gas in the gas distribution system after the distribution is finished, reduce the influence of distribution of the previous time to distribution of the next time.
Description
Technical Field
The utility model relates to a gaseous technical field that supplies with, in particular to developments distribution equipment.
Background
At present, in the gaseous field of supplying with, often need the combination distribution of multiple source gas, current dynamic gas distribution system generally disposes 2 or 4 gas inlets, corresponds respectively and connects 2 kinds or 4 kinds of containers, during the use, connects gas inlet and corresponding container well, sets up the distribution procedure and can distribute the gas. However, when the primary gas distribution is finished and the secondary gas distribution is finished, a certain gas inlet needs to be replaced by another container or a certain container needs to be replaced by another gas inlet, the original connection can only be manually dismantled, and then the original connection can be manually connected again according to the new gas distribution requirement. Thus, the workload of air distribution is increased, and the operation is easy to make mistakes and has low efficiency. Moreover, when the connection is removed after the first gas distribution is finished, residual gas in the original pipeline can escape into the environment to cause pollution, and the residual gas in the pipeline can also influence and interfere with the second gas distribution.
SUMMERY OF THE UTILITY MODEL
In order to solve the technical problem, the utility model provides a developments distribution equipment, the utility model discloses a controller control air supply system, distribution system and tail gas processing system need not manual control, have improved work efficiency and distribution precision, and after the distribution was ended, tail gas processing system can handle simultaneously gas in the distribution system avoids the polluted environment, effectively reduces influence and the interference of previous distribution to latter distribution simultaneously.
The utility model discloses a developments distribution equipment includes: the system comprises a controller, an air source system, an air distribution system and a tail gas treatment system;
the tail gas treatment system comprises a first container and a vacuum generator, and the vacuum generator is connected with the controller;
the air source system comprises a first pipeline, a second pipeline, a third pipeline and a pipeline on-off component, and the pipeline on-off component is connected with the controller and used for controlling the on-off of the first pipeline, the second pipeline and the third pipeline;
the gas distribution system comprises a first gas distribution module, the first gas distribution module comprises a first branch, a second branch, a third branch and a branch on-off assembly, and the branch on-off assembly is connected with the controller and is used for controlling the on-off of the first branch, the second branch and the third branch;
the first branch is respectively communicated with the first pipeline and the first container; the third branch is respectively communicated with the third pipeline and the vacuum generator; one end of the second branch is communicated with the second pipeline, and the other end of the second branch is used for leading out gas.
Further, the branch on-off assembly comprises a first pneumatic diaphragm valve and a second pneumatic diaphragm valve; the first pneumatic diaphragm valve and the second pneumatic diaphragm valve are arranged on the first branch, and the gas flow direction in the first pneumatic diaphragm valve is opposite to that in the second pneumatic diaphragm valve.
Further, the branch on-off assembly further comprises a third pneumatic diaphragm valve, a fourth pneumatic diaphragm valve, a fifth pneumatic diaphragm valve and a sixth pneumatic diaphragm valve;
the second branch is sequentially provided with the third pneumatic diaphragm valve, the four-way ferrule connector and the fourth pneumatic diaphragm valve along the gas flowing direction; the third branch is sequentially provided with the fifth pneumatic diaphragm valve, the first three-way ferrule connector and the sixth pneumatic diaphragm valve along the gas flowing direction.
Further, the first branch, the second branch and the third branch are communicated with each other.
Further, the gas distribution system further comprises a second gas distribution module and a third gas distribution module, the first gas distribution module, the second gas distribution module and the third gas distribution module have the same structure and are connected with the gas source system and the tail gas treatment system at the same positions, and the first gas distribution module, the second gas distribution module and the third gas distribution module are communicated with each other.
