CN211753747U - Gas emission preprocessor - Google Patents
Gas emission preprocessor Download PDFInfo
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- CN211753747U CN211753747U CN201922379522.8U CN201922379522U CN211753747U CN 211753747 U CN211753747 U CN 211753747U CN 201922379522 U CN201922379522 U CN 201922379522U CN 211753747 U CN211753747 U CN 211753747U
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Abstract
The utility model provides a gas emission preprocessor, which comprises a shell, a first film type drying tube, a second film type drying tube, an ammonia removal device, an air exhaust device, a first air blowing device, a second air blowing device, a controller, a temperature and humidity sensor, a display and a first heating tube; a first permeation tube is inserted in the first membrane type drying tube, and a second permeation tube is inserted in the second membrane type drying tube; the shell is provided with an air outlet, an air inlet and an air outlet, one end of the first membrane type drying tube is connected with the ammonia removal device and the first air blowing device, and the other end of the first membrane type drying tube is connected with the air extraction device and one end of the second membrane type drying tube; the ammonia removal device is connected with the first heating pipe; the temperature and humidity sensor is connected between the air extracting device and the air outlet; the other end and the second gas blowing device of second diaphragm type drying tube are connected, and first gas blowing device and second gas blowing device communicate with the gas vent, and the other end and the air inlet intercommunication of second diaphragm type drying tube, controller and display, first heating pipe and temperature and humidity sensor electric connection.
Description
[ technical field ] A method for producing a semiconductor device
The utility model relates to a gas emission technical field especially relates to a gas emission preprocessor.
[ background of the invention ]
The traditional gas preprocessor mainly comprises a stainless steel sampling pipe, a polytetrafluoroethylene gas pipe, a semiconductor electronic refrigerator, an air suction pump, a peristaltic pump, a flow indicator and a filter, wherein the traditional gas preprocessor takes the semiconductor refrigerator as a core technology to separate condensed water from flue gas, and a large number of unheated polytetrafluoroethylene gas pipes are used, so that the flue gas is heated and transmitted through a heat tracing pipeline, and the flue gas is cooled to generate the condensed water in the transmission process due to the aging of the heat tracing pipeline and the poor heat tracing effect; the semiconductor electronic refrigerator has an unsatisfactory refrigerating effect in a high-temperature environment, water in the flue gas is not separated out, and condensed water cannot be discharged in time and is carried by the flue gas to enter a subsequent pipeline or instrument; in low temperature conditions (in electronic refrigerators), SO in flue gases2The solubility of the compound is increased, and the compound can be dissolved into condensed water to cause the analysis data to be reduced or zero, so that the environment monitoring requirement under the working condition of low temperature and high humidity aiming at ultra-low emission smoke at present can not be met.
In view of the above, there is a need for a new type of gas discharge pretreater that overcomes the above-mentioned drawbacks.
[ Utility model ] content
The utility model aims at providing a gas emission preprocessor can solve the problem that the water analysis in the flue gas goes out with the mode of dehumidification, has reduced SO2And the temperature and humidity information in the flue gas can be monitored in real time, so that the precision and accuracy of flue gas analysis are ensured.
In order to achieve the above object, the present invention provides a gas emission preprocessor 10, which comprises a housing 1, a first membrane type drying tube 2 installed in the housing 1, a second membrane type drying tube 3 installed in the housing 1, an ammonia removal device 4 installed in the housing 1, an air extraction device 5 installed in the housing 1, a first air blowing device 6 installed in the housing 1, a second air blowing device 7 installed in the housing 1, a controller 8 installed in the housing 1, a temperature and humidity sensor 9 installed in the housing 1, a display 11 installed outside the housing 1, and a first heating tube 12 installed outside the housing 1; a first permeation tube 21 spaced from the inner wall of the first membrane type drying tube 2 is inserted into the first membrane type drying tube 2, and a second permeation tube spaced from the inner wall of the second membrane type drying tube 3 is inserted into the second membrane type drying tube 3; the shell 1 is provided with an air outlet 101, an air inlet 102 and an air outlet 103, one end of the first membrane type drying tube 2 is connected with the ammonia removal device 4 and the first blowing device 6, and the other end of the first membrane type drying tube is connected with the air extraction device 5 and one end of the second membrane type drying tube 3; the ammonia removal device 4 is connected with the first heating pipe 12; the temperature and humidity sensor 9 is connected between the air extracting device 5 and the air outlet 102; the other end of the second film type drying tube 3 is connected with the second air blowing device 7, the first air blowing device 6 and the second air blowing device 7 are communicated with the air exhaust port 103, the other end of the second film type drying tube 3 is communicated with the air inlet 102, and the controller 8 is electrically connected with the display 11, the first heating tube 12 and the temperature and humidity sensor 9.
