CN211739125U - Pure oxygen combustion exhaust treatment device - Google Patents
Pure oxygen combustion exhaust treatment device Download PDFInfo
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- CN211739125U CN211739125U CN202020093682.6U CN202020093682U CN211739125U CN 211739125 U CN211739125 U CN 211739125U CN 202020093682 U CN202020093682 U CN 202020093682U CN 211739125 U CN211739125 U CN 211739125U
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- pure oxygen
- treatment device
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- reaction chamber
- water tank
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Abstract
The utility model discloses a pure oxygen burning exhaust treatment device, including water tank, reaction chamber and pure oxygen combustor, install the overflow bucket on the water tank, the overflow bucket passes through C type jack catch connection reaction chamber, the reaction chamber is connected with the furnace end through C type jack catch, be equipped with a plurality of pipelines on the furnace end, every it does not be connected with the three-way valve to equally divide on the pipeline, the pure oxygen combustor passes through the mounting screw on the furnace end. By using the pure oxygen burner, the temperature in the reaction cavity is quickly raised and can reach more than 1300 ℃; the nitrogen content is low, so that the heat loss and the generation of NOx are reduced; the waste gas is subjected to high-temperature treatment on part of the gas types, and then the rest of the gas types are subjected to water washing treatment.
Description
Technical Field
The utility model relates to an industrial waste gas handles the field, concretely relates to pure oxygen combustion exhaust treatment device.
Background
The waste gas in the semiconductor manufacturing process is mostly toxic and harmful gas, which has serious harm to human body and environment; the waste gas treatment device generally uses compressed air to support combustion, the temperature of a combustion chamber is generally about 700-1000 ℃, only process gas decomposed below 1000 ℃ can be treated, a large amount of perfluorinated compounds in the waste gas can be effectively treated above 1200 ℃, the oxygen content in the air only accounts for 1/5, a large amount of nitrogen is contained, combustion can be supported only by the oxygen, heat waste can be caused by heating useless nitrogen, and the nitrogen reacts with the oxygen to produce NOx, so that the environment is polluted, and the greenhouse effect is caused.
SUMMERY OF THE UTILITY MODEL
The utility model aims at providing a pure oxygen combustion exhaust treatment device to solve and use the combustion-supporting formation NOx of compressed air among the prior art, extravagant heat, polluted environment.
A pure oxygen burning exhaust treatment device, including water tank, reaction chamber and pure oxygen combustor, install the overflow bucket on the water tank, the overflow bucket passes through C type jack catch and connects the reaction chamber, the reaction chamber is connected with the furnace end through C type jack catch, be equipped with a plurality of pipelines on the furnace end, every equally divide on the pipeline and do not be connected with the three-way valve, the pure oxygen combustor passes through the mounting screw on the furnace end.
Preferably, the water tank is further provided with a lower washing tower, the lower washing tower is connected with a middle washing tower through a hoop, and the middle washing tower is connected with an acid discharge port through the hoop.
Preferably, the water tank is provided with a water pump, the middle washing tower and the lower washing tower are provided with spray headers, the water pump is connected with a water pipe, and the water pipe is connected with the spray headers.
Preferably, the other two joints of the three-way valve are respectively connected with an air inlet pipe and a branch pipe.
Preferably, a sealing ring is arranged between the pure oxygen burner and the furnace end.
The utility model has the advantages that: by using the pure oxygen burner, the temperature in the reaction cavity is quickly raised and can reach more than 1300 ℃; the nitrogen content is low, so that the heat loss and the generation of NOx are reduced; the waste gas is subjected to high-temperature treatment on part of the gas species, and then the rest of the gas species is subjected to water washing treatment; the overflow bucket prevents that the water level of water tank is too high and is influenced the burning in the reaction chamber.
Drawings
Fig. 1 and fig. 2 are schematic structural diagrams of the present invention at different angles.
Fig. 3 is a partially enlarged view of a in fig. 2.
Wherein, the device comprises a three-way valve 1, a pure oxygen burner 2, a burner 3, a reaction chamber 4, an overflow barrel 5, a water pump 6, a water tank 7, a lower washing tower 8, a middle washing tower 9 and an acid discharge outlet 10.
Detailed Description
The following detailed description of the embodiments of the present invention will be provided to help those skilled in the art understand the concept and technical solutions of the present invention more completely, accurately and deeply.