Further, the gas distribution system further comprises a fourth gas distribution module, the fourth gas distribution module comprises a fourth pipeline, a fifth pipeline, a sixth pipeline, a fifth container and a sixth container, the fourth pipeline is communicated with the fifth container, the fifth pipeline is communicated with the sixth container, one end of the sixth pipeline is communicated with the fourth pipeline and the fifth pipeline through a second three-way clamping sleeve joint, and the other end of the sixth pipeline is used for leading out gas.
Further, the gas source system further comprises a second container, a third container and a fourth container, the first pipeline is communicated with the second container, the second pipeline is communicated with the third container, the third pipeline is communicated with the fourth container, and the first pipeline, the second pipeline and the third pipeline are identical in structure.
Further, the tail gas treatment system comprises a seventh pipeline and an eighth pipeline, the seventh pipeline is respectively communicated with the eighth pipeline and the first container, and the seventh pipeline is sequentially provided with a pressure reducing valve, a first one-way valve, a pressure gauge and a pneumatic valve distribution disc along the gas flowing direction; and the eighth pipeline is sequentially provided with a second one-way valve, a seventh pneumatic diaphragm valve, a vacuum generator, a tail gas processor, a first diaphragm valve and a third outlet joint along the gas flowing direction.
Further, the tail gas treatment system also comprises a ninth pipeline, wherein the ninth pipeline is sequentially provided with a first inlet joint, a second diaphragm valve and a filter along the gas flowing direction, and the ninth pipeline is arranged between the pneumatic valve distribution disc and the second one-way valve through a third three-way clamping sleeve joint.
Further, pressure sensors are arranged on the first air distribution module, the second air distribution module and the third air distribution module, and the pressure sensors are electrically connected with the controller.
Implement the embodiment of the utility model provides a, following beneficial effect has:
1. the utility model discloses after the distribution is finished, tail gas processing system can handle gas in the distribution system avoids the polluted environment, effectively reduces influence and the interference of distribution of last time to the distribution of next time simultaneously.
2. The utility model discloses the air supply system sets up a plurality of containers, and gas homoenergetic in every container is derived from an outlet connection or a plurality of outlet connection, and this has improved to a certain extent the utility model discloses a commonality.
3. The utility model discloses a controller control air supply system, gas distribution system and tail gas processing system need not manual control, have improved work efficiency and distribution precision.
Drawings
In order to more clearly illustrate the technical solution of the present invention, the drawings used in the description of the embodiment or the prior art will be briefly described below. It is obvious that the drawings in the following description are only some embodiments of the invention, and that for a person skilled in the art, other drawings can be derived from them without inventive effort.
Fig. 1 is a schematic structural view of the dynamic air distribution equipment of the present invention;
FIG. 2 is a schematic structural diagram of the first gas distribution module during purging;
fig. 3 is a schematic structural view of the first gas distribution module during vacuum processing.
Wherein the reference numerals in the figures correspond to:
1-a gas source system; 2-a gas distribution system; 3-a tail gas treatment system; 11-a first conduit; 12-a second conduit; 13-a third line; 21-a first gas distribution module; 22-a second gas distribution module; 23-a third gas distribution module; 24-a fourth gas distribution module; 31-a first container; 32-a vacuum generator; 33-pneumatic valve dispensing disc; 34-a second one-way valve; 35-a tail gas processor; 36-a third outlet connection; 37-a first diaphragm valve; 38-a first inlet fitting; 39-a second diaphragm valve; 211 — a first branch; 212-a second branch; 213-third branch; 241-a fourth pipeline; 242-a fifth line; 2111-first pneumatically actuated diaphragm valve; 2112-a second pneumatic diaphragm valve; 2113-a second container; 2114-third pneumatic diaphragm valve; 2115-a fourth pneumatic diaphragm valve; 2116-fifth pneumatic diaphragm valve; 2117-sixth pneumatic diaphragm valve; 2121-a first outlet connection; 2421-a sixth container; 2422-second outlet connection.