In a preferred embodiment, the gas exhaust pre-processor 10 further comprises a second heating pipe 13, and the second heating pipe 13 is connected to an end of the first heating pipe 2 away from the housing 1 and is electrically connected to the controller 8.
In a preferred embodiment, a first filter 14 is further installed in the housing 1, and the first filter 14 is connected between the first heating pipe 12 and the ammonia removal device 4.
In a preferred embodiment, a second filter 15 is further installed in the housing 1, and the second filter 15 is disposed at the air outlet 101.
In a preferred embodiment, a flow meter 16 is further installed in the housing 1, and the flow meter 16 is electrically connected to the controller 8.
In a preferred embodiment, a flow restriction valve 17 is also mounted in the housing 1, the flow restriction valve 17 being connected between the second membrane dryer tube 3 and the first membrane dryer tube 2.
In a preferred embodiment, a power source 18 is further disposed in the housing 1, and the power source 18 is electrically connected to the controller 8.
In a preferred embodiment, the air outlet 101, the air inlet 102 and the air outlet 103 are spaced apart.
In a preferred embodiment, a third filter 19 is further disposed in the housing 1, and the third filter 19 is disposed at the air inlet 102.
Compared with the prior art, the utility model provides a pair of gas emission preprocessor, beneficial effect lies in, through the problem that the water analysis in the flue gas goes out is solved to the mode of the first permeability tube of first diaphragm type drying tube and the second permeability tube dehumidification of second diaphragm type drying tube, has reduced SO2And the temperature and humidity information in the flue gas can be monitored in real time, so that the precision and accuracy of flue gas analysis are ensured.
[ description of the drawings ]
In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the drawings that are required to be used in the embodiments will be briefly described below, it should be understood that the following drawings only illustrate some embodiments of the present invention, and therefore should not be considered as limiting the scope, and for those skilled in the art, other related drawings can be obtained according to the drawings without inventive efforts.
Fig. 1 is a cross-sectional view of a gas discharge preprocessor provided by the present invention.
Fig. 2 is a cross-sectional view of a first membrane dryer tube of the gas discharge preconditioner shown in fig. 1.
Fig. 3 is a schematic view showing a flow of gas in the gas exhaust preprocessor shown in fig. 1.
[ detailed description ] embodiments
In order to make the objects, technical solutions and advantageous technical effects of the present invention more clearly understood, the present invention is further described in detail with reference to the accompanying drawings and the following detailed description. It should be understood that the detailed description and specific examples, while indicating the present invention, are given by way of illustration only and not by way of limitation.
It will be understood that the terms "upper", "lower", "front", "rear", "left", "right", "top", "bottom", "inner", "outer", and the like, are used in the orientation or positional relationship indicated in the drawings for convenience in describing the present invention and simplicity in description, and do not indicate or imply that the device or element so referred to must have a particular orientation, be constructed and operated in a particular orientation, and thus should not be construed as limiting the present invention.
It is also noted that, unless expressly stated or limited otherwise, the terms "mounted," "connected," "secured," "disposed," and the like are intended to be inclusive and mean, for example, that they may be fixedly connected, detachably connected, or integrally formed; can be mechanically or electrically connected; either directly or indirectly through intervening media, either internally or in any other relationship. The above terms may have the specific meanings given in the present invention to those skilled in the art according to the specific circumstances.
Furthermore, the terms "first", "second", and "first" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defined as "first", "second", may explicitly or implicitly include one or more of that feature. Further, the meaning of "a plurality" or "a plurality" means two or more unless specifically limited otherwise.