As shown in fig. 1 to 3, a pure oxygen combustion exhaust treatment device, includes water tank 7, reaction chamber 4 and pure oxygen combustor 2, install overflow bucket 5 on the water tank 7, overflow bucket 5 is through C type jack catch connection reaction chamber 4, reaction chamber 4 is connected with furnace end 3 through C type jack catch, be equipped with a plurality of pipelines on the furnace end 3, every equally divide on the pipeline and do not be connected with three-way valve 1, pure oxygen combustor 2 passes through the mounting screw on furnace end 3.
Still install washing tower 8 down on the water tank 7, washing tower 8 has well washing tower 9 through the clamp connection down, well washing tower 9 has acid row mouth 10 through the clamp connection.
The water tank 7 is provided with a water pump 6, the middle washing tower 9 and the lower washing tower 8 are provided with spray headers, the water pump 6 is connected with a water pipe, and the water pipe is connected with the spray headers.
And the other two interfaces of the three-way valve 1 are respectively connected with an air inlet pipe and a branch pipe.
And a sealing ring is arranged between the pure oxygen combustor 2 and the furnace end 3.
The working process of the utility model is as follows:
the intake-tube connection exhaust outlet, other treatment facility are connected to the branch road union coupling, open three-way valve 1, waste gas gets into other treatment facility from the branch road pipe under the bypass state, waste gas gets into reaction chamber 4 from the intake-tube under the direct state, open pure oxygen combustor 2, pure oxygen combustor 2 sprays oxygen and reacts with the fuel, the temperature rises fast in reaction chamber 4, handle some kinds of gas in the waste gas, then gas gets into washing tower 8 and well washing tower 9 under through water tank 7, the shower head water spray, flow into water tank 7 after some kinds of gas dissolve in water in the waste gas, gas after the processing is discharged from acid escape way 10.
The above description is made for the exemplary purposes with reference to the accompanying drawings, and it is obvious that the present invention is not limited by the above embodiments, and various insubstantial improvements can be made without modification to the present invention.
Claims (5)
1. A pure oxygen combustion exhaust treatment device is characterized in that: including water tank (7), reaction chamber (4) and pure oxygen combustor (2), install overflow bucket (5) on water tank (7), overflow bucket (5) are through C type jack catch connection reaction chamber (4), reaction chamber (4) are connected with furnace end (3) through C type jack catch, be equipped with a plurality of pipelines on furnace end (3), every equally divide on the pipeline and do not be connected with three-way valve (1), pure oxygen combustor (2) are through the mounting screw on furnace end (3).
2. The pure oxygen combustion exhaust gas treatment device according to claim 1, wherein: still install washing tower (8) down on water tank (7), washing tower (8) have well washing tower (9) through the clamp connection down, well washing tower (9) have acid row mouth (10) through the clamp connection.
3. The pure oxygen combustion exhaust gas treatment device according to claim 2, wherein: install water pump (6) on water tank (7), install the shower head in well scrubbing tower (9) and lower scrubbing tower (8), water pump (6) are connected with the water pipe, water piping connection shower head.
4. The pure oxygen combustion exhaust gas treatment device according to claim 1, wherein: and the other two interfaces of the three-way valve (1) are respectively connected with an air inlet pipe and a branch pipe.
5. The pure oxygen combustion exhaust gas treatment device according to claim 1, wherein: and a sealing ring is arranged between the pure oxygen combustor (2) and the furnace end (3).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202020093682.6U CN211739125U (en) | 2020-01-16 | 2020-01-16 | Pure oxygen combustion exhaust treatment device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202020093682.6U CN211739125U (en) | 2020-01-16 | 2020-01-16 | Pure oxygen combustion exhaust treatment device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN211739125U true CN211739125U (en) | 2020-10-23 |
Family
ID=72880938
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202020093682.6U Active CN211739125U (en) | 2020-01-16 | 2020-01-16 | Pure oxygen combustion exhaust treatment device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN211739125U (en) |
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2020
- 2020-01-16 CN CN202020093682.6U patent/CN211739125U/en active Active
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CP03 | Change of name, title or address |
Address after: 100176 block a, 14th floor, yard 8, Liangshuihe 2nd Street, Beijing Economic and Technological Development Zone, Daxing District, Beijing Patentee after: Beijing Jingyi automation equipment Technology Co.,Ltd. Address before: 100000 block a, 14 / F, courtyard 8, Liangshuihe Second Street, Beijing Economic and Technological Development Zone, Daxing District, Beijing Patentee before: BEIJING JINGYI AUTOMATION EQUIPMENT Co.,Ltd. |
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| CP03 | Change of name, title or address |