Detailed Description
The technical solutions in the embodiments of the present invention will be described clearly and completely with reference to the accompanying drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only some embodiments of the present invention, not all embodiments. Based on the embodiments in the present invention, all other embodiments obtained by a person skilled in the art without creative efforts belong to the protection scope of the present invention.
It should be noted that the terms "first," "second," and the like in the description and claims of the present invention and in the drawings described above are used for distinguishing between similar elements and not necessarily for describing a particular sequential or chronological order. It is to be understood that the data so used is interchangeable under appropriate circumstances such that the embodiments of the invention described herein are capable of operation in sequences other than those illustrated or otherwise described herein. Furthermore, the terms "comprises," "comprising," and "having," and any variations thereof, are intended to cover a non-exclusive inclusion, such that a process, method, system, article, or apparatus that comprises a list of steps or elements is not necessarily limited to those steps or elements expressly listed, but may include other steps or elements not expressly listed or inherent to such process, method, article, or apparatus.
The existing dynamic gas distribution system has the following defects: the gas distribution workload is large, the operation is easy to make mistakes and the efficiency is low; moreover, when the connection is removed after the first gas distribution is finished, residual gas in the original pipeline may escape into the environment to cause pollution, and the residual gas in the pipeline also affects and interferes with the second gas distribution.
The embodiment of the utility model provides a defect to prior art, the embodiment of the utility model provides a developments distribution equipment, through controller control air source system, gas distribution system and tail gas processing system, need not manual control, can improve work efficiency and distribution precision, simultaneously after the distribution, tail gas processing system can handle gas in the gas distribution system avoids the polluted environment, effectively reduces influence and the interference of distribution before to distribution after simultaneously.
Referring to fig. 1 to fig. 3, the present embodiment provides a dynamic air distribution apparatus, including: the system comprises a controller, an air source system 1, an air distribution system 2 and a tail gas treatment system 3;
the tail gas treatment system 3 comprises a first container 31 and a vacuum generator 32, wherein the vacuum generator 32 is connected with the controller;
the air source system 1 comprises a first pipeline 11, a second pipeline 12, a third pipeline 13 and a pipeline on-off component, wherein the pipeline on-off component is connected with the controller and is used for controlling the on-off of the first pipeline 11, the second pipeline 12 and the third pipeline 13;
the gas distribution system 2 comprises a first gas distribution module 21, the first gas distribution module 21 comprises a first branch 211, a second branch 212, a third branch 213 and a branch on-off assembly, and the branch on-off assembly is connected with the controller and is used for controlling the on-off of the first branch 211, the second branch 212 and the third branch 213;
the first branch 211 communicates with the first pipeline 11 and the first container 31, respectively; the third branch 213 communicates with the third pipeline 13 and the vacuum generator 32, respectively; one end of the second branch 212 is communicated with the second pipeline 12, and the other end of the second branch 212 is used for leading out gas.
Specifically, one end of the second branch 212 is communicated with the second pipeline 12, and the other end of the second branch 212 is communicated with a first outlet connector 2121, so that the gas in the gas source system 1 can be led out through the first outlet connector 2121.
Preferably, the branch on/off assembly comprises a first pneumatic diaphragm valve 2111 and a second pneumatic diaphragm valve 2112; the first pneumatic diaphragm valve 2111 and the second pneumatic diaphragm valve 2112 are arranged on the first branch 211, and the first pneumatic diaphragm valve 2111 and the second pneumatic diaphragm valve 2112 have opposite gas flowing directions.
Preferably, the branch on-off assembly further comprises a third pneumatic diaphragm valve 2114, a fourth pneumatic diaphragm valve 2115, a fifth pneumatic diaphragm valve 2116 and a sixth pneumatic diaphragm valve 2117;
the second branch 212 is provided with the third pneumatic diaphragm valve 2114, a four-way ferrule connector and the fourth pneumatic diaphragm valve 2115 in sequence along the gas flow direction; the third branch 213 is provided with the fifth pneumatic diaphragm valve 2116, the first three-way ferrule adapter and the sixth pneumatic diaphragm valve 2117 in sequence along the gas flow direction.