Referring to fig. 1 to 3, the present invention provides a gas emission preprocessor 10, which comprises a housing 1, a first membrane type drying tube 2 installed in the housing 1, a second membrane type drying tube 3 installed in the housing 1, an ammonia removal device 4 installed in the housing 1, an air extraction device 5 installed in the housing 1, a first air blowing device 6 installed in the housing 1, a second air blowing device 7 installed in the housing 1, a controller 8 installed in the housing 1, a temperature and humidity sensor 9 installed in the housing 1, a display 11 installed outside the housing 1, and a first heating tube 12 installed outside the housing 1; the shapes of the first membrane type drying pipe 2 and the second membrane type drying pipe 3 are consistent, a first permeation pipe 21 which is spaced from the inner wall of the first membrane type drying pipe 2 is inserted in the first membrane type drying pipe 2, and a second permeation pipe which is spaced from the inner wall of the second membrane type drying pipe 3 is inserted in the second membrane type drying pipe 3;
the shell 1 is provided with an air outlet 101, an air inlet 102 and an air outlet 103, one end of the first membrane type drying tube 2 is connected with the ammonia removal device 4 and the first blowing device 6, and the other end of the first membrane type drying tube is connected with the air extraction device 5 and one end of the second membrane type drying tube 3; the ammonia removal device 4 is connected with the first heating pipe 12; the temperature and humidity sensor 9 is connected between the air extracting device 5 and the air outlet 101; the other end of the second film type drying tube 3 is connected with the second air blowing device 7, the first air blowing device 6 and the second air blowing device 7 are communicated with the air exhaust port 103, the other end of the second film type drying tube 3 is communicated with the air inlet 102, and the controller 8 is electrically connected with the display 11, the first heating tube 12 and the temperature and humidity sensor 9.
The air extracting device 5 is started to extract air, when flue gas enters from the first heating pipe 12, the controller 8 sends a signal to enable the first heating pipe 12 to heat the flue gas and preserve heat of the flue gas, the flue gas enters the ammonia removing device 4, the ammonia removing device 4 adsorbs ammonia gas in the flue gas to remove the ammonia gas, the flue gas after ammonia gas adsorption enters the first membrane type drying pipe 2, passes through the temperature and humidity sensor 9 after passing through the first permeation pipe 21 and is discharged from the air outlet 101, at the moment, the temperature and humidity sensor 9 can detect the temperature and humidity of the flue gas after ammonia gas adsorption and send the detected temperature information and humidity information to the controller 8, and the display 11 displays the temperature information and humidity information detected by the temperature and humidity sensor 9;
meanwhile, part of the outside air enters the second permeation tube of the second membrane drying tube 3 from the air inlet 102 and enters the gap between the first permeation tube 21 of the first membrane drying tube 2 and the inner wall of the first membrane drying tube 2 from the second permeation tube of the second membrane drying tube 3, and at the same time, the outside air permeates into the first permeation tube 21 to absorb moisture in the flue gas and is exhausted from the air outlet 103 by the first blowing device 6 so as to carry the moisture in the flue gas in the first permeation tube 21 of the first membrane drying tube 2 out of the air outlet 103 and dry the flue gas;
another part of the outside air enters the second air blowing device 7 from the gap between the second permeation tube of the second membrane drying tube 3 and the second membrane drying tube 2, and is discharged from the air outlet 103 by the second air blowing device 7.
Therefore, the problem of water analysis in the flue gas is solved in a dehumidification mode through the first permeation tube of the first membrane type drying tube and the second permeation tube of the second membrane type drying tube, and SO is reduced2And the temperature and humidity information in the flue gas can be monitored in real time, so that the precision and accuracy of flue gas analysis are ensured.
In one embodiment, the gas exhaust pre-processor 10 further comprises a second heating pipe 13, the second heating pipe 13 is connected to an end of the first heating pipe 12 away from the housing 1 and is electrically connected to the controller 8, and a heating instruction can be sent to the first heating pipe 12 and the second heating pipe 13 through the controller 8.
In one embodiment, a first filter 14 is further installed in the housing 1, the first filter 14 is connected between the first heating pipe 12 and the ammonia removal device 4, and the first filter 14 is used for filtering particles contained in the flue gas.
In one embodiment, a second filter 15 is further installed in the housing 1, and the second filter 15 is disposed at the air outlet 101 for filtering particles contained in the dried flue gas. When the dried flue gas enters the second filter 15, the second filter 15 filters particles contained in the dried flue gas and discharges the particles from the air outlet 101.
In one embodiment, a flow meter 16 having functions of detecting a flue gas flow and adjusting the flue gas flow is further installed in the housing 1, and the flow meter 16 is electrically connected to the controller 8.
In one embodiment, a flow restriction valve 17 is further installed in the housing 1, and the flow restriction valve 17 is connected between the second membrane drying duct 3 and the first membrane drying duct 2 and is used for restricting the flow of air between the first membrane drying duct 2 and the second membrane drying duct 3.