Specifically, after the gas distribution is finished, performing vacuum treatment, wherein the vacuum treatment comprises the following steps: and the sixth pneumatic diaphragm valve 2117 in the branch on-off assembly is controlled by the controller to be opened, and the rest are closed, so that the tail gas treatment system 3 can treat the gas in the gas distribution system 2, the environment pollution is avoided, and the influence and the interference of the previous gas distribution on the next gas distribution are effectively reduced.
In particular, the line switching assembly comprises a reservoir valve for opening or closing a corresponding reservoir and a pressure reducing valve for regulating the gas pressure to a suitable value.
Specifically, the branch on-off assembly and the pipeline on-off assembly are electrically connected to a controller respectively, the controller can control on-off of each valve in the branch on-off assembly and the pipeline on-off assembly, meanwhile, the valves in the branch on-off assembly have a unidirectional property, and after installation, the gas flow directions in the first pneumatic diaphragm valve 2111, the second pneumatic diaphragm valve 2112, the third pneumatic diaphragm valve 2114, the fourth pneumatic diaphragm valve 2115, the fifth pneumatic diaphragm valve 2116 and the sixth pneumatic diaphragm valve 2117 cannot be changed.
Specifically, when gas is supplied to the first gas distribution module 21 for gas distribution, the first pneumatic diaphragm valve 2111, the third pneumatic diaphragm valve 2114, the fourth pneumatic diaphragm valve 2115 and the fifth pneumatic diaphragm valve 2116 are opened to control the gas in the second container 2113 to enter the first gas distribution module 21, and at this time, the second pneumatic diaphragm valve 2112 and the sixth pneumatic diaphragm valve 2117 are in a closed state to prevent the gas from entering the exhaust gas treatment system 3.
Before the vacuum treatment, a purging treatment is also carried out, and the purging treatment comprises the following steps: the first pneumatic diaphragm valve 2111, the third pneumatic diaphragm valve 2114, the fourth pneumatic diaphragm valve 2115 and the fifth pneumatic diaphragm valve 2116 are closed, and meanwhile, the second pneumatic diaphragm valve 2112 and the sixth pneumatic diaphragm valve 2117 are opened, so that the gas in the first container 31 can enter the first gas distribution module 21, the operation is simpler, manual valve opening and closing are not needed, and the working efficiency is improved.
Preferably, the gas distribution system 2 further includes a second gas distribution module 22 and a third gas distribution module 23, the first gas distribution module 21, the second gas distribution module 22 and the third gas distribution module 23 have the same structure and the same connection position with the gas source system 1 and the tail gas treatment system 3, and the first gas distribution module 21, the second gas distribution module 22 and the third gas distribution module 23 are communicated with each other.
Specifically, the first, second and third air distribution modules 21, 22 and 23 also include the first branch 211, the second branch 212 and the third branch 213, and the second and third air distribution modules 22 and 23 can be regarded as being duplicated from the first air distribution module 21.
Specifically, the first branch 211 of the second air distribution module 22 is respectively communicated with the first pipeline 11 and the first container 31; the third branch 213 of the second air distribution module 22 is respectively communicated with the third pipeline 13 and the vacuum generator 32; one end of the second branch 212 of the second gas distribution module 22 is communicated with the second pipeline 12, and the other end of the second branch 212 is used for leading out gas.
Specifically, the first branch 211 of the third air distribution module 23 is respectively communicated with the first pipeline 11 and the first container 31; the third branch 213 of the third air distribution module 23 is respectively communicated with the third pipeline 13 and the vacuum generator 32; one end of the second branch 212 of the third gas distribution module 23 is communicated with the second pipeline 12, and the other end of the second branch 212 is used for leading out gas.
Preferably, three of the first branches 211 are communicated with each other, and three of the third branches 213 are communicated with each other.
Specifically, the first gas distribution module 21, the second gas distribution module 22 and the third gas distribution module 23 each include one first outlet connection 2121, each first outlet connection 2121 can lead out gas, and each first outlet connection 2121 is independent from each other and does not affect each other; when needing two joints to distribute gas, when not needing other joints, can pass through control the fourth pneumatic diaphragm valve 2115 is closed and is controlled other outlet connection and not derive gas, and passes through opening or closing of controller control outlet connection to the manual container or the outlet connection of dismantling has been avoided to the interface quantity that control needs, and this has improved to a certain extent the utility model discloses a commonality.
Preferably, the gas distribution system 2 further includes a fourth gas distribution module 24, where the fourth gas distribution module 24 includes a fourth pipeline 241, a fifth pipeline 242, a sixth pipeline, a fifth container 2411, and a sixth container 2421, the fourth pipeline is communicated with the fifth container 2411, the fifth pipeline is communicated with the sixth container 2421, one end of the sixth pipeline is communicated with the fourth pipeline 241 and the fifth pipeline 242 through a second three-way ferrule, and the other end of the sixth pipeline is used for leading out gas.
Specifically, the fourth pipeline 241 and the fifth pipeline 242 have the same structure, and the fourth pipeline 241 is sequentially provided with a pressure sensor, a pressure gauge, a pressure reducing valve and an eighth pneumatic diaphragm valve along the gas flowing direction; the sixth pipeline is provided with a pressure sensor, a ninth pneumatic diaphragm valve and a second outlet connector 2422 in sequence.
Specifically, the gas in the fifth container 2411 is dry air, the gas in the sixth container 2421 is nitrogen, the gases in the sixth container 2421 and the fifth container 2411 cannot be mixed, the fourth pipeline 241 is opened when dry air is required as background gas, and the fifth pipeline 242 is opened when nitrogen is required as background gas.
Preferably, the first pipeline 11, the second pipeline 12 and the third pipeline 13 are identical in structure; the gas source system 1 further comprises a second container 2113, a third container and a fourth container, the first pipeline 11 is communicated with the second container 2113, the second pipeline 12 is communicated with the third container, and the third pipeline 13 is communicated with the fourth container.
Specifically, the first pipeline 11 is provided with a pressure sensor, a pressure reducing valve and a pressure gauge in sequence along the gas flowing direction.
Preferably, the gas composition in the second container 2113, the third container, the fourth container, the fifth container and the sixth container 2421 is different, so that different gases can be mixed, and the universality of the utility model is embodied.
Specifically, the gas in the containers in the gas source system 1 have different compositions, and when only the gas in the second container 2113 needs to be mixed, the other containers in the gas source system 1 are in a closed state, and the gas cannot come out of the containers; when the gas in the third container and the gas in the fourth container are required to be mixed, the gas in the third container can be led out from the first outlet joint 2121 of the first gas distribution module 21, the gas in the fourth container is led out from the first outlet joint 2121 of the second gas distribution module 22, and the gas in each container can be led out from one outlet joint or a plurality of outlet joints, so that the universality of the utility model is improved to a certain extent.
Specifically, one first outlet connector 2121 can only lead out gas in one container, and gas in one container can be led out from any one first outlet connector 2121, so that the outlet connectors do not need to be manually disassembled, and the working efficiency and the gas distribution precision are improved.
Preferably, the tail gas treatment system 3 comprises a seventh pipeline and an eighth pipeline, the seventh pipeline is respectively communicated with the eighth pipeline and the first container 31, and the seventh pipeline is sequentially provided with a pressure reducing valve, a first check valve, a pressure gauge and a pneumatic valve distribution disc 33 along the gas flowing direction; the eighth pipeline is sequentially provided with a second one-way valve 34, a seventh pneumatic diaphragm valve, a vacuum generator 32, a tail gas processor 35, a first diaphragm valve 37 and a third outlet joint 36 along the gas flowing direction.