In one embodiment, a power source 18 is further disposed in the housing 1, and the power source 18 is electrically connected to the controller 8.
In one embodiment, a third filter 19 is further disposed in the housing 1, the third filter is disposed at the air inlet 102, and the third filter 19 is used for filtering the external air.
The invention is not limited solely to that described in the specification and the embodiments, and additional advantages and modifications will readily occur to those skilled in the art, and it is not intended to be limited to the specific details, representative apparatus, and illustrative examples shown and described herein, without departing from the spirit and scope of the general concept as defined by the appended claims and their equivalents.
Claims (9)
1. A gas emission preprocessor (10) is characterized by comprising a shell (1), a first membrane type drying tube (2) arranged in the shell (1), a second membrane type drying tube (3) arranged in the shell (1), an ammonia removal device (4) arranged in the shell (1), an air extraction device (5) arranged in the shell (1), a first air blowing device (6) arranged in the shell (1), a second air blowing device (7) arranged in the shell (1), a controller (8) arranged in the shell (1), a temperature and humidity sensor (9) arranged in the shell (1), a display (11) arranged outside the shell (1) and a first heating tube (12) arranged outside the shell (1); a first permeation tube (21) spaced from the inner wall of the first membrane type drying tube (2) is inserted in the first membrane type drying tube (2), and a second permeation tube spaced from the inner wall of the second membrane type drying tube (3) is inserted in the second membrane type drying tube (3);
the shell (1) is provided with an air outlet (101), an air inlet (102) and an air outlet (103), one end of the first membrane type drying tube (2) is connected with the ammonia removal device (4) and the first air blowing device (6), and the other end of the first membrane type drying tube is connected with the air extraction device (5) and one end of the second membrane type drying tube (3); the ammonia removal device (4) is connected with the first heating pipe (12); the temperature and humidity sensor (9) is connected between the air extracting device (5) and the air outlet (101); the other end of second diaphragm type drying tube (3) with second gas blowing device (7) are connected, first gas blowing device (6) and second gas blowing device (7) with gas vent (103) intercommunication, the other end of second diaphragm type drying tube (3) with air inlet (102) intercommunication, controller (8) with display (11), first heating pipe (12) and temperature and humidity sensor (9) electric connection.
2. A gas exhaust pre-processor (10) according to claim 1, characterized in that the gas exhaust pre-processor (10) further comprises a second heating pipe (13), the second heating pipe (13) being connected to an end of the first heating pipe (12) remote from the housing (1) and being electrically connected to the controller (8).
3. A gas exhaust pre-processor (10) according to claim 1, characterized in that a first filter (14) is further arranged in the housing (1), the first filter (14) being connected between the first heating pipe (12) and the ammonia removal device (4).
4. A gas exhaust pre-processor (10) according to claim 1, characterized in that a second filter (15) is further mounted in the housing (1), the second filter (15) being arranged at the gas outlet (101).
5. A gas exhaust pre-processor (10) according to claim 1, characterized in that a flow meter (16) is further mounted in the housing (1), the flow meter (16) being electrically connected to the controller (8).
6. A gas emission pre-processor (10) according to claim 1, characterized in that a flow restriction valve (17) is further mounted in the housing (1), the flow restriction valve (17) being connected between the second membrane drying duct (3) and the first membrane drying duct (2).
7. A gas exhaust pre-processor (10) according to claim 1, characterized in that a power source (18) is further arranged in the housing (1), the power source (18) being electrically connected to the controller (8).
8. A gas exhaust pre-processor (10) according to claim 1, characterized in that a third filter (19) is further arranged in the housing (1), the third filter (19) being arranged at the gas inlet (102).
9. A gas exhaust pre-processor (10) according to claim 1 wherein the gas outlet (101), gas inlet (102) and gas outlet (103) are spaced apart.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201922379522.8U CN211753747U (en) | 2019-12-26 | 2019-12-26 | Gas emission preprocessor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201922379522.8U CN211753747U (en) | 2019-12-26 | 2019-12-26 | Gas emission preprocessor |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN211753747U true CN211753747U (en) | 2020-10-27 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201922379522.8U Active CN211753747U (en) | 2019-12-26 | 2019-12-26 | Gas emission preprocessor |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN211753747U (en) |
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2019
- 2019-12-26 CN CN201922379522.8U patent/CN211753747U/en active Active
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