Specifically, a one-inch pipe can be further disposed at a connection position of the eighth pipeline and the seventh pipeline, and the one-inch pipe can slow down a flow rate of the gas in the first container 31 entering the eighth pipeline.
Preferably, the exhaust gas treatment system 3 further comprises a ninth pipeline, which is provided with a first inlet joint 38, a second diaphragm valve 39 and a filter in sequence along the gas flow direction, and the ninth pipeline is arranged between the pneumatic valve distribution disc 33 and the second one-way valve 34 through a third three-way ferrule joint.
In particular, the first outlet connection 2121, the second outlet connection 2422, the third outlet connection 36 and the first inlet connection 38 are each provided with a thread, which is provided for the purpose of facilitating the connection; the first outlet connector 2121 and the second outlet connector 2422 have the same diameter and are smaller than the diameter of the third outlet connector 36, and the main purpose of the arrangement is that the third outlet connector 36 needs to discharge the exhaust gas quickly.
Specifically, the gas in the first container 31 is nitrogen, and after the gas distribution is completed, the tail gas treatment system 3 is started to purge the gas distribution system 2; the ninth line is provided for the purpose of: avoid when the nitrogen gas in the first container 31 runs out, need constantly change first container 31 sets up external nitrogen gas, makes the operation more convenient.
Specifically, the pneumatic valve dispensing disc 33 is used to supply or de-supply air to the pneumatic diaphragm valve in the bypass on/off assembly.
Preferably, the air supply system 1 comprises at least three pipelines, and the first air distribution module 21 comprises at least three branches, and the branches are communicated with each other.
Specifically, the number of the pipelines of the gas source system 1 corresponds to the number of the branches of the first gas distribution module 21, that is, when there are four pipelines of the gas source system 1, the number of the branches of the first gas distribution module 21 is also four.
Specifically, when the gas types to be mixed are more than three, pipelines need to be added, and the embodiment takes four pipelines as an example for explanation: the four pipelines are correspondingly provided with four branches, the gas source system 1 further comprises a fourth pipeline, the structure of the fourth pipeline is the same as that of the first pipeline 11, the gas flow direction is the same, the only difference is that the fourth pipeline is communicated with a seventh container, and the type of the gas in the seventh container is different from that of the gas in other containers.
Specifically, the pipeline and the branch are stainless steel electrolytic polishing pipelines, and the pipeline can resist corrosion and avoid adsorption.
Specifically, the fourth branch communicated with the fourth pipeline is a tenth branch, the tenth branch is provided with a tenth pneumatic diaphragm valve and a fourth three-way ferrule joint along the gas flow direction, and the tenth branch is communicated with the second branch 212 and the third branch 213 through the fourth three-way ferrule joint.
Preferably, pressure sensors are disposed on the first air distribution module 21, the second air distribution module 22 and the third air distribution module 23, and the pressure sensors are electrically connected with the controller.
Specifically, the pressure sensor sends the detected pressure value to the controller, the controller judges whether the pressure value is in a normal range, and if the pressure value is not in the normal range, the controller sends an abnormal signal.
The controller includes a display screen, the display screen is a touch display screen, a starting frame, a first air supply port, a second air supply port, a third air supply port and a fourth air supply port which can be clicked are displayed on the display screen, the first air supply port corresponds to the second outlet connector 2422, the second air supply port corresponds to the first outlet connector 2121 of the first air distribution module 21, the third air supply port corresponds to the first outlet connector 2121 of the second air distribution module 22, and the fourth air supply port corresponds to the first outlet connector 2121 of the third air distribution module 23.
Specifically, after the first air supply port is clicked, a new display page is entered, all the pneumatic diaphragm valves and the completion frame on the fourth air distribution module 24 are displayed on the page, an operator can open or close each pneumatic diaphragm valve on the fourth air distribution module 24 by clicking, and after the configuration is completed, the operator clicks the completion frame, exits from the page, returns to the main page, and then configures other air distribution modules.
Specifically, the touch display screen is used for controlling air distribution, so that the troubles of manually replacing the container, disassembling the valve and switching the pipeline are reduced, and the working efficiency and the air distribution precision are also improved.
The dynamic gas distribution equipment comprises a support, a bottom plate and a touch display screen, wherein the bottom plate is fixed on the support, and the touch display screen is fixed on the support and electrically connected with the controller.
The working process of the dynamic gas distribution equipment is as follows: fixedly mounting 6 containers commonly used for gas distribution on a bottom plate, opening a valve of the container, adjusting the pressure to the pressure required by the gas distribution, and then opening the touch display screen for gas distribution; when four gas supply ports are needed for gas supply, the first gas distribution module 21, the second gas distribution module 22, the third gas distribution module 23 and the fourth gas distribution module 24 are opened, and meanwhile, the tail gas treatment system is in a closed state, and gas in one container is led out from one outlet connector at the moment; after the gas distribution is completed, the fourth gas distribution module 24 is closed, and the tail gas treatment system 3 is started to perform tail gas treatment on the gas distribution system 2.
Specifically, the specific steps of opening the first air distribution module 21 are as follows: opening the first, third, fourth, and fifth pneumatic diaphragm valves 2111, 2114, 2115, 2116 while closing the second and sixth pneumatic diaphragm valves 2112, 2117; the steps of opening the second air distribution module 22 and opening the third air distribution module 23 are the same as the steps of opening the first air distribution module 21.
Dynamic gas distribution equipment passes through controller control air supply system, gas distribution system and tail gas processing system, need not manual control, has improved work efficiency and distribution precision, and simultaneously after the distribution, tail gas processing system can handle gas in the gas distribution system avoids the polluted environment, effectively reduces influence and the interference of distribution of last time to distribution of later time simultaneously, dynamic gas distribution equipment suitability is good, and can remove, makes dynamic gas distribution equipment can use in laboratory or mill.
Although the present invention has been described in connection with the preferred embodiments, it is not intended to limit the invention to the embodiments described herein, but rather, to include various changes and modifications without departing from the scope of the invention.
In this document, the terms front, back, upper and lower are used to define the components in the drawings and the positions of the components relative to each other, and are used for clarity and convenience of the technical solution. It is to be understood that the use of the directional terms should not be taken to limit the scope of the claims.
The above disclosure is only a preferred embodiment of the present invention, and certainly should not be taken as limiting the scope of the invention, which is defined by the claims and their equivalents.
Claims (10)
1. A dynamic gas distribution apparatus, comprising: the device comprises a controller, an air source system (1), an air distribution system (2) and a tail gas treatment system (3);
the tail gas treatment system (3) comprises a first container (31) and a vacuum generator (32), wherein the vacuum generator (32) is connected with the controller;
the air source system (1) comprises a first pipeline (11), a second pipeline (12), a third pipeline (13) and a pipeline on-off component, wherein the pipeline on-off component is connected with the controller and is used for controlling the on-off of the first pipeline (11), the second pipeline (12) and the third pipeline (13);
the gas distribution system (2) comprises a first gas distribution module (21), wherein the first gas distribution module (21) comprises a first branch (211), a second branch (212), a third branch (213) and a branch on-off assembly, and the branch on-off assembly is connected with the controller and is used for controlling the on-off of the first branch (211), the second branch (212) and the third branch (213);
the first branch (211) communicates with the first duct (11) and the first container (31), respectively; the third branch (213) communicates with the third line (13) and the vacuum generator (32), respectively; one end of the second branch (212) is communicated with the second pipeline (12), and the other end of the second branch (212) is used for leading out gas.
2. A dynamic gas distribution apparatus according to claim 1, wherein the bypass on/off assembly comprises a first pneumatic diaphragm valve (2111) and a second pneumatic diaphragm valve (2112); the first pneumatic diaphragm valve (2111) and the second pneumatic diaphragm valve (2112) are arranged on the first branch (211), and the gas flow direction in the first pneumatic diaphragm valve (2111) and the second pneumatic diaphragm valve (2112) is opposite.
3. A dynamic gas distribution apparatus according to claim 2, wherein the branch on/off assembly further comprises a third pneumatic diaphragm valve (2114), a fourth pneumatic diaphragm valve (2115), a fifth pneumatic diaphragm valve (2116) and a sixth pneumatic diaphragm valve (2117);
the second branch (212) is sequentially provided with the third pneumatic diaphragm valve (2114), a four-way ferrule connector and the fourth pneumatic diaphragm valve (2115) along the gas flow direction; the third branch (213) is sequentially provided with the fifth pneumatic diaphragm valve (2116), the first three-way ferrule connector and the sixth pneumatic diaphragm valve (2117) along the gas flow direction.
4. A dynamic gas distribution arrangement according to claim 3, characterized in that the first branch (211), the second branch (212) and the third branch (213) communicate with each other.
5. A dynamic air distribution device according to claim 4, wherein the air distribution system (2) further comprises a second air distribution module (22) and a third air distribution module (23), the first air distribution module (21), the second air distribution module (22) and the third air distribution module (23) have the same structure, and the same connection position with the air source system (1) and the tail gas treatment system (3), and the first air distribution module (21), the second air distribution module (22) and the third air distribution module (23) are communicated with each other.
6. A dynamic gas distribution apparatus according to claim 5, wherein the gas distribution system (2) further comprises a fourth gas distribution module (24), the fourth gas distribution module (24) comprises a fourth pipeline (241), a fifth pipeline (242), a sixth pipeline, a fifth container (2411) and a sixth container (2421), the fourth pipeline is communicated with the fifth container (2411), the fifth pipeline is communicated with the sixth container (2421), one end of the sixth pipeline is communicated with the fourth pipeline (241) and the fifth pipeline (242) through a second three-way ferrule joint, and the other end of the sixth pipeline is used for leading out gas.
7. A dynamic gas distribution arrangement according to claim 6, wherein the gas supply system (1) further comprises a second container (2113), a third container and a fourth container, the first line (11) communicates with the second container (2113), the second line (12) communicates with the third container, the third line (13) communicates with the fourth container, and the first line (11), the second line (12) and the third line (13) are identical in structure.
8. A dynamic gas distribution apparatus according to claim 1, wherein the exhaust gas treatment system (3) comprises a seventh pipeline and an eighth pipeline, the seventh pipeline is respectively communicated with the eighth pipeline and the first container (31), and the seventh pipeline is sequentially provided with a pressure reducing valve, a first check valve, a pressure gauge and a pneumatic valve distribution plate (33) along the gas flow direction; and the eighth pipeline is sequentially provided with a second one-way valve (34), a seventh pneumatic diaphragm valve, a vacuum generator (32), a tail gas processor (35), a first diaphragm valve (37) and a third outlet joint (36) along the gas flowing direction.
9. A dynamic gas distribution arrangement according to claim 8, characterized in that the exhaust gas treatment system (3) further comprises a ninth line, which in turn is provided with a first inlet connection (38), a second diaphragm valve (39) and a filter in the gas flow direction, the ninth line being provided between the pneumatic valve distribution disc (33) and the second one-way valve (34) by a third three-way bayonet joint.
10. A dynamic air distribution arrangement according to claim 5, characterized in that pressure sensors are arranged on the first air distribution module (21), the second air distribution module (22) and the third air distribution module (23), and the pressure sensors are electrically connected with the controller.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201921428608.9U CN211753993U (en) | 2019-08-30 | 2019-08-30 | Dynamic gas distribution equipment |
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| CN114804029A (en) * | 2022-05-13 | 2022-07-29 | 中环领先半导体材料有限公司 | Secondary purifier for HCL |